{"id":"https://openalex.org/W4319599798","doi":"https://doi.org/10.3390/s23041889","title":"Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data","display_name":"Generative Adversarial Network-Based Fault Detection in Semiconductor Equipment with Class-Imbalanced Data","publication_year":2023,"publication_date":"2023-02-08","ids":{"openalex":"https://openalex.org/W4319599798","doi":"https://doi.org/10.3390/s23041889","pmid":"https://pubmed.ncbi.nlm.nih.gov/36850488"},"language":"en","primary_location":{"id":"doi:10.3390/s23041889","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041889","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1889/pdf?version=1675842833","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/23/4/1889/pdf?version=1675842833","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045797924","display_name":"Jeong Eun Choi","orcid":"https://orcid.org/0000-0002-5233-7364"},"institutions":[{"id":"https://openalex.org/I89440247","display_name":"Myongji University","ror":"https://ror.org/00s9dpb54","country_code":"KR","type":"education","lineage":["https://openalex.org/I89440247"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jeong Eun Choi","raw_affiliation_strings":["Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-5233-7364","affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea","institution_ids":["https://openalex.org/I89440247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067768298","display_name":"Da Hoon Seol","orcid":null},"institutions":[{"id":"https://openalex.org/I89440247","display_name":"Myongji University","ror":"https://ror.org/00s9dpb54","country_code":"KR","type":"education","lineage":["https://openalex.org/I89440247"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Da Hoon Seol","raw_affiliation_strings":["Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea","institution_ids":["https://openalex.org/I89440247"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043422357","display_name":"Chan Young Kim","orcid":"https://orcid.org/0000-0001-6656-9425"},"institutions":[{"id":"https://openalex.org/I89440247","display_name":"Myongji University","ror":"https://ror.org/00s9dpb54","country_code":"KR","type":"education","lineage":["https://openalex.org/I89440247"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Chan Young Kim","raw_affiliation_strings":["Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea","institution_ids":["https://openalex.org/I89440247"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088574413","display_name":"Sang Jeen Hong","orcid":"https://orcid.org/0000-0002-6576-690X"},"institutions":[{"id":"https://openalex.org/I89440247","display_name":"Myongji University","ror":"https://ror.org/00s9dpb54","country_code":"KR","type":"education","lineage":["https://openalex.org/I89440247"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Sang Jeen Hong","raw_affiliation_strings":["Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-6576-690X","affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Myongji University, 116 Myongji-ro, Yongin-si 17058, Gyeonggi-do, Republic of Korea","institution_ids":["https://openalex.org/I89440247"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5088574413"],"corresponding_institution_ids":["https://openalex.org/I89440247"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":2.3592,"has_fulltext":true,"cited_by_count":25,"citation_normalized_percentile":{"value":0.88259468,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":100},"biblio":{"volume":"23","issue":"4","first_page":"1889","last_page":"1889"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12282","display_name":"Mineral Processing and Grinding","score":0.9848999977111816,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12282","display_name":"Mineral Processing and Grinding","score":0.9848999977111816,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9817000031471252,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9815999865531921,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fault","display_name":"Fault (geology)","score":0.7274882793426514},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.6002254486083984},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5729050040245056},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.4996933937072754},{"id":"https://openalex.org/keywords/fault-detection-and-isolation","display_name":"Fault detection and isolation","score":0.4914778470993042},{"id":"https://openalex.org/keywords/class","display_name":"Class (philosophy)","score":0.4832661747932434},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.47795724868774414},{"id":"https://openalex.org/keywords/anomaly-detection","display_name":"Anomaly detection","score":0.44822460412979126},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.44065025448799133},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.3336465358734131},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23638984560966492},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11080613732337952}],"concepts":[{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.7274882793426514},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6002254486083984},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5729050040245056},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.4996933937072754},{"id":"https://openalex.org/C152745839","wikidata":"https://www.wikidata.org/wiki/Q5438153","display_name":"Fault detection and isolation","level":3,"score":0.4914778470993042},{"id":"https://openalex.org/C2777212361","wikidata":"https://www.wikidata.org/wiki/Q5127848","display_name":"Class (philosophy)","level":2,"score":0.4832661747932434},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.47795724868774414},{"id":"https://openalex.org/C739882","wikidata":"https://www.wikidata.org/wiki/Q3560506","display_name":"Anomaly