{"id":"https://openalex.org/W3185468689","doi":"https://doi.org/10.3390/s21155153","title":"Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays","display_name":"Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays","publication_year":2021,"publication_date":"2021-07-29","ids":{"openalex":"https://openalex.org/W3185468689","doi":"https://doi.org/10.3390/s21155153","mag":"3185468689","pmid":"https://pubmed.ncbi.nlm.nih.gov/34372390"},"language":"en","primary_location":{"id":"doi:10.3390/s21155153","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21155153","pdf_url":"https://www.mdpi.com/1424-8220/21/15/5153/pdf?version=1627891923","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"review","indexed_in":["crossref","datacite","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/15/5153/pdf?version=1627891923","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087240198","display_name":"Marcel Tintelott","orcid":null},"institutions":[{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcel Tintelott","raw_affiliation_strings":["Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027986704","display_name":"Vivek Pachauri","orcid":"https://orcid.org/0000-0003-3275-2429"},"institutions":[{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Vivek Pachauri","raw_affiliation_strings":["Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":"https://orcid.org/0000-0003-3275-2429","affiliations":[{"raw_affiliation_string":"Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034116377","display_name":"Sven Ingebrandt","orcid":"https://orcid.org/0000-0002-0405-2727"},"institutions":[{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sven Ingebrandt","raw_affiliation_strings":["Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":"https://orcid.org/0000-0002-0405-2727","affiliations":[{"raw_affiliation_string":"Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029506794","display_name":"Xuan Thang Vu","orcid":"https://orcid.org/0000-0001-6797-2443"},"institutions":[{"id":"https://openalex.org/I887968799","display_name":"RWTH Aachen University","ror":"https://ror.org/04xfq0f34","country_code":"DE","type":"education","lineage":["https://openalex.org/I887968799"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Xuan Thang Vu","raw_affiliation_strings":["Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany"],"raw_orcid":"https://orcid.org/0000-0001-6797-2443","affiliations":[{"raw_affiliation_string":"Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I887968799"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5029506794"],"corresponding_institution_ids":["https://openalex.org/I887968799"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.4625,"has_fulltext":true,"cited_by_count":45,"citation_normalized_percentile":{"value":0.88988835,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"21","issue":"15","first_page":"5153","last_page":"5153"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.75215744972229},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7426836490631104},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6641726493835449},{"id":"https://openalex.org/keywords/nanowire","display_name":"Nanowire","score":0.6510351300239563},{"id":"https://openalex.org/keywords/biosensor","display_name":"Biosensor","score":0.5734829306602478},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5587610602378845},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.5553532838821411},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.5432620048522949},{"id":"https://openalex.org/keywords/field-effect-transistor","display_name":"Field-effect transistor","score":0.51387619972229},{"id":"https://openalex.org/keywords/nanometre","display_name":"Nanometre","score":0.49519529938697815},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4735756814479828},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.4483826458454132},{"id":"https://openalex.org/keywords/nanosensor","display_name":"Nanosensor","score":0.42231106758117676},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.41944241523742676},{"id":"https://openalex.org/keywords/nanoelectronics","display_name":"Nanoelectronics","score":0.414179265499115},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2666603922843933},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.14771848917007446},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.07880187034606934},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.06677097082138062}],"concepts":[{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.75215744972229},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7426836490631104},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6641726493835449},{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.6510351300239563},{"id":"https://openalex.org/C160756335","wikidata":"https://www.wikidata.org/wiki/Q669391","display_name":"Biosensor","level":2,"score":0.5734829306602478},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5587610602378845},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5553532838821411},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.5432620048522949},{"id":"https://openalex.org/C145598152","wikidata":"https://www.wikidata.org/wiki/Q176097","display_name":"Field-effect