{"id":"https://openalex.org/W3194705217","doi":"https://doi.org/10.3390/s21165572","title":"Extension and Limits of Depolarization-Fringe Contrast Roughness Method in Sub-Micron Domain","display_name":"Extension and Limits of Depolarization-Fringe Contrast Roughness Method in Sub-Micron Domain","publication_year":2021,"publication_date":"2021-08-18","ids":{"openalex":"https://openalex.org/W3194705217","doi":"https://doi.org/10.3390/s21165572","mag":"3194705217","pmid":"https://pubmed.ncbi.nlm.nih.gov/34451014"},"language":"en","primary_location":{"id":"doi:10.3390/s21165572","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21165572","pdf_url":"https://www.mdpi.com/1424-8220/21/16/5572/pdf?version=1629338045","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/16/5572/pdf?version=1629338045","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109375621","display_name":"Franziska P\u00f6ller","orcid":null},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Franziska P\u00f6ller","raw_affiliation_strings":["Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany"],"raw_orcid":"https://orcid.org/0000-0002-4169-5713","affiliations":[{"raw_affiliation_string":"Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068073320","display_name":"F\u00e9lix Salazar Bloise","orcid":"https://orcid.org/0000-0003-2157-4380"},"institutions":[{"id":"https://openalex.org/I88060688","display_name":"Universidad Polit\u00e9cnica de Madrid","ror":"https://ror.org/03n6nwv02","country_code":"ES","type":"education","lineage":["https://openalex.org/I88060688"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"F\u00e9lix Salazar Bloise","raw_affiliation_strings":["ETSI Minas y Energ\u00eda, Universidad Polit\u00e9cnica de Madrid, Calle de R\u00edos Rosas 21, 28003 Madrid, Spain"],"raw_orcid":"https://orcid.org/0000-0003-2157-4380","affiliations":[{"raw_affiliation_string":"ETSI Minas y Energ\u00eda, Universidad Polit\u00e9cnica de Madrid, Calle de R\u00edos Rosas 21, 28003 Madrid, Spain","institution_ids":["https://openalex.org/I88060688"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006055932","display_name":"Martin Jakobi","orcid":"https://orcid.org/0000-0003-4391-6118"},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Martin Jakobi","raw_affiliation_strings":["Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065344453","display_name":"Jie Dong","orcid":"https://orcid.org/0000-0002-8425-5136"},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jie Dong","raw_affiliation_strings":["Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany"],"raw_orcid":"https://orcid.org/0000-0002-8425-5136","affiliations":[{"raw_affiliation_string":"Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany","institution_ids":["https://openalex.org/I62916508"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072750068","display_name":"Alexander W. Koch","orcid":null},"institutions":[{"id":"https://openalex.org/I62916508","display_name":"Technical University of Munich","ror":"https://ror.org/02kkvpp62","country_code":"DE","type":"education","lineage":["https://openalex.org/I62916508"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Alexander W. Koch","raw_affiliation_strings":["Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Measurement Systems and Sensor Technology, Technical University of Munich, Theresienstrasse 90, 80333 Munich, Germany","institution_ids":["https://openalex.org/I62916508"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5109375621"],"corresponding_institution_ids":["https://openalex.org/I62916508"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":1951,"currency":"EUR","value_usd":2104},"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.1258261,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"21","issue":"16","first_page":"5572","last_page":"5572"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stylus","display_name":"Stylus","score":0.8219902515411377},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.7261632084846497},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6955181956291199},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.6345822215080261},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5187451839447021},{"id":"https://openalex.org/keywords/michelson-interferometer","display_name":"Michelson interferometer","score":0.4679960608482361},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.45005369186401367},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.4389808177947998},{"id":"https://openalex.org/keywords/profilometer","display_name":"Profilometer","score":0.43251651525497437},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.37491607666015625},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.28312647342681885},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21349948644638062}],"concepts":[{"id":"https://openalex.org/C164086593","wikidata":"https://www.wikidata.org/wiki/Q1227035","display_name":"Stylus","level":2,"score":0.8219902515411377},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.7261632084846497},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6955181956291199},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.6345822215080261},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5187451839447021},{"id":"https://openalex.org/C9809166","wikidata":"https://www.wikidata.org/wiki/Q733088","display_name":"Michelson interferometer","level":3,"score":0.4679960608482361},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.45005369186401367},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.4389808177947998},{"id":"https://openalex.org/C79261456","wikidata":"https://www.wikidata.org/wiki/Q443756","display_name":"Profilometer","level":3,"score":0.43251651525497437},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.37491607666015625},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.28312647342681885},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21349948644638062},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[],"locations_count":7,"locations":[{"id":"doi:10.3390/s21165572","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21165572","pdf_url":"https://www.mdpi.com/1424-8220/21/16/5572/pdf?version=1629338045","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:34451014","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34451014","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:140b36f34ae941acafc48e32d090451f","is_oa":true,"landing_page_url":"https://doaj.org/article/140b36f34ae941acafc48e32d090451f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 