{"id":"https://openalex.org/W3207929475","doi":"https://doi.org/10.3390/s21206722","title":"Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process","display_name":"Noise Improvement of a-Si Microbolometers by the Post-Metal Annealing Process","publication_year":2021,"publication_date":"2021-10-10","ids":{"openalex":"https://openalex.org/W3207929475","doi":"https://doi.org/10.3390/s21206722","mag":"3207929475","pmid":"https://pubmed.ncbi.nlm.nih.gov/34695935"},"language":"en","primary_location":{"id":"doi:10.3390/s21206722","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21206722","pdf_url":"https://www.mdpi.com/1424-8220/21/20/6722/pdf?version=1634118383","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/20/6722/pdf?version=1634118383","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108389272","display_name":"Jae-Sub Oh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210164985","display_name":"National NanoFab Center","ror":"https://ror.org/05k1va520","country_code":"KR","type":"facility","lineage":["https://openalex.org/I157485424","https://openalex.org/I4210164985"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaesub Oh","raw_affiliation_strings":["Division of Nano Convergence Technology, National NanoFab Center, Daejeon-si 34141, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Nano Convergence Technology, National NanoFab Center, Daejeon-si 34141, Korea","institution_ids":["https://openalex.org/I4210164985"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112457148","display_name":"Hyeong-Sub Song","orcid":null},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyeong-sub Song","raw_affiliation_strings":["Foundry Business, Samsung Electronics Co., Suwon-si 18448, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Foundry Business, Samsung Electronics Co., Suwon-si 18448, Korea","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009658289","display_name":"Jongcheol Park","orcid":"https://orcid.org/0000-0003-4606-0036"},"institutions":[{"id":"https://openalex.org/I4210164985","display_name":"National NanoFab Center","ror":"https://ror.org/05k1va520","country_code":"KR","type":"facility","lineage":["https://openalex.org/I157485424","https://openalex.org/I4210164985"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jongcheol Park","raw_affiliation_strings":["Division of Nano Convergence Technology, National NanoFab Center, Daejeon-si 34141, Korea"],"raw_orcid":"https://orcid.org/0000-0003-4606-0036","affiliations":[{"raw_affiliation_string":"Division of Nano Convergence Technology, National NanoFab Center, Daejeon-si 34141, Korea","institution_ids":["https://openalex.org/I4210164985"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067219425","display_name":"Jong\u2010Kwon Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I22586776","display_name":"Cheongju University","ror":"https://ror.org/02tx4na66","country_code":"KR","type":"education","lineage":["https://openalex.org/I22586776"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jong-Kwon Lee","raw_affiliation_strings":["Division of Energy and Optical Technology Convergence, Cheongju University, Cheongju-si 28503, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Division of Energy and Optical Technology Convergence, Cheongju University, Cheongju-si 28503, Korea","institution_ids":["https://openalex.org/I22586776"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5067219425"],"corresponding_institution_ids":["https://openalex.org/I22586776"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.0262,"has_fulltext":true,"cited_by_count":15,"citation_normalized_percentile":{"value":0.72881277,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":"21","issue":"20","first_page":"6722","last_page":"6722"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11856","display_name":"Thermography and Photoacoustic Techniques","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12019","display_name":"Calibration and Measurement Techniques","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/temperature-coefficient","display_name":"Temperature coefficient","score":0.702560305595398},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6782834529876709},{"id":"https://openalex.org/keywords/annealing","display_name":"Annealing (glass)","score":0.6288110613822937},{"id":"https://openalex.org/keywords/passivation","display_name":"Passivation","score":0.585999608039856},{"id":"https://openalex.org/keywords/amorphous-solid","display_name":"Amorphous solid","score":0.5354998111724854},{"id":"https://openalex.org/keywords/full-width-at-half-maximum","display_name":"Full width at half maximum","score":0.4916122555732727},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46827009320259094},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.41056889295578003},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.331795334815979},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.32874196767807007},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.3250073492527008},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.21748322248458862},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.1498580276966095},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.09943398833274841},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.07573792338371277}],"concepts":[{"id":"https://openalex.org/C16643434","wikidata":"https://www.wikidata.org/wiki/Q898642","display_name":"Temperature coefficient","level":2,"score":0.702560305595398},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6782834529876709},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.6288110613822937},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.585999608039856},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5354998111724854},{"id":"https://openalex.org/C108649604","wikidata":"https://www.wikidata.org/wiki/Q1065170","display_name":"Full width at half