{"id":"https://openalex.org/W4319983553","doi":"https://doi.org/10.3390/s23041938","title":"A Morphing Point-to-Point Displacement Control Based on Long Short-Term Memory for a Coplanar XXY Stage","display_name":"A Morphing Point-to-Point Displacement Control Based on Long Short-Term Memory for a Coplanar XXY Stage","publication_year":2023,"publication_date":"2023-02-09","ids":{"openalex":"https://openalex.org/W4319983553","doi":"https://doi.org/10.3390/s23041938","pmid":"https://pubmed.ncbi.nlm.nih.gov/36850536"},"language":"en","primary_location":{"id":"doi:10.3390/s23041938","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041938","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1938/pdf?version=1675934003","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/4/1938/pdf?version=1675934003","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111333888","display_name":"Mingyu Ma","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Yu Ma","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung City 40227, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung City 40227, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005848201","display_name":"Yi\u2010Cheng Huang","orcid":"https://orcid.org/0000-0002-4065-7731"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Yi-Cheng Huang","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung City 40227, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-4065-7731","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung City 40227, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5042628394","display_name":"Yu-Tso Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I70522481","display_name":"National Changhua University of Education","ror":"https://ror.org/005gkfa10","country_code":"TW","type":"education","lineage":["https://openalex.org/I70522481"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu-Tso Wu","raw_affiliation_strings":["Department of Mechatronics Engineering, National Changhua University of Education, Changhua City 500207, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechatronics Engineering, National Changhua University of Education, Changhua City 500207, Taiwan","institution_ids":["https://openalex.org/I70522481"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5005848201"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.1138,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":{"value":0.35153877,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"23","issue":"4","first_page":"1938","last_page":"1938"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10531","display_name":"Advanced Vision and Imaging","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10531","display_name":"Advanced Vision and Imaging","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11484","display_name":"Adaptive optics and wavefront sensing","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/morphing","display_name":"Morphing","score":0.6313707828521729},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6289283633232117},{"id":"https://openalex.org/keywords/mean-squared-error","display_name":"Mean squared error","score":0.6074512004852295},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.5247431397438049},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4597170352935791},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.44704627990722656},{"id":"https://openalex.org/keywords/point","display_name":"Point (geometry)","score":0.4355286955833435},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.42561036348342896},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.4125528037548065},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1907857060432434},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.16955164074897766},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15567860007286072},{"id":"https://openalex.org/keywords/step-response","display_name":"Step response","score":0.1539950668811798},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.13870209455490112},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.08021089434623718}],"concepts":[{"id":"https://openalex.org/C50637493","wikidata":"https://www.wikidata.org/wiki/Q1136781","display_name":"Morphing","level":2,"score":0.6313707828521729},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6289283633232117},{"id":"https://openalex.org/C139945424","wikidata":"https://www.wikidata.org/wiki/Q1940696","display_name":"Mean squared error","level":2,"score":0.6074512004852295},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5247431397438049},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4597170352935791},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.44704627990722656},{"id":"https://openalex.org/C28719098","wikidata":"https://www.wikidata.org/wiki/Q44946","display_name":"Point (geometry)","level":2,"score":0.4355286955833435},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.42561036348342896},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4125528037548065},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1907857060432434},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.16955164074897766},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15567860007286072},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.1539950668811798},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.13870209455490112},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.08021089434623718},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s23041938","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041938","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1938/pdf?version=1675934003","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:36850536","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/36850536","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:9960131","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/9960131","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC9960131/pdf/sensors-23-01938.