{"id":"https://openalex.org/W4392360157","doi":"https://doi.org/10.3390/s24051622","title":"Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy","display_name":"Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy","publication_year":2024,"publication_date":"2024-03-01","ids":{"openalex":"https://openalex.org/W4392360157","doi":"https://doi.org/10.3390/s24051622","pmid":"https://pubmed.ncbi.nlm.nih.gov/38475160"},"language":"en","primary_location":{"id":"doi:10.3390/s24051622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24051622","pdf_url":"https://www.mdpi.com/1424-8220/24/5/1622/pdf?version=1709301024","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/24/5/1622/pdf?version=1709301024","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101661865","display_name":"Fei Yu","orcid":"https://orcid.org/0009-0004-0795-2167"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fei Yu","raw_affiliation_strings":["Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000807861","display_name":"Min Xu","orcid":"https://orcid.org/0000-0002-0881-5891"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Min Xu","raw_affiliation_strings":["Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100649618","display_name":"Junhua Wang","orcid":"https://orcid.org/0000-0002-0885-8234"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junhua Wang","raw_affiliation_strings":["Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronic, Fudan University, Shanghai 200438, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]},{"raw_affiliation_string":"Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronic, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089552026","display_name":"Xiangchao Zhang","orcid":"https://orcid.org/0000-0003-3809-1262"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiangchao Zhang","raw_affiliation_strings":["Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China"],"raw_orcid":"https://orcid.org/0000-0003-3809-1262","affiliations":[{"raw_affiliation_string":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062607337","display_name":"Xinlan Tang","orcid":"https://orcid.org/0000-0003-1065-0624"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xinlan Tang","raw_affiliation_strings":["Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, China","institution_ids":["https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5000807861"],"corresponding_institution_ids":["https://openalex.org/I24943067"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.5289,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.81948965,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":100},"biblio":{"volume":"24","issue":"5","first_page":"1622","last_page":"1622"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6974986791610718},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6015128493309021},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4841347634792328},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4680927097797394},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.46607208251953125},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.44522541761398315},{"id":"https://openalex.org/keywords/reduction","display_name":"Reduction (mathematics)","score":0.4274137616157532},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4047551155090332},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38029247522354126},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20018640160560608},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1994946300983429},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.10551482439041138}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6974986791610718},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6015128493309021},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4841347634792328},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4680927097797394},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.46607208251953125},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.44522541761398315},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.4274137616157532},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4047551155090332},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38029247522354126},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20018640160560608},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1994946300983429},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.10551482439041138},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s24051622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24051622","pdf_url":"https://www.mdpi.com/1424-8220/24/5/1622/pdf?version=1709301024","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:38475160","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38475160","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10934137","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10934137","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10934137/pdf/sensors-24-01622.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:b8e58872df9940edb84346cc99ab0052","is_oa":false,"landing_page_url":"https://doaj.org/article/b8e58872df9940edb84346cc99ab0052","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 24, Iss 5, p 1622 (2024)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s24051622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24051622","pdf_url":"https://www.mdpi.com/1424-8220/24/5/1622/pdf?version=1709301024","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G6175447965","display_name":null,"funder_award_id":"51875107","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7261344546","display_name":null,"funder_award_id":"BE2021035","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W4392360157.pdf"},"referenced_works_count":34,"referenced_works":["https://openalex.org/W1602583071","https://openalex.org/W2004013937","https://openalex.org/W2019706720","https://openalex.org/W2031083890","https://openalex.org/W2036970705","https://openalex.org/W2044430360","https://openalex.org/W2052354744","https://openalex.org/W2068708529","https://openalex.org/W2077450827","https://openalex.org/W2117454459","https://openalex.org/W2118797653","https://openalex.org/W2121821431","https://openalex.org/W2315667554","https://openalex.org/W2474804768","https://openalex.org/W2503873164","https://openalex.org/W2555275614","https://openalex.org/W2739024792","https://openalex.org/W2745735382","https://openalex.org/W2765666711","https://openalex.org/W3033828852","https://openalex.org/W3081224493","https://openalex.org/W3086583482","https://openalex.org/W3102631324","https://openalex.org/W3119981039","https://openalex.org/W3134405878","https://openalex.org/W3164453000","https://openalex.org/W3211911952","https://openalex.org/W4220670418","https://openalex.org/W4226112582","https://openalex.org/W4226283974","https://openalex.org/W4237173899","https://openalex.org/W4291954783","https://openalex.org/W4293790283","https://openalex.org/W6636250074"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W2038820605","https://openalex.org/W1985417357","https://openalex.org/W2955207210","https://openalex.org/W2115053376","https://openalex.org/W2367528910","https://openalex.org/W1991489478","https://openalex.org/W2121416564"],"abstract_inverted_index":{"In":[0],"semiconductor":[1],"manufacturing,":[2],"defect":[3],"inspection":[4],"in":[5,18,85,93],"non-patterned":[6],"wafer":[7],"production":[8,20],"lines":[9],"is":[10,33,68],"essential":[11],"to":[12,38,75],"ensure":[13],"high-quality":[14],"integrated":[15],"circuits.":[16],"However,":[17],"actual":[19],"lines,":[21],"achieving":[22],"both":[23],"high":[24,27],"efficiency":[25,49],"and":[26,50,91],"sensitivity":[28],"at":[29],"the":[30,55,83,86,94,101,109],"same":[31],"time":[32,56],"a":[34,44,72],"significant":[35],"challenge":[36],"due":[37],"their":[39],"mutual":[40],"constraints.":[41],"To":[42],"achieve":[43],"reasonable":[45],"trade-off":[46],"between":[47],"detection":[48],"sensitivity,":[51],"this":[52],"paper":[53],"integrates":[54],"delay":[57],"integration":[58],"(TDI)":[59],"technology":[60],"into":[61],"dark-field":[62],"microscopy.":[63],"The":[64],"TDI":[65,89],"image":[66],"sensor":[67],"utilized":[69],"instead":[70],"of":[71,88,104],"photomultiplier":[73],"tube":[74],"realize":[76],"multi-point":[77],"simultaneous":[78],"scanning.":[79],"Experiments":[80],"illustrate":[81],"that":[82],"increase":[84],"number":[87],"stages":[90],"reduction":[92],"column":[95],"fixed":[96],"pattern":[97],"noise":[98],"effectively":[99],"improve":[100],"signal-to-noise":[102],"ratio":[103],"particle":[105],"defects":[106],"without":[107],"sacrificing":[108],"detecting":[110],"efficiency.":[111]},"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":3}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}