{"id":"https://openalex.org/W4382982114","doi":"https://doi.org/10.3390/s23136061","title":"Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes","display_name":"Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes","publication_year":2023,"publication_date":"2023-06-30","ids":{"openalex":"https://openalex.org/W4382982114","doi":"https://doi.org/10.3390/s23136061","pmid":"https://pubmed.ncbi.nlm.nih.gov/37447910"},"language":"en","primary_location":{"id":"doi:10.3390/s23136061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136061","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6061/pdf?version=1688119271","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/13/6061/pdf?version=1688119271","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007958887","display_name":"Yuzhen Guo","orcid":"https://orcid.org/0000-0001-6521-4745"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuzhen Guo","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"],"raw_orcid":"https://orcid.org/0000-0001-6521-4745","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009647797","display_name":"Zengxing Zhang","orcid":"https://orcid.org/0000-0002-4726-4287"},"institutions":[{"id":"https://openalex.org/I4210156302","display_name":"Tan Kah Kee Innovation Laboratory","ror":"https://ror.org/05jxgts87","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210156302"]},{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zengxing Zhang","raw_affiliation_strings":["Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China","Tan Kah Kee Innovation Laboratory, Xiamen 361005, China"],"raw_orcid":"https://orcid.org/0000-0002-4726-4287","affiliations":[{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China","institution_ids":["https://openalex.org/I75867142"]},{"raw_affiliation_string":"Tan Kah Kee Innovation Laboratory, Xiamen 361005, China","institution_ids":["https://openalex.org/I4210156302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100658818","display_name":"Bin Yao","orcid":"https://orcid.org/0000-0003-0748-3220"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Yao","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113848220","display_name":"Jin Chai","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jin Chai","raw_affiliation_strings":["Xiamen Zehuo Industry Digital Research Institute Co., Ltd., Xiamen 361005, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Xiamen Zehuo Industry Digital Research Institute Co., Ltd., Xiamen 361005, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100703155","display_name":"Shiqiang Zhang","orcid":"https://orcid.org/0000-0003-3407-6356"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shiqiang Zhang","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082751801","display_name":"Jianwei Liu","orcid":"https://orcid.org/0000-0001-9237-1025"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianwei Liu","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102795798","display_name":"Zhou Zhao","orcid":"https://orcid.org/0000-0003-3798-6507"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhou Zhao","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100408559","display_name":"Chenyang Xue","orcid":"https://orcid.org/0000-0003-0770-3975"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]},{"id":"https://openalex.org/I4210156302","display_name":"Tan Kah Kee Innovation Laboratory","ror":"https://ror.org/05jxgts87","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210156302"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Chenyang Xue","raw_affiliation_strings":["State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","Tan Kah Kee Innovation Laboratory, Xiamen 361005, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Tan Kah Kee Innovation Laboratory, Xiamen 361005, China","institution_ids":["https://openalex.org/I4210156302"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5009647797","https://openalex.org/A5100408559"],"corresponding_institution_ids":["https://openalex.org/I135714990","https://openalex.org/I4210156302","https://openalex.org/I75867142"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.7706,"has_fulltext":true,"cited_by_count":19,"citation_normalized_percentile":{"value":0.92949576,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"23","issue":"13","first_page":"6061","last_page":"6061"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/miniaturization","display_name":"Miniaturization","score":0.7670943737030029},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7621525526046753},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7124844789505005},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6889135241508484},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5355536937713623},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5009748935699463},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.47743234038352966},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.47110942006111145},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.46794241666793823},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.465084969997406},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4267004132270813},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3615397810935974},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3344639837741852},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2355460226535797},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.13686391711235046},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08210533857345581}],"concepts":[{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.7670943737030029},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7621525526046753},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7124844789505005},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6889135241508484},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5355536937713623},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5009748935699463},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.47743234038352966},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.47110942006111145},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.46794241666793823},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.465084969997406},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4267004132270813},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3615397810935974},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3344639837741852},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2355460226535797},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.13686391711235046},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08210533857345581},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[{"descriptor_ui":"D000465","descriptor_name":"Algorithms","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D000465","descriptor_name":"Algorithms","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D000465","descriptor_name":"Algorithms","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006863","descriptor_name":"Hydrogen-Ion