{"id":"https://openalex.org/W4391170191","doi":"https://doi.org/10.3390/sym16020137","title":"Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment","display_name":"Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment","publication_year":2024,"publication_date":"2024-01-23","ids":{"openalex":"https://openalex.org/W4391170191","doi":"https://doi.org/10.3390/sym16020137"},"language":"en","primary_location":{"id":"doi:10.3390/sym16020137","is_oa":true,"landing_page_url":"https://doi.org/10.3390/sym16020137","pdf_url":"https://www.mdpi.com/2073-8994/16/2/137/pdf?version=1706091725","source":{"id":"https://openalex.org/S190787756","display_name":"Symmetry","issn_l":"2073-8994","issn":["2073-8994"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Symmetry","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2073-8994/16/2/137/pdf?version=1706091725","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056874918","display_name":"\u0421. \u0410. \u041b\u044b\u0447\u0435\u0432","orcid":"https://orcid.org/0000-0001-7590-1389"},"institutions":[{"id":"https://openalex.org/I4210092536","display_name":"Institute for Problems in Mechanics","ror":"https://ror.org/00nj22y86","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210092536","https://openalex.org/I4210164537"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"Sergey Lychev","raw_affiliation_strings":["Ishlinsky Institute for Problems in Mechanics RAS, 119526 Moscow, Russia"],"raw_orcid":"https://orcid.org/0000-0001-7590-1389","affiliations":[{"raw_affiliation_string":"Ishlinsky Institute for Problems in Mechanics RAS, 119526 Moscow, Russia","institution_ids":["https://openalex.org/I4210092536"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021786112","display_name":"Alexander Digilov","orcid":"https://orcid.org/0000-0001-6892-7740"},"institutions":[{"id":"https://openalex.org/I4210092536","display_name":"Institute for Problems in Mechanics","ror":"https://ror.org/00nj22y86","country_code":"RU","type":"facility","lineage":["https://openalex.org/I1313323035","https://openalex.org/I4210092536","https://openalex.org/I4210164537"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Alexander Digilov","raw_affiliation_strings":["Ishlinsky Institute for Problems in Mechanics RAS, 119526 Moscow, Russia"],"raw_orcid":"https://orcid.org/0000-0001-6892-7740","affiliations":[{"raw_affiliation_string":"Ishlinsky Institute for Problems in Mechanics RAS, 119526 Moscow, Russia","institution_ids":["https://openalex.org/I4210092536"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009914249","display_name":"Gleb D. Demin","orcid":"https://orcid.org/0000-0001-6642-1359"},"institutions":[{"id":"https://openalex.org/I204490831","display_name":"National Research University of Electronic Technology","ror":"https://ror.org/02hf6mx60","country_code":"RU","type":"education","lineage":["https://openalex.org/I204490831"]}],"countries":["RU"],"is_corresponding":true,"raw_author_name":"Gleb Demin","raw_affiliation_strings":["MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia"],"raw_orcid":"https://orcid.org/0000-0001-6642-1359","affiliations":[{"raw_affiliation_string":"MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia","institution_ids":["https://openalex.org/I204490831"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057548078","display_name":"E. E. Gusev","orcid":"https://orcid.org/0000-0002-2819-2599"},"institutions":[{"id":"https://openalex.org/I204490831","display_name":"National Research University of Electronic Technology","ror":"https://ror.org/02hf6mx60","country_code":"RU","type":"education","lineage":["https://openalex.org/I204490831"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Evgeney Gusev","raw_affiliation_strings":["MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia"],"raw_orcid":"https://orcid.org/0000-0002-2819-2599","affiliations":[{"raw_affiliation_string":"MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia","institution_ids":["https://openalex.org/I204490831"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5093597651","display_name":"\u0418.\u0412. \u041a\u0443\u0448\u043d\u0430\u0440\u0435\u0432","orcid":"https://orcid.org/0009-0000-8241-0553"},"institutions":[{"id":"https://openalex.org/I204490831","display_name":"National Research University of Electronic Technology","ror":"https://ror.org/02hf6mx60","country_code":"RU","type":"education","lineage":["https://openalex.org/I204490831"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Ivan Kushnarev","raw_affiliation_strings":["MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia"],"raw_orcid":"https://orcid.org/0009-0000-8241-0553","affiliations":[{"raw_affiliation_string":"MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia","institution_ids":["https://openalex.org/I204490831"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078089865","display_name":"N. A. Djuzhev","orcid":"https://orcid.org/0000-0002-5205-0304"},"institutions":[{"id":"https://openalex.org/I204490831","display_name":"National