{"id":"https://openalex.org/W2006625374","doi":"https://doi.org/10.4018/ijimr.2013010104","title":"Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution","display_name":"Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution","publication_year":2013,"publication_date":"2013-01-01","ids":{"openalex":"https://openalex.org/W2006625374","doi":"https://doi.org/10.4018/ijimr.2013010104","mag":"2006625374"},"language":"en","primary_location":{"id":"doi:10.4018/ijimr.2013010104","is_oa":false,"landing_page_url":"https://doi.org/10.4018/ijimr.2013010104","pdf_url":null,"source":{"id":"https://openalex.org/S4210174632","display_name":"International Journal of Intelligent Mechatronics and Robotics","issn_l":"2156-1656","issn":["2156-1656","2156-1664"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320424","host_organization_name":"IGI Global","host_organization_lineage":["https://openalex.org/P4310320424"],"host_organization_lineage_names":["IGI Global"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Intelligent Mechatronics and Robotics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025335228","display_name":"Zhuang Xiong","orcid":"https://orcid.org/0000-0001-5272-7007"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Zhuang Xiong","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102903307","display_name":"Benjamin Walter","orcid":"https://orcid.org/0000-0001-7001-4609"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Benjamin Walter","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067541682","display_name":"Estelle Mairiaux","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Estelle Mairiaux","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061175460","display_name":"M. Faucher","orcid":"https://orcid.org/0000-0003-0206-9813"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Marc Faucher","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019066653","display_name":"L. Buchaillot","orcid":"https://orcid.org/0000-0002-9844-0498"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Lionel Buchaillot","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5047686660","display_name":"Bernard Legrand","orcid":"https://orcid.org/0000-0001-5158-3654"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Bernard Legrand","raw_affiliation_strings":["CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I4210123471"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.04693963,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"3","issue":"1","first_page":"38","last_page":"52"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8988234400749207},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6344902515411377},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5814743638038635},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.5469286441802979},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.4909229874610901},{"id":"https://openalex.org/keywords/electrostatic-force-microscope","display_name":"Electrostatic force microscope","score":0.46351778507232666},{"id":"https://openalex.org/keywords/ring","display_name":"Ring (chemistry)","score":0.4372623562812805},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.43206900358200073},{"id":"https://openalex.org/keywords/non-contact-atomic-force-microscopy","display_name":"Non-contact atomic force microscopy","score":0.4164392352104187},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.41043365001678467},{"id":"https://openalex.org/keywords/conductive-atomic-force-microscopy","display_name":"Conductive atomic force microscopy","score":0.3626669645309448},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3385145664215088},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.32044199109077454},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.281038761138916},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.16823014616966248},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16558468341827393},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1216091513633728}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8988234400749207},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6344902515411377},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5814743638038635},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.5469286441802979},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.4909229874610901},{"id":"https://openalex.org/C147230242","wikidata":"https://www.wikidata.org/wiki/Q5358564","display_name":"Electrostatic force microscope","level":3,"score":0.46351778507232666},{"id":"https://openalex.org/C2780378348","wikidata":"https://www.wikidata.org/wiki/Q25351438","display_name":"Ring (chemistry)","level":2,"score":0.4372623562812805},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.43206900358200073},{"id":"https://openalex.org/C71246147","wikidata":"https://www.wikidata.org/wiki/Q16029538","display_name":"Non-contact atomic force microscopy","level":4,"score":0.4164392352104187},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.41043365001678467},{"id":"https://openalex.org/C206008964","wikidata":"https://www.wikidata.org/wiki/Q5159384","display_name":"Conductive atomic force microscopy","level":3,"score":0.3626669645309448},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3385145664215088},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32044199109077454},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.281038761138916},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16823014616966248},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16558468341827393},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1216091513633728},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.4018/ijimr.2013010104","is_oa":false,"landing_page_url":"https://doi.org/10.4018/ijimr.2013010104","pdf_url":null,"source":{"id":"https://openalex.org/S4210174632","display_name":"International Journal of Intelligent Mechatronics and Robotics","issn_l":"2156-1656","issn":["2156-1656","2156-1664"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310320424","host_organization_name":"IGI Global","host_organization_lineage":["https://openalex.org/P4310320424"],"host_organization_lineage_names":["IGI Global"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Journal of Intelligent Mechatronics and Robotics","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00801105v1","is_oa":false,"landing_page_url":"https://hal.science/hal-00801105","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:HAL:hal-00871948v1","is_oa":false,"landing_page_url":"https://hal.science/hal-00871948","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.46000000834465027,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1590706606","https://openalex.org/W1983294930","https://openalex.org/W2009461444","https://openalex.org/W2019751820","https://openalex.org/W2034874214","https://openalex.org/W2038667420","https://openalex.org/W2042181726","https://openalex.org/W2053783548","https://openalex.org/W2059859277","https://openalex.org/W2098070562","https://openalex.org/W2120255193","https://openalex.org/W2121098965","https://openalex.org/W2122894837","https://openalex.org/W2144104521"],"related_works":["https://openalex.org/W2052929500","https://openalex.org/W1993237138","https://openalex.org/W2091168769","https://openalex.org/W1993749717","https://openalex.org/W2271423976","https://openalex.org/W2035465588","https://openalex.org/W1982579834","https://openalex.org/W1997235148","https://openalex.org/W1994301181","https://openalex.org/W2083769693"],"abstract_inverted_index":{"A":[0],"new":[1],"concept":[2],"of":[3,82],"Atomic":[4],"Force":[5],"Microscope":[6],"(AFM)":[7],"oscillating":[8],"probes":[9,48],"using":[10],"electrostatic":[11],"excitation":[12],"and":[13,29,54,64,78],"piezoresistive":[14],"detection":[15],"is":[16,20,39,58,71,88,97],"presented.":[17],"The":[18,35,68,90],"probe":[19,70],"characterized":[21],"by":[22,30],"electrical":[23],"methods":[24,32],"in":[25,33,50,62,66],"a":[26,74],"vacuum":[27,63],"chamber":[28],"mechanical":[31],"air.":[34,67],"frequency-mixing":[36],"measurement":[37],"technique":[38],"developed":[40],"to":[41],"reduce":[42],"the":[43,51,55,79,95],"parasitic":[44],"signal":[45],"level.":[46],"These":[47],"resonant":[49],"1MHz":[52],"range":[53],"quality":[56],"factor":[57],"measured":[59],"about":[60,98],"53000":[61],"3000":[65],"ring":[69],"mounted":[72],"onto":[73],"commercial":[75],"AFM":[76],"set-up":[77],"surface":[80],"topography":[81],"PMMA":[83],"sample":[84],"(2":[85],"\u00b5m":[86],"square)":[87],"obtained.":[89],"force":[91],"resolution":[92],"deduced":[93],"from":[94],"measurements":[96],"10":[99],"pN/Hz0.5.":[100]},"counts_by_year":[],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}