transistor","level":4,"score":0.51387619972229},{"id":"https://openalex.org/C77066764","wikidata":"https://www.wikidata.org/wiki/Q178674","display_name":"Nanometre","level":2,"score":0.49519529938697815},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4735756814479828},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4483826458454132},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.42231106758117676},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.41944241523742676},{"id":"https://openalex.org/C141400236","wikidata":"https://www.wikidata.org/wiki/Q1479544","display_name":"Nanoelectronics","level":2,"score":0.414179265499115},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2666603922843933},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.14771848917007446},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07880187034606934},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.06677097082138062},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012825","descriptor_name":"Silicon","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014173","descriptor_name":"Transistors, Electronic","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014173","descriptor_name":"Transistors, Electronic","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014173","descriptor_name":"Transistors, Electronic","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014173","descriptor_name":"Transistors, Electronic","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D053770","descriptor_name":"Nanowires","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D053770","descriptor_name":"Nanowires","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D053770","descriptor_name":"Nanowires","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D053770","descriptor_name":"Nanowires","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true}],"locations_count":6,"locations":[{"id":"doi:10.3390/s21155153","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21155153","pdf_url":"https://www.mdpi.com/1424-8220/21/15/5153/pdf?version=1627891923","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:34372390","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34372390","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:76a740055c294bdbb48718004b232f50","is_oa":true,"landing_page_url":"https://doaj.org/article/76a740055c294bdbb48718004b232f50","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 15, p 5153 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/15/5153/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21155153","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 15; Pages: 5153","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8347659","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8347659","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"doi:10.18154/rwth-2021-08032","is_oa":true,"landing_page_url":"https://doi.org/10.18154/rwth-2021-08032","pdf_url":null,"source":{"id":"https://openalex.org/S4306401033","display_name":"RWTH Publications (RWTH Aachen)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I887968799","host_organization_name":"RWTH Aachen University","host_organization_lineage":["https://openalex.org/I887968799"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"article-journal"}],"best_oa_location":{"id":"doi:10.3390/s21155153","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21155153","pdf_url":"https://www.mdpi.com/1424-8220/21/15/5153/pdf?version=1627891923","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","score":0.4099999964237213,"display_name":"Industry, innovation and infrastructure"}],"awards":[{"id":"https://openalex.org/G305903420","display_name":"Molecular Programs for neurodegenerative disease Protein Biosensing","funder_award_id":"ANR-17-CE18-0031","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"},{"id":"https://openalex.org/G7322481888","display_name":"Molekulare Programme f\u00fcr die Biodetektion von Krankheitsmarkern in neurodegenerativen Erkrankungen","funder_award_id":"391107823","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"}],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"},{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3185468689.pdf","grobid_xml":"https://content.openalex.org/works/W3185468689.grobid-xml"},"referenced_works_count":96,"referenced_works":["https://openalex.org/W625133991","https://openalex.org/W946010953","https://openalex.org/W1516992425","https://openalex.org/W1536026606","https://openalex.org/W1562815408","https://openalex.org/W1968782482","https://openalex.org/W1969265144","https://openalex.org/W1972407523","https://openalex.org/W1982184370","https://openalex.org/W1986643359","https://openalex.org/W1987416224","https://openalex.org/W1992560326","https://openalex.org/W1999951714","https://openalex.org/W2001819609","https://openalex.org/W2004610448","https://openalex.org/W2008816109","https://openalex.org/W2008818599","https://openalex.org/W2012152864","https://openalex.org/W2013095323","https://openalex.org/W2014065889","https://openalex.org/W2014420544","https://openalex.org/W2017655623","https://openalex.org/W2018614219","https://openalex.org/W2020452955","https://openalex.org/W2033950836","https://openalex.org/W2040268774","https://openalex.org/W2047491637","https://openalex.org/W2048056780","https://openalex.org/W2058957939","https://openalex.org/W2059425774","https://openalex.org/W2062479532","https://openalex.org/W2064861305","https://openalex.org/W2064952285","https://openalex.org/W2068235344","https://openalex.org/W2069362588","https://openalex.org/W2072660350","https://openalex.org/W2077609143","https://openalex.org/W2079109852","https://openalex.org/W2079148569","https://openalex.org/W2079406653","https://openalex.org/W2082486318","https://openalex.org/W2083600412","https://openalex.org/W2084857126