{"id":"https://openalex.org/W4399292777","doi":"https://doi.org/10.3390/s24113597","title":"SiNx/SiO2-Based Fabry\u2013Perot Interferometer on Sapphire for Near-UV Optical Gas Sensing of Formaldehyde in Air","display_name":"SiNx/SiO2-Based Fabry\u2013Perot Interferometer on Sapphire for Near-UV Optical Gas Sensing of Formaldehyde in Air","publication_year":2024,"publication_date":"2024-06-03","ids":{"openalex":"https://openalex.org/W4399292777","doi":"https://doi.org/10.3390/s24113597","pmid":"https://pubmed.ncbi.nlm.nih.gov/38894388"},"language":"en","primary_location":{"id":"doi:10.3390/s24113597","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24113597","pdf_url":"https://www.mdpi.com/1424-8220/24/11/3597/pdf?version=1717395959","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/24/11/3597/pdf?version=1717395959","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5072116455","display_name":"R.F. Wolffenbuttel","orcid":"https://orcid.org/0000-0003-2074-4958"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":true,"raw_author_name":"Reinoud Wolffenbuttel","raw_affiliation_strings":["Laboratory for Electronic Instrumentation, Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, 2628 CD Delft, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0003-2074-4958","affiliations":[{"raw_affiliation_string":"Laboratory for Electronic Instrumentation, Department of Microelectronics, Faculty of Electrical Engineering, Mathematics and Computer Science, Delft University of Technology, 2628 CD Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014059292","display_name":"Declan Winship","orcid":"https://orcid.org/0000-0002-3994-1153"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Declan Winship","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0002-3994-1153","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039228422","display_name":"David Bilby","orcid":"https://orcid.org/0000-0003-3997-2168"},"institutions":[{"id":"https://openalex.org/I1292974536","display_name":"Ford Motor Company (United States)","ror":"https://ror.org/00g2tkw06","country_code":"US","type":"company","lineage":["https://openalex.org/I1292974536"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Bilby","raw_affiliation_strings":["Research and Advanced Engineering, Ford Motor Company, Dearborn, MI 48121, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research and Advanced Engineering, Ford Motor Company, Dearborn, MI 48121, USA","institution_ids":["https://openalex.org/I1292974536"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109423587","display_name":"Jaco Visser","orcid":null},"institutions":[{"id":"https://openalex.org/I1292974536","display_name":"Ford Motor Company (United States)","ror":"https://ror.org/00g2tkw06","country_code":"US","type":"company","lineage":["https://openalex.org/I1292974536"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jaco Visser","raw_affiliation_strings":["Research and Advanced Engineering, Ford Motor Company, Dearborn, MI 48121, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research and Advanced Engineering, Ford Motor Company, Dearborn, MI 48121, USA","institution_ids":["https://openalex.org/I1292974536"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084912799","display_name":"Yutao Qin","orcid":"https://orcid.org/0000-0003-4589-4485"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yutao Qin","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0003-4589-4485","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016991190","display_name":"Yogesh B. Gianchandani","orcid":"https://orcid.org/0000-0003-2281-3937"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yogesh Gianchandani","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0003-2281-3937","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5072116455"],"corresponding_institution_ids":["https://openalex.org/I98358874"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.4385,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.55491227,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"24","issue":"11","first_page":"3597","last_page":"3597"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11111","display_name":"Spectroscopy and Laser Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11111","display_name":"Spectroscopy and