{"id":"https://openalex.org/W4360616590","doi":"https://doi.org/10.3390/s23063360","title":"Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy","display_name":"Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy","publication_year":2023,"publication_date":"2023-03-22","ids":{"openalex":"https://openalex.org/W4360616590","doi":"https://doi.org/10.3390/s23063360","pmid":"https://pubmed.ncbi.nlm.nih.gov/36992071"},"language":"en","primary_location":{"id":"doi:10.3390/s23063360","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23063360","pdf_url":"https://www.mdpi.com/1424-8220/23/6/3360/pdf?version=1679493389","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/6/3360/pdf?version=1679493389","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062666579","display_name":"C. H. Joseph","orcid":"https://orcid.org/0000-0003-0251-5975"},"institutions":[{"id":"https://openalex.org/I116067653","display_name":"University of Rome Tor Vergata","ror":"https://ror.org/02p77k626","country_code":"IT","type":"education","lineage":["https://openalex.org/I116067653"]},{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"C. H. Joseph","raw_affiliation_strings":["Department of Electronic Engineering, University of Rome \"Tor Vergata\", Via del Politecnico 1, 00133 Rome, Italy","Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0003-0251-5975","affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, University of Rome \"Tor Vergata\", Via del Politecnico 1, 00133 Rome, Italy","institution_ids":["https://openalex.org/I116067653"]},{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042183636","display_name":"Giovanni Capoccia","orcid":"https://orcid.org/0000-0001-5770-0380"},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giovanni Capoccia","raw_affiliation_strings":["Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0001-5770-0380","affiliations":[{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054903587","display_name":"Andrea Lucibello","orcid":"https://orcid.org/0000-0003-1281-0409"},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Andrea Lucibello","raw_affiliation_strings":["Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0003-1281-0409","affiliations":[{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028401722","display_name":"Emanuela Proietti","orcid":"https://orcid.org/0000-0001-9547-4265"},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Emanuela Proietti","raw_affiliation_strings":["Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0001-9547-4265","affiliations":[{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028959006","display_name":"Giovanni Maria Sardi","orcid":"https://orcid.org/0000-0002-3850-2685"},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giovanni Maria Sardi","raw_affiliation_strings":["Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0002-3850-2685","affiliations":[{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064577617","display_name":"G. Bartolucci","orcid":"https://orcid.org/0000-0001-9113-3957"},"institutions":[{"id":"https://openalex.org/I116067653","display_name":"University of Rome Tor Vergata","ror":"https://ror.org/02p77k626","country_code":"IT","type":"education","lineage":["https://openalex.org/I116067653"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giancarlo Bartolucci","raw_affiliation_strings":["Department of Electronic Engineering, University of Rome \"Tor Vergata\", Via del Politecnico 1, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0001-9113-3957","affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering, University of Rome \"Tor Vergata\", Via del Politecnico 1, 00133 Rome, Italy","institution_ids":["https://openalex.org/I116067653"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051401626","display_name":"R. Marcelli","orcid":"https://orcid.org/0000-0002-4815-9470"},"institutions":[{"id":"https://openalex.org/I4210155236","display_name":"National Research Council","ror":"https://ror.org/04zaypm56","country_code":"IT","type":"nonprofit","lineage":["https://openalex.org/I4210155236"]},{"id":"https://openalex.org/I4210165120","display_name":"Institute for Microelectronics and Microsystems","ror":"https://ror.org/05vk2g845","country_code":"IT","type":"facility","lineage":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Romolo Marcelli","raw_affiliation_strings":["Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy"],"raw_orcid":"https://orcid.org/0000-0002-4815-9470","affiliations":[{"raw_affiliation_string":"Institute for Microelectronics and Microsystems, National Research Council (CNR-IMM), Via del Fosso del Cavaliere 100, 00133 