{"id":"https://openalex.org/W4221017487","doi":"https://doi.org/10.3390/s22062307","title":"Sensitivity\u2014Bandwidth Optimization of PMUT with Acoustical Matching Using Finite Element Method","display_name":"Sensitivity\u2014Bandwidth Optimization of PMUT with Acoustical Matching Using Finite Element Method","publication_year":2022,"publication_date":"2022-03-16","ids":{"openalex":"https://openalex.org/W4221017487","doi":"https://doi.org/10.3390/s22062307","pmid":"https://pubmed.ncbi.nlm.nih.gov/35336478"},"language":"en","primary_location":{"id":"doi:10.3390/s22062307","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22062307","pdf_url":"https://www.mdpi.com/1424-8220/22/6/2307/pdf?version=1647524938","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/6/2307/pdf?version=1647524938","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022664507","display_name":"Leming He","orcid":"https://orcid.org/0000-0003-4131-3508"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]},{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN","FR"],"is_corresponding":false,"raw_author_name":"Le-Ming He","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I70348806","https://openalex.org/I2279609970","https://openalex.org/I7454413","https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024738909","display_name":"Wei-Jiang X\u00fc","orcid":"https://orcid.org/0000-0002-7309-2343"},"institutions":[{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"funder","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I4387154098","display_name":"INSA Hauts-de-France","ror":"https://ror.org/041rsh762","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154098","https://openalex.org/I70348806"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Wei-Jiang Xu","raw_affiliation_strings":["INSA Hauts-de-France, Le Mont Houy, F-59313 Valenciennes, France","Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France"],"affiliations":[{"raw_affiliation_string":"INSA Hauts-de-France, Le Mont Houy, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I4387154098"]},{"raw_affiliation_string":"Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I70348806","https://openalex.org/I2279609970","https://openalex.org/I7454413","https://openalex.org/I1294671590","https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100617588","display_name":"Yan Wang","orcid":"https://orcid.org/0000-0002-5099-7350"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Wang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","School of IoT and Engineering"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"School of IoT and Engineering","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020046309","display_name":"Jia Zhou","orcid":"https://orcid.org/0000-0002-9098-5661"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jia Zhou","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016448886","display_name":"Junyan Ren","orcid":"https://orcid.org/0000-0002-7799-6251"},"institutions":[{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jun-Yan Ren","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5016448886","https://openalex.org/A5024738909"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2279609970","https://openalex.org/I24943067","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I4391767673","https://openalex.org/I70348806","https://openalex.org/I7454413"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.8355,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.82310306,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":98},"biblio":{"volume":"22","issue":"6","first_page":"2307","last_page":"2307"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10822","display_name":"Acoustic Wave Phenomena Research","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.7454188466072083},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.7020102143287659},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6576425433158875},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.596825122833252},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5796583294868469},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5616658926010132},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5176190137863159},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4461275339126587},{"id":"https://openalex.org/keywords/sound-pressure","display_name":"Sound pressure","score":0.412925660610199},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3232229948043823},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2408023476600647},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18842631578445435},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1011451780796051},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.10060977935791016},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.07842046022415161}],"concepts":[{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.7454188466072083},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.7020102143287659},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6576425433158875},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.596825122833252},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5796583294868469},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5616658926010132},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5176190137863159},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4461275339126587},{"id":"https://openalex.org/C68115822","wikidata":"https://www.wikidata.org/wiki/Q1068172","display_name":"Sound