Laser Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9919000267982483,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7196784615516663},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5978793501853943},{"id":"https://openalex.org/keywords/absorbance","display_name":"Absorbance","score":0.5333039164543152},{"id":"https://openalex.org/keywords/transmittance","display_name":"Transmittance","score":0.5300552248954773},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.5001213550567627},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4937640130519867},{"id":"https://openalex.org/keywords/sapphire","display_name":"Sapphire","score":0.4654707610607147},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4542851448059082},{"id":"https://openalex.org/keywords/fabry\u2013p\u00e9rot-interferometer","display_name":"Fabry\u2013P\u00e9rot interferometer","score":0.4230043292045593},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.29471683502197266},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.2889232039451599},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.143520325422287}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7196784615516663},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5978793501853943},{"id":"https://openalex.org/C98015330","wikidata":"https://www.wikidata.org/wiki/Q907315","display_name":"Absorbance","level":2,"score":0.5333039164543152},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.5300552248954773},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5001213550567627},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4937640130519867},{"id":"https://openalex.org/C2780064504","wikidata":"https://www.wikidata.org/wiki/Q127583","display_name":"Sapphire","level":3,"score":0.4654707610607147},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4542851448059082},{"id":"https://openalex.org/C169268690","wikidata":"https://www.wikidata.org/wiki/Q1359945","display_name":"Fabry\u2013P\u00e9rot interferometer","level":3,"score":0.4230043292045593},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.29471683502197266},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.2889232039451599},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.143520325422287},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s24113597","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24113597","pdf_url":"https://www.mdpi.com/1424-8220/24/11/3597/pdf?version=1717395959","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:38894388","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38894388","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:11175207","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/11175207","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC11175207/pdf/sensors-24-03597.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:b74281b9fe714c7db0ee4e437e5aeec0","is_oa":false,"landing_page_url":"https://doaj.org/article/b74281b9fe714c7db0ee4e437e5aeec0","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 24, Iss 11, p 3597 (2024)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/24/11/3597/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s24113597","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:tudelft.nl:uuid:cd7e6d2d-e417-4354-8a89-0d5747a58b88","is_oa":true,"landing_page_url":"http://resolver.tudelft.nl/uuid:cd7e6d2d-e417-4354-8a89-0d5747a58b88","pdf_url":null,"source":{"id":"https://openalex.org/S4306400906","display_name":"Research Repository (Delft University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I98358874","host_organization_name":"Delft University of Technology","host_organization_lineage":["https://openalex.org/I98358874"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"journal