{"id":"https://openalex.org/W36146391","doi":"https://doi.org/10.3390/s22187041","title":"Medi\u00e7\u00e3o de dist\u00e2ncia com o uso de laser","display_name":"Medi\u00e7\u00e3o de dist\u00e2ncia com o uso de laser","publication_year":2010,"publication_date":"2010-01-01","ids":{"openalex":"https://openalex.org/W36146391","doi":"https://doi.org/10.3390/s22187041","mag":"36146391"},"language":"en","primary_location":{"id":"mag:36146391","is_oa":false,"landing_page_url":"https://www.lume.ufrgs.br/handle/10183/33069","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},"type":"article","indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/10183/33069","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5029822360","display_name":"Eduardo Schoenknecht","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Eduardo Schoenknecht","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5029822360"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00251996,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"22","issue":"18","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9223999977111816,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9223999977111816,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/political-science","display_name":"Political science","score":0.24623358249664307}],"concepts":[{"id":"https://openalex.org/C17744445","wikidata":"https://www.wikidata.org/wiki/Q36442","display_name":"Political science","level":0,"score":0.24623358249664307}],"mesh":[],"locations_count":2,"locations":[{"id":"mag:36146391","is_oa":false,"landing_page_url":"https://www.lume.ufrgs.br/handle/10183/33069","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:www.lume.ufrgs.br:10183/33069","is_oa":true,"landing_page_url":"http://hdl.handle.net/10183/33069","pdf_url":"http://hdl.handle.net/10183/33069","source":{"id":"https://openalex.org/S4306401468","display_name":"Lume (Universidade Federal do Rio Grande do Sul)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097146","host_organization_name":"Hospital de Cl\u00ednicas de Porto Alegre","host_organization_lineage":["https://openalex.org/I4210097146"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Trabalho de conclus\u00e3o de gradua\u00e7\u00e3o"}],"best_oa_location":{"id":"pmh:oai:www.lume.ufrgs.br:10183/33069","is_oa":true,"landing_page_url":"http://hdl.handle.net/10183/33069","pdf_url":"http://hdl.handle.net/10183/33069","source":{"id":"https://openalex.org/S4306401468","display_name":"Lume (Universidade Federal do Rio Grande do Sul)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097146","host_organization_name":"Hospital de Cl\u00ednicas de Porto Alegre","host_organization_lineage":["https://openalex.org/I4210097146"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Trabalho de conclus\u00e3o de gradua\u00e7\u00e3o"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.4399999976158142,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W36146391.pdf","grobid_xml":"https://content.openalex.org/works/W36146391.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"A":[0],"protocol":[1],"for":[2,63,123,130],"successfully":[3],"depositing":[4],"[001]":[5],"textured,":[6],"2\u22123":[7],"\u00b5m":[8,91],"thick":[9,92],"films":[10,73,87,140],"of":[11,29,39,51,98,107,119,151,160],"Al0.75Sc0.25N,":[12],"is":[13,24,58,111,114],"proposed.":[14],"The":[15,48],"procedure":[16],"relies":[17],"on":[18],"the":[19,33,71,76,108,158,161],"fact":[20],"that":[21,112],"sputtered":[22],"Ti":[23],"[001]-textured":[25],"\u03b1-phase":[26],"(hcp).":[27],"Diffusion":[28],"nitrogen":[30],"ions":[31],"into":[32],"\u03b1-Ti":[34],"film":[35,55],"during":[36],"reactive":[37],"sputtering":[38],"Al0.75,Sc0.25N":[40],"likely":[41],"forms":[42],"a":[43,117],"[111]-oriented":[44],"TiN":[45],"intermediate":[46],"layer.":[47],"lattice":[49],"mismatch":[50],"this":[52],"very":[53],"thin":[54],"with":[56,116],"Al0.75Sc0.25N":[57,72],"~3.7%,":[59],"providing":[60],"excellent":[61],"conditions":[62],"epitaxial":[64],"growth.":[65],"In":[66],"contrast":[67],"to":[68,89,93,144],"earlier":[69],"reports,":[70],"prepared":[74],"in":[75,102,157],"current":[77],"study":[78],"are":[79],"Al-terminated.":[80],"Low":[81],"growth":[82],"stress":[83],"(<100":[84],"MPa)":[85],"allows":[86],"up":[88],"3":[90],"be":[94],"deposited":[95],"without":[96,155],"loss":[97],"orientation":[99],"or":[100,125],"decrease":[101],"piezoelectric":[103,146],"coefficient.":[104],"An":[105],"advantage":[106],"proposed":[109],"technique":[110],"it":[113],"compatible":[115],"variety":[118],"substrates":[120],"commonly":[121],"used":[122],"actuators":[124],"MEMS,":[126],"as":[127],"demonstrated":[128],"here":[129],"both":[131],"Si":[132],"wafers":[133],"and":[134],"D263":[135],"borosilicate":[136],"glass.":[137],"Additionally,":[138],"thicker":[139],"can":[141],"potentially":[142],"lead":[143],"increased":[145],"stress/strain":[147],"by":[148],"supporting":[149],"application":[150],"higher":[152],"voltage,":[153],"but":[154],"increase":[156],"magnitude":[159],"electric":[162],"field.":[163]},"counts_by_year":[],"updated_date":"2026-04-28T14:05:53.105641","created_date":"2025-10-10T00:00:00"}