16, p 5572 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/16/5572/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21165572","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 16; Pages: 5572","raw_type":"Text"},{"id":"pmh:oai:mediatum.ub.tum.de:node/1621654","is_oa":false,"landing_page_url":"https://mediatum.ub.tum.de/1621654","pdf_url":null,"source":{"id":"https://openalex.org/S4306400453","display_name":"mediaTUM \u2013 the media and publications repository of the Technical University Munich (Technical University Munich)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I62916508","host_organization_name":"Technical University of Munich","host_organization_lineage":["https://openalex.org/I62916508"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"article"},{"id":"pmh:oai:mediatum.ub.tum.de:node/1726543","is_oa":true,"landing_page_url":"https://mediatum.ub.tum.de/1726543","pdf_url":null,"source":{"id":"https://openalex.org/S4377196330","display_name":"mediaTUM  (Technical University of Munich)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I62916508","host_organization_name":"Technical University of Munich","host_organization_lineage":["https://openalex.org/I62916508"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"article"},{"id":"pmh:oai:pubmedcentral.nih.gov:8402283","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8402283","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21165572","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21165572","pdf_url":"https://www.mdpi.com/1424-8220/21/16/5572/pdf?version=1629338045","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.6000000238418579}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W3194705217.pdf"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W1965082509","https://openalex.org/W1973085526","https://openalex.org/W1983214066","https://openalex.org/W1987233150","https://openalex.org/W1993646578","https://openalex.org/W2001466414","https://openalex.org/W2002083352","https://openalex.org/W2005342372","https://openalex.org/W2007561523","https://openalex.org/W2010174176","https://openalex.org/W2023525328","https://openalex.org/W2025092603","https://openalex.org/W2027839592","https://openalex.org/W2032015601","https://openalex.org/W2044727638","https://openalex.org/W2057058909","https://openalex.org/W2064001737","https://openalex.org/W2069303008","https://openalex.org/W2074522109","https://openalex.org/W2076654553","https://openalex.org/W2080691976","https://openalex.org/W2081418737","https://openalex.org/W2085302603","https://openalex.org/W2085334782","https://openalex.org/W2113653293","https://openalex.org/W2116060048","https://openalex.org/W2128574187","https://openalex.org/W2136418212","https://openalex.org/W2262691156","https://openalex.org/W2346278083","https://openalex.org/W2944967182","https://openalex.org/W3009365247"],"related_works":["https://openalex.org/W4321517106","https://openalex.org/W1970739558","https://openalex.org/W2909631434","https://openalex.org/W2314589842","https://openalex.org/W2018071903","https://openalex.org/W1004864346","https://openalex.org/W4321517215","https://openalex.org/W3194413053","https://openalex.org/W2991726348","https://openalex.org/W2349732462"],"abstract_inverted_index":{"To":[0],"guarantee":[1],"quality":[2],"standards":[3],"for":[4,46],"the":[5,27,32,47,73,78,99,102,111,121,126,140,144,161,167,175,178,183,188,191,197,203,207],"industry,":[6],"surface":[7,33,103],"properties,":[8],"particularly":[9],"those":[10],"of":[11,19,50,63,98,143,177,190,196,206],"roughness,":[12],"must":[13],"be":[14,35,58,106],"considered":[15],"in":[16,129,147,151],"many":[17],"areas":[18],"application.":[20],"Today,":[21],"several":[22],"methods":[23],"are":[24,155,199],"available":[25],"on":[26,84,94],"market,":[28],"but":[29],"some":[30],"damage":[31],"to":[34,68,138],"tested":[36],"as":[37,60],"they":[38],"measure":[39],"it":[40],"by":[41,77,89,109,213],"contact.":[42],"A":[43],"non-contact":[44],"method":[45],"precise":[48],"estimation":[49],"sub-micron":[51],"roughness":[52,65,104,128,209],"values":[53,205],"is":[54,82],"presented,":[55],"which":[56,152,171],"can":[57,105],"used":[59],"an":[61],"extension":[62],"existing":[64],"measurement":[66,141],"techniques":[67],"improve":[69],"them":[70],"further":[71],"considering":[72,133],"depolarized":[74],"light":[75],"reflected":[76],"sample.":[79],"This":[80,114,135],"setup":[81],"based":[83],"a":[85,91,95,117,148,216],"Michelson":[86],"interferometer,":[87],"and":[88],"introducing":[90],"quarter-wave":[92],"plate":[93],"half":[96],"part":[97],"reference":[100,204],"mirror,":[101],"directly":[107],"derived":[108],"measuring":[110],"fringe":[112,168],"contrasts.":[113],"article":[115],"introduces":[116],"simple":[118],"model":[119],"describing":[120],"intensity":[122],"distortions":[123],"resulting":[124],"from":[125],"microscopic":[127],"divided":[130],"interferograms":[131],"when":[132],"depolarization.":[134],"work":[136],"aimed":[137],"extend":[139],"range":[142],"technique":[145],"developed":[146],"previous":[149],"work,":[150],"depolarization":[153,176],"effects":[154],"taken":[156],"into":[157],"account.":[158],"For":[159,201],"verification,":[160],"experimental":[162],"results":[163],"were":[164,210],"compared":[165],"with":[166,215],"contrast":[169],"technique,":[170],"does":[172],"not":[173],"consider":[174],"scattered":[179],"light,":[180],"especially":[181],"regarding":[182],"extended":[184],"wavelength":[185],"interval,":[186],"highlighting":[187],"limits":[189],"technique.":[192],"In":[193],"addition,":[194],"simulations":[195],"experiments":[198],"presented.":[200],"comparison,":[202],"sample":[208],"also":[211],"generated":[212],"measurements":[214],"stylus":[217],"profiler.":[218]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}