{"id":"https://openalex.org/W4387957919","doi":"https://doi.org/10.3390/s23218733","title":"A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test","display_name":"A Reliability Analysis of a MEMS Flow Sensor with an Accelerated Degradation Test","publication_year":2023,"publication_date":"2023-10-26","ids":{"openalex":"https://openalex.org/W4387957919","doi":"https://doi.org/10.3390/s23218733","pmid":"https://pubmed.ncbi.nlm.nih.gov/37960433"},"language":"en","primary_location":{"id":"doi:10.3390/s23218733","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23218733","pdf_url":"https://www.mdpi.com/1424-8220/23/21/8733/pdf?version=1698308459","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/21/8733/pdf?version=1698308459","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011354541","display_name":"Qiaoqiao Kang","orcid":"https://orcid.org/0000-0002-1582-8666"},"institutions":[{"id":"https://openalex.org/I154099455","display_name":"Shandong University","ror":"https://ror.org/0207yh398","country_code":"CN","type":"education","lineage":["https://openalex.org/I154099455"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiaoqiao Kang","raw_affiliation_strings":["Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China"],"raw_orcid":"https://orcid.org/0000-0002-1582-8666","affiliations":[{"raw_affiliation_string":"Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China","institution_ids":["https://openalex.org/I154099455"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113482502","display_name":"Yuzhe Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I154099455","display_name":"Shandong University","ror":"https://ror.org/0207yh398","country_code":"CN","type":"education","lineage":["https://openalex.org/I154099455"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuzhe Lin","raw_affiliation_strings":["School of Information Science and Engineering, Shandong University, Qingdao 266237, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Information Science and Engineering, Shandong University, Qingdao 266237, China","institution_ids":["https://openalex.org/I154099455"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5063350660","display_name":"Jifang Tao","orcid":"https://orcid.org/0000-0003-3706-5599"},"institutions":[{"id":"https://openalex.org/I154099455","display_name":"Shandong University","ror":"https://ror.org/0207yh398","country_code":"CN","type":"education","lineage":["https://openalex.org/I154099455"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jifang Tao","raw_affiliation_strings":["Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China","Qingdao Xinnovis Microsystem Co., Ltd., Qingdao 266101, China","School of Information Science and Engineering, Shandong University, Qingdao 266237, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Laser and Infrared System of Ministry of Education, Shandong University, Qingdao 266237, China","institution_ids":["https://openalex.org/I154099455"]},{"raw_affiliation_string":"Qingdao Xinnovis Microsystem Co., Ltd., Qingdao 266101, China","institution_ids":[]},{"raw_affiliation_string":"School of Information Science and Engineering, Shandong University, Qingdao 266237, China","institution_ids":["https://openalex.org/I154099455"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5063350660"],"corresponding_institution_ids":["https://openalex.org/I154099455"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.2636,"has_fulltext":true,"cited_by_count":13,"citation_normalized_percentile":{"value":0.77759587,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":98,"max":99},"biblio":{"volume":"23","issue":"21","first_page":"8733","last_page":"8733"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12169","display_name":"Non-Destructive Testing Techniques","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11778","display_name":"Electrical and Bioimpedance Tomography","score":0.9922999739646912,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/weibull-distribution","display_name":"Weibull distribution","score":0.8246030807495117},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.7841342687606812},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6345479488372803},{"id":"https://openalex.org/keywords/degradation","display_name":"Degradation (telecommunications)","score":0.535847544670105},{"id":"https://openalex.org/keywords/flow-sensor","display_name":"Flow sensor","score":0.49198266863822937},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.4766572117805481},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4731634259223938},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.4050149917602539},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3802938461303711},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.37386199831962585},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.36620032787323},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3133992552757263},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17884814739227295},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.16557186841964722},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.09447410702705383},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.08763554692268372},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08426609635353088}],"concepts":[{"id":"https://openalex.org/C173291955","wikidata":"https://www.wikidata.org/wiki/Q732332","display_name":"Weibull distribution","level":2,"score":0.8246030807495117},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.7841342687606812},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6345479488372803},{"id":"https://openalex.org/C2779679103","wikidata":"https://www.wikidata.org/wiki/Q5251805","display_name":"Degradation (telecommunications)","level":2,"score":0.535847544670105},{"id":"https://openalex.org/C2777153531","wikidata":"https://www.wikidata.org/wiki/Q15091623","display_name":"Flow