{"id":"https://openalex.org/W7164327394","doi":"https://doi.org/10.48550/arxiv.2606.11247","title":"Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction","display_name":"Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction","publication_year":2026,"publication_date":"2026-06-08","ids":{"openalex":"https://openalex.org/W7164327394","doi":"https://doi.org/10.48550/arxiv.2606.11247"},"language":null,"primary_location":{"id":"doi:10.48550/arxiv.2606.11247","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2606.11247","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"},"type":"preprint","indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.48550/arxiv.2606.11247","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5121501701","display_name":"Yaser Mike Banad","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Banad, Yaser Mike","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5128194497","display_name":"Sarah Sharif","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sharif, Sarah","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10775","display_name":"Generative Adversarial Networks and Image Synthesis","score":0.2732999920845032,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10775","display_name":"Generative Adversarial Networks and Image Synthesis","score":0.2732999920845032,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11206","display_name":"Model Reduction and Neural Networks","score":0.24050000309944153,"subfield":{"id":"https://openalex.org/subfields/3109","display_name":"Statistical and Nonlinear Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11948","display_name":"Machine Learning in Materials Science","score":0.08420000225305557,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/generative-grammar","display_name":"Generative grammar","score":0.800599992275238},{"id":"https://openalex.org/keywords/generative-model","display_name":"Generative model","score":0.6080999970436096},{"id":"https://openalex.org/keywords/differentiable-function","display_name":"Differentiable function","score":0.5795999765396118},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5566999912261963},{"id":"https://openalex.org/keywords/physical-system","display_name":"Physical system","score":0.5019000172615051},{"id":"https://openalex.org/keywords/perspective","display_name":"Perspective (graphical)","score":0.49160000681877136},{"id":"https://openalex.org/keywords/filter","display_name":"Filter (signal processing)","score":0.47999998927116394}],"concepts":[{"id":"https://openalex.org/C39890363","wikidata":"https://www.wikidata.org/wiki/Q36108","display_name":"Generative grammar","level":2,"score":0.800599992275238},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6121000051498413},{"id":"https://openalex.org/C167966045","wikidata":"https://www.wikidata.org/wiki/Q5532625","display_name":"Generative model","level":3,"score":0.6080999970436096},{"id":"https://openalex.org/C202615002","wikidata":"https://www.wikidata.org/wiki/Q783507","display_name":"Differentiable function","level":2,"score":0.5795999765396118},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5566999912261963},{"id":"https://openalex.org/C116672817","wikidata":"https://www.wikidata.org/wiki/Q1454986","display_name":"Physical system","level":2,"score":0.5019000172615051},{"id":"https://openalex.org/C12713177","wikidata":"https://www.wikidata.org/wiki/Q1900281","display_name":"Perspective (graphical)","level":2,"score":0.49160000681877136},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.47999998927116394},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.4489000141620636},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.40220001339912415},{"id":"https://openalex.org/C26760741","wikidata":"https://www.wikidata.org/wiki/Q160402","display_name":"Perception","level":2,"score":0.38100001215934753},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.3675999939441681},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.3671000003814697},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.3215999901294708},{"id":"https://openalex.org/C80444323","wikidata":"https://www.wikidata.org/wiki/Q2878974","display_name":"Theoretical computer science","level":1,"score":0.3034999966621399},{"id":"https://openalex.org/C184408114","wikidata":"https://www.wikidata.org/wiki/Q1502022","display_name":"Generative Design","level":3,"score":0.29339998960494995},{"id":"https://openalex.org/C143587482","wikidata":"https://www.wikidata.org/wiki/Q1543216","display_name":"Iterative and incremental development","level":2,"score":0.28299999237060547},{"id":"https://openalex.org/C2778755073","wikidata":"https://www.wikidata.org/wiki/Q10858537","display_name":"Scale (ratio)","level":2,"score":0.27639999985694885},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.26089999079704285}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.48550/arxiv.2606.11247","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2606.11247","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"doi:10.48550/arxiv.2606.11247","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2606.11247","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"},"sustainable_development_goals":[{"score":0.6664541959762573,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"Generative":[0],"models":[1,134,154],"are":[2,19,58],"increasingly":[3],"used":[4],"to":[5,118,186],"propose":[6,140],"designs,":[7],"data,":[8,42],"and":[9,43,51,109,113,124,135,138,151,158,196],"control":[10],"actions":[11],"for":[12,80,155,191],"physical":[13,23,82,156,169],"systems,":[14],"yet":[15],"many":[16],"such":[17],"systems":[18],"governed":[20],"by":[21,27,87,181],"hard":[22],"constraints":[24],"rather":[25,165],"than":[26,166],"perceptual":[28],"plausibility.":[29],"Semiconductor":[30],"manufacturing":[31,70],"provides":[32],"a":[33,72,141],"demanding":[34],"test":[35],"case:":[36],"generated":[37],"masks,":[38],"layouts,":[39],"synthetic":[40],"defect":[41],"process":[44,122],"recipes":[45],"must":[46,84],"obey":[47],"lithography,":[48,120],"transport,":[49],"reaction,":[50],"device-physics":[52],"constraints,":[53],"because":[54],"physically":[55],"invalid":[56],"samples":[57],"not":[59,89],"merely":[60],"low":[61],"quality":[62],"but":[63],"unusable.":[64],"This":[65],"Perspective":[66],"argues":[67],"that":[68,77,178,189],"semiconductor":[69],"exposes":[71],"broader":[73],"computational-science":[74],"challenge,":[75],"namely":[76],"generative":[78,111,133],"AI":[79],"constrained":[81],"domains":[83],"be":[85,184],"physics-informed":[86,102],"construction,":[88],"corrected":[90],"only":[91],"through":[92],"post-hoc":[93],"filtering.":[94],"We":[95,127],"survey":[96],"the":[97,172,194,197,200],"emerging":[98],"architectural":[99],"toolkit,":[100],"including":[101],"diffusion,":[103],"PDE-constrained":[104],"variational":[105],"models,":[106],"neural-operator":[107],"priors,":[108],"conservation-law-respecting":[110],"networks,":[112],"show":[114],"how":[115],"it":[116,180,192],"connects":[117],"differentiable":[119,148],"TCAD,":[121],"simulation,":[123],"autonomous":[125],"experimentation.":[126],"identify":[128],"four":[129],"integration":[130],"patterns":[131],"between":[132],"physics-based":[136],"simulators,":[137],"we":[139],"research":[142],"agenda":[143],"centered":[144],"on":[145],"physics-fidelity":[146],"benchmarks,":[147],"simulator":[149],"infrastructure,":[150],"multimodal":[152],"foundation":[153],"design":[157],"manufacturing.":[159],"The":[160],"central":[161],"claim":[162],"is":[163,171,199,205],"analytical":[164],"rhetorical:":[167],"where":[168,202],"validity":[170],"binding":[173],"criterion":[174],"of":[175],"success,":[176],"architectures":[177],"enforce":[179],"construction":[182],"should":[183],"expected":[185],"outperform":[187],"those":[188],"filter":[190],"after":[193],"fact,":[195],"fab":[198],"setting":[201],"this":[203],"distinction":[204],"sharpest.":[206]},"counts_by_year":[],"updated_date":"2026-07-28T07:46:37.118299","created_date":"2026-06-12T00:00:00"}