{"id":"https://openalex.org/W4210249165","doi":"https://doi.org/10.3390/s22031152","title":"Optimization of Silicon Nitride Waveguide Platform for On-Chip Virus Detection","display_name":"Optimization of Silicon Nitride Waveguide Platform for On-Chip Virus Detection","publication_year":2022,"publication_date":"2022-02-02","ids":{"openalex":"https://openalex.org/W4210249165","doi":"https://doi.org/10.3390/s22031152","pmid":"https://pubmed.ncbi.nlm.nih.gov/35161897"},"language":"en","primary_location":{"id":"doi:10.3390/s22031152","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22031152","pdf_url":"https://www.mdpi.com/1424-8220/22/3/1152/pdf?version=1644572668","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/3/1152/pdf?version=1644572668","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017801161","display_name":"Raghi S. El Shamy","orcid":"https://orcid.org/0000-0001-9997-0637"},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Raghi S. El Shamy","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Faculty of Engineering, McMaster University, Hamilton, ON L8S 4L8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Faculty of Engineering, McMaster University, Hamilton, ON L8S 4L8, Canada","institution_ids":["https://openalex.org/I98251732"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077449820","display_name":"Mohamed A. Swillam","orcid":"https://orcid.org/0000-0002-7962-2341"},"institutions":[{"id":"https://openalex.org/I80693520","display_name":"American University in Cairo","ror":"https://ror.org/0176yqn58","country_code":"EG","type":"education","lineage":["https://openalex.org/I80693520"]}],"countries":["EG"],"is_corresponding":false,"raw_author_name":"Mohamed A. Swillam","raw_affiliation_strings":["Department of Physics, School of Science and Engineering, The American University in Cairo, New Cairo 11835, Egypt"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, School of Science and Engineering, The American University in Cairo, New Cairo 11835, Egypt","institution_ids":["https://openalex.org/I80693520"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100341851","display_name":"Xun Li","orcid":"https://orcid.org/0000-0002-1921-1006"},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"Xun Li","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Faculty of Engineering, McMaster University, Hamilton, ON L8S 4L8, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Faculty of Engineering, McMaster University, Hamilton, ON L8S 4L8, Canada","institution_ids":["https://openalex.org/I98251732"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5100341851"],"corresponding_institution_ids":["https://openalex.org/I98251732"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":0.9671,"has_fulltext":true,"cited_by_count":13,"citation_normalized_percentile":{"value":0.71201783,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"22","issue":"3","first_page":"1152","last_page":"1152"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10767","display_name":"Advanced Photonic Communication Systems","score":0.9936000108718872,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10494","display_name":"Plant Virus Research Studies","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/1110","display_name":"Plant Science"},"field":{"id":"https://openalex.org/fields/11","display_name":"Agricultural and Biological Sciences"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.6581199169158936},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5881995558738708},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.47940489649772644},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4666915535926819},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.460921049118042},{"id":"https://openalex.org/keywords/nitride","display_name":"Nitride","score":0.4546757638454437},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.41015490889549255},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.38577139377593994},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.38267433643341064},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.33730798959732056},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2630453109741211},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.18392688035964966}],"concepts":[{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.6581199169158936},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5881995558738708},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.47940489649772644},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4666915535926819},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.460921049118042},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.4546757638454437},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.41015490889549255},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38577139377593994},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.38267433643341064},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.33730798959732056},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2630453109741211},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.18392688035964966},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[{"descriptor_ui":"D012031","descriptor_name":"Refractometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012031","descriptor_name":"Refractometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012031","descriptor_name":"Refractometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012031","descriptor_name":"Refractometry","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017655","descriptor_name":"Silicon Compounds","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055095","descriptor_name":"Optics and Photonics","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055095","descriptor_name":"Optics and Photonics","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055095","descriptor_name":"Optics and Photonics","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055095","descriptor_name":"Optics and