{"id":"https://openalex.org/W4205443345","doi":"https://doi.org/10.3390/s22030712","title":"Embedded UV Sensors in CMOS SOI Technology","display_name":"Embedded UV Sensors in CMOS SOI Technology","publication_year":2022,"publication_date":"2022-01-18","ids":{"openalex":"https://openalex.org/W4205443345","doi":"https://doi.org/10.3390/s22030712","pmid":"https://pubmed.ncbi.nlm.nih.gov/35161472"},"language":"en","primary_location":{"id":"doi:10.3390/s22030712","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22030712","pdf_url":"https://www.mdpi.com/1424-8220/22/3/712/pdf?version=1642512035","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/22/3/712/pdf?version=1642512035","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006083111","display_name":"Michael Yampolsky","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Michael Yampolsky","raw_affiliation_strings":["Tower Semiconductor, Migdal Haemek 2310502, Israel"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tower Semiconductor, Migdal Haemek 2310502, Israel","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082597513","display_name":"Evgeny Pikhay","orcid":"https://orcid.org/0000-0002-0156-4241"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Evgeny Pikhay","raw_affiliation_strings":["Tower Semiconductor, Migdal Haemek 2310502, Israel"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tower Semiconductor, Migdal Haemek 2310502, Israel","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061181795","display_name":"Yakov Roizin","orcid":"https://orcid.org/0000-0002-9484-1681"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yakov Roizin","raw_affiliation_strings":["Tower Semiconductor, Migdal Haemek 2310502, Israel"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tower Semiconductor, Migdal Haemek 2310502, Israel","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5006083111"],"corresponding_institution_ids":[],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":0.7439,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.64986291,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":97},"biblio":{"volume":"22","issue":"3","first_page":"712","last_page":"712"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11992","display_name":"CCD and CMOS Imaging Sensors","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11992","display_name":"CCD and CMOS Imaging Sensors","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10990","display_name":"Infection Control and Ventilation","score":0.9807000160217285,"subfield":{"id":"https://openalex.org/subfields/2740","display_name":"Pulmonary and Respiratory Medicine"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.7584419250488281},{"id":"https://openalex.org/keywords/responsivity","display_name":"Responsivity","score":0.7483571171760559},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.7022445797920227},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6826612949371338},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.682237446308136},{"id":"https://openalex.org/keywords/ultraviolet","display_name":"Ultraviolet","score":0.6675934791564941},{"id":"https://openalex.org/keywords/photodiode","display_name":"Photodiode","score":0.5977484583854675},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.4559907615184784},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.366607666015625},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3300737738609314},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.29038703441619873},{"id":"https://openalex.org/keywords/photodetector","display_name":"Photodetector","score":0.2369297742843628},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12826800346374512},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11461767554283142}],"concepts":[{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.7584419250488281},{"id":"https://openalex.org/C178889773","wikidata":"https://www.wikidata.org/wiki/Q7316011","display_name":"Responsivity","level":3,"score":0.7483571171760559},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7022445797920227},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6826612949371338},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.682237446308136},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.6675934791564941},{"id":"https://openalex.org/C751236","wikidata":"https://www.wikidata.org/wiki/Q175943","display_name":"Photodiode","level":2,"score":0.5977484583854675},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.4559907615184784},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.366607666015625},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3300737738609314},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.29038703441619873},{"id":"https://openalex.org/C23125352","wikidata":"https://www.wikidata.org/wiki/Q210765","display_name":"Photodetector","level":2,"score":0.2369297742843628},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12826800346374512},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11461767554283142}],"mesh":[{"descriptor_ui":"D000086382","descriptor_name":"COVID-19","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D000086382","descriptor_name":"COVID-19","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D000