{"id":"https://openalex.org/W2043309648","doi":"https://doi.org/10.3390/s90503357","title":"Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope","display_name":"Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope","publication_year":2009,"publication_date":"2009-05-07","ids":{"openalex":"https://openalex.org/W2043309648","doi":"https://doi.org/10.3390/s90503357","mag":"2043309648","pmid":"https://pubmed.ncbi.nlm.nih.gov/22412316"},"language":"en","primary_location":{"id":"doi:10.3390/s90503357","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90503357","pdf_url":"https://www.mdpi.com/1424-8220/9/5/3357/pdf?version=1403311460","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/9/5/3357/pdf?version=1403311460","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102940337","display_name":"Bo Yang","orcid":"https://orcid.org/0000-0003-0404-8119"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Bo Yang","raw_affiliation_strings":["College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","College of Instrument Science and Engineering,Southeast University,Nanjing 210096,China)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"College of Instrument Science and Engineering,Southeast University,Nanjing 210096,China)","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076693818","display_name":"Shourong Wang","orcid":"https://orcid.org/0000-0003-3394-1299"},"institutions":[{"id":"https://openalex.org/I2799490518","display_name":"Society of Exploration Geophysicists","ror":"https://ror.org/04gap2p44","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I2799490518"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN","US"],"is_corresponding":false,"raw_author_name":"Shourong Wang","raw_affiliation_strings":["College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","E-Mails:  srwang@seu.edu.cn"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"E-Mails:  srwang@seu.edu.cn","institution_ids":["https://openalex.org/I2799490518"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100732449","display_name":"Hongsheng Li","orcid":"https://orcid.org/0000-0001-6339-2505"},"institutions":[{"id":"https://openalex.org/I4210156900","display_name":"CNS Research (United States)","ror":"https://ror.org/05a9nb826","country_code":"US","type":"company","lineage":["https://openalex.org/I4210156900"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN","US"],"is_corresponding":false,"raw_author_name":"Hongsheng Li","raw_affiliation_strings":["College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","hsli@seu.edu.cn"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"hsli@seu.edu.cn","institution_ids":["https://openalex.org/I4210156900"]}]},{"author_position":"last","author":{"id":null,"display_name":"Bailing Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I38706770","display_name":"Guilin University of Technology","ror":"https://ror.org/03z391397","country_code":"CN","type":"education","lineage":["https://openalex.org/I38706770"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bailing Zhou","raw_affiliation_strings":["College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","zhoubailing@seu.edu.cn"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Instrument Science & Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"zhoubailing@seu.edu.cn","institution_ids":["https://openalex.org/I38706770"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5102940337"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.3051,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.62307988,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"9","issue":"5","first_page":"3357","last_page":"3375"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.815712571144104},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.7104097604751587},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.6231298446655273},{"id":"https://openalex.org/keywords/phase-noise","display_name":"Phase noise","score":0.5416778326034546},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5325549840927124},{"id":"https://openalex.org/keywords/closed-loop","display_name":"Closed loop","score":0.44136425852775574},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3872084617614746},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.36885717511177063},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32328933477401733},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.22797450423240662},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.16692471504211426},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1043001115322113},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.10185626149177551},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.07869744300842285}],"concepts":[{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.815712571144104},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.7104097604751587},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.6231298446655273},{"id":"https://openalex.org/C89631360","wikidata":"https://www.wikidata.org/wiki/Q1428766","display_name":"Phase