detection","level":2,"score":0.44822460412979126},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.44065025448799133},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.3336465358734131},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23638984560966492},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11080613732337952},{"id":"https://openalex.org/C165205528","wikidata":"https://www.wikidata.org/wiki/Q83371","display_name":"Seismology","level":1,"score":0.0},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.0},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s23041889","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041889","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1889/pdf?version=1675842833","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:36850488","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/36850488","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:9967967","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/9967967","pdf_url":"https://pmc.ncbi.nlm.nih.gov/articles/PMC9967967/pdf/sensors-23-01889.pdf","source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:77a93b3851604ea7a894065fb29be4ac","is_oa":true,"landing_page_url":"https://doaj.org/article/77a93b3851604ea7a894065fb29be4ac","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 23, Iss 4, p 1889 (2023)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/23/4/1889/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s23041889","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s23041889","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s23041889","pdf_url":"https://www.mdpi.com/1424-8220/23/4/1889/pdf?version=1675842833","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2752232947","display_name":null,"funder_award_id":"CRC-2001-NFRI","funder_id":"https://openalex.org/F4320325370","funder_display_name":"National Research Council of Science and Technology"},{"id":"https://openalex.org/G4200692081","display_name":null,"funder_award_id":"1711121944 (CRC-20-01-NFRI)","funder_id":"https://openalex.org/F4320325370","funder_display_name":"National Research Council of Science and Technology"},{"id":"https://openalex.org/G7630731244","display_name":null,"funder_award_id":"1711121944","funder_id":"https://openalex.org/F4320325370","funder_display_name":"National Research Council of Science and Technology"}],"funders":[{"id":"https://openalex.org/F4320325370","display_name":"National Research Council of Science and Technology","ror":"https://ror.org/058rymf81"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4319599798.pdf"},"referenced_works_count":40,"referenced_works":["https://openalex.org/W239741025","https://openalex.org/W1677182931","https://openalex.org/W1971044750","https://openalex.org/W1980038009","https://openalex.org/W2026249211","https://openalex.org/W2037368216","https://openalex.org/W2043715675","https://openalex.org/W2049961362","https://openalex.org/W2060880752","https://openalex.org/W2083286146","https://openalex.org/W2119777652","https://openalex.org/W2124543898","https://openalex.org/W2127800670","https://openalex.org/W2133074518","https://openalex.org/W2498862821","https://openalex.org/W2512338826","https://openalex.org/W2765427245","https://openalex.org/W2891123663","https://openalex.org/W2943921974","https://openalex.org/W2946476603","https://openalex.org/W2949812770","https://openalex.org/W2962984188","https://openalex.org/W2995758361","https://openalex.org/W3017264588","https://openalex.org/W3084233697","https://openalex.org/W3092707779","https://openalex.org/W3135309452","https://openalex.org/W3153695212","https://openalex.org/W3157884173","https://openalex.org/W3161670441","https://openalex.org/W3170481153","https://openalex.org/W3171622190","https://openalex.org/W3173310499","https://openalex.org/W3198955842","https://openalex.org/W3206337481","https://openalex.org/W4205414130","https://openalex.org/W4220992948","https://openalex.org/W4292974997","https://openalex.org/W4320013936","https://openalex.org/W6643177133"],"related_works":["https://openalex.org/W2105642232","https://openalex.org/W3207332793","https://openalex.org/W3197833032","https://openalex.org/W4386081464","https://openalex.org/W2499612753","https://openalex.org/W3113278055","https://openalex.org/W2750709484","https://openalex.org/W4296474495","https://openalex.org/W4388937474","https://openalex.org/W1969801928"],"abstract_inverted_index":{"This":[0],"research":[1],"proposes":[2],"an":[3,41],"application":[4],"of":[5,23,35,69,90,110,119,142,150,179],"generative":[6],"adversarial":[7],"networks":[8],"(GANs)":[9],"to":[10,103,137,146],"solve":[11],"the":[12,17,31,36,53,70,86,99,107,114,123,140,157,168,186],"class":[13,109,131,176],"imbalance":[14,177],"problem":[15],"in":[16,30,45,52,60,75,85,182],"fault":[18,50,153,183],"detection":[19,51,154,184],"and":[20,106,117],"classification":[21],"study":[22],"a":[24,46,91,165],"plasma":[25,37,87,188],"etching":[26,88],"process.":[27],"Small":[28],"changes":[29],"equipment":[32,38,42,76],"part":[33],"condition":[34],"may":[39],"cause":[40],"fault,":[43],"resulting":[44],"process":[47,55,62,89,96],"anomaly.":[48],"Thus,":[49],"semiconductor":[54,187],"is":[56,101,113,122,173],"essential":[57],"for":[58,139,167,175,185],"success":[59],"advanced":[61],"control.":[63],"Two":[64],"datasets":[65,159,181],"that":[66,118],"assume":[67],"faults":[68],"mass":[71],"flow":[72],"controller":[73],"(MFC)":[74],"components":[77],"were":[78,133],"acquired":[79],"using":[80,135,171],"optical":[81],"emission":[82],"spectroscopy":[83],"(OES)":[84],"silicon":[92],"trench:":[93],"The":[94],"abnormal":[95,124],"changed":[97],"by":[98],"MFC":[100],"assumed":[102],"be":[104],"faults,":[105],"minority":[108,130,169],"Case":[111,120],"1":[112],"normal":[115],"class,":[116],"2":[121],"class.":[125],"In":[126],"each":[127],"case,":[128],"additional":[129],"data":[132],"generated":[134],"GANs":[136,172],"compensate":[138],"degradation":[141],"model":[143],"training":[144],"due":[145],"class-imbalanced":[147],"data.":[148],"Comparisons":[149],"five":[151],"existing":[152],"algorithms":[155],"with":[156],"augmented":[158],"showed":[160],"improved":[161],"modeling":[162],"performances.":[163],"Generating":[164],"dataset":[166],"group":[170],"beneficial":[174],"problems":[178],"OES":[180],"equipment.":[189]},"counts_by_year":[{"year":2026,"cited_by_count":7},{"year":2025,"cited_by_count":9},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":4}],"updated_date":"2026-08-01T09:00:35.917206","created_date":"2025-10-10T00:00:00"}