{"id":"https://openalex.org/W2073111866","doi":"https://doi.org/10.3390/s90301330","title":"An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer","display_name":"An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer","publication_year":2009,"publication_date":"2009-02-26","ids":{"openalex":"https://openalex.org/W2073111866","doi":"https://doi.org/10.3390/s90301330","mag":"2073111866","pmid":"https://pubmed.ncbi.nlm.nih.gov/22573956"},"language":"en","primary_location":{"id":"doi:10.3390/s90301330","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90301330","pdf_url":"https://www.mdpi.com/1424-8220/9/3/1330/pdf?version=1403311308","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/9/3/1330/pdf?version=1403311308","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002031940","display_name":"Zhengwei Wu","orcid":"https://orcid.org/0000-0002-3500-5990"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhengwei Wu","raw_affiliation_strings":["Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100349601","display_name":"Lei Liu","orcid":"https://orcid.org/0000-0002-9714-2130"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Liu","raw_affiliation_strings":["Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102031154","display_name":"Xiaojing Shi","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaojing Shi","raw_affiliation_strings":["Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5049215297"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":1.5837,"has_fulltext":true,"cited_by_count":16,"citation_normalized_percentile":{"value":0.83963152,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"9","issue":"3","first_page":"1330","last_page":"1338"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microbeam","display_name":"Microbeam","score":0.8404194116592407},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7984969615936279},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.6987463235855103},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.6665544509887695},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6236372590065002},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5500341057777405},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.5053873062133789},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.4930855929851532},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4649578034877777},{"id":"https://openalex.org/keywords/nitride","display_name":"Nitride","score":0.420784592628479},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4025719165802002},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3381763696670532},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2912902534008026},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.14220094680786133}],"concepts":[{"id":"https://openalex.org/C2777152588","wikidata":"https://www.wikidata.org/wiki/Q6839237","display_name":"Microbeam","level":2,"score":0.8404194116592407},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7984969615936279},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.6987463235855103},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.6665544509887695},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6236372590065002},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5500341057777405},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5053873062133789},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.4930855929851532},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4649578034877777},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.420784592628479},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4025719165802002},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3381763696670532},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2912902534008026},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.14220094680786133},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s90301330","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90301330","pdf_url":"https://www.mdpi.com/1424-8220/9/3/1330/pdf?version=1403311308","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22573956","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22573956","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:102c80c9e5094a3fb3d0f9ad5c90e7cf","is_oa":true,"landing_page_url":"https://doaj.org/article/102c80c9e5094a3fb3d0f9ad5c90e7cf","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 9, Iss 3, Pp 1330-1338 (2009)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2354422","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3345835","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s90301330","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s90301330","pdf_url":"https://www.mdpi.com/1424-8220/9/3/1330/pdf?version=1403311308","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.6600000262260437,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2073111866.pdf","grobid_xml":"https://content.openalex.org/works/W2073111866.grobid-xml"},"referenced_works_count":8,"referenced_works":["https://openalex.org/W1771567176","https://openalex.org/W1869177441","https://openalex.org/W2007620779","https://openalex.org/W2009591452","https://openalex.org/W2108619704","https://openalex.org/W2143909640","https://openalex.org/W2149871666","https://openalex.org/W2154759250"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152","https://openalex.org/W2978594305"],"abstract_inverted_index":{"A":[0],"resonant":[1,63,112],"microbeam":[2],"accelerometer":[3,28],"of":[4,30,70,93,110,124],"a":[5,40],"novel":[6,104],"highly":[7],"symmetric":[8],"structure":[9,73,105],"based":[10],"on":[11,89],"MEMS":[12],"bulk-silicon":[13],"technology":[14],"is":[15,45,59,80],"proposed":[16],"and":[17,39,67,82,98,114],"some":[18],"numerical":[19],"modeling":[20],"results":[21,100],"for":[22],"this":[23],"scheme":[24],"are":[25],"presented.":[26],"The":[27,77],"consists":[29],"two":[31,37,52],"proof":[32,53],"masses,":[33],"four":[34],"supporting":[35],"hinges,":[36],"anchors,":[38],"vibrating":[41],"triple":[42,64,78],"beam,":[43],"which":[44],"clamped":[46],"at":[47],"both":[48],"ends":[49],"to":[50],"the":[51,62,71,90,94,103,107,111],"masses.":[54],"LPCVD":[55],"silicon":[56],"rich":[57],"nitride":[58],"chosen":[60],"as":[61,120],"beam":[65,79],"material,":[66],"parameter":[68],"optimization":[69],"triple-beam":[72],"has":[74],"been":[75],"performed.":[76],"excited":[81],"sensed":[83],"electromagnetically":[84],"by":[85],"film":[86],"electrodes":[87],"located":[88],"upper":[91],"surface":[92],"beam.":[95],"Both":[96],"simulation":[97],"experimental":[99],"show":[101],"that":[102],"increases":[106],"scale":[108],"factor":[109],"accelerometer,":[113],"ameliorates":[115],"other":[116],"performance":[117],"issues":[118],"such":[119],"cross":[121],"axis":[122],"sensitivity":[123],"insensitive":[125],"input":[126],"acceleration,":[127],"etc.":[128]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}