Rome, Italy","institution_ids":["https://openalex.org/I4210165120","https://openalex.org/I4210155236"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5051401626"],"corresponding_institution_ids":["https://openalex.org/I4210155236","https://openalex.org/I4210165120"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.1043,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.36752044,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"23","issue":"6","first_page":"3360","last_page":"3360"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9936000108718872,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6851198673248291},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.6142213344573975},{"id":"https://openalex.org/keywords/microwave","display_name":"Microwave","score":0.602146327495575},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5967186689376831},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.5412006974220276},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.5120707154273987},{"id":"https://openalex.org/keywords/scanning-electron-microscope","display_name":"Scanning electron microscope","score":0.5078869462013245},{"id":"https://openalex.org/keywords/microscopy","display_name":"Microscopy","score":0.455827534198761},{"id":"https://openalex.org/keywords/coaxial","display_name":"Coaxial","score":0.43548792600631714},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4259505569934845},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.36507949233055115},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.32238680124282837},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.14228996634483337},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.09378635883331299},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.07525306940078735},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.06938958168029785}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6851198673248291},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6142213344573975},{"id":"https://openalex.org/C44838205","wikidata":"https://www.wikidata.org/wiki/Q127995","display_name":"Microwave","level":2,"score":0.602146327495575},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5967186689376831},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.5412006974220276},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.5120707154273987},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.5078869462013245},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.455827534198761},{"id":"https://openalex.org/C51221625","wikidata":"https://www.wikidata.org/wiki/Q1751466","display_name":"Coaxial","level":2,"score":0.43548792600631714},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4259505569934845},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36507949233055115},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.32238680124282837},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.14228996634483337},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09378635883331299},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.07525306940078735},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.06938958168029785},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":7,"locations":[{"id":"doi:10.3390/s23063360","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23063360","pdf_url":"https://www.mdpi.com/1424-8220/23/6/3360/pdf?version=1679493389","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:36992071","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/36992071","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:10056389","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/10056389","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC10056389/pdf/sensors-23-03360.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:art.torvergata.it:2108/331424","is_oa":false,"landing_page_url":"https://hdl.handle.net/2108/331424","pdf_url":null,"source":{"id":"https://openalex.org/S4306400993","display_name":"Cineca Institutional Research Information System (Tor Vergata University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I116067653","host_organization_name":"University of Rome Tor Vergata","host_organization_lineage":["https://openalex.org/I116067653"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:doaj.org/article:8e6fab9df2df4a37ab124b852a694383","is_oa":true,"landing_page_url":"https://doaj.org/article/8e6fab9df2df4a37ab124b852a694383","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 6, p 3360 (2023)","raw_type":"article"},{"id":"pmh:oai:it.cnr:prodotti:486819","is_oa":false,"landing_page_url":"http://www.cnr.it/prodotto/i/486819","pdf_url":null,"source":{"id":"https://openalex.org/S7407055101","display_name":"CNR