086382","descriptor_name":"COVID-19","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D000086382","descriptor_name":"COVID-19","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D000086402","descriptor_name":"SARS-CoV-2","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D000086402","descriptor_name":"SARS-CoV-2","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D000086402","descriptor_name":"SARS-CoV-2","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D000086402","descriptor_name":"SARS-CoV-2","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004203","descriptor_name":"Disinfection","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004203","descriptor_name":"Disinfection","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004203","descriptor_name":"Disinfection","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004203","descriptor_name":"Disinfection","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013672","descriptor_name":"Technology","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013672","descriptor_name":"Technology","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013672","descriptor_name":"Technology","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013672","descriptor_name":"Technology","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s22030712","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22030712","pdf_url":"https://www.mdpi.com/1424-8220/22/3/712/pdf?version=1642512035","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:35161472","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/35161472","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:3da7944ada7f477184a9b0540a5f2ae9","is_oa":true,"landing_page_url":"https://doaj.org/article/3da7944ada7f477184a9b0540a5f2ae9","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 22, Iss 3, p 712 (2022)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/22/3/712/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s22030712","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 22; Issue 3; Pages: 712","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8839690","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8839690","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s22030712","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s22030712","pdf_url":"https://www.mdpi.com/1424-8220/22/3/712/pdf?version=1642512035","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.6499999761581421,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W4205443345.pdf"},"referenced_works_count":15,"referenced_works":["https://openalex.org/W2006506859","https://openalex.org/W2070498065","https://openalex.org/W2107742347","https://openalex.org/W2114276097","https://openalex.org/W2128973091","https://openalex.org/W2478517172","https://openalex.org/W2568658991","https://openalex.org/W2918916119","https://openalex.org/W2952666174","https://openalex.org/W3034266002","https://openalex.org/W3046756900","https://openalex.org/W3093078042","https://openalex.org/W3139163088","https://openalex.org/W3152611170","https://openalex.org/W4299908858"],"related_works":["https://openalex.org/W3134287205","https://openalex.org/W2103801052","https://openalex.org/W2043828272","https://openalex.org/W4307903441","https://openalex.org/W2038830093","https://openalex.org/W2752471724","https://openalex.org/W2574280370","https://openalex.org/W2313645367","https://openalex.org/W2066661519","https://openalex.org/W2085256615"],"abstract_inverted_index":{"We":[0],"report":[1],"on":[2,20],"ultraviolet":[3,36],"(UV)":[4],"sensors":[5,25,98],"employing":[6],"high":[7,136],"voltage":[8],"PIN":[9],"lateral":[10],"photodiode":[11],"strings":[12],"integrated":[13],"into":[14],"the":[15,60,82,96,120],"production":[16],"RF":[17],"SOI":[18,129],"(silicon":[19],"isolator)":[21],"CMOS":[22,128],"platform.":[23],"The":[24],"were":[26,113],"optimized":[27],"for":[28,49],"applications":[29],"that":[30],"require":[31],"measurements":[32],"of":[33,95],"short":[34,100],"wavelength":[35,101],"(UVC)":[37],"radiation":[38],"under":[39,99],"strong":[40],"visible":[41,69],"and":[42,65,70,105,107,134],"near-infrared":[43],"lights,":[44],"such":[45],"as":[46],"UV":[47,92,102],"used":[48],"sterilization":[50],"purposes,":[51],"e.g.,":[52],"COVID-19":[53],"disinfection.":[54],"Responsivity":[55],"above":[56],"0.1":[57],"A/W":[58],"in":[59,84,125,138],"UVC":[61],"range":[62],"was":[63,103],"achieved,":[64],"improved":[66],"blindness":[67],"to":[68,81],"infrared":[71],"(IR)":[72],"light":[73],"demonstrated":[74],"by":[75],"implementing":[76],"back-end":[77],"dielectric":[78],"layers":[79],"transparent":[80],"UV,":[83],"combination":[85],"with":[86,90,116],"differential":[87],"sensing":[88],"circuits":[89],"polysilicon":[91],"filters.":[93],"Degradation":[94],"developed":[97],"investigated":[104],"design":[106,122],"operation":[108],"regimes":[109],"allowing":[110],"decreased":[111],"degradation":[112],"discussed.":[114],"Compared":[115],"other":[117],"embedded":[118],"solutions,":[119],"current":[121],"is":[123],"implemented":[124],"a":[126],"mass-production":[127],"technology,":[130],"without":[131],"additional":[132],"masks,":[133],"has":[135],"sensitivity":[137],"UVC.":[139]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}