Concentration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006863","descriptor_name":"Hydrogen-Ion Concentration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006863","descriptor_name":"Hydrogen-Ion Concentration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true}],"locations_count":5,"locations":[{"id":"doi:10.3390/s23136061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136061","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6061/pdf?version=1688119271","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:37447910","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/37447910","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10346533","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10346533","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10346533/pdf/sensors-23-06061.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:24b6207f581544aa8ade1cdc52fad666","is_oa":true,"landing_page_url":"https://doaj.org/article/24b6207f581544aa8ade1cdc52fad666","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 13, p 6061 (2023)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/23/13/6061/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s23136061","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 23; Issue 13; Pages: 6061","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s23136061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23136061","pdf_url":"https://www.mdpi.com/1424-8220/23/13/6061/pdf?version=1688119271","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5699999928474426,"id":"https://metadata.un.org/sdg/6","display_name":"Clean water and sanitation"}],"awards":[{"id":"https://openalex.org/G4733308923","display_name":null,"funder_award_id":"62101511","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8538382423","display_name":null,"funder_award_id":"Grant No. 62101511","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320324776","display_name":"North University of China","ror":"https://ror.org/047bp1713"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4382982114.pdf"},"referenced_works_count":31,"referenced_works":["https://openalex.org/W1767693793","https://openalex.org/W1964745980","https://openalex.org/W1977616747","https://openalex.org/W1980667078","https://openalex.org/W1995476792","https://openalex.org/W2009591838","https://openalex.org/W2034907123","https://openalex.org/W2049368177","https://openalex.org/W2049626980","https://openalex.org/W2055109068","https://openalex.org/W2056686535","https://openalex.org/W2066725101","https://openalex.org/W2075830300","https://openalex.org/W2078624039","https://openalex.org/W2083138868","https://openalex.org/W2094862292","https://openalex.org/W2110135340","https://openalex.org/W2113297575","https://openalex.org/W2398146543","https://openalex.org/W2763702043","https://openalex.org/W2808148732","https://openalex.org/W2899585482","https://openalex.org/W2926905806","https://openalex.org/W2995212110","https://openalex.org/W3009023073","https://openalex.org/W3047193461","https://openalex.org/W3111868774","https://openalex.org/W3137233287","https://openalex.org/W3178922498","https://openalex.org/W3191528883","https://openalex.org/W4232237026"],"related_works":["https://openalex.org/W2348807422","https://openalex.org/W2361025757","https://openalex.org/W2050837474","https://openalex.org/W2926730772","https://openalex.org/W4365794569","https://openalex.org/W2053577253","https://openalex.org/W2347456755","https://openalex.org/W2291633415","https://openalex.org/W4400063720","https://openalex.org/W4327617095"],"abstract_inverted_index":{"In":[0,84],"this":[1],"work,":[2],"a":[3,42,131],"capacitive":[4],"pH":[5,52,82,127],"sensor":[6,122],"consisting":[7],"of":[8,81],"Ta2O5":[9,21],"functional":[10],"film":[11,23],"is":[12,32],"designed":[13,48],"and":[14,28,41,59,67,89,96,114],"fabricated":[15,121],"by":[16],"employing":[17],"MEMS-based":[18],"procedures.":[19],"The":[20,100],"thin":[22],"has":[24],"an":[25],"amorphous":[26],"microstructure,":[27],"its":[29],"surface":[30],"roughness":[31],"less":[33],"than":[34],"3.17":[35],"nm.":[36],"A":[37],"signal":[38],"processing":[39],"circuit":[40],"software":[43],"filtering":[44],"algorithm":[45],"are":[46,71,91,134],"also":[47],"to":[49,93],"measure":[50],"the":[51,56,74,79,86,107,120],"value,":[53],"thus":[54],"improving":[55],"detection":[57],"accuracy":[58],"anti-interference":[60],"ability.":[61],"Good":[62],"linearity":[63],"(R2":[64],"=":[65],"0.99904)":[66],"sensitivity":[68],"(63.12":[69],"mV/pH)":[70],"recorded":[72],"for":[73,116,124],"proposed":[75],"sensing":[76,102],"element":[77],"in":[78,104,130],"range":[80],"2~12.":[83],"addition,":[85],"sensor\u2019s":[87],"drift":[88],"hysteresis":[90],"equal":[92],"5.1":[94],"mV":[95],"5.8":[97],"mV,":[98],"respectively.":[99],"enhanced":[101],"performance":[103],"combination":[105],"with":[106],"facile":[108],"miniaturization":[109],"process,":[110],"low":[111],"fabrication":[112],"cost,":[113],"suitability":[115],"mass":[117],"production":[118],"render":[119],"attractive":[123],"applications":[125],"where":[126],"change":[128],"measurements":[129],"water":[132],"environment":[133],"required.":[135]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":11},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}