maximum","level":2,"score":0.4916122555732727},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46827009320259094},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.41056889295578003},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.331795334815979},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.32874196767807007},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3250073492527008},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.21748322248458862},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1498580276966095},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.09943398833274841},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.07573792338371277},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s21206722","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21206722","pdf_url":"https://www.mdpi.com/1424-8220/21/20/6722/pdf?version=1634118383","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:34695935","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34695935","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:2be2866ce5454c998394b81b2c56434f","is_oa":true,"landing_page_url":"https://doaj.org/article/2be2866ce5454c998394b81b2c56434f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 20, p 6722 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/20/6722/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21206722","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 20; Pages: 6722","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8538186","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8538186","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21206722","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21206722","pdf_url":"https://www.mdpi.com/1424-8220/21/20/6722/pdf?version=1634118383","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.7400000095367432,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G136606028","display_name":null,"funder_award_id":"CRC-19-02-ETRI","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"},{"id":"https://openalex.org/G2874201682","display_name":null,"funder_award_id":"CRC-19-02-ETRI","funder_id":"https://openalex.org/F4320328359","funder_display_name":"Ministry of Science and ICT, South Korea"},{"id":"https://openalex.org/G3077585752","display_name":null,"funder_award_id":"2021R1A2C2014098","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"}],"funders":[{"id":"https://openalex.org/F4320320671","display_name":"National Research Foundation","ror":"https://ror.org/05s0g1g46"},{"id":"https://openalex.org/F4320322093","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10"},{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"},{"id":"https://openalex.org/F4320328359","display_name":"Ministry of Science and ICT, South Korea","ror":"https://ror.org/01wpjm123"},{"id":"https://openalex.org/F4320336895","display_name":"National NanoFab Center","ror":"https://ror.org/05k1va520"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3207929475.pdf","grobid_xml":"https://content.openalex.org/works/W3207929475.grobid-xml"},"referenced_works_count":30,"referenced_works":["https://openalex.org/W1636503557","https://openalex.org/W1964334669","https://openalex.org/W1974851488","https://openalex.org/W1976864243","https://openalex.org/W1978567164","https://openalex.org/W1999621311","https://openalex.org/W2001748629","https://openalex.org/W2004944414","https://openalex.org/W2022305408","https://openalex.org/W2036332951","https://openalex.org/W2047105899","https://openalex.org/W2053752663","https://openalex.org/W2056752855","https://openalex.org/W2061690803","https://openalex.org/W2067627024","https://openalex.org/W2104905662","https://openalex.org/W2136289510","https://openalex.org/W2163966671","https://openalex.org/W2575941463","https://openalex.org/W2745169581","https://openalex.org/W2767320333","https://openalex.org/W2896780690","https://openalex.org/W2951675104","https://openalex.org/W3009077659","https://openalex.org/W3015741351","https://openalex.org/W3080231972","https://openalex.org/W3094954528","https://openalex.org/W3137414448","https://openalex.org/W3158846631","https://openalex.org/W3181713933"],"related_works":["https://openalex.org/W2893117232","https://openalex.org/W2368982584","https://openalex.org/W957405543","https://openalex.org/W2100154643","https://openalex.org/W81629128","https://openalex.org/W2326159057","https://openalex.org/W1965743066","https://openalex.org/W1979157137","https://openalex.org/W1977288005","https://openalex.org/W2949086270"],"abstract_inverted_index":{"To":[0],"realize":[1],"high-resolution":[2],"thermal":[3],"images":[4],"with":[5,94],"high":[6],"quality,":[7],"it":[8,138],"is":[9,139,159],"essential":[10],"to":[11,48,126,133,150,161,182],"improve":[12],"the":[13,17,27,33,50,57,67,80,85,88,92,104,108,112,120,134,142,151,154,162,168,178,183,188],"noise":[14,51,73,143],"characteristics":[15,144],"of":[16,35,53,62,66,87,91,153],"widely":[18],"adopted":[19],"uncooled":[20],"microbolometers.":[21,55],"In":[22],"this":[23],"work,":[24],"we":[25],"applied":[26,176],"post-metal":[28],"annealing":[29],"(PMA)":[30],"process":[31,110],"under":[32],"condition":[34],"deuterium":[36,174],"forming":[37],"gas,":[38],"at":[39,128],"10":[40,129],"atm":[41],"and":[42,59,78,119,173],"300":[43],"\u00b0C":[44],"for":[45],"30":[46],"min,":[47],"reduce":[49],"level":[52],"amorphous-Si":[54],"Here,":[56],"DC":[58],"temperature":[60],"coefficient":[61],"resistance":[63,89,115,155],"(TCR)":[64],"measurements":[65],"devices":[68],"as":[69,71,131],"well":[70],"1/f":[72],"analysis":[74],"were":[75],"performed":[76],"before":[77],"after":[79],"PMA":[81,109],"treatment,":[82],"while":[83],"changing":[84],"width":[86,152],"layer":[90],"microbolometers":[93,105],"35":[95],"\u03bcm":[96,99],"or":[97],"12":[98],"pixel.":[100,189],"As":[101],"a":[102],"result,":[103],"treated":[106],"by":[107,116,171],"show":[111],"decrease":[113],"in":[114,122,147],"about":[117],"60%":[118],"increase":[121],"TCR":[123],"value":[124],"up":[125],"48.2%":[127],"Hz,":[130],"compared":[132],"reference":[135],"device.":[136],"Moreover,":[137],"observed":[140],"that":[141],"are":[145],"improved":[146],"inverse":[148],"proportion":[149],"layer.":[156],"This":[157],"improvement":[158],"attributed":[160],"cured":[163],"poly-silicon":[164],"grain":[165],"boundary":[166],"through":[167],"hydrogen":[169],"passivation":[170],"heat":[172],"atoms":[175],"during":[177],"PMA,":[179],"which":[180],"leads":[181],"uniform":[184],"current":[185],"path":[186],"inside":[187]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":5}],"updated_date":"2026-05-16T08:24:45.110214","created_date":"2025-10-10T00:00:00"}