ExploRA","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"info:cnr-pdr/source/autori:Joseph, C. H.; Capoccia, Giovanni; Lucibello, Andrea; Proietti, Emanuela; Sardi, Giovanni Maria; Bartolucci, Giancarlo; Marcelli, Romolo/titolo:Fabrication of Ultra-Sharp Tips by Dynamic Chemical Etching Process for Scanning Near-Field Microwave Microscopy/doi:10.3390%2Fs23063360/rivista:Sensors (Basel)/anno:2023/pagina_da:/pagina_a:/intervallo_pagine:/volume:23","raw_type":"Articolo in rivista"},{"id":"pmh:oai:mdpi.com:/1424-8220/23/6/3360/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s23063360","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 23; Issue 6; Pages: 3360","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s23063360","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23063360","pdf_url":"https://www.mdpi.com/1424-8220/23/6/3360/pdf?version=1679493389","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G356403543","display_name":null,"funder_award_id":"317116","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W4360616590.pdf"},"referenced_works_count":42,"referenced_works":["https://openalex.org/W63574450","https://openalex.org/W1537536887","https://openalex.org/W1615425024","https://openalex.org/W1952120599","https://openalex.org/W1974340575","https://openalex.org/W1978835560","https://openalex.org/W1980377858","https://openalex.org/W1990250229","https://openalex.org/W1999939773","https://openalex.org/W2008593970","https://openalex.org/W2015177480","https://openalex.org/W2023178948","https://openalex.org/W2024312243","https://openalex.org/W2028106697","https://openalex.org/W2031126369","https://openalex.org/W2045431919","https://openalex.org/W2061357096","https://openalex.org/W2068293731","https://openalex.org/W2073974156","https://openalex.org/W2075158547","https://openalex.org/W2086788343","https://openalex.org/W2089075055","https://openalex.org/W2113420502","https://openalex.org/W2118317488","https://openalex.org/W2281380156","https://openalex.org/W2346780776","https://openalex.org/W2476604512","https://openalex.org/W2508030112","https://openalex.org/W2810400923","https://openalex.org/W2888159922","https://openalex.org/W2888542415","https://openalex.org/W2916927251","https://openalex.org/W2977897170","https://openalex.org/W3083676280","https://openalex.org/W3157935560","https://openalex.org/W3176847994","https://openalex.org/W3203686410","https://openalex.org/W4205778238","https://openalex.org/W4252979980","https://openalex.org/W4288720438","https://openalex.org/W4311856032","https://openalex.org/W6645304005"],"related_works":["https://openalex.org/W2128494206","https://openalex.org/W2148274155","https://openalex.org/W2074502480","https://openalex.org/W2788903434","https://openalex.org/W2606133557","https://openalex.org/W2091008601","https://openalex.org/W3184811876","https://openalex.org/W581292172","https://openalex.org/W2990644426","https://openalex.org/W2150931894"],"abstract_inverted_index":{"This":[0],"work":[1],"details":[2],"an":[3],"effective":[4],"dynamic":[5,40],"chemical":[6,41],"etching":[7,42],"technique":[8,48],"to":[9,51,62,94],"fabricate":[10,52],"ultra-sharp":[11,53],"tips":[12,55,108],"for":[13,83],"Scanning":[14],"Near-Field":[15],"Microwave":[16],"Microscopy":[17],"(SNMM).":[18],"The":[19,47,72,103],"protruded":[20],"cylindrical":[21],"part":[22],"of":[23,66,78,99,106,122,131],"the":[24,76,97,100,107,120,123,137],"inner":[25],"conductor":[26],"in":[27],"a":[28,39,64,133],"commercial":[29],"SMA":[30],"(Sub":[31],"Miniature":[32],"A)":[33],"coaxial":[34],"connector":[35],"is":[36,49,91],"tapered":[37,60],"by":[38,111,129],"process":[43],"using":[44,136],"ferric":[45],"chloride.":[46],"optimized":[50],"probe":[54],"with":[56],"controllable":[57],"shapes":[58],"and":[59,119],"down":[61],"have":[63],"radius":[65],"tip":[67,101],"apex":[68],"around":[69],"\u223c1":[70],"\u03bcm.":[71],"detailed":[73],"optimization":[74],"facilitated":[75],"fabrication":[77],"reproducible":[79],"high-quality":[80],"probes":[81,124],"suitable":[82],"non-contact":[84],"SNMM":[85],"operation.":[86],"A":[87],"simple":[88],"analytical":[89],"model":[90],"also":[92],"presented":[93],"better":[95],"describe":[96],"dynamics":[98],"formation.":[102],"near-field":[104,140],"characteristics":[105],"are":[109],"evaluated":[110],"finite":[112],"element":[113],"method":[114],"(FEM)":[115],"based":[116],"electromagnetic":[117],"simulations":[118],"performance":[121],"has":[125],"been":[126],"validated":[127],"experimentally":[128],"means":[130],"imaging":[132],"metal-dielectric":[134],"sample":[135],"in-house":[138],"scanning":[139],"microwave":[141],"microscopy":[142],"system.":[143]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}