{"id":"https://openalex.org/W4399895929","doi":"https://doi.org/10.3390/s24124018","title":"A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer","display_name":"A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer","publication_year":2024,"publication_date":"2024-06-20","ids":{"openalex":"https://openalex.org/W4399895929","doi":"https://doi.org/10.3390/s24124018","pmid":"https://pubmed.ncbi.nlm.nih.gov/38931800"},"language":"en","primary_location":{"id":"doi:10.3390/s24124018","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24124018","pdf_url":"https://www.mdpi.com/1424-8220/24/12/4018/pdf?version=1718887382","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/24/12/4018/pdf?version=1718887382","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006737021","display_name":"Sergiusz \u0141uczak","orcid":"https://orcid.org/0000-0003-2351-9473"},"institutions":[{"id":"https://openalex.org/I108403487","display_name":"Warsaw University of Technology","ror":"https://ror.org/00y0xnp53","country_code":"PL","type":"education","lineage":["https://openalex.org/I108403487"]}],"countries":["PL"],"is_corresponding":true,"raw_author_name":"Sergiusz \u0141uczak","raw_affiliation_strings":["Warsaw University of Technology, Faculty of Mechatronics, 00-661 Warsaw, Poland"],"raw_orcid":"https://orcid.org/0000-0003-2351-9473","affiliations":[{"raw_affiliation_string":"Warsaw University of Technology, Faculty of Mechatronics, 00-661 Warsaw, Poland","institution_ids":["https://openalex.org/I108403487"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054036327","display_name":"M. Ekwi\u0144ska","orcid":null},"institutions":[{"id":"https://openalex.org/I4210129336","display_name":"\u0141ukasiewicz Research Network","ror":"https://ror.org/036f4sz05","country_code":"PL","type":"facility","lineage":["https://openalex.org/I4210129336"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"Magdalena Ekwi\u0144ska","raw_affiliation_strings":["\u0141ukasiewicz Research Network Institute of Microelectronics and Photonics, Al. Lotnikow 32/46, 02-668 Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u0141ukasiewicz Research Network Institute of Microelectronics and Photonics, Al. Lotnikow 32/46, 02-668 Warsaw, Poland","institution_ids":["https://openalex.org/I4210129336"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088307829","display_name":"Daniel Tomaszewski","orcid":"https://orcid.org/0000-0001-5158-2520"},"institutions":[{"id":"https://openalex.org/I4210129336","display_name":"\u0141ukasiewicz Research Network","ror":"https://ror.org/036f4sz05","country_code":"PL","type":"facility","lineage":["https://openalex.org/I4210129336"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"Daniel Tomaszewski","raw_affiliation_strings":["\u0141ukasiewicz Research Network Institute of Microelectronics and Photonics, Al. Lotnikow 32/46, 02-668 Warsaw, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u0141ukasiewicz Research Network Institute of Microelectronics and Photonics, Al. Lotnikow 32/46, 02-668 Warsaw, Poland","institution_ids":["https://openalex.org/I4210129336"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5006737021"],"corresponding_institution_ids":["https://openalex.org/I108403487"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.3937,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59168594,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"24","issue":"12","first_page":"4018","last_page":"4018"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9293898344039917},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.7871395349502563},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.679417610168457},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5944096446037292},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5839236378669739},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.5825768709182739},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.5431519746780396},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.444989413022995},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.4418489336967468},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.42371395230293274},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.4173060357570648},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.41517555713653564},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.38211578130722046},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3526710569858551},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.31401151418685913},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.26154953241348267},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16682207584381104},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.11952817440032959},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.09993073344230652}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9293898344039917},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7871395349502563},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.679417610168457},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5944096446037292},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5839236378669739},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.5825768709182739},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5431519746780396},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.444989413022995},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.4418489336967468},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42371395230293274},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