article"}],"best_oa_location":{"id":"doi:10.3390/s24113597","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24113597","pdf_url":"https://www.mdpi.com/1424-8220/24/11/3597/pdf?version=1717395959","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W4399292777.pdf"},"referenced_works_count":40,"referenced_works":["https://openalex.org/W1978926533","https://openalex.org/W1992361753","https://openalex.org/W2002969532","https://openalex.org/W2009579744","https://openalex.org/W2017764611","https://openalex.org/W2020729558","https://openalex.org/W2022261870","https://openalex.org/W2035060318","https://openalex.org/W2041087308","https://openalex.org/W2043691499","https://openalex.org/W2046177851","https://openalex.org/W2049114911","https://openalex.org/W2074175464","https://openalex.org/W2075521762","https://openalex.org/W2082143275","https://openalex.org/W2089782593","https://openalex.org/W2091811066","https://openalex.org/W2093032611","https://openalex.org/W2096284799","https://openalex.org/W2119942537","https://openalex.org/W2127045114","https://openalex.org/W2129467885","https://openalex.org/W2133151341","https://openalex.org/W2134824951","https://openalex.org/W2150757688","https://openalex.org/W2156167948","https://openalex.org/W2161861891","https://openalex.org/W2164280110","https://openalex.org/W2169692112","https://openalex.org/W2234107512","https://openalex.org/W2259854149","https://openalex.org/W2519486009","https://openalex.org/W2897773333","https://openalex.org/W3095805952","https://openalex.org/W3133337445","https://openalex.org/W3192947803","https://openalex.org/W4223582955","https://openalex.org/W4315927689","https://openalex.org/W4362736911","https://openalex.org/W6940490409"],"related_works":["https://openalex.org/W2354462865","https://openalex.org/W2065523387","https://openalex.org/W1979386281","https://openalex.org/W3177028888","https://openalex.org/W2791834687","https://openalex.org/W2034954964","https://openalex.org/W2096653810","https://openalex.org/W2083838758","https://openalex.org/W4382139692","https://openalex.org/W4376108497"],"abstract_inverted_index":{"Fabry\u2013Perot":[0],"interferometers":[1],"(FPIs),":[2],"comprising":[3,22],"foundry-compatible":[4],"dielectric":[5],"thin":[6,122],"films":[7,123],"on":[8,48,184],"sapphire":[9,36],"wafer":[10],"substrates,":[11],"were":[12,54],"investigated":[13,55],"for":[14,56,75,82,128,152,198,212],"possible":[15],"use":[16],"in":[17,58,96,102,163,168,216],"chemical":[18],"sensing.":[19],"Specifically,":[20],"structures":[21],"two":[23,181],"vertically":[24],"stacked":[25],"distributed":[26],"Bragg":[27],"reflectors":[28],"(DBRs),":[29],"with":[30,207,218],"the":[31,45,59,76,83,103,112,195,208],"lower":[32,84,142],"DBR":[33,47],"between":[34,157,172],"a":[35,39,68,164,169,226,235],"substrate":[37],"and":[38,44,79,118,130,161,180,188,234],"silicon-oxide":[40],"(SiO2)":[41],"resonator":[42,52],"layer":[43],"other":[46],"top":[49],"of":[50,67,70,138,224,231,241],"this":[51,144],"layer,":[53],"operation":[57],"near-ultraviolet":[60],"(near-UV)":[61],"range.":[62],"The":[63,155],"DBRs":[64],"are":[65,124],"composed":[66],"stack":[69],"nitride-rich":[71,148],"silicon-nitride":[72],"(SiNx)":[73],"layers":[74,81],"higher":[77],"index":[78],"SiO2":[80],"index.":[85],"An":[86],"exemplary":[87],"application":[88],"would":[89],"be":[90,205],"formaldehyde":[91],"detection":[92],"at":[93,141,221],"sub-ppm":[94],"concentrations":[95],"air,":[97],"using":[98,176],"UV":[99],"absorption":[100,214],"spectroscopy":[101,215],"300\u2013360":[104],"nm":[105,223,233],"band,":[106],"while":[107],"providing":[108],"spectral":[109,158,228,238],"selectivity":[110],"against":[111],"main":[113],"interfering":[114],"gases,":[115],"notably":[116],"NO2":[117],"O3.":[119],"Although":[120],"SiNx":[121,149],"conventionally":[125],"used":[126],"only":[127],"visible":[129],"near-infrared":[131],"optical":[132],"wavelengths":[133],"(above":[134],"450":[135],"nm)":[136],"because":[137],"high":[139],"absorbance":[140],"wavelengths,":[143],"work":[145],"shows":[146],"that":[147,193],"is":[150,166],"suitable":[151],"near-UV":[153],"wavelengths.":[154],"interplay":[156],"absorbance,":[159],"transmittance":[160],"reflectance":[162],"FPI":[165,174,210],"presented":[167],"comparative":[170],"study":[171],"one":[173],"design":[175,196,211],"stoichiometric":[177],"material":[178],"(Si3N4)":[179],"designs":[182],"based":[183],"N-rich":[185],"compositions,":[186],"SiN1.39":[187],"SiN1.49.":[189],"Spectral":[190],"measurements":[191],"confirm":[192],"if":[194],"accounts":[197],"phase":[199],"penetration":[200],"depth,":[201],"sufficient":[202],"performance":[203],"can":[204],"achieved":[206],"SiN1.49-based":[209],"gas":[213],"near-UV,":[217],"peak":[219],"transmission":[220],"330":[222],"64%,":[225],"free":[227],"range":[229],"(FSR)":[230],"20":[232],"full-width":[236],"half-magnitude":[237],"resolution":[239],"(FWHM)":[240],"2":[242],"nm.":[243]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}