sensor","level":2,"score":0.49198266863822937},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.4766572117805481},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4731634259223938},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.4050149917602539},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3802938461303711},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37386199831962585},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.36620032787323},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3133992552757263},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17884814739227295},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.16557186841964722},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.09447410702705383},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.08763554692268372},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08426609635353088},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s23218733","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23218733","pdf_url":"https://www.mdpi.com/1424-8220/23/21/8733/pdf?version=1698308459","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:37960433","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/37960433","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10650100","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10650100","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10650100/pdf/sensors-23-08733.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:2799303df08a4d0cb48e446d98147d00","is_oa":true,"landing_page_url":"https://doaj.org/article/2799303df08a4d0cb48e446d98147d00","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 21, p 8733 (2023)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s23218733","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23218733","pdf_url":"https://www.mdpi.com/1424-8220/23/21/8733/pdf?version=1698308459","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G7956575426","display_name":null,"funder_award_id":"2021B1515120012","funder_id":"https://openalex.org/F4320337111","funder_display_name":"Basic and Applied Basic Research Foundation of Guangdong Province"}],"funders":[{"id":"https://openalex.org/F4320337111","display_name":"Basic and Applied Basic Research Foundation of Guangdong Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4387957919.pdf"},"referenced_works_count":41,"referenced_works":["https://openalex.org/W983284481","https://openalex.org/W1967940210","https://openalex.org/W1970249062","https://openalex.org/W1987275541","https://openalex.org/W2000365400","https://openalex.org/W2011679445","https://openalex.org/W2017751259","https://openalex.org/W2059077974","https://openalex.org/W2090749763","https://openalex.org/W2103562298","https://openalex.org/W2127379387","https://openalex.org/W2169713656","https://openalex.org/W2169820559","https://openalex.org/W2221837934","https://openalex.org/W2343755845","https://openalex.org/W2736979856","https://openalex.org/W2760903766","https://openalex.org/W2897686245","https://openalex.org/W2906993651","https://openalex.org/W2950629902","https://openalex.org/W2950837406","https://openalex.org/W2998750270","https://openalex.org/W3034671506","https://openalex.org/W3084979441","https://openalex.org/W3094881816","https://openalex.org/W3097442054","https://openalex.org/W3193434928","https://openalex.org/W3207717005","https://openalex.org/W4212767417","https://openalex.org/W4237435442","https://openalex.org/W4294113398","https://openalex.org/W4320483688","https://openalex.org/W4366779165","https://openalex.org/W4379055303","https://openalex.org/W4382371039","https://openalex.org/W4385400446","https://openalex.org/W6704343862","https://openalex.org/W6744967276","https://openalex.org/W6800665224","https://openalex.org/W6850012488","https://openalex.org/W6855073304"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W3083898685","https://openalex.org/W1973754976","https://openalex.org/W189075692","https://openalex.org/W4220847856","https://openalex.org/W4220801072","https://openalex.org/W2374817159","https://openalex.org/W4220691425","https://openalex.org/W2328223263","https://openalex.org/W4226215114"],"abstract_inverted_index":{"With":[0,183],"the":[1,54,66,76,94,97,100,105,114,124,127,130,146,158,162,166,171,184,191,201,210],"wide":[2],"application":[3,185,211],"of":[4,21,42,99,107,113,119,165,186,212],"flow":[5,28,39,67,214],"sensors,":[6],"their":[7],"reliability":[8,20,163,202],"under":[9,30,84,179],"extreme":[10],"conditions":[11],"has":[12],"become":[13],"a":[14,22,45,49,140,206],"concern":[15],"in":[16,35],"recent":[17],"years.":[18],"The":[19,62,72,110,137],"Micro":[23],"Electro":[24],"Mechanical":[25],"Systems":[26],"(MEMS)":[27],"sensor":[29,40,46,63,68,82],"temperature":[31],"(Ts)":[32],"is":[33,60,79,91,102,135,143,154,168,177],"researched":[34],"this":[36,108,120,213],"paper.":[37],"This":[38,198],"consists":[41],"two":[43],"parts,":[44],"chip":[47,64],"and":[48,65,133,170,196],"signal-processing":[50],"system":[51,69],"(SPS).":[52],"Firstly,":[53],"step-stress":[55],"accelerated":[56,187],"degradation":[57,188],"test":[58],"(SSADT)":[59],"implemented.":[61],"are":[70,194],"tested.":[71],"results":[73,193],"show":[74],"that":[75],"biggest":[77],"drift":[78,112],"3.15%":[80],"for":[81,93,117,209],"chips":[83],"150":[85],"\u00b0C":[86,181],"testing":[87,189],"conditions,":[88],"while":[89],"32.91%":[90],"recorded":[92],"flowmeters.":[95],"So,":[96],"attenuation":[98],"SPS":[101,115],"significant":[103],"to":[104,156],"degeneration":[106],"flowmeter.":[109,121],"minimum":[111],"accounts":[116],"82.01%":[118],"Secondly,":[122],"using":[123,145],"Coffin-Manson":[125],"model,":[126],"relationship":[128],"between":[129],"cycle":[131],"index":[132],"Ts":[134,142],"established.":[136],"lifetime":[138,159],"with":[139],"different":[141],"estimated":[144],"Arrhenius":[147],"model.":[148],"In":[149],"addition,":[150],"Weibull":[151],"distribution":[152],"(WD)":[153],"applied":[155],"evaluate":[157],"distribution.":[160],"Finally,":[161],"function":[164],"WD":[167],"demonstrated,":[169],"survival":[172],"rate":[173],"within":[174],"one":[175],"year":[176],"87.69%":[178],"85":[180],"conditions.":[182],"(ADT),":[190],"acquired":[192],"innovative":[195],"original.":[197],"research":[199],"illustrates":[200],"research,":[203],"which":[204],"provides":[205],"relational":[207],"database":[208],"sensor.":[215]},"counts_by_year":[{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":7}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}