pressure","level":2,"score":0.412925660610199},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3232229948043823},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2408023476600647},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18842631578445435},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1011451780796051},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10060977935791016},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.07842046022415161}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s22062307","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22062307","pdf_url":"https://www.mdpi.com/1424-8220/22/6/2307/pdf?version=1647524938","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:35336478","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35336478","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:HAL:hal-03626108v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03626108","pdf_url":null,"source":{"id":"https://openalex.org/S4406922466","display_name":"SPIRE - Sciences Po Institutional REpository","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, 2022, 22 (6), pp.2307. ⟨10.3390/s22062307⟩","raw_type":"Journal articles"},{"id":"pmh:oai:doaj.org/article:8449d1a9cef1434cb4ef65dd93172d0b","is_oa":true,"landing_page_url":"https://doaj.org/article/8449d1a9cef1434cb4ef65dd93172d0b","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 6, p 2307 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/6/2307/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22062307","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 6; Pages: 2307","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8951133","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8951133","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22062307","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22062307","pdf_url":"https://www.mdpi.com/1424-8220/22/6/2307/pdf?version=1647524938","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5899999737739563,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1344544370","display_name":null,"funder_award_id":"62174036","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4221017487.pdf","grobid_xml":"https://content.openalex.org/works/W4221017487.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W171940441","https://openalex.org/W2003017040","https://openalex.org/W2012779095","https://openalex.org/W2016291486","https://openalex.org/W2019123650","https://openalex.org/W2020590373","https://openalex.org/W2060075982","https://openalex.org/W2066665164","https://openalex.org/W2084853768","https://openalex.org/W2094382114","https://openalex.org/W2102624141","https://openalex.org/W2116583632","https://openalex.org/W2124726994","https://openalex.org/W2125791194","https://openalex.org/W2157763436","https://openalex.org/W2171281935","https://openalex.org/W2295501467","https://openalex.org/W2525246808","https://openalex.org/W2626022486","https://openalex.org/W2727465127","https://openalex.org/W2743764621","https://openalex.org/W2929448107","https://openalex.org/W2980060769","https://openalex.org/W2996063371","https://openalex.org/W2996095979","https://openalex.org/W3045443807","https://openalex.org/W3045866961","https://openalex.org/W3090575551","https://openalex.org/W3098062135","https://openalex.org/W3100867876","https://openalex.org/W3110294026","https://openalex.org/W3112866641","https://openalex.org/W3115427971","https://openalex.org/W3133542079","https://openalex.org/W3137189405","https://openalex.org/W6606980145","https://openalex.org/W6650807065","https://openalex.org/W6781461593"],"related_works":["https://openalex.org/W2912807936","https://openalex.org/W2383309909","https://openalex.org/W2102304199","https://openalex.org/W2314521183","https://openalex.org/W2352652589","https://openalex.org/W138921638","https://openalex.org/W4245694902","https://openalex.org/W3156424550","https://openalex.org/W2348916807","https://openalex.org/W560544569"],"abstract_inverted_index":{"A":[0],"new":[1],"model":[2],"in":[3,215],"finite":[4],"element":[5],"method":[6,139],"to":[7,74,83,131,144,197],"study":[8],"round-trip":[9,56,154],"performance":[10,23],"of":[11,24,58,65,69,80,112,121,163,200,206],"piezoelectric":[12,117,123,192],"micromachined":[13],"ultrasonic":[14],"transducers":[15],"(pMUTs)":[16],"is":[17,37,46,60,100,140],"established.":[18],"Most":[19],"studies":[20],"on":[21,29,88],"the":[22,30,34,42,55,63,66,103,113,116,119,122,126,133,147,153,160,170,182,188,201,204,217],"pMUT":[25,59,99,177],"are":[26,129,194],"based":[27],"only":[28],"transmission":[31,43],"sensibility,":[32],"but":[33],"reception":[35,81],"capacity":[36],"as":[38,41,62,108],"much":[39],"important":[40],"one,":[44],"and":[45,78,115,125,142,159,173,191,219],"quite":[47],"different":[48],"from":[49],"this":[50,53,89],"latter.":[51],"In":[52],"work,":[54],"sensitivity":[57,90,155],"defined":[61],"product":[64,105,184],"frequency":[67],"response":[68,162],"transmitted":[70],"far":[71],"field":[72],"pressure":[73],"source":[75],"voltage":[76],"excitation":[77,165],"that":[79],"output":[82],"return":[84],"wave":[85],"pressure.":[86],"Based":[87],"characteristic,":[91],"firstly,":[92],"a":[93,97,151],"multi-parameter":[94],"optimization":[95,180],"for":[96,146,176],"cavity":[98,202],"performed":[101],"using":[102],"sensitivity-bandwidth":[104,183],"parameter":[106],"SBW":[107],"criterion.":[109],"The":[110,179],"radii":[111],"electrode":[114,190],"layer,":[118],"thicknesses":[120],"layer":[124,193,210],"vibration":[127],"diaphragm":[128],"adjusted":[130],"maximize":[132],"performance.":[134],"Secondly,":[135],"an":[136,207],"acoustic":[137,208],"matching":[138,209],"proposed":[141],"applied":[143],"pMUTs":[145],"first":[148],"time.":[149],"As":[150],"result,":[152],"can":[156,166],"be":[157,167],"evaluated":[158],"pulse-echo":[161],"wide-band":[164],"simulated,":[168],"giving":[169],"most":[171],"quantitative":[172],"intuitive":[174],"feedback":[175],"design.":[178],"enhances":[181],"by":[185],"52%":[186],"when":[187],"top":[189],"both":[195,216],"etched":[196],"75%":[198],"radius":[199],"beneath;":[203],"introduction":[205],"shows":[211],"significant":[212],"bandwidth":[213],"expansion":[214],"transmitting":[218],"receiving":[220],"process.":[221]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":5}],"updated_date":"2026-03-26T15:22:09.906841","created_date":"2025-10-10T00:00:00"}