{"id":"https://openalex.org/W4391846514","doi":"https://doi.org/10.3390/s24041242","title":"Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry","display_name":"Regime Map of the Effective Medium Approximation Modelling of Micro-Rough Surfaces in Ellipsometry","publication_year":2024,"publication_date":"2024-02-15","ids":{"openalex":"https://openalex.org/W4391846514","doi":"https://doi.org/10.3390/s24041242","pmid":"https://pubmed.ncbi.nlm.nih.gov/38400398"},"language":"en","primary_location":{"id":"doi:10.3390/s24041242","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24041242","pdf_url":"https://www.mdpi.com/1424-8220/24/4/1242/pdf?version=1707992487","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/24/4/1242/pdf?version=1707992487","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101192432","display_name":"Meijiao Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210088164","display_name":"Changchun Institute of Optics, Fine Mechanics and Physics","ror":"https://ror.org/012rct222","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Meijiao Huang","raw_affiliation_strings":["Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"],"affiliations":[{"raw_affiliation_string":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China","institution_ids":["https://openalex.org/I4210088164","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100735438","display_name":"Liang Guo","orcid":"https://orcid.org/0000-0003-2111-0631"},"institutions":[{"id":"https://openalex.org/I4210088164","display_name":"Changchun Institute of Optics, Fine Mechanics and Physics","ror":"https://ror.org/012rct222","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liang Guo","raw_affiliation_strings":["Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"],"affiliations":[{"raw_affiliation_string":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China","institution_ids":["https://openalex.org/I4210088164","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5087416010","display_name":"Fengyi Jiang","orcid":"https://orcid.org/0000-0003-1854-1641"},"institutions":[{"id":"https://openalex.org/I4210088164","display_name":"Changchun Institute of Optics, Fine Mechanics and Physics","ror":"https://ror.org/012rct222","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210088164"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Fengyi Jiang","raw_affiliation_strings":["Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China"],"affiliations":[{"raw_affiliation_string":"Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China","institution_ids":["https://openalex.org/I4210088164","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5087416010"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210088164"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.3789,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.52910686,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"24","issue":"4","first_page":"1242","last_page":"1242"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/molar-absorptivity","display_name":"Molar absorptivity","score":0.7250475287437439},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.6949150562286377},{"id":"https://openalex.org/keywords/refractive-index","display_name":"Refractive index","score":0.6707535982131958},{"id":"https://openalex.org/keywords/root-mean-square","display_name":"Root mean square","score":0.6302732229232788},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.6236504316329956},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.6146374940872192},{"id":"https://openalex.org/keywords/ellipsometry","display_name":"Ellipsometry","score":0.6038843393325806},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5882625579833984},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.5481545925140381},{"id":"https://openalex.org/keywords/approximation-error","display_name":"Approximation error","score":0.5037190318107605},{"id":"https://openalex.org/keywords/extinction","display_name":"Extinction (optical mineralogy)","score":0.49100640416145325},{"id":"https://openalex.org/keywords/computational-physics","display_name":"Computational physics","score":0.4578581750392914},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4417334496974945},{"id":"https://openalex.org/keywords/mean-squared-error","display_name":"Mean squared error","score":0.4321633279323578},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3055611252784729},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3050813376903534},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.2604111433029175},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.18638545274734497},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.1659184694290161},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.15959396958351135},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.0810193419456482}],"concepts":[{"id":"https://openalex.org/C76046532","wikidata":"https://www.wikidata.org/wiki/Q900239","display_name":"Molar absorptivity","level":2,"score":0.7250475287437439},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.6949150562286377},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.6707535982131958},{"id":"https://openalex.org/C71907059","wikidata":"https://www.wikidata.org/wiki/Q223323","display_name":"Root mean square","level":2,"score":0.6302732229232788},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.6236504316329956},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.6146374940872192},{"id":"https://openalex.org/C18293161","wikidata":"https://www.wikidata.org/wiki/Q898774","display_name":"Ellipsometry","level":3,"score":0.6038843393325806},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5882625579833984},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.5481545925140381},{"id":"https://openalex.org/C122383733","wikidata":"https://www.wikidata.org/wiki/Q865920","display_name":"Approximation error","level":2,"score":0.5037190318107605},{"id":"https://openalex.org/C101991246","wikidata":"https://www.wikidata.org/wiki/Q5422078","display_name":"Extinction (optical mineralogy)","level":2,"score":0.49100640416145325},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.4578581750392914},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4417334496974945},{"id":"https://openalex.org/C139945424","wikidata":"https://www.wikidata.org/wiki/Q1940696","display_name":"Mean squared error","level":2,"score":0.4321633279323578},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3055611252784729},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3050813376903534},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.2604111433029175},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.18638545274734497},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.1659184694290161},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.15959396958351135},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.0810193419456482},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s24041242","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24041242","pdf_url":"https://www.mdpi.com/1424-8220/24/4/1242/pdf?version=1707992487","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:38400398","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38400398","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10893149","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10893149","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10893149/pdf/sensors-24-01242.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:4d0e0cf796344e418a4a45dea61e6862","is_oa":true,"landing_page_url":"https://doaj.org/article/4d0e0cf796344e418a4a45dea61e6862","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 24, Iss 4, p 1242 (2024)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s24041242","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24041242","pdf_url":"https://www.mdpi.com/1424-8220/24/4/1242/pdf?version=1707992487","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5921694148","display_name":null,"funder_award_id":"62205334","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321940","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4391846514.pdf"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W599844041","https://openalex.org/W1966034711","https://openalex.org/W1970998021","https://openalex.org/W1971173811","https://openalex.org/W1980949842","https://openalex.org/W1985073523","https://openalex.org/W2002190158","https://openalex.org/W2041091255","https://openalex.org/W2048021500","https://openalex.org/W2052812504","https://openalex.org/W2084540419","https://openalex.org/W2093751929","https://openalex.org/W2107587098","https://openalex.org/W2109971711","https://openalex.org/W2122238162","https://openalex.org/W2269408884","https://openalex.org/W2470804845","https://openalex.org/W2493470163","https://openalex.org/W2525516591","https://openalex.org/W2607979797","https://openalex.org/W2759085639","https://openalex.org/W2808124847","https://openalex.org/W2845029250","https://openalex.org/W2913798150","https://openalex.org/W2943639846","https://openalex.org/W3115421383","https://openalex.org/W3216093904","https://openalex.org/W4283034543","https://openalex.org/W4293715066","https://openalex.org/W4301032712","https://openalex.org/W4307187154","https://openalex.org/W4311463350"],"related_works":["https://openalex.org/W1969480571","https://openalex.org/W366812453","https://openalex.org/W2108016968","https://openalex.org/W2523030755","https://openalex.org/W2395897208","https://openalex.org/W3006697620","https://openalex.org/W2996080850","https://openalex.org/W2606749786","https://openalex.org/W2539351224","https://openalex.org/W2160743927"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"discuss":[4],"the":[5,8,15,30,44,57,66,74,82,96,105,109,131,147,152,158,170,175,180,191,195,209,216,227],"precision":[6,129,163,171,176,181],"of":[7,18,43,56,95,104,130,139,164,172,177,182,194,198,207],"effective":[9],"medium":[10],"approximation":[11],"(EMA)":[12],"model":[13,46,98,110,118,226],"in":[14,126],"data":[16],"analysis":[17],"spectroscopic":[19],"ellipsometry":[20],"(SE)":[21],"for":[22],"solid":[23],"materials":[24],"with":[25,60,81,108,121],"micro-rough":[26,119],"surfaces":[27,59,120,229],"by":[28,49,65,73,101],"drawing":[29,208],"regime":[31,78,192,210],"map.":[32],"The":[33,53,77,137,162],"SE":[34,83,199],"parameters":[35,84,200],"\u03c8":[36,165],"(amplitude":[37],"ratio)":[38],"and":[39,85,91,134,143,174,201],"\u0394":[40,178],"(phase":[41],"difference)":[42],"EMA":[45,97,116,222],"were":[47,99],"solved":[48],"rigorous":[50],"coupled-wave":[51],"analysis.":[52],"electromagnetic":[54],"response":[55],"actual":[58,106],"micro":[61],"roughness":[62,149],"was":[63,71],"simulated":[64],"finite-difference":[67],"time-domain":[68],"method,":[69],"which":[70],"validated":[72],"experimental":[75],"results.":[76],"maps":[79,193],"associated":[80],"optical":[86,202],"constants":[87],"n":[88,142],"(refractive":[89],"index)":[90],"k":[92,144,173],"(extinction":[93],"coefficient)":[94],"drawn":[100],"a":[102,127],"comparison":[103],"values":[107],"values.":[111],"We":[112],"find":[113],"that":[114,213],"using":[115],"to":[117,220,225],"high":[122],"absorption":[123],"can":[124],"result":[125],"higher":[128],"amplitude":[132],"ratio":[133],"extinction":[135],"coefficient.":[136],"precisions":[138],"\u03c8,":[140],"\u0394,":[141],"increase":[145],"as":[146,219],"relative":[148,196],"\u03c3/\u03bb":[150],"(\u03c3:":[151],"root":[153],"mean":[154],"square":[155],"roughness,":[156],"\u03bb:":[157],"incident":[159],"wavelength)":[160],"decreases.":[161],"has":[166,187],"an":[167],"influence":[168],"on":[169,190],"affects":[179],"n.":[183],"Changing":[184],"\u03c3":[185],"alone":[186],"little":[188],"effect":[189],"errors":[197],"constants.":[203],"A":[204],"superior":[205],"advantage":[206],"map":[211],"is":[212,223],"it":[214],"enables":[215],"clear":[217],"determination":[218],"whether":[221],"able":[224],"rough":[228],"or":[230],"not.":[231]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2026-03-08T08:50:53.379069","created_date":"2025-10-10T00:00:00"}