{"id":"https://openalex.org/W4390748059","doi":"https://doi.org/10.3390/s24020439","title":"A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator","display_name":"A Flexible Printed Circuit Board Based Microelectromechanical Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator","publication_year":2024,"publication_date":"2024-01-11","ids":{"openalex":"https://openalex.org/W4390748059","doi":"https://doi.org/10.3390/s24020439","pmid":"https://pubmed.ncbi.nlm.nih.gov/38257532"},"language":"en","primary_location":{"id":"doi:10.3390/s24020439","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24020439","pdf_url":"https://www.mdpi.com/1424-8220/24/2/439/pdf?version=1705025859","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/24/2/439/pdf?version=1705025859","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103013416","display_name":"Tao Chen","orcid":"https://orcid.org/0009-0000-0690-4252"},"institutions":[{"id":"https://openalex.org/I46247651","display_name":"University of Manitoba","ror":"https://ror.org/02gfys938","country_code":"CA","type":"education","lineage":["https://openalex.org/I46247651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Tao Chen","raw_affiliation_strings":["Department of Electrical & Computer Engineering, University of Manitoba, Winnipeg, MB R3T 5V6, Canada"],"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, University of Manitoba, Winnipeg, MB R3T 5V6, Canada","institution_ids":["https://openalex.org/I46247651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083452324","display_name":"Cyrus Shafai","orcid":"https://orcid.org/0000-0003-4499-9250"},"institutions":[{"id":"https://openalex.org/I46247651","display_name":"University of Manitoba","ror":"https://ror.org/02gfys938","country_code":"CA","type":"education","lineage":["https://openalex.org/I46247651"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"Cyrus Shafai","raw_affiliation_strings":["Department of Electrical & Computer Engineering, University of Manitoba, Winnipeg, MB R3T 5V6, Canada"],"affiliations":[{"raw_affiliation_string":"Department of Electrical & Computer Engineering, University of Manitoba, Winnipeg, MB R3T 5V6, Canada","institution_ids":["https://openalex.org/I46247651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5083452324"],"corresponding_institution_ids":["https://openalex.org/I46247651"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00331839,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"24","issue":"2","first_page":"439","last_page":"439"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12510","display_name":"Magneto-Optical Properties and Applications","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/shutter","display_name":"Shutter","score":0.9497448205947876},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6392094492912292},{"id":"https://openalex.org/keywords/electric-field","display_name":"Electric field","score":0.6254977583885193},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.599118709564209},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4899696409702301},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.47320979833602905},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.4596827030181885},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4513584077358246},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42045459151268005},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.369585245847702},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.36732304096221924},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.33295485377311707},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2341209352016449},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22344636917114258},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.18490731716156006}],"concepts":[{"id":"https://openalex.org/C2776871301","wikidata":"https://www.wikidata.org/wiki/Q691823","display_name":"Shutter","level":2,"score":0.9497448205947876},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6392094492912292},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.6254977583885193},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.599118709564209},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4899696409702301},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.47320979833602905},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.4596827030181885},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4513584077358246},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42045459151268005},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.369585245847702},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36732304096221924},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33295485377311707},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2341209352016449},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22344636917114258},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.18490731716156006},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s24020439","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24020439","pdf_url":"https://www.mdpi.com/1424-8220/24/2/439/pdf?version=1705025859","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:38257532","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/38257532","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10818687","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10818687","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10818687/pdf/sensors-24-00439.