{"id":"https://openalex.org/W4383227507","doi":"https://doi.org/10.3390/s23136130","title":"Multielectrode Arrays at Wafer-Level for Miniaturized Sensors Applications: Electrochemical Growth of Ag/AgCl Reference Electrodes","display_name":"Multielectrode Arrays at Wafer-Level for Miniaturized Sensors Applications: Electrochemical Growth of Ag/AgCl Reference Electrodes","publication_year":2023,"publication_date":"2023-07-04","ids":{"openalex":"https://openalex.org/W4383227507","doi":"https://doi.org/10.3390/s23136130","pmid":"https://pubmed.ncbi.nlm.nih.gov/37447979"},"language":"en","primary_location":{"id":"doi:10.3390/s23136130","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136130","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6130/pdf?version=1688449840","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/13/6130/pdf?version=1688449840","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019966348","display_name":"Haosheng Wu","orcid":"https://orcid.org/0000-0001-6979-2243"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Haosheng Wu","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":"https://orcid.org/0000-0001-6979-2243","affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017783843","display_name":"R. Krause","orcid":"https://orcid.org/0009-0004-9173-4655"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Robert Krause","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":"https://orcid.org/0009-0004-9173-4655","affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092405477","display_name":"Eshanee Gogoi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Eshanee Gogoi","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032025368","display_name":"Andr\u00e9 Reck","orcid":"https://orcid.org/0000-0002-3712-8652"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Andr\u00e9 Reck","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":"https://orcid.org/0000-0002-3712-8652","affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101863655","display_name":"Alexander Graf","orcid":"https://orcid.org/0000-0001-5754-8876"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Alexander Graf","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Str. 2, 01109 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Str. 2, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074545442","display_name":"Marcus Wislicenus","orcid":"https://orcid.org/0009-0005-2678-8144"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcus Wislicenus","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041591944","display_name":"Olaf R. Hild","orcid":null},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Olaf R. Hild","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Str. 2, 01109 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Str. 2, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061416869","display_name":"Conrad Guhl","orcid":"https://orcid.org/0000-0002-8955-2922"},"institutions":[{"id":"https://openalex.org/I4210110247","display_name":"Fraunhofer Institute for Photonic Microsystems","ror":"https://ror.org/020n3fw10","country_code":"DE","type":"facility","lineage":["https://openalex.org/I4210110247","https://openalex.org/I4923324"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Conrad Guhl","raw_affiliation_strings":["Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake 5, 01109 Dresden, Germany","institution_ids":["https://openalex.org/I4210110247"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5019966348"],"corresponding_institution_ids":["https://openalex.org/I4210110247"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2215,"currency":"EUR","value_usd":2388},"fwci":1.3115,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.79555928,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":"23","issue":"13","first_page":"6130","last_page":"6130"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11434","display_name":"Electrochemical Analysis and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/1603","display_name":"Electrochemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7994707822799683},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7552361488342285},{"id":"https://openalex.org/keywords/reference-electrode","display_name":"Reference electrode","score":0.7430170774459839},{"id":"https://openalex.org/keywords/electrochemistry","display_name":"Electrochemistry","score":0.7036934494972229},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6062690019607544},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.5207293033599854},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.478839635848999},{"id":"https://openalex.org/keywords/passivation","display_name":"Passivation","score":0.43152499198913574},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.41340941190719604},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3812450170516968},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3625922203063965},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.3018686771392822},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.07382252812385559}],"concepts":[{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7994707822799683},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7552361488342285},{"id":"https://openalex.org/C40290423","wikidata":"https://www.wikidata.org/wiki/Q653954","display_name":"Reference