Research University of Electronic Technology","ror":"https://ror.org/02hf6mx60","country_code":"RU","type":"education","lineage":["https://openalex.org/I204490831"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Nikolay Djuzhev","raw_affiliation_strings":["MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia"],"raw_orcid":"https://orcid.org/0000-0002-5205-0304","affiliations":[{"raw_affiliation_string":"MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia","institution_ids":["https://openalex.org/I204490831"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5082175310","display_name":"\u0412. \u0410. \u0411\u0435\u0441\u043f\u0430\u043b\u043e\u0432","orcid":"https://orcid.org/0000-0003-1901-4181"},"institutions":[{"id":"https://openalex.org/I204490831","display_name":"National Research University of Electronic Technology","ror":"https://ror.org/02hf6mx60","country_code":"RU","type":"education","lineage":["https://openalex.org/I204490831"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Vladimir Bespalov","raw_affiliation_strings":["MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMSEC R&D Center, National Research University of Electronic Technology (MIET),124498 Moscow, Russia","institution_ids":["https://openalex.org/I204490831"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5009914249","https://openalex.org/A5056874918"],"corresponding_institution_ids":["https://openalex.org/I204490831","https://openalex.org/I4210092536"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":0.6962,"has_fulltext":true,"cited_by_count":7,"citation_normalized_percentile":{"value":0.66798862,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":"16","issue":"2","first_page":"137","last_page":"137"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13159","display_name":"Structural mechanics and materials","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13159","display_name":"Structural mechanics and materials","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13129","display_name":"Material Properties and Applications","score":0.9648000001907349,"subfield":{"id":"https://openalex.org/subfields/2500","display_name":"General Materials Science"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9593999981880188,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.69075608253479},{"id":"https://openalex.org/keywords/anisotropy","display_name":"Anisotropy","score":0.6566735506057739},{"id":"https://openalex.org/keywords/flexural-rigidity","display_name":"Flexural rigidity","score":0.6410034894943237},{"id":"https://openalex.org/keywords/boundary-value-problem","display_name":"Boundary value problem","score":0.5812197327613831},{"id":"https://openalex.org/keywords/deformation","display_name":"Deformation (meteorology)","score":0.5381224155426025},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5368350744247437},{"id":"https://openalex.org/keywords/plate-theory","display_name":"Plate theory","score":0.5328353643417358},{"id":"https://openalex.org/keywords/single-crystal","display_name":"Single crystal","score":0.42647042870521545},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4244900345802307},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.3699035048484802},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.35322797298431396},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.3530663251876831},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.30611956119537354},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.29257655143737793},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.1997559666633606},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1699080765247345},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16545149683952332},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.12154251337051392},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08194512128829956},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.07053855061531067}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.69075608253479},{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.6566735506057739},{"id":"https://openalex.org/C73099012","wikidata":"https://www.wikidata.org/wiki/Q5459050","display_name":"Flexural rigidity","level":2,"score":0.6410034894943237},{"id":"https://openalex.org/C182310444","wikidata":"https://www.wikidata.org/wiki/Q1332643","display_name":"Boundary value problem","level":2,"score":0.5812197327613831},{"id":"https://openalex.org/C204366326","wikidata":"https://www.wikidata.org/wiki/Q3027650","display_name":"Deformation (meteorology)","level":2,"score":0.5381224155426025},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5368350744247437},{"id":"https://openalex.org/C16826683","wikidata":"https://www.wikidata.org/wiki/Q2098720","display_name":"Plate theory","level":3,"score":0.5328353643417358},{"id":"https://openalex.org/C73922627","wikidata":"https://www.wikidata.org/wiki/Q754943","display_name":"Single