{"id":"https://openalex.org/W4311050693","doi":"https://doi.org/10.3390/s22239348","title":"Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer","display_name":"Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer","publication_year":2022,"publication_date":"2022-12-01","ids":{"openalex":"https://openalex.org/W4311050693","doi":"https://doi.org/10.3390/s22239348","pmid":"https://pubmed.ncbi.nlm.nih.gov/36502050"},"language":"en","primary_location":{"id":"doi:10.3390/s22239348","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22239348","pdf_url":"https://www.mdpi.com/1424-8220/22/23/9348/pdf?version=1669878907","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/23/9348/pdf?version=1669878907","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5090420306","display_name":"Xin Xiong","orcid":"https://orcid.org/0000-0001-9955-9389"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]},{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN","JP"],"is_corresponding":false,"raw_author_name":"Xin Xiong","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]},{"raw_affiliation_string":"The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080736317","display_name":"Chenguang Yin","orcid":"https://orcid.org/0000-0002-9536-6309"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Chenguang Yin","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":"https://orcid.org/0000-0002-9536-6309","affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081560619","display_name":"Lue Quan","orcid":"https://orcid.org/0000-0001-6290-6500"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Lue Quan","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011145618","display_name":"Ryo Sato","orcid":"https://orcid.org/0000-0002-5414-1488"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryo Sato","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048332393","display_name":"Hiraku Matsukuma","orcid":"https://orcid.org/0000-0001-8125-9708"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiraku Matsukuma","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019910404","display_name":"Yuki Shimizu","orcid":"https://orcid.org/0000-0003-3527-2869"},"institutions":[{"id":"https://openalex.org/I205349734","display_name":"Hokkaido University","ror":"https://ror.org/02e16g702","country_code":"JP","type":"education","lineage":["https://openalex.org/I205349734"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Yuki Shimizu","raw_affiliation_strings":["Department of Human Mechanical Systems and Design, Hokkaido University, Sapporo 060-0808, Japan"],"raw_orcid":"https://orcid.org/0000-0003-3527-2869","affiliations":[{"raw_affiliation_string":"Department of Human Mechanical Systems and Design, Hokkaido University, Sapporo 060-0808, Japan","institution_ids":["https://openalex.org/I205349734"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087205102","display_name":"Hideaki Tamiya","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hideaki Tamiya","raw_affiliation_strings":["Magnescale Co., Ltd., Suzukawa 45, Isehara 259-1146, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Magnescale Co., Ltd., Suzukawa 45, Isehara 259-1146, Japan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079733529","display_name":"Wei Gao","orcid":"https://orcid.org/0000-0001-9336-2729"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Wei Gao","raw_affiliation_strings":["Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":"https://orcid.org/0000-0001-9336-2729","affiliations":[{"raw_affiliation_string":"Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5019910404"],"corresponding_institution_ids":["https://openalex.org/I205349734"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":0.9514,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.69924701,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"22","issue":"23","first_page":"9348","last_page":"9348"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.991599977016449,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.7989404201507568},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.7706261277198792},{"id":"https://openalex.org/keywords/fizeau-interferometer","display_name":"Fizeau interferometer","score":0.7561149597167969},{"id":"https://openalex.org/keywords/wavefront","display_name":"Wavefront","score":0.6990271210670471},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5860655307769775},{"id":"https://openalex.org/keywords/diffraction","display_name":"Diffraction","score":0.5591405630111694},{"id":"https://openalex.org/keywords/flatness","display_name":"Flatness (cosmology)","score":0.5495655536651611},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.5432196855545044},{"id":"https://openalex.org/keywords/rotary-encoder","display_name":"Rotary encoder","score":0.5069203972816467},{"id":"https://openalex.org/keywords/blazed-grating","display_name":"Blazed grating","score":0.4764728546142578},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.45221203565597534},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.4404483437538147},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.4185504615306854},{"id":"https://openalex.org/keywords/encoder","display_name":"Encoder","score":0.2487950623035431},{"id":"https://openalex.org/keywords/astronomical-interferometer","display_name":"Astronomical interferometer","score":0.2328224778175354},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.17862457036972046}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7989404201507568},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.7706261277198792},{"id":"https://openalex.org/C2776904371","wikidata":"https://www.wikidata.org/wiki/Q1422100","display_name":"Fizeau interferometer","level":4,"score":0.7561149597167969},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.6990271210670471},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5860655307769775},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5591405630111694},{"id":"https://openalex.org/C2778530986","wikidata":"https://www.wikidata.org/wiki/Q5457948","display_name":"Flatness (cosmology)","level":3,"score":0.5495655536651611},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5432196855545044},{"id":"https://openalex.org/C37488316","wikidata":"https://www.wikidata.org/wiki/Q53699","display_name":"Rotary encoder","level":3,"score":0.5069203972816467},{"id":"https://openalex.org/C1363856","wikidata":"https://www.wikidata.org/wiki/Q883195","display_name":"Blazed