electrode","level":4,"score":0.7430170774459839},{"id":"https://openalex.org/C52859227","wikidata":"https://www.wikidata.org/wiki/Q7877","display_name":"Electrochemistry","level":3,"score":0.7036934494972229},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6062690019607544},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5207293033599854},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.478839635848999},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.43152499198913574},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.41340941190719604},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3812450170516968},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3625922203063965},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3018686771392822},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.07382252812385559},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008839","descriptor_name":"Microelectrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012834","descriptor_name":"Silver","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D012834","descriptor_name":"Silver","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D012834","descriptor_name":"Silver","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D018030","descriptor_name":"Silver Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D018030","descriptor_name":"Silver Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true},{"descriptor_ui":"D018030","descriptor_name":"Silver Compounds","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":true}],"locations_count":6,"locations":[{"id":"doi:10.3390/s23136130","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136130","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6130/pdf?version=1688449840","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:37447979","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/37447979","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10347207","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10347207","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10347207/pdf/sensors-23-06130.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:17688d59522842668f52bdb568643066","is_oa":true,"landing_page_url":"https://doaj.org/article/17688d59522842668f52bdb568643066","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 13, p 6130 (2023)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/23/13/6130/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s23136130","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 23; Issue 13; Pages: 6130","raw_type":"Text"},{"id":"pmh:oai:publica.fraunhofer.de:publica/452272","is_oa":false,"landing_page_url":"https://publica.fraunhofer.de/handle/publica/452272","pdf_url":null,"source":{"id":"https://openalex.org/S4306400318","display_name":"Fraunhofer-Publica (Fraunhofer-Gesellschaft)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4923324","host_organization_name":"Fraunhofer-Gesellschaft","host_organization_lineage":["https://openalex.org/I4923324"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"journal article"}],"best_oa_location":{"id":"doi:10.3390/s23136130","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136130","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6130/pdf?version=1688449840","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320323752","display_name":"S\u00e4chsische Aufbaubank","ror":"https://ror.org/04ekv3k57"},{"id":"https://openalex.org/F4320335322","display_name":"European Regional Development Fund","ror":"https://ror.org/00k4n6c32"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W4383227507.pdf"},"referenced_works_count":19,"referenced_works":["https://openalex.org/W1844131094","https://openalex.org/W1955964714","https://openalex.org/W1966567175","https://openalex.org/W1990587603","https://openalex.org/W1991546961","https://openalex.org/W2066148694","https://openalex.org/W2080118301","https://openalex.org/W2084557815","https://openalex.org/W2147756098","https://openalex.org/W2148069841","https://openalex.org/W2225999398","https://openalex.org/W2327153325","https://openalex.org/W2763702043","https://openalex.org/W2766126992","https://openalex.org/W2898569697","https://openalex.org/W3010378195","https://openalex.org/W3049165759","https://openalex.org/W3136535649","https://openalex.org/W4308592424"],"related_works":["https://openalex.org/W2001792619","https://openalex.org/W1506673119","https://openalex.org/W3108739229","https://openalex.org/W2338840401","https://openalex.org/W2799407972","https://openalex.org/W2001250931","https://openalex.org/W2025348959","https://openalex.org/W16041389","https://openalex.org/W1982452484","https://openalex.org/W2972327772"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"a":[3,138,149],"range":[4],"of":[5,30,36,49,89,96,132],"miniaturized":[6],"Ag/AgCl":[7,92,134],"reference":[8,112,135],"electrodes":[9,98,113],"with":[10,20,54,79],"various":[11],"layouts":[12],"were":[13,52],"successfully":[14],"fabricated":[15],"on":[16,142],"wafer-level":[17],"silicon-based":[18],"substrates":[19],"metallic":[21],"intermediate":[22],"layers":[23],"by":[24,33],"precisely":[25],"controlling":[26],"the":[27,37,46,50,62,68,87,97,111,130,133],"electrochemical":[28,34,90],"deposition":[29],"Ag,":[31],"followed":[32],"chlorination":[35,63,146],"deposited":[38],"Ag":[39,83],"layer.":[40,152],"The":[41,58,94,107,124],"structure,":[42],"as":[43,45],"well":[44],"chemical":[47],"composition":[48],"electrode,":[51],"characterized":[53],"SEM":[55],"&":[56],"EDS.":[57],"results":[59,108],"showed":[60,109,128],"that":[61,110,129],"is":[64],"very":[65],"sensitive":[66],"to":[67],"applied":[69],"electric":[70],"field":[71],"and":[72,148],"background":[73],"solution.":[74,123],"Potentiostatic":[75],"chlorination,":[76],"in":[77,137],"combination":[78],"an":[80],"adjusted":[81],"mushroom-shaped":[82],"sealing":[84],"deposition,":[85],"enabled":[86],"formation":[88],"usable":[91],"layers.":[93],"stability":[95,131],"was":[99],"tested":[100],"using":[101],"open":[102],"circuit":[103],"potential":[104],"(OCP)":[105],"measurement.":[106],"stayed":[114],"stable":[115],"for":[116],"300":[117],"s":[118],"under":[119],"3":[120],"M":[121],"KCl":[122],"first":[125],"stage":[126],"study":[127],"electrode":[136],"chip":[139,143],"highly":[140],"depends":[141],"size":[144],"design,":[145],"conditions,":[147],"further":[150],"protection":[151]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":4}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}