{"id":"https://openalex.org/W2007697940","doi":"https://doi.org/10.3390/s91108748","title":"Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process","display_name":"Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process","publication_year":2009,"publication_date":"2009-10-30","ids":{"openalex":"https://openalex.org/W2007697940","doi":"https://doi.org/10.3390/s91108748","mag":"2007697940","pmid":"https://pubmed.ncbi.nlm.nih.gov/22291534"},"language":"en","primary_location":{"id":"doi:10.3390/s91108748","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s91108748","pdf_url":"https://www.mdpi.com/1424-8220/9/11/8748/pdf?version=1403311854","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/9/11/8748/pdf?version=1403311854","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087657892","display_name":"Po\u2010Wei Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Po-Wei Lu","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052420595","display_name":"Chyan\u2010Chyi Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I107470533","display_name":"Tamkang University","ror":"https://ror.org/04tft4718","country_code":"TW","type":"education","lineage":["https://openalex.org/I107470533"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chyan-Chyi Wu","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan","institution_ids":["https://openalex.org/I107470533"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102241555","display_name":"Chienliu Chang","orcid":null},"institutions":[{"id":"https://openalex.org/I1320697193","display_name":"Canon (Japan)","ror":"https://ror.org/05gg0gh87","country_code":"JP","type":"company","lineage":["https://openalex.org/I1320697193"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chienliu Chang","raw_affiliation_strings":["Corporate R&D Headquarters, Canon Inc., Tokyo 146-8501, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Corporate R&D Headquarters, Canon Inc., Tokyo 146-8501, Japan","institution_ids":["https://openalex.org/I1320697193"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5005155364"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.5255,"has_fulltext":false,"cited_by_count":17,"citation_normalized_percentile":{"value":0.83117502,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"9","issue":"11","first_page":"8748","last_page":"8760"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.7923290133476257},{"id":"https://openalex.org/keywords/parylene","display_name":"Parylene","score":0.6368514895439148},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6327592134475708},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5435402989387512},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46451038122177124},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.4425739347934723},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4198288917541504},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34623104333877563},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18317174911499023},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.07588374614715576}],"concepts":[{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.7923290133476257},{"id":"https://openalex.org/C2777385008","wikidata":"https://www.wikidata.org/wiki/Q448540","display_name":"Parylene","level":3,"score":0.6368514895439148},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6327592134475708},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5435402989387512},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46451038122177124},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.4425739347934723},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4198288917541504},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34623104333877563},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18317174911499023},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.07588374614715576},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s91108748","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s91108748","pdf_url":"https://www.mdpi.com/1424-8220/9/11/8748/pdf?version=1403311854","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22291534","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22291534","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:fc962f576d0e40278196ced566689972","is_oa":true,"landing_page_url":"https://doaj.org/article/fc962f576d0e40278196ced566689972","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 9, Iss 11, Pp 8748-8760 (2009)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2272452","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3260611","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/9/11/8748/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s91108748","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 9; Issue 11; Pages: 8748-8760","raw_type":"Text"},{"id":"pmh:oai:tkuir.lib.tku.edu.tw:987654321/65307","is_oa":false,"landing_page_url":"https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/65307","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"doi:10.3390/s91108748","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s91108748","pdf_url":"https://www.mdpi.com/1424-8220/9/11/8748/pdf?version=1403311854","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.8199999928474426,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W2007697940.pdf"},"referenced_works_count":14,"referenced_works":["https://openalex.org/W1982075763","https://openalex.org/W1983282195","https://openalex.org/W2004901902","https://openalex.org/W2006903672","https://openalex.org/W2012376833","https://openalex.org/W2028269670","https://openalex.org/W2111884433","https://openalex.org/W2117364386","https://openalex.org/W2134571742","https://openalex.org/W2140329388","https://openalex.org/W2147910234","https://openalex.org/W2166520173","https://openalex.org/W2621919695","https://openalex.org/W4245642689"],"related_works":["https://openalex.org/W2953703289","https://openalex.org/W2075707675","https://openalex.org/W2294645879","https://openalex.org/W4386774075","https://openalex.org/W2109445684","https://openalex.org/W2095318639","https://openalex.org/W2135814299","https://openalex.org/W4220955032","https://openalex.org/W4386127536","https://openalex.org/W4211078944"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"we":[3],"fabricated":[4],"a":[5,25,35,83,106,138,164,177],"wireless":[6,28,178],"micro":[7,29],"FET":[8,36],"(field":[9],"effect":[10],"transistor)":[11],"pressure":[12,30,37,67,80,86,130,141,161,171],"sensor":[13,31,81,87,131,162],"based":[14],"on":[15],"the":[16,56,62,66,75,79,110,113,116,125,129,134,150,154,160,170],"commercial":[17],"CMOS":[18],"(complementary":[19],"metal":[20],"oxide":[21,103],"semiconductor)":[22,104],"process":[23],"and":[24,43,55,105,137,176],"post-process.":[26],"The":[27,46,69,85,119],"is":[32,48,58,71,88,115,146],"composed":[33],"of":[34,65,78,112,166,173,181],"sensor,":[38],"an":[39,41,44,52,100],"oscillator,":[40],"amplifier":[42,57],"antenna.":[45],"oscillator":[47],"adopted":[49,147],"to":[50,60,73,82,123,148],"generate":[51],"ac":[53],"signal,":[54],"used":[59],"amplify":[61],"sensing":[63,92,97],"signal":[64],"sensor.":[68],"antenna":[70],"utilized":[72],"transmit":[74],"output":[76],"voltage":[77],"receiver.":[84],"constructed":[89],"by":[90],"16":[91],"cells":[93],"in":[94,128,153,169],"parallel.":[95],"Each":[96],"cell":[98],"contains":[99],"MOS":[101,114],"(metal":[102],"suspended":[107,117,135],"membrane,":[108],"which":[109],"gate":[111],"membrane.":[118],"post-process":[120],"employs":[121],"etchants":[122],"etch":[124,151],"sacrificial":[126],"layers":[127],"for":[132],"releasing":[133],"membranes,":[136],"LPCVD":[139],"(low":[140],"chemical":[142],"vapor":[143],"deposition)":[144],"parylene":[145],"seal":[149],"holes":[152],"pressure.":[155],"Experimental":[156],"results":[157],"show":[158],"that":[159],"has":[163],"sensitivity":[165],"0.08":[167],"mV/kPa":[168],"range":[172],"0-500":[174],"kPa":[175],"transmission":[179],"distance":[180],"10":[182],"cm.":[183]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2015,"cited_by_count":4},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}