{"id":"https://openalex.org/W3202232019","doi":"https://doi.org/10.3390/s21196428","title":"A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging","display_name":"A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging","publication_year":2021,"publication_date":"2021-09-26","ids":{"openalex":"https://openalex.org/W3202232019","doi":"https://doi.org/10.3390/s21196428","mag":"3202232019","pmid":"https://pubmed.ncbi.nlm.nih.gov/34640747"},"language":"en","primary_location":{"id":"doi:10.3390/s21196428","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21196428","pdf_url":"https://www.mdpi.com/1424-8220/21/19/6428/pdf?version=1633997126","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/19/6428/pdf?version=1633997126","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101727791","display_name":"Pengfei Xu","orcid":"https://orcid.org/0000-0003-3738-3925"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pengfei Xu","raw_affiliation_strings":["College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":"https://orcid.org/0000-0003-3738-3925","affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031616117","display_name":"Chaowei Si","orcid":"https://orcid.org/0000-0002-0093-9881"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chaowei Si","raw_affiliation_strings":["Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101821532","display_name":"Yurong He","orcid":"https://orcid.org/0000-0002-3242-986X"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yurong He","raw_affiliation_strings":["College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102965506","display_name":"Zhenyu Wei","orcid":"https://orcid.org/0000-0003-2461-9281"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenyu Wei","raw_affiliation_strings":["College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033553857","display_name":"Lu Jia","orcid":"https://orcid.org/0000-0001-5248-9504"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lu Jia","raw_affiliation_strings":["College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060829352","display_name":"Guowei Han","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guowei Han","raw_affiliation_strings":["Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Jin Ning","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jin Ning","raw_affiliation_strings":["Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101678468","display_name":"Fuhua Yang","orcid":"https://orcid.org/0000-0002-9981-9387"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210149211","display_name":"Institute of Semiconductors","ror":"https://ror.org/048dd0611","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210149211"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Fuhua Yang","raw_affiliation_strings":["College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China","institution_ids":["https://openalex.org/I4210149211","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5101678468"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210149211","https://openalex.org/I4210165038"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.1184,"has_fulltext":true,"cited_by_count":13,"citation_normalized_percentile":{"value":0.77651417,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"21","issue":"19","first_page":"6428","last_page":"6428"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.778853714466095},{"id":"https://openalex.org/keywords/tuning-fork","display_name":"Tuning fork","score":0.7545917630195618},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.6764422655105591},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5943613648414612},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5266948938369751},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5067508816719055},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4733707308769226},{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.456071674823761},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.43622609972953796},{"id":"https://openalex.org/keywords/differentiator","display_name":"Differentiator","score":0.4331423044204712},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.3058123290538788},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27084657549858093},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2660556733608246},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.22130319476127625},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20159408450126648}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.778853714466095},{"id":"https://openalex.org/C107677527","wikidata":"https://www.wikidata.org/wiki/Q201898","display_name":"Tuning fork","level":3,"score":0.7545917630195618},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.6764422655105591},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5943613648414612},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5266948938369751},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5067508816719055},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4733707308769226},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.456071674823761},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.43622609972953796},{"id":"https://openalex.org/C12112733","wikidata":"https://www.wikidata.org/wiki/Q2659948","display_name":"Differentiator","level":3,"score":0.4331423044204712},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.3058123290538788},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27084657549858093},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2660556733608246},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.22130319476127625},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20159408450126648},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s21196428","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21196428","pdf_url":"https://www.mdpi.com/1424-8220/21/19/6428/pdf?version=1633997126","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:34640747","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34640747","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:59a30e00f821456c83f5f41cc67995b4","is_oa":true,"landing_page_url":"https://doaj.org/article/59a30e00f821456c83f5f41cc67995b4","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 