Photonics","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s22031152","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22031152","pdf_url":"https://www.mdpi.com/1424-8220/22/3/1152/pdf?version=1644572668","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:35161897","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35161897","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:a838ca0c21dc40e09c4e8f0b02f59a7e","is_oa":true,"landing_page_url":"https://doaj.org/article/a838ca0c21dc40e09c4e8f0b02f59a7e","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 3, p 1152 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/3/1152/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22031152","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 3; Pages: 1152","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8840533","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8840533","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22031152","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22031152","pdf_url":"https://www.mdpi.com/1424-8220/22/3/1152/pdf?version=1644572668","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G124107261","display_name":null,"funder_award_id":"RGPIN-6907-2019","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"}],"funders":[{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4210249165.pdf","grobid_xml":"https://content.openalex.org/works/W4210249165.grobid-xml"},"referenced_works_count":39,"referenced_works":["https://openalex.org/W1772751683","https://openalex.org/W1806739626","https://openalex.org/W2023282503","https://openalex.org/W2025729078","https://openalex.org/W2036066386","https://openalex.org/W2051234647","https://openalex.org/W2057410520","https://openalex.org/W2061883300","https://openalex.org/W2063950143","https://openalex.org/W2077131476","https://openalex.org/W2090157735","https://openalex.org/W2109874506","https://openalex.org/W2291370895","https://openalex.org/W2320925332","https://openalex.org/W2534312285","https://openalex.org/W2540485708","https://openalex.org/W2565015850","https://openalex.org/W2762534778","https://openalex.org/W2790659990","https://openalex.org/W2804479194","https://openalex.org/W2809342681","https://openalex.org/W2889734641","https://openalex.org/W2900065955","https://openalex.org/W2902453405","https://openalex.org/W2905660009","https://openalex.org/W2909318109","https://openalex.org/W2919674796","https://openalex.org/W2922494621","https://openalex.org/W2940041508","https://openalex.org/W2955052533","https://openalex.org/W2972728863","https://openalex.org/W2995976872","https://openalex.org/W3005943294","https://openalex.org/W3015336926","https://openalex.org/W3094150051","https://openalex.org/W3098675477","https://openalex.org/W3123843686","https://openalex.org/W6760707278","https://openalex.org/W6773509314"],"related_works":["https://openalex.org/W3011831393","https://openalex.org/W2518845051","https://openalex.org/W2038256311","https://openalex.org/W2516241657","https://openalex.org/W2389680235","https://openalex.org/W2895059647","https://openalex.org/W2366625390","https://openalex.org/W4386282660","https://openalex.org/W2135033373","https://openalex.org/W2006846697"],"abstract_inverted_index":{"This":[0],"work":[1],"presents":[2],"a":[3,28,40,82,179],"rigorous":[4],"and":[5,62,70,76,98,163,186,199,236],"generic":[6],"sensitivity":[7,75,105,161],"analysis":[8,80],"of":[9,65,85,166,169,181,258],"silicon":[10,13,140],"nitride":[11,141],"on":[12],"dioxide":[14],"strip":[15,94,127,142],"waveguide":[16,25,128,143,160],"for":[17,68,152,178,261],"virus":[18,45,108,153],"detection.":[19],"In":[20],"general,":[21],"by":[22],"functionalizing":[23],"the":[24,34,93,99,104,107,126,130,149,159,164,170,242,245,262],"surface":[26,113],"with":[27,73,129,183,225,264],"specific":[29],"antibodies":[30],"layer,":[31],"we":[32],"make":[33],"optical":[35,58],"sensor":[36,246],"sensitive":[37],"only":[38],"to":[39,89,106,111,222,244],"particular":[41],"virus.":[42],"Unlike":[43],"conventional":[44],"detection":[46,72,154],"methods":[47],"such":[48],"as":[49,155],"polymerase":[50],"chain":[51],"reaction":[52],"(PCR),":[53],"integrated":[54],"refractive":[55,187],"index":[56],"(RI)":[57],"sensors":[59,193,208],"offer":[60],"cheap":[61],"mass-scale":[63],"fabrication":[64],"compact":[66],"devices":[67],"fast":[69],"straightforward":[71],"high":[74,210],"selectivity.":[77],"Our":[78,135],"numerical":[79],"includes":[81],"wide":[83],"range":[84,180],"wavelengths":[86,147],"from":[87,218,241],"visible":[88],"mid-infrared.":[90],"We":[91,123],"determined":[92],"waveguide\u2019s":[95],"single-mode":[96],"dimensions":[97,101],"optimum":[100,150],"that":[102,139],"maximize":[103],"layer":[109],"attached":[110],"its":[112],"at":[114,145,203,212,253],"each":[115],"wavelength":[116],"using":[117,196],"finite":[118],"difference":[119],"eigenmode":[120],"(FDE)":[121],"solver.":[122],"also":[124,234],"compared":[125],"widely":[131],"used":[132],"slot":[133],"waveguide.":[134],"theoretical":[136],"study":[137],"shows":[138],"working":[144],"lower":[146],"is":[148],"choice":[151],"it":[156],"maximizes":[157],"both":[158],"(Swg)":[162],"figure":[165],"merit":[167],"(FOM)":[168],"sensor.":[171],"The":[172,206,269],"optimized":[173],"waveguides":[174],"are":[175,273],"well":[176],"suited":[177],"viruses":[182],"different":[184,204],"sizes":[185],"indices.":[188],"Balanced":[189],"Mach\u2013Zehnder":[190],"interferometer":[191],"(MZI)":[192],"were":[194,233],"designed":[195,207],"FDE":[197],"solver":[198],"photonic":[200],"circuit":[201],"simulator":[202],"wavelengths.":[205],"show":[209],"FOM":[211,265],"\u03bb":[213,254],"=":[214,227,255,266],"450":[215,256],"nm":[216,257],"ranging":[217],"500":[219,228,267],"RIU\u22121":[220,224],"up":[221],"1231":[223],"LMZI":[226],"\u00b5m.":[229],"Different":[230],"MZI":[231],"configurations":[232],"studied":[235],"compared.":[237],"Finally,":[238],"edge":[239],"coupling":[240,271],"fiber":[243,278],"was":[247],"designed,":[248],"showing":[249],"insertion":[250],"loss":[251],"(IL)":[252],"4.1":[259],"dB":[260],"design":[263],"RIU\u22121.":[268],"obtained":[270],"efficiencies":[272],"higher":[274],"than":[275],"recently":[276],"proposed":[277],"couplers.":[279]},"counts_by_year":[{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}