{"id":"https://openalex.org/W4283733036","doi":"https://doi.org/10.3390/s22134937","title":"Design and Optimization of a Pressure Sensor Based on Serpentine-Shaped Graphene Piezoresistors for Measuring Low Pressure","display_name":"Design and Optimization of a Pressure Sensor Based on Serpentine-Shaped Graphene Piezoresistors for Measuring Low Pressure","publication_year":2022,"publication_date":"2022-06-30","ids":{"openalex":"https://openalex.org/W4283733036","doi":"https://doi.org/10.3390/s22134937","pmid":"https://pubmed.ncbi.nlm.nih.gov/35808432"},"language":"en","primary_location":{"id":"doi:10.3390/s22134937","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134937","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4937/pdf?version=1656902311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/13/4937/pdf?version=1656902311","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016155300","display_name":"Xincheng Ren","orcid":"https://orcid.org/0000-0003-3487-7700"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xincheng Ren","raw_affiliation_strings":["School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China"],"affiliations":[{"raw_affiliation_string":"School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102863587","display_name":"Xiyu Liu","orcid":"https://orcid.org/0009-0003-0662-1465"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xianyun Liu","raw_affiliation_strings":["School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China"],"affiliations":[{"raw_affiliation_string":"School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100640058","display_name":"Xin Su","orcid":"https://orcid.org/0000-0003-2072-341X"},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Su","raw_affiliation_strings":["School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China"],"affiliations":[{"raw_affiliation_string":"School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China","institution_ids":["https://openalex.org/I4210153482"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112121985","display_name":"Xingfang Jiang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210153482","display_name":"Changzhou University","ror":"https://ror.org/04ymgwq66","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210153482"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingfang Jiang","raw_affiliation_strings":["School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China"],"affiliations":[{"raw_affiliation_string":"School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, China","institution_ids":["https://openalex.org/I4210153482"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5102863587"],"corresponding_institution_ids":["https://openalex.org/I4210153482"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.1302,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.87320848,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"22","issue":"13","first_page":"4937","last_page":"4937"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8005764484405518},{"id":"https://openalex.org/keywords/taguchi-methods","display_name":"Taguchi methods","score":0.7874878644943237},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.715004026889801},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.706799328327179},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6884216070175171},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.6625090837478638},{"id":"https://openalex.org/keywords/graphene","display_name":"Graphene","score":0.6567419171333313},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6377431750297546},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6110615134239197},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.5292776226997375},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3402537405490875},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.3395756483078003},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3381202518939972},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.30840641260147095},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.27509891986846924},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.259945273399353},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16398653388023376},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.06584075093269348}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8005764484405518},{"id":"https://openalex.org/C83469408","wikidata":"https://www.wikidata.org/wiki/Q2036525","display_name":"Taguchi methods","level":2,"score":0.7874878644943237},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.715004026889801},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.706799328327179},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6884216070175171},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.6625090837478638},{"id":"https://openalex.org/C30080830","wikidata":"https://www.wikidata.org/wiki/Q169917","display_name":"Graphene","level":2,"score":0.6567419171333313},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6377431750297546},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6110615134239197},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.5292776226997375},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3402537405490875},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3395756483078003},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3381202518939972},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.30840641260147095},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27509891986846924},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.259945273399353},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16398653388023376},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.06584075093269348},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s22134937","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134937","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4937/pdf?version=1656902311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:35808432","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35808432","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:741b20115d164c41bfe831341032edfd","is_oa":true,"landing_page_url":"https://doaj.org/article/741b20115d164c41bfe831341032edfd","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 