{"id":"https://openalex.org/W2045092500","doi":"https://doi.org/10.3390/s90806219","title":"Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique","display_name":"Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique","publication_year":2009,"publication_date":"2009-08-06","ids":{"openalex":"https://openalex.org/W2045092500","doi":"https://doi.org/10.3390/s90806219","mag":"2045092500","pmid":"https://pubmed.ncbi.nlm.nih.gov/22454581"},"language":"en","primary_location":{"id":"doi:10.3390/s90806219","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90806219","pdf_url":"https://www.mdpi.com/1424-8220/9/8/6219/pdf?version=1403311643","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/9/8/6219/pdf?version=1403311643","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033183611","display_name":"Pin\u2010Hsu Kao","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Pin-Hsu Kao","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I114129787","display_name":"NCR (United States)","ror":"https://ror.org/00nqjkj48","country_code":"US","type":"company","lineage":["https://openalex.org/I114129787"]},{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW","US"],"is_corresponding":true,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","E-Mail:  d9461402@mail.nchu.edu.tw  (P.-H.K.)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"E-Mail:  d9461402@mail.nchu.edu.tw  (P.-H.K.)","institution_ids":["https://openalex.org/I114129787"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101088381","display_name":"Cheng-Chih Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I99908691","display_name":"Yuan Ze University","ror":"https://ror.org/01fv1ds98","country_code":"TW","type":"education","lineage":["https://openalex.org/I99908691"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Cheng-Chih Hsu","raw_affiliation_strings":["Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan, 320 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan, 320 Taiwan","institution_ids":["https://openalex.org/I99908691"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052420595","display_name":"Chyan\u2010Chyi Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I107470533","display_name":"Tamkang University","ror":"https://ror.org/04tft4718","country_code":"TW","type":"education","lineage":["https://openalex.org/I107470533"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chyan-Chyi Wu","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan","institution_ids":["https://openalex.org/I107470533"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5005155364"],"corresponding_institution_ids":["https://openalex.org/I114129787","https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.6102,"has_fulltext":true,"cited_by_count":12,"citation_normalized_percentile":{"value":0.71277127,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"9","issue":"8","first_page":"6219","last_page":"6231"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8226240873336792},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6968511343002319},{"id":"https://openalex.org/keywords/digital-micromirror-device","display_name":"Digital micromirror device","score":0.4932982325553894},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4160654544830322},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.40727975964546204},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4041004478931427},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3886699080467224},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3052671551704407},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.29103419184684753}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8226240873336792},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6968511343002319},{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.4932982325553894},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4160654544830322},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.40727975964546204},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4041004478931427},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3886699080467224},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3052671551704407},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29103419184684753}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s90806219","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90806219","pdf_url":"https://www.mdpi.com/1424-8220/9/8/6219/pdf?version=1403311643","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22454581","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22454581","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:f76919ae491f40ed8fad954237006261","is_oa":false,"landing_page_url":"https://doaj.org/article/f76919ae491f40ed8fad954237006261","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 9, Iss 8, Pp 6219-6231 (2009)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2318080","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3312440","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/9/8/6219/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s90806219","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 9; Issue 8; Pages: 6219-6231","raw_type":"Text"},{"id":"pmh:oai:tkuir.lib.tku.edu.tw:987654321/65336","is_oa":false,"landing_page_url":"https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/65336","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"doi:10.3390/s90806219","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90806219","pdf_url":"https://www.mdpi.com/1424-8220/9/8/6219/pdf?version=1403311643","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2045092500.pdf","grobid_xml":"https://content.openalex.org/works/W2045092500.grobid-xml"},"referenced_works_count":20,"referenced_works":["https://openalex.org/W2004901902","https://openalex.org/W2007954272","https://openalex.org/W2010099773","https://openalex.org/W2019073058","https://openalex.org/W2028873622","https://openalex.org/W2080381396","https://openalex.org/W2095532255","https://openalex.org/W2096600473","https://openalex.org/W2099391127","https://openalex.org/W2109103540","https://openalex.org/W2110295403","https://openalex.org/W2116071829","https://openalex.org/W2134571742","https://openalex.org/W2144557698","https://openalex.org/W2147910234","https://openalex.org/W2156686996","https://openalex.org/W2166072064","https://openalex.org/W2169379798","https://openalex.org/W3140707511","https://openalex.org/W6674644353"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2272290532","https://openalex.org/W2353426333","https://openalex.org/W2326564110","https://openalex.org/W752721784","https://openalex.org/W2361272194","https://openalex.org/W2055883698","https://openalex.org/W2120483398","https://openalex.org/W4318472837","https://openalex.org/W2109445684"],"abstract_inverted_index":{"In":[0],"this":[1],"study":[2],"we":[3,42,66,143],"used":[4,67,122],"the":[5,35,44,48,54,72,78,96,104,107,125,130,146,167],"commercial":[6],"0.35":[7],"\u03bcm":[8],"CMOS":[9,50],"(complementary":[10],"metal":[11],"oxide":[12],"semiconductor)":[13],"process":[14],"and":[15,75,87,94,116,127],"simple":[16],"maskless":[17],"post-processing":[18,65],"to":[19,56,70,123],"fabricate":[20],"an":[21,68],"array":[22,82],"of":[23,106,129,152,160,166],"micromirrors":[24,30,168],"exhibiting":[25],"high":[26],"natural":[27,164],"frequency.":[28],"The":[29,80,163],"were":[31,121],"manufactured":[32],"from":[33],"aluminum;":[34],"sacrificial":[36,73],"layer":[37,74],"was":[38,169],"silicon":[39],"dioxide.":[40],"Because":[41],"fabricated":[43],"micromirror":[45,81,131,134,147],"arrays":[46],"using":[47],"standard":[49],"process,":[51],"they":[52],"have":[53],"potential":[55],"be":[57,136],"integrated":[58],"with":[59],"circuitry":[60],"on":[61],"a":[62,84,117,149,157],"chip.":[63],"For":[64],"etchant":[69],"remove":[71],"thereby":[76],"suspend":[77],"micromirrors.":[79],"contained":[83],"circular":[85,97],"membrane":[86],"four":[88,100,139],"fixed":[89],"beams":[90],"set":[91],"symmetrically":[92],"around":[93],"below":[95],"mirror;":[98],"these":[99],"fan-shaped":[101],"electrodes":[102],"controlled":[103],"tilting":[105,150],"micromirror.":[108],"A":[109],"MEMS":[110],"(microelectromechanical":[111],"system)":[112],"motion":[113],"analysis":[114],"system":[115],"confocal":[118],"3D-surface":[119],"topography":[120],"characterize":[124],"properties":[126],"configuration":[128],"array.":[132],"Each":[133],"could":[135],"rotated":[137],"in":[138],"independent":[140],"directions.":[141],"Experimentally,":[142],"found":[144],"that":[145],"had":[148],"angle":[151],"about":[153],"2.55\u00b0":[154],"when":[155],"applying":[156],"driving":[158],"voltage":[159],"40":[161],"V.":[162],"frequency":[165],"59.1":[170],"kHz.":[171]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}