noise","level":2,"score":0.5416778326034546},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5325549840927124},{"id":"https://openalex.org/C3019251811","wikidata":"https://www.wikidata.org/wiki/Q5135346","display_name":"Closed loop","level":2,"score":0.44136425852775574},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3872084617614746},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.36885717511177063},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32328933477401733},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.22797450423240662},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16692471504211426},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1043001115322113},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.10185626149177551},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.07869744300842285},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s90503357","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90503357","pdf_url":"https://www.mdpi.com/1424-8220/9/5/3357/pdf?version=1403311460","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22412316","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22412316","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.271.3517","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.271.3517","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ftp://ftp.ncbi.nlm.nih.gov/pub/pmc/e8/6c/Sensors_(Basel)_2009_May_7_9(5)_3357-3375.tar.gz","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:4ed51f6c09f74e16b13dd4af08159b2d","is_oa":true,"landing_page_url":"https://doaj.org/article/4ed51f6c09f74e16b13dd4af08159b2d","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 9, Iss 5, Pp 3357-3375 (2009)","raw_type":"article"},{"id":"pmh:oai:pubmedcentral.nih.gov:3297147","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3297147","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s90503357","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90503357","pdf_url":"https://www.mdpi.com/1424-8220/9/5/3357/pdf?version=1403311460","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5899999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2043309648.pdf","grobid_xml":"https://content.openalex.org/works/W2043309648.grobid-xml"},"referenced_works_count":19,"referenced_works":["https://openalex.org/W585985452","https://openalex.org/W1481616730","https://openalex.org/W1548051100","https://openalex.org/W1973819951","https://openalex.org/W1975528623","https://openalex.org/W2000121421","https://openalex.org/W2003469080","https://openalex.org/W2016754757","https://openalex.org/W2017316327","https://openalex.org/W2036599674","https://openalex.org/W2040886699","https://openalex.org/W2045630735","https://openalex.org/W2086879121","https://openalex.org/W2101995939","https://openalex.org/W2134128596","https://openalex.org/W2135407339","https://openalex.org/W3041070869","https://openalex.org/W3096151628","https://openalex.org/W6645328474"],"related_works":["https://openalex.org/W1889129279","https://openalex.org/W4387451989","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W23275807","https://openalex.org/W2358715846","https://openalex.org/W2761234876","https://openalex.org/W2168042464","https://openalex.org/W4229455305","https://openalex.org/W2115950857"],"abstract_inverted_index":{"A":[0],"new":[1],"closed-loop":[2,14,30,93,99,129,140,164,191],"drive":[3,125],"scheme":[4],"which":[5],"decouples":[6],"the":[7,10,13,26,44,55,59,62,67,78,87,92,98,104,111,120,124,128,137,144,147,160,170,175,179,186,190],"phase":[8],"and":[9,32,70,76,90,123,134,142,150,156,173],"gain":[11],"of":[12,29,46,51,58,66,139,146,163,189],"driving":[15,31,56,68,89,100,130,141,165,176,192],"system":[16,27,41],"was":[17],"designed":[18],"in":[19,86,91,127],"a":[20],"Silicon":[21],"Micro-Gyroscope":[22],"(SMG).":[23],"We":[24,108],"deduce":[25],"model":[28],"use":[33],"stochastic":[34],"averaging":[35],"to":[36,82],"obtain":[37],"an":[38],"approximate":[39],"\"slow\"":[40],"that":[42,97,110],"clarifies":[43],"effect":[45],"thermal":[47,83],"noise.":[48],"The":[49,132,154],"effects":[50],"mechanical-thermal":[52,171,180],"noise":[53,63,79,84,106,113,162,172,181,188],"on":[54],"performance":[57],"SMG,":[60],"including":[61],"spectral":[64],"density":[65],"amplitude":[69,80,126],"frequency,":[71],"are":[72],"derived.":[73],"By":[74],"calculating":[75],"comparing":[77],"due":[81],"both":[85],"opened-loop":[88],"driving,":[94],"we":[95],"find":[96],"does":[101],"not":[102],"reduce":[103],"RMS":[105,112],"amplitude.":[107],"observe":[109],"frequency":[114],"can":[115],"be":[116],"reduced":[117],"by":[118],"increasing":[119],"quality":[121],"factor":[122],"system.":[131],"experiment":[133,155],"simulation":[135,157],"validate":[136],"feasibility":[138],"confirm":[143],"validity":[145],"averaged":[148],"equation":[149],"its":[151],"stablility":[152],"criterion.":[153],"results":[158],"indicate":[159],"electrical":[161,187],"circuitry":[166],"is":[167],"bigger":[168,184],"than":[169,185],"as":[174],"mass":[177],"decreases,":[178],"may":[182],"get":[183],"circuitry.":[193]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}