","https://openalex.org/W2087467014","https://openalex.org/W2089603967","https://openalex.org/W2089776731","https://openalex.org/W2092333682","https://openalex.org/W2097565302","https://openalex.org/W2107193043","https://openalex.org/W2112333830","https://openalex.org/W2113272527","https://openalex.org/W2130686586","https://openalex.org/W2131499698","https://openalex.org/W2133955122","https://openalex.org/W2137366465","https://openalex.org/W2143243991","https://openalex.org/W2151385252","https://openalex.org/W2152858635","https://openalex.org/W2159976263","https://openalex.org/W2160660291","https://openalex.org/W2167007099","https://openalex.org/W2214221740","https://openalex.org/W2264947579","https://openalex.org/W2314469249","https://openalex.org/W2330444599","https://openalex.org/W2464264446","https://openalex.org/W2472968342","https://openalex.org/W2520433866","https://openalex.org/W2547501022","https://openalex.org/W2563091869","https://openalex.org/W2566193534","https://openalex.org/W2725266022","https://openalex.org/W2734822630","https://openalex.org/W2757913998","https://openalex.org/W2783691615","https://openalex.org/W2794113654","https://openalex.org/W2797688965","https://openalex.org/W2801379890","https://openalex.org/W2809136186","https://openalex.org/W2810542460","https://openalex.org/W2885497569","https://openalex.org/W2886477946","https://openalex.org/W2886902516","https://openalex.org/W2909919887","https://openalex.org/W2914011913","https://openalex.org/W2937463396","https://openalex.org/W2945247767","https://openalex.org/W2948230686","https://openalex.org/W2971619966","https://openalex.org/W3032942731","https://openalex.org/W3045754416","https://openalex.org/W3045973528","https://openalex.org/W3047192977","https://openalex.org/W3114047752","https://openalex.org/W3117847684","https://openalex.org/W6945298313"],"related_works":["https://openalex.org/W3126872468","https://openalex.org/W2385877031","https://openalex.org/W2188796877","https://openalex.org/W3043329414","https://openalex.org/W2319271163","https://openalex.org/W4297682646","https://openalex.org/W2089770167","https://openalex.org/W2381853949","https://openalex.org/W2197384375","https://openalex.org/W1565953738"],"abstract_inverted_index":{"Silicon":[0],"nanowire":[1],"field-effect":[2],"transistors":[3],"(SiNW-FET)":[4],"have":[5,47],"been":[6],"studied":[7],"as":[8,22],"ultra-high":[9],"sensitive":[10],"sensors":[11,46,133],"for":[12,25,41,93,134,157,164,176,192,209,261],"the":[13,42,60,67,129,153,158,179,183,189,205,218,237,243,254],"detection":[14],"of":[15,44,53,62,75,114,119,132,137,141,152,161,188,204,245,253],"biomolecules,":[16],"metal":[17],"ions,":[18],"gas":[19],"molecules":[20],"and":[21,103,168,216,233,250],"an":[23],"interface":[24],"biological":[26],"systems":[27],"due":[28],"to":[29,73,84,106,110,224],"their":[30,48,142],"remarkable":[31],"electronic":[32],"properties.":[33],"\"Bottom-up\"":[34],"or":[35],"\"top-down\"":[36],"approaches":[37],"that":[38,221],"are":[39,174],"used":[40],"fabrication":[43,131,172,184,231],"SiNW-FET":[45,255],"respective":[49],"limitations":[50],"in":[51,66,77,116,124,145,166,182,236],"terms":[52],"technology":[54],"development.":[55],"The":[56,97,139],"\"bottom-up\"":[57],"approach":[58,99],"allows":[59],"synthesis":[61],"silicon":[63],"nanowires":[64],"(SiNW)":[65],"range":[68],"from":[69],"a":[70,90,111,125,135,193,201,226],"few":[71,112],"nm":[72,76],"hundreds":[74],"diameter.":[78],"However,":[79],"it":[80],"is":[81,186],"technologically":[82],"challenging":[83],"realize":[85],"reproducible":[86],"bottom-up":[87],"devices":[88],"on":[89,230,257],"large":[91],"scale":[92],"clinical":[94],"biosensing":[95,262],"applications.":[96,138,198],"top-down":[98],"involves":[100],"state-of-the-art":[101,238],"lithography":[102],"nanofabrication":[104],"techniques":[105,173],"cast":[107],"SiNW":[108],"down":[109],"10s":[113],"nanometers":[115],"diameter":[117],"out":[118],"high-quality":[120],"Silicon-on-Insulator":[121],"(SOI)":[122],"wafers":[123],"controlled":[126],"environment,":[127],"enabling":[128],"large-scale":[130,194],"myriad":[136],"possibility":[140],"wafer-scale":[143],"integration":[144,252],"standard":[146],"semiconductor":[147],"processes":[148,185,234],"makes":[149],"SiNW-FETs":[150],"one":[151,187],"most":[154],"promising":[155],"candidates":[156],"next":[159],"generation":[160],"biosensor":[162],"platforms":[163],"applications":[165],"healthcare":[167],"medicine.":[169],"Although":[170],"advanced":[171],"employed":[175],"fabricating":[177],"SiNW,":[178],"sensor-to-sensor":[180,211,227,259],"variation":[181],"limiting":[190],"factors":[191],"production":[195],"towards":[196],"commercial":[197],"To":[199],"provide":[200],"detailed":[202],"overview":[203],"technical":[206],"aspects":[207,220],"responsible":[208],"this":[210],"variation,":[212,228],"we":[213,241],"critically":[214],"review":[215],"discuss":[217,242],"fundamental":[219],"could":[222],"lead":[223],"such":[225],"focusing":[229],"parameters":[232],"described":[235],"literature.":[239],"Furthermore,":[240],"impact":[244],"functionalization":[246],"aspects,":[247],"surface":[248],"modification,":[249],"system":[251],"biosensors":[256],"post-fabrication-induced":[258],"variations":[260],"experiments.":[263]},"counts_by_year":[{"year":2026,"cited_by_count":5},{"year":2025,"cited_by_count":11},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":8},{"year":2022,"cited_by_count":11},{"year":2021,"cited_by_count":2}],"updated_date":"2026-06-22T08:00:12.763002","created_date":"2021-08-02T00:00:00"}