{"id":"https://openalex.org/W4283316457","doi":"https://doi.org/10.3390/s22134700","title":"Hermetic Welding of an Optical Fiber Fabry\u2013P\u00e9rot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser","display_name":"Hermetic Welding of an Optical Fiber Fabry\u2013P\u00e9rot Cavity for a Diaphragm-Based Pressure Sensor Using CO2 Laser","publication_year":2022,"publication_date":"2022-06-22","ids":{"openalex":"https://openalex.org/W4283316457","doi":"https://doi.org/10.3390/s22134700","pmid":"https://pubmed.ncbi.nlm.nih.gov/35808196"},"language":"en","primary_location":{"id":"doi:10.3390/s22134700","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134700","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4700/pdf?version=1655884134","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/13/4700/pdf?version=1655884134","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100681666","display_name":"Hui Zhang","orcid":"https://orcid.org/0000-0002-3112-2364"},"institutions":[{"id":"https://openalex.org/I4210131919","display_name":"Xi'an University of Technology","ror":"https://ror.org/038avdt50","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210131919"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hui Zhang","raw_affiliation_strings":["Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","Xi'an Modern Control Technology Research Institute, Xi'an 710065, China"],"affiliations":[{"raw_affiliation_string":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","institution_ids":["https://openalex.org/I4210131919"]},{"raw_affiliation_string":"Xi'an Modern Control Technology Research Institute, Xi'an 710065, China","institution_ids":["https://openalex.org/I4210131919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100421652","display_name":"Yi Li","orcid":"https://orcid.org/0000-0002-8855-4520"},"institutions":[{"id":"https://openalex.org/I4210131919","display_name":"Xi'an University of Technology","ror":"https://ror.org/038avdt50","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210131919"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Li","raw_affiliation_strings":["Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","Xi'an Modern Control Technology Research Institute, Xi'an 710065, China"],"affiliations":[{"raw_affiliation_string":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","institution_ids":["https://openalex.org/I4210131919"]},{"raw_affiliation_string":"Xi'an Modern Control Technology Research Institute, Xi'an 710065, China","institution_ids":["https://openalex.org/I4210131919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100429700","display_name":"Zhuo Zhang","orcid":"https://orcid.org/0000-0002-0515-6288"},"institutions":[{"id":"https://openalex.org/I4210131919","display_name":"Xi'an University of Technology","ror":"https://ror.org/038avdt50","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210131919"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhuo Zhang","raw_affiliation_strings":["Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","Xi'an Modern Control Technology Research Institute, Xi'an 710065, China"],"affiliations":[{"raw_affiliation_string":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","institution_ids":["https://openalex.org/I4210131919"]},{"raw_affiliation_string":"Xi'an Modern Control Technology Research Institute, Xi'an 710065, China","institution_ids":["https://openalex.org/I4210131919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101416166","display_name":"Chaoming Yang","orcid":"https://orcid.org/0000-0002-2899-6001"},"institutions":[{"id":"https://openalex.org/I4210131919","display_name":"Xi'an University of Technology","ror":"https://ror.org/038avdt50","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210131919"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chaoming Yang","raw_affiliation_strings":["Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","Xi'an Modern Control Technology Research Institute, Xi'an 710065, China"],"affiliations":[{"raw_affiliation_string":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","institution_ids":["https://openalex.org/I4210131919"]},{"raw_affiliation_string":"Xi'an Modern Control Technology Research Institute, Xi'an 710065, China","institution_ids":["https://openalex.org/I4210131919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039338633","display_name":"Mingshan Liang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210131919","display_name":"Xi'an University of Technology","ror":"https://ror.org/038avdt50","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210131919"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingshan Liang","raw_affiliation_strings":["Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","Xi'an Modern Control Technology Research Institute, Xi'an 710065, China"],"affiliations":[{"raw_affiliation_string":"Xi\u2019an Modern Control Technology Research Institute, Xi\u2019an 710065, China","institution_ids":["https://openalex.org/I4210131919"]},{"raw_affiliation_string":"Xi'an Modern Control Technology Research Institute, Xi'an 710065, China","institution_ids":["https://openalex.org/I4210131919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113413898","display_name":"Yong Hu","orcid":"https://orcid.org/0000-0002-3903-4596"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yong Hu","raw_affiliation_strings":["Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069520740","display_name":"Heming Wei","orcid":"https://orcid.org/0000-0002-8023-7109"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Heming Wei","raw_affiliation_strings":["Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5052839162","display_name":"Fufei Pang","orcid":"https://orcid.org/0000-0002-8925-6947"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fufei Pang","raw_affiliation_strings":["Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University, Shanghai 200444, China","institution_ids":["https://openalex.org/I113940042"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5100681666"],"corresponding_institution_ids":["https://openalex.org/I4210131919"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.0921,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.39019569,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"22","issue":"13","first_page":"4700","last_page":"4700"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10846","display_name":"Photonic Crystal and Fiber Optics","score":0.9846000075340271,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabry\u2013p\u00e9rot-interferometer","display_name":"Fabry\u2013P\u00e9rot interferometer","score":0.8260357975959778},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7657500505447388},{"id":"https://openalex.org/keywords/diaphragm","display_name":"Diaphragm (acoustics)","score":0.7423658967018127},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.6123170852661133},{"id":"https://openalex.org/keywords/welding","display_name":"Welding","score":0.582310140132904},{"id":"https://openalex.org/keywords/optical-fiber","display_name":"Optical fiber","score":0.5780390501022339},{"id":"https://openalex.org/keywords/polishing","display_name":"Polishing","score":0.5534194707870483},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5279704332351685},{"id":"https://openalex.org/keywords/optical-cavity","display_name":"Optical cavity","score":0.5254784226417542},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.4831544756889343},{"id":"https://openalex.org/keywords/fiber-laser","display_name":"Fiber laser","score":0.4792068898677826},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.45457738637924194},{"id":"https://openalex.org/keywords/pressure-measurement","display_name":"Pressure measurement","score":0.4540766179561615},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4379516839981079},{"id":"https://openalex.org/keywords/fiber","display_name":"Fiber","score":0.3917783498764038},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.242335706949234},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.12262055277824402},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.09609785676002502},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.08701914548873901}],"concepts":[{"id":"https://openalex.org/C169268690","wikidata":"https://www.wikidata.org/wiki/Q1359945","display_name":"Fabry\u2013P\u00e9rot interferometer","level":3,"score":0.8260357975959778},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7657500505447388},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.7423658967018127},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.6123170852661133},{"id":"https://openalex.org/C19474535","wikidata":"https://www.wikidata.org/wiki/Q131172","display_name":"Welding","level":2,"score":0.582310140132904},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.5780390501022339},{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.5534194707870483},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5279704332351685},{"id":"https://openalex.org/C190269828","wikidata":"https://www.wikidata.org/wiki/Q6856168","display_name":"Optical cavity","level":3,"score":0.5254784226417542},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.4831544756889343},{"id":"https://openalex.org/C17163034","wikidata":"https://www.wikidata.org/wiki/Q390528","display_name":"Fiber laser","level":3,"score":0.4792068898677826},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.45457738637924194},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.4540766179561615},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4379516839981079},{"id":"https://openalex.org/C519885992","wikidata":"https://www.wikidata.org/wiki/Q161","display_name":"Fiber","level":2,"score":0.3917783498764038},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.242335706949234},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.12262055277824402},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.09609785676002502},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.08701914548873901},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s22134700","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134700","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4700/pdf?version=1655884134","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:35808196","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35808196","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:3fbb74113d2d423abc73cea83c80344b","is_oa":true,"landing_page_url":"https://doaj.org/article/3fbb74113d2d423abc73cea83c80344b","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 13, p 4700 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/13/4700/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22134700","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 13; Pages: 4700","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:9269120","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/9269120","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22134700","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22134700","pdf_url":"https://www.mdpi.com/1424-8220/22/13/4700/pdf?version=1655884134","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4099999964237213}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4283316457.pdf","grobid_xml":"https://content.openalex.org/works/W4283316457.grobid-xml"},"referenced_works_count":20,"referenced_works":["https://openalex.org/W1990056377","https://openalex.org/W2005778145","https://openalex.org/W2033067220","https://openalex.org/W2073692745","https://openalex.org/W2076908348","https://openalex.org/W2081164099","https://openalex.org/W2095161029","https://openalex.org/W2141057923","https://openalex.org/W2141610246","https://openalex.org/W2164681096","https://openalex.org/W2372857557","https://openalex.org/W2465289616","https://openalex.org/W2520918025","https://openalex.org/W2596173247","https://openalex.org/W2755758603","https://openalex.org/W2901427098","https://openalex.org/W2943520408","https://openalex.org/W2972087654","https://openalex.org/W3004398889","https://openalex.org/W6651975747"],"related_works":["https://openalex.org/W4206804491","https://openalex.org/W1973127455","https://openalex.org/W4242883309","https://openalex.org/W2984836626","https://openalex.org/W3022118013","https://openalex.org/W2534267407","https://openalex.org/W2269051159","https://openalex.org/W818971998","https://openalex.org/W178109321","https://openalex.org/W2093962749"],"abstract_inverted_index":{"A":[0,35],"diaphragm-based":[1],"hermetic":[2,43],"optical":[3,105],"fiber":[4,106],"Fabry-P\u00e9rot":[5],"(FP)":[6],"cavity":[7,17,28,45,52],"is":[8,18,38],"proposed":[9,97],"and":[10],"demonstrated":[11],"for":[12,46,103,108],"pressure":[13,47],"sensing.":[14,48],"The":[15,49,61,92],"FP":[16,44,51],"hermetically":[19],"sealed":[20],"using":[21],"one-step":[22],"CO<sub>2</sub>":[23],"laser":[24],"welding":[25],"with":[26,78],"a":[27,54,70,79],"length":[29],"from":[30],"30":[31],"to":[32,73,89],"100":[33],"\u03bcm.":[34],"thin":[36],"diaphragm":[37],"formed":[39],"by":[40],"polishing":[41],"the":[42,66,74,85,96],"fabricated":[50,67],"has":[53,69],"fringe":[55],"contrast":[56],"larger":[57],"than":[58],"15":[59],"dB.":[60],"experimental":[62],"results":[63,93],"show":[64],"that":[65,95],"device":[68],"linear":[71],"response":[72],"change":[75],"in":[76,84],"pressure,":[77],"sensitivity":[80],"of":[81,87],"-2.02":[82],"nm/MPa":[83],"range":[86],"0":[88],"4":[90],"MPa.":[91],"demonstrate":[94],"fabrication":[98],"technique":[99],"can":[100],"be":[101],"used":[102],"fabricating":[104],"microcavities":[107],"sensing":[109],"applications.":[110]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}