crystal","level":2,"score":0.42647042870521545},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4244900345802307},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.3699035048484802},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.35322797298431396},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.3530663251876831},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.30611956119537354},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.29257655143737793},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.1997559666633606},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1699080765247345},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16545149683952332},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.12154251337051392},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08194512128829956},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07053855061531067},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.3390/sym16020137","is_oa":true,"landing_page_url":"https://doi.org/10.3390/sym16020137","pdf_url":"https://www.mdpi.com/2073-8994/16/2/137/pdf?version=1706091725","source":{"id":"https://openalex.org/S190787756","display_name":"Symmetry","issn_l":"2073-8994","issn":["2073-8994"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Symmetry","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:14199a0c9505457e95246107e6bb7faf","is_oa":false,"landing_page_url":"https://doaj.org/article/14199a0c9505457e95246107e6bb7faf","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Symmetry, Vol 16, Iss 2, p 137 (2024)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/sym16020137","is_oa":true,"landing_page_url":"https://doi.org/10.3390/sym16020137","pdf_url":"https://www.mdpi.com/2073-8994/16/2/137/pdf?version=1706091725","source":{"id":"https://openalex.org/S190787756","display_name":"Symmetry","issn_l":"2073-8994","issn":["2073-8994"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Symmetry","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G6575257632","display_name":null,"funder_award_id":"FSMR-2023-0014","funder_id":"https://openalex.org/F4320327494","funder_display_name":"Ministry of Science and Higher Education of the Russian Federation"}],"funders":[{"id":"https://openalex.org/F4320327494","display_name":"Ministry of Science and Higher Education of the Russian Federation","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4391170191.pdf","grobid_xml":"https://content.openalex.org/works/W4391170191.grobid-xml"},"referenced_works_count":27,"referenced_works":["https://openalex.org/W1984003326","https://openalex.org/W2146033590","https://openalex.org/W2294000617","https://openalex.org/W2326111774","https://openalex.org/W2943890292","https://openalex.org/W2955848089","https://openalex.org/W3028690099","https://openalex.org/W3080231972","https://openalex.org/W3118392101","https://openalex.org/W3160091220","https://openalex.org/W3206327833","https://openalex.org/W3207456696","https://openalex.org/W3215546930","https://openalex.org/W4200451096","https://openalex.org/W4220827892","https://openalex.org/W4286377385","https://openalex.org/W4293574565","https://openalex.org/W4299153227","https://openalex.org/W4313165108","https://openalex.org/W4316013209","https://openalex.org/W4320148383","https://openalex.org/W4377140879","https://openalex.org/W4388731471","https://openalex.org/W4389450250","https://openalex.org/W4389753524","https://openalex.org/W4400988437","https://openalex.org/W6871794348"],"related_works":["https://openalex.org/W2429158493","https://openalex.org/W2053198125","https://openalex.org/W2150680907","https://openalex.org/W1991700436","https://openalex.org/W2062052780","https://openalex.org/W1990890502","https://openalex.org/W4289528112","https://openalex.org/W3088203130","https://openalex.org/W1971332542","https://openalex.org/W2317430799"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"the":[3,7,17,47,53,61,82,88,92],"experimental":[4],"methodology":[5],"for":[6,16,38],"single-crystal":[8,56],"circular":[9,43,57],"plate":[10,93],"deformation":[11,54],"measurement":[12],"and":[13,77],"subsequent":[14],"procedure":[15,26],"quantitation":[18],"of":[19,34,41,52,55,63,72,84,91],"its":[20],"mechanical":[21],"properties":[22],"are":[23,75],"developed.":[24],"The":[25,70],"is":[27,79],"based":[28],"on":[29,60],"a":[30,42,50,64],"new":[31],"numerical-analytical":[32],"solution":[33],"non-linear":[35],"boundary-value":[36],"problem":[37],"finite":[39],"deformations":[40],"anisotropic":[44],"plate.":[45],"Using":[46],"developed":[48],"method,":[49],"study":[51],"plates":[58],"formed":[59],"basis":[62],"silicon-on-insulator":[65],"structure":[66],"was":[67],"carried":[68],"out.":[69],"values":[71],"residual":[73],"stresses":[74,86],"determined":[76],"it":[78],"shown":[80],"that":[81],"presence":[83],"these":[85],"increases":[87],"flexural":[89],"rigidity":[90],"by":[94],"several":[95],"times.":[96]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":4}],"updated_date":"2026-06-14T06:11:07.267592","created_date":"2025-10-10T00:00:00"}