19, p 6428 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/19/6428/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21196428","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 19; Pages: 6428","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8512718","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8512718","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21196428","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21196428","pdf_url":"https://www.mdpi.com/1424-8220/21/19/6428/pdf?version=1633997126","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5699999928474426,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3202232019.pdf","grobid_xml":"https://content.openalex.org/works/W3202232019.grobid-xml"},"referenced_works_count":20,"referenced_works":["https://openalex.org/W1253510265","https://openalex.org/W1501809753","https://openalex.org/W1595610629","https://openalex.org/W1645226208","https://openalex.org/W1975762650","https://openalex.org/W1991619555","https://openalex.org/W2001330891","https://openalex.org/W2088637660","https://openalex.org/W2097296443","https://openalex.org/W2097772002","https://openalex.org/W2098473452","https://openalex.org/W2134840571","https://openalex.org/W2150502990","https://openalex.org/W2157301463","https://openalex.org/W2568426367","https://openalex.org/W2811436806","https://openalex.org/W2908312775","https://openalex.org/W2963377315","https://openalex.org/W3156527481","https://openalex.org/W3158109665"],"related_works":["https://openalex.org/W2127249521","https://openalex.org/W2043475313","https://openalex.org/W2362727837","https://openalex.org/W2568426367","https://openalex.org/W3144251752","https://openalex.org/W2009915232","https://openalex.org/W2395160601","https://openalex.org/W2951759015","https://openalex.org/W2185308786","https://openalex.org/W2104393105"],"abstract_inverted_index":{"Tuning":[0],"fork":[1,21],"gyroscopes":[2],"(TFGs)":[3],"are":[4,69],"promising":[5],"for":[6,32],"potential":[7],"high-precision":[8],"applications.":[9],"This":[10,169],"work":[11],"proposes":[12],"and":[13,57,66,77,103,126,159,166,179,220],"experimentally":[14],"demonstrates":[15],"a":[16,42,83,134,140,172,180,186,212,221],"novel":[17,84],"high-Q":[18],"dual-mass":[19],"tuning":[20],"microelectromechanical":[22],"system":[23],"(MEMS)":[24],"gyroscope":[25,128],"utilizing":[26],"three-dimensional":[27],"(3D)":[28],"packaging":[29,86,151],"techniques.":[30],"Except":[31],"two":[33],"symmetrically":[34,43],"decoupled":[35,44],"proof":[36],"masses":[37],"(PM)":[38],"with":[39,139,148,185],"synchronization":[40],"structures,":[41],"lever":[45],"structure":[46],"is":[47,88,108,120,131],"designed":[48],"to":[49,90,111,122,164],"force":[50],"the":[51,73,112,154,157],"antiparallel,":[52],"antiphase":[53,79],"drive":[54,158],"mode":[55,195],"motion":[56],"eliminate":[58],"low":[59,222],"frequency":[60],"spurious":[61],"modes.":[62],"Thermoelastic":[63],"damping":[64],"(TED)":[65],"anchor":[67],"loss":[68],"greatly":[70],"reduced":[71],"by":[72,100,208],"linearly":[74],"coupled,":[75],"momentum-":[76],"torque-balanced":[78],"sense":[80,160],"mode.":[81],"Moreover,":[82],"3D":[85,150],"technique":[87],"used":[89],"realize":[91,123],"high":[92,141,181],"Q-factors.":[93],"A":[94,116],"composite":[95],"substrate":[96],"encapsulation":[97],"cap,":[98],"fabricated":[99],"through-silicon-via":[101],"(TSV)":[102],"glass-in-silicon":[104],"(GIS)":[105],"reflow":[106],"processes,":[107],"anodically":[109],"bonded":[110],"wafer-scale":[113],"sensing":[114],"structures.":[115],"self-developed":[117],"control":[118,125],"circuit":[119],"adopted":[121],"loop":[124],"characterize":[127],"performances.":[129],"It":[130],"shown":[132],"that":[133],"high-reliability":[135],"electrical":[136],"connection,":[137],"together":[138],"air":[142],"impermeability":[143],"package,":[144],"can":[145,204],"be":[146,205],"fulfilled":[147],"this":[149],"technique.":[152],"Furthermore,":[153],"Q-factors":[155],"of":[156,176,183,190,218,226],"modes":[161],"reach":[162],"up":[163],"51,947":[165],"49,249,":[167],"respectively.":[168],"TFG":[170],"realizes":[171],"wide":[173],"measurement":[174],"range":[175],"\u00b11800":[177],"\u00b0/s":[178],"resolution":[182],"0.1\u00b0/s":[184],"scale":[187],"factor":[188],"nonlinearity":[189],"720":[191],"ppm":[192],"after":[193],"automatic":[194],"matching.":[196],"In":[197],"addition,":[198],"long-term":[199],"zero-rate":[200],"output":[201],"(ZRO)":[202],"drift":[203],"effectively":[206],"suppressed":[207],"temperature":[209],"compensation,":[210],"inducing":[211],"small":[213],"angle":[214],"random":[215],"walk":[216],"(ARW)":[217],"0.923\u00b0/\u221ah":[219],"bias":[223],"instability":[224],"(BI)":[225],"9.270\u00b0/h.":[227]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}