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:c76f9ff02cd44e32a6326c462a59082a","is_oa":true,"landing_page_url":"https://doaj.org/article/c76f9ff02cd44e32a6326c462a59082a","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 24, Iss 2, p 439 (2024)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/24/2/439/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s24020439","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s24020439","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s24020439","pdf_url":"https://www.mdpi.com/1424-8220/24/2/439/pdf?version=1705025859","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1597412403","display_name":null,"funder_award_id":"RGPIN-","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"},{"id":"https://openalex.org/G1679865357","display_name":null,"funder_award_id":"Mitacs","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"},{"id":"https://openalex.org/G19868237","display_name":null,"funder_award_id":"IT17156","funder_id":"https://openalex.org/F4320322675","funder_display_name":"Mitacs"},{"id":"https://openalex.org/G2165548363","display_name":null,"funder_award_id":"Canada","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"},{"id":"https://openalex.org/G6221715925","display_name":null,"funder_award_id":"RGPIN","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"},{"id":"https://openalex.org/G8284766523","display_name":null,"funder_award_id":"(NSERC)","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"}],"funders":[{"id":"https://openalex.org/F4320315155","display_name":"Manitoba Hydro","ror":"https://ror.org/03y90jx90"},{"id":"https://openalex.org/F4320322675","display_name":"Mitacs","ror":"https://ror.org/00cjrc276"},{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4390748059.pdf"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W1972654804","https://openalex.org/W1972997521","https://openalex.org/W2043981527","https://openalex.org/W2076178496","https://openalex.org/W2089870281","https://openalex.org/W2097230138","https://openalex.org/W2120686642","https://openalex.org/W2125306606","https://openalex.org/W2135321193","https://openalex.org/W2150696738","https://openalex.org/W2762232082","https://openalex.org/W2788135710","https://openalex.org/W2902491096","https://openalex.org/W2909121667","https://openalex.org/W2982269960","https://openalex.org/W2985576123","https://openalex.org/W2996062347","https://openalex.org/W3037634404","https://openalex.org/W3097078881","https://openalex.org/W3113844367","https://openalex.org/W3127162575","https://openalex.org/W4200183720","https://openalex.org/W4200367150","https://openalex.org/W4300839023","https://openalex.org/W4309675394","https://openalex.org/W6678286837"],"related_works":["https://openalex.org/W2118257562","https://openalex.org/W747865691","https://openalex.org/W2029654887","https://openalex.org/W2174395551","https://openalex.org/W2317693328","https://openalex.org/W2165421579","https://openalex.org/W2108813946","https://openalex.org/W2584182360","https://openalex.org/W1997309374","https://openalex.org/W2089389693"],"abstract_inverted_index":{"Micromachined":[0],"electric":[1,40,167],"field":[2,41],"mills":[3],"have":[4,22],"received":[5],"much":[6],"interest":[7],"for":[8,164],"the":[9,26,74,83,90,94,99,106,115,119,122,129,140,144,170],"measurement":[10],"of":[11,28,73,108,121,137,143,162,172],"DC":[12,166],"fields;":[13],"however,":[14],"conventional":[15],"designs":[16],"with":[17,114],"lateral":[18],"moving":[19],"shutters":[20],"could":[21],"shutter":[23,47,75,91,131],"lifting":[24],"in":[25,93,169],"presence":[27],"strong":[29],"fields,":[30],"which":[31],"affects":[32],"their":[33],"performance.":[34],"This":[35,104],"paper":[36],"presents":[37],"a":[38,44,60,68,87,109,135,159],"MEMS":[39],"mill":[42],"utilizing":[43],"vertical":[45,130],"movement":[46,72],"to":[48,112,151,175],"address":[49],"this":[50],"issue.":[51],"The":[52,71,155],"sensor":[53,145,156],"is":[54,65,76,86,132,146,149],"designed":[55],"and":[56,64,101,148],"fabricated":[57],"based":[58],"on":[59],"flexible":[61],"PCB":[62],"substrate":[63],"released":[66],"using":[67],"laser-cutting":[69],"process.":[70],"driven":[77,133],"by":[78],"an":[79],"electrostatic":[80],"actuator.":[81],"When":[82],"driving":[84,123],"signal":[85,116],"sine":[88],"wave,":[89],"moves":[92],"same":[95],"direction":[96],"during":[97],"both":[98],"positive":[100],"negative":[102],"half-periods.":[103],"facilitates":[105],"application":[107],"lock-in":[110],"amplifier":[111],"synchronize":[113],"at":[117,134],"twice":[118],"frequency":[120],"signal.":[124],"In":[125],"experimental":[126],"testing,":[127],"when":[128],"resonance":[136],"840":[138],"Hz,":[139],"highest":[141],"sensitivity":[142],"achieved":[147],"measured":[150],"be":[152],"5.1":[153],"V/kVm<sup>-1</sup>.":[154],"also":[157],"demonstrates":[158],"good":[160],"linearity":[161],"1.1%":[163],"measuring":[165],"fields":[168],"range":[171],"1.25":[173],"kV/m":[174],"25":[176],"kV/m.":[177]},"counts_by_year":[],"updated_date":"2026-04-10T15:06:20.359241","created_date":"2025-10-10T00:00:00"}