grating","level":4,"score":0.4764728546142578},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.45221203565597534},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.4404483437538147},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.4185504615306854},{"id":"https://openalex.org/C118505674","wikidata":"https://www.wikidata.org/wiki/Q42586063","display_name":"Encoder","level":2,"score":0.2487950623035431},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.2328224778175354},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.17862457036972046},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C26405456","wikidata":"https://www.wikidata.org/wiki/Q338","display_name":"Cosmology","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D002138","descriptor_name":"Calibration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D002138","descriptor_name":"Calibration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D002138","descriptor_name":"Calibration","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D007368","descriptor_name":"Interferometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D007368","descriptor_name":"Interferometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D007368","descriptor_name":"Interferometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true}],"locations_count":5,"locations":[{"id":"doi:10.3390/s22239348","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22239348","pdf_url":"https://www.mdpi.com/1424-8220/22/23/9348/pdf?version=1669878907","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:36502050","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/36502050","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:9736133","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/9736133","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:461ac434e6a647a7a094009e63ab7c59","is_oa":true,"landing_page_url":"https://doaj.org/article/461ac434e6a647a7a094009e63ab7c59","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 23, p 9348 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/23/9348/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22239348","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 23; Pages: 9348","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22239348","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22239348","pdf_url":"https://www.mdpi.com/1424-8220/22/23/9348/pdf?version=1669878907","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G8332207285","display_name":"Subatomic 3D Ultra-Precision Measurement by Creation of Optical Comb Dimensional Conversion Optics and In-Situ Autonomous Calibration Method","funder_award_id":"20H00211","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4311050693.pdf","grobid_xml":"https://content.openalex.org/works/W4311050693.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1968669654","https://openalex.org/W1970168555","https://openalex.org/W1975730865","https://openalex.org/W1985352193","https://openalex.org/W2023618805","https://openalex.org/W2025749696","https://openalex.org/W2055569019","https://openalex.org/W2071079715","https://openalex.org/W2085301767","https://openalex.org/W2085827067","https://openalex.org/W2088331397","https://openalex.org/W2131648127","https://openalex.org/W2163721469","https://openalex.org/W2305182540","https://openalex.org/W2371968885","https://openalex.org/W2511010459","https://openalex.org/W2520852803","https://openalex.org/W2551741574","https://openalex.org/W2582658492","https://openalex.org/W2606552166","https://openalex.org/W2755232389","https://openalex.org/W2801020877","https://openalex.org/W2896554469","https://openalex.org/W2897607471","https://openalex.org/W2903605504","https://openalex.org/W2916770578","https://openalex.org/W2951215190","https://openalex.org/W3020391304","https://openalex.org/W3087860141","https://openalex.org/W3088467556","https://openalex.org/W3097035643","https://openalex.org/W3121686913","https://openalex.org/W3134321469","https://openalex.org/W3194230277","https://openalex.org/W3213530100","https://openalex.org/W4302293912","https://openalex.org/W4311050693"],"related_works":["https://openalex.org/W2005168301","https://openalex.org/W2592571106","https://openalex.org/W1996325658","https://openalex.org/W248619786","https://openalex.org/W2808384726","https://openalex.org/W630786221","https://openalex.org/W2049299502","https://openalex.org/W2073524920","https://openalex.org/W4280537711","https://openalex.org/W2040253765"],"abstract_inverted_index":{"A":[0],"new":[1],"method":[2,8,143],"based":[3],"on":[4],"the":[5,13,24,28,47,51,58,63,66,70,81,84,90,94,99,101,106,114,119,122,130,133,138,147,150,153,157,162,165,178,194,197,201,211,220,225],"interferometric":[6],"pseudo-lateral-shearing":[7],"is":[9,110],"proposed":[10,142,198],"to":[11,104,128,192],"evaluate":[12],"pitch":[14,67,95],"variation":[15,68],"of":[16,27,50,62,69,80,93,121,132,137,149,152,196,214],"a":[17,33,40,188],"large-scale":[18,189],"planar":[19,34],"variable-line-spacing":[20],"(VLS)":[21],"grating.":[22,140],"In":[23],"method,":[25],"wavefronts":[26,120],"first-order":[29,52,123],"diffracted":[30,53,124,170],"beams":[31,125],"from":[32],"VLS":[35,64,71,139,190,203,222],"grating":[36,72,82,191,223],"are":[37,126,184,205],"measured":[38,166],"by":[39,160,207],"commercial":[41],"Fizeau":[42,158],"form":[43],"interferometer.":[44],"By":[45],"utilizing":[46],"differential":[48],"wavefront":[49],"beam":[54],"before":[55],"and":[56,168,181],"after":[57],"small":[59],"lateral":[60,85],"shift":[61],"grating,":[65],"can":[73,144,174],"be":[74,175],"evaluated.":[75],"Meanwhile,":[76],"additional":[77,134],"positioning":[78,135],"errors":[79,136],"in":[83,118,156],"shifting":[86],"process":[87],"could":[88],"degrade":[89],"measurement":[91],"accuracy":[92],"variation.":[96],"To":[97],"address":[98],"issue,":[100],"technique":[102,109],"referred":[103],"as":[105,224],"reference":[107,154],"plane":[108],"also":[111,145],"introduced,":[112],"where":[113],"least":[115],"squares":[116],"planes":[117],"employed":[127],"reduce":[129,146],"influences":[131],"The":[141],"influence":[148],"out-of-flatness":[151],"flat":[155],"interferometer":[159],"taking":[161],"difference":[163],"between":[164],"positive":[167],"negative":[169],"wavefronts;":[171],"namely,":[172],"self-calibration":[173],"accomplished.":[176],"After":[177],"theoretical":[179],"analysis":[180],"simulations,":[182],"experiments":[183],"carried":[185],"out":[186],"with":[187,210],"verify":[193],"feasibility":[195],"methods.":[199],"Furthermore,":[200],"evaluated":[202,221],"parameters":[204],"verified":[206],"comparing":[208],"them":[209],"readout":[212],"signal":[213],"an":[215],"absolute":[216],"surface":[217],"encoder":[218],"employing":[219],"scale":[226],"for":[227],"measurement.":[228]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-08-12T21:12:35.861297","created_date":"2025-10-10T00:00:00"}