13, p 4937 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/13/4937/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22134937","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 13; Pages: 4937","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:9269475","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/9269475","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22134937","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134937","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4937/pdf?version=1656902311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.6000000238418579,"display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G1121271761","display_name":null,"funder_award_id":"Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G1926725907","display_name":null,"funder_award_id":"41875026","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2087396116","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3317480652","display_name":null,"funder_award_id":"Science","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5994120800","display_name":null,"funder_award_id":"Natural","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4283733036.pdf","grobid_xml":"https://content.openalex.org/works/W4283733036.grobid-xml"},"referenced_works_count":43,"referenced_works":["https://openalex.org/W1530413915","https://openalex.org/W1890992718","https://openalex.org/W1966400724","https://openalex.org/W1973459136","https://openalex.org/W1973468826","https://openalex.org/W1974266516","https://openalex.org/W1984423191","https://openalex.org/W1989491796","https://openalex.org/W1998166518","https://openalex.org/W2007127764","https://openalex.org/W2010971702","https://openalex.org/W2016773880","https://openalex.org/W2031542599","https://openalex.org/W2051774130","https://openalex.org/W2055813917","https://openalex.org/W2070527568","https://openalex.org/W2083600459","https://openalex.org/W2099779584","https://openalex.org/W2115489808","https://openalex.org/W2126934395","https://openalex.org/W2149032140","https://openalex.org/W2159233708","https://openalex.org/W2160130198","https://openalex.org/W2296651299","https://openalex.org/W2341838124","https://openalex.org/W2552148320","https://openalex.org/W2566997854","https://openalex.org/W2578179231","https://openalex.org/W2610526373","https://openalex.org/W2612548939","https://openalex.org/W2621919695","https://openalex.org/W2753062671","https://openalex.org/W2766814253","https://openalex.org/W2790754523","https://openalex.org/W2809822999","https://openalex.org/W2883053054","https://openalex.org/W2921226675","https://openalex.org/W3033716353","https://openalex.org/W3047167915","https://openalex.org/W3082141507","https://openalex.org/W4213219582","https://openalex.org/W6681388442","https://openalex.org/W6782029024"],"related_works":["https://openalex.org/W2326864911","https://openalex.org/W4231551819","https://openalex.org/W2089076881","https://openalex.org/W2576957273","https://openalex.org/W99992490","https://openalex.org/W2890232104","https://openalex.org/W2378386980","https://openalex.org/W2443919171","https://openalex.org/W4285807532","https://openalex.org/W4319718036"],"abstract_inverted_index":{"This":[0],"thesis":[1],"describes":[2],"a":[3,159],"novel":[4],"microelectromechanical":[5],"system":[6],"(MEMS)":[7],"piezoresistive":[8],"pressure":[9,151,173],"sensor":[10,114,152],"based":[11],"on":[12],"serpentine-shaped":[13,131],"graphene":[14,132,156],"piezoresistors":[15,133,157],"paired":[16],"with":[17,153],"trapezoidal":[18],"prisms":[19],"under":[20],"the":[21,36,44,66,72,77,85,89,93,99,112,150,172],"diaphragm":[22],"for":[23,88],"measuring":[24],"low":[25,122],"pressure.":[26],"The":[27,53,145],"finite":[28],"element":[29],"method":[30,80],"(FEM)":[31],"is":[32,62,81,96,109,141],"utilized":[33],"to":[34,42,70,83,98,143],"analyze":[35],"mechanical":[37,57],"stress":[38,47,73],"and":[39,59,74,137,165],"membrane":[40],"deflection":[41],"enhance":[43],"degree":[45],"of":[46,105,130,162,168,175],"concentration":[48],"in":[49,103,171],"this":[50,125],"unique":[51],"sensor.":[52],"functional":[54],"relationship":[55],"between":[56],"performance":[58],"dimension":[60],"variables":[61],"established":[63],"after":[64],"using":[65],"curve":[67],"fitting":[68],"approach":[69],"handle":[71],"deflection.":[75],"Additionally,":[76],"Taguchi":[78],"optimization":[79],"employed":[82],"identify":[84],"best":[86],"dimensions":[87],"proposed":[90],"structure.":[91],"Then,":[92],"suggested":[94],"design":[95],"compared":[97,142],"other":[100],"three":[101,127],"designs":[102],"terms":[104],"operating":[106],"performance.":[107],"It":[108],"revealed":[110],"that":[111,149],"recommended":[113],"can":[115],"significantly":[116],"improve":[117],"sensitivity":[118,161],"while":[119],"maintaining":[120],"extremely":[121],"nonlinearity.":[123],"In":[124],"study,":[126],"different":[128],"types":[129],"are":[134],"also":[135],"designed,":[136],"their":[138],"sensing":[139],"capability":[140],"silicon.":[144],"simulation":[146],"results":[147],"indicate":[148],"Type":[154],"2":[155],"has":[158],"maximum":[160],"24.50":[163],"mV/psi":[164],"ultra-low":[166],"nonlinearity":[167],"0.06%":[169],"FSS":[170],"range":[174],"0-3":[176],"psi.":[177]},"counts_by_year":[{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}