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:3fa1344add7b4b2291ba37d3f2e5cd05","is_oa":true,"landing_page_url":"https://doaj.org/article/3fa1344add7b4b2291ba37d3f2e5cd05","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 4, p 1938 (2023)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/23/4/1938/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s23041938","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s23041938","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041938","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1938/pdf?version=1675934003","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G7489393043","display_name":null,"funder_award_id":"MOST 109-","funder_id":"https://openalex.org/F4320331164","funder_display_name":"National Science and Technology Council"}],"funders":[{"id":"https://openalex.org/F4320331164","display_name":"National Science and Technology Council","ror":"https://ror.org/00wnb9798"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4319983553.pdf"},"referenced_works_count":16,"referenced_works":["https://openalex.org/W1563913119","https://openalex.org/W1968796042","https://openalex.org/W2007654486","https://openalex.org/W2038009897","https://openalex.org/W2054186106","https://openalex.org/W2064675550","https://openalex.org/W2089950447","https://openalex.org/W2261488316","https://openalex.org/W2994902374","https://openalex.org/W2999466041","https://openalex.org/W3032431737","https://openalex.org/W3152507879","https://openalex.org/W3157019450","https://openalex.org/W4231938560","https://openalex.org/W4255670102","https://openalex.org/W4292836822"],"related_works":["https://openalex.org/W1679315481","https://openalex.org/W3151495635","https://openalex.org/W4236870338","https://openalex.org/W2016917053","https://openalex.org/W51472912","https://openalex.org/W4361020386","https://openalex.org/W4362722828","https://openalex.org/W2375652671","https://openalex.org/W4205835231","https://openalex.org/W2388648383"],"abstract_inverted_index":{"In":[0,174],"this":[1],"study,":[2],"visual":[3],"recognition":[4],"with":[5,72,134,139,225],"a":[6,21,92,128,159,235,249],"charge-coupled":[7],"device":[8],"(CCD)":[9],"image":[10,34,48,53],"feedback":[11,163],"control":[12,50,67,115,164,179,251],"system":[13,165,262],"was":[14,55,124,166,222],"used":[15,125,146],"to":[16,111,126,147,169,264],"record":[17,148],"the":[18,28,33,38,42,47,65,73,82,113,120,149,155,171,177,190,193,212,219,226,242,246,259],"movement":[19],"of":[20,27,41,64,69,91,142,192,238,244],"coplanar":[22],"XXY":[23,150,162],"stage.":[24],"The":[25,52,89],"position":[26,151],"stage":[29,43,132,247],"is":[30,44,100],"fedback":[31],"through":[32],"positioning":[35,39,62,121,172,214,266],"method,":[36],"and":[37,57,81,107,201,234,253],"compensation":[40,49],"performed":[45],"by":[46],"parameter.":[51],"resolution":[54],"constrained":[56],"resulted":[58],"in":[59],"an":[60,135,140],"average":[61,213],"error":[63,77,215,230],"optimized":[66],"parameter":[68],"6.712":[70],"\u00b5m,":[71,80,224,233],"root":[74,227],"mean":[75,228],"square":[76,229],"being":[78,85,145,231],"2.802":[79],"settling":[83,236,255],"time":[84,237,256],"approximately":[86],"7":[87],"s.":[88,240],"merit":[90],"long":[93],"short-term":[94],"memory":[95],"(LSTM)":[96],"deep":[97],"learning":[98,195],"model":[99,130,221],"that":[101,211],"it":[102],"can":[103],"identify":[104],"long-term":[105],"dependencies":[106],"sequential":[108],"state":[109],"data":[110],"determine":[112],"next":[114],"signal.":[116],"As":[117],"for":[118,131],"improving":[119],"performance,":[122],"LSTM":[123,194,220],"develop":[127],"training":[129],"motion":[133],"additional":[136],"dial":[137,157],"indicator":[138],"accuracy":[141,252],"1":[143],"\u03bcm":[144],"information.":[152],"After":[153],"removing":[154],"assisting":[156],"indicator,":[158],"new":[160],"LSTM-based":[161],"subsequently":[167],"constructed":[168],"reduce":[170],"error.":[173],"other":[175],"words,":[176],"morphing":[178],"signals":[180],"are":[181],"dependent":[182],"not":[183],"only":[184],"on":[185,189],"time,":[186],"but":[187],"also":[188],"iterations":[191],"process.":[196],"Point-to-point":[197],"commanded":[198],"forward,":[199],"backward":[200],"repeated":[202],"back-and-forth":[203],"repetitive":[204],"motions":[205],"were":[206],"conducted.":[207],"Experimental":[208],"results":[209],"revealed":[210],"achieved":[216],"after":[217],"using":[218],"2.085":[223],"2.681":[232],"2.02":[239],"With":[241],"assistance":[243],"LSTM,":[245],"exhibited":[248],"higher":[250],"less":[254],"than":[257],"did":[258],"CCD":[260],"imaging":[261],"according":[263],"three":[265],"indices.":[267]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}