.4173060357570648},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.41517555713653564},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.38211578130722046},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3526710569858551},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31401151418685913},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.26154953241348267},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16682207584381104},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11952817440032959},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09993073344230652},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s24124018","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24124018","pdf_url":"https://www.mdpi.com/1424-8220/24/12/4018/pdf?version=1718887382","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:38931800","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38931800","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:11207480","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/11207480","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC11207480/pdf/sensors-24-04018.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:04432a8d6c084f6db55d523370af8c39","is_oa":false,"landing_page_url":"https://doaj.org/article/04432a8d6c084f6db55d523370af8c39","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 24, Iss 12, p 4018 (2024)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s24124018","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24124018","pdf_url":"https://www.mdpi.com/1424-8220/24/12/4018/pdf?version=1718887382","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6899999976158142}],"awards":[],"funders":[{"id":"https://openalex.org/F4320322637","display_name":"Politechnika Warszawska","ror":"https://ror.org/00y0xnp53"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4399895929.pdf"},"referenced_works_count":42,"referenced_works":["https://openalex.org/W1523335907","https://openalex.org/W1975881973","https://openalex.org/W1981889528","https://openalex.org/W1990097076","https://openalex.org/W1996331830","https://openalex.org/W2035179658","https://openalex.org/W2041461880","https://openalex.org/W2087125032","https://openalex.org/W2110344849","https://openalex.org/W2112357965","https://openalex.org/W2120356803","https://openalex.org/W2123581176","https://openalex.org/W2132351550","https://openalex.org/W2141604440","https://openalex.org/W2142523325","https://openalex.org/W2161695306","https://openalex.org/W2168236174","https://openalex.org/W2480223251","https://openalex.org/W2542968777","https://openalex.org/W2604059219","https://openalex.org/W2608449940","https://openalex.org/W2756332284","https://openalex.org/W2889015027","https://openalex.org/W2904994691","https://openalex.org/W2939337778","https://openalex.org/W2951772568","https://openalex.org/W2975317920","https://openalex.org/W3043429387","https://openalex.org/W3068605328","https://openalex.org/W3095728620","https://openalex.org/W3159540682","https://openalex.org/W3182319652","https://openalex.org/W3208450847","https://openalex.org/W4212806305","https://openalex.org/W4225625980","https://openalex.org/W4281647217","https://openalex.org/W4293242641","https://openalex.org/W4312195810","https://openalex.org/W4376456822","https://openalex.org/W4384026510","https://openalex.org/W4384517610","https://openalex.org/W4392567271"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2922271745","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W756886103"],"abstract_inverted_index":{"A":[0],"novel":[1],"design":[2,140],"of":[3,42,61,88,97,128,141,145,151,166],"a":[4,15,59,119,125,133],"MEMS":[5],"(Micro-Electromechanical":[6],"System)":[7],"capacitive":[8],"accelerometer":[9,44,99,112],"fabricated":[10],"by":[11,109],"surface":[12],"micromachining,":[13],"with":[14,48,55,67,73,91],"structure":[16,41,144],"enabling":[17,94],"precise":[18],"auto-calibration":[19,25,96,161],"during":[20],"operation,":[21],"is":[22,106],"presented.":[23,163],"Precise":[24],"was":[26,65,102],"introduced":[27],"to":[28,35,124,171],"ensure":[29],"more":[30],"accurate":[31],"acceleration":[32,130],"measurements":[33],"compared":[34],"standard":[36,39],"designs.":[37],"The":[38,136,164],"mechanical":[40,143,172],"the":[43,95,98,111,115,139,142,146,148,152,156,167],"(seismic":[45],"mass":[46,90,117],"integrated":[47],"elastic":[49],"suspension":[50],"and":[51,138,155,173],"movable":[52,69],"plates":[53,57],"coupled":[54,72],"fixed":[56,75],"forming":[58],"system":[60],"differential":[62],"sensing":[63],"capacitors)":[64],"equipped":[66],"three":[68,74,79,85],"detection":[70],"electrodes":[71],"electrodes,":[76],"thus":[77],"creating":[78],"atypical":[80],"tunneling":[81],"displacement":[82],"transducers":[83],"detecting":[84],"specific":[86,120],"positions":[87],"seismic":[89,116],"high":[92],"precision,":[93],"while":[100,114],"it":[101],"being":[103],"operated.":[104],"Auto-calibration":[105],"carried":[107],"out":[108],"recording":[110],"indication":[113],"occupies":[118],"position,":[121],"which":[122],"corresponds":[123],"known":[126],"value":[127],"acting":[129],"determined":[131],"in":[132],"pre-calibration":[134],"process.":[135],"diagram":[137,150],"accelerometer,":[147],"block":[149],"electronic":[153],"circuits,":[154],"mathematical":[157],"relationships":[158],"used":[159],"for":[160],"are":[162,176],"results":[165],"simulation":[168],"studies":[169],"related":[170],"electric":[174],"phenomena":[175],"discussed.":[177]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}