{"id":"https://openalex.org/W3169765903","doi":"https://doi.org/10.3390/s21124088","title":"Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure","display_name":"Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure","publication_year":2021,"publication_date":"2021-06-14","ids":{"openalex":"https://openalex.org/W3169765903","doi":"https://doi.org/10.3390/s21124088","mag":"3169765903","pmid":"https://pubmed.ncbi.nlm.nih.gov/34198533"},"language":"en","primary_location":{"id":"doi:10.3390/s21124088","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21124088","pdf_url":"https://www.mdpi.com/1424-8220/21/12/4088/pdf?version=1623751503","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/12/4088/pdf?version=1623751503","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081047434","display_name":"Andi Setiono","orcid":"https://orcid.org/0000-0002-2271-2792"},"institutions":[{"id":"https://openalex.org/I19128659","display_name":"Indonesian Institute of Sciences","ror":"https://ror.org/03d7c1451","country_code":"ID","type":"facility","lineage":["https://openalex.org/I19128659"]},{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE","ID"],"is_corresponding":true,"raw_author_name":"Andi Setiono","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia"],"raw_orcid":"https://orcid.org/0000-0002-2271-2792","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]},{"raw_affiliation_string":"Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia","institution_ids":["https://openalex.org/I19128659"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051854726","display_name":"Michael Fahrbach","orcid":"https://orcid.org/0000-0003-1027-9968"},"institutions":[{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Fahrbach","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0003-1027-9968","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010630359","display_name":"A. Deutschinger","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Alexander Deutschinger","raw_affiliation_strings":["SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006966944","display_name":"E.J. Fantner","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ernest J. Fantner","raw_affiliation_strings":["SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088496086","display_name":"Christian H. Schwalb","orcid":"https://orcid.org/0000-0003-2730-8059"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Christian H. Schwalb","raw_affiliation_strings":["GETec Microscopy GmbH, 1220 Vienna, Austria"],"raw_orcid":"https://orcid.org/0000-0003-2730-8059","affiliations":[{"raw_affiliation_string":"GETec Microscopy GmbH, 1220 Vienna, Austria","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008087321","display_name":"Iqbal Syamsu","orcid":"https://orcid.org/0000-0003-0419-313X"},"institutions":[{"id":"https://openalex.org/I19128659","display_name":"Indonesian Institute of Sciences","ror":"https://ror.org/03d7c1451","country_code":"ID","type":"facility","lineage":["https://openalex.org/I19128659"]},{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE","ID"],"is_corresponding":false,"raw_author_name":"Iqbal Syamsu","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia"],"raw_orcid":"https://orcid.org/0000-0003-0419-313X","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]},{"raw_affiliation_string":"Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia","institution_ids":["https://openalex.org/I19128659"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050145307","display_name":"Hutomo Suryo Wasisto","orcid":"https://orcid.org/0000-0002-4522-3625"},"institutions":[{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Hutomo Suryo Wasisto","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0002-4522-3625","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027087490","display_name":"Erwin Peiner","orcid":"https://orcid.org/0000-0001-5801-813X"},"institutions":[{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Erwin Peiner","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0001-5801-813X","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universit\u00e4t Braunschweig, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5081047434"],"corresponding_institution_ids":["https://openalex.org/I19128659","https://openalex.org/I94509681"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.3466,"has_fulltext":true,"cited_by_count":11,"citation_normalized_percentile":{"value":0.80663094,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"21","issue":"12","first_page":"4088","last_page":"4088"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7530807852745056},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.6946658492088318},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5856612920761108},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.49960851669311523},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4718199670314789},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4650733470916748},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.44651710987091064},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.353130578994751},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3229132890701294},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1736275553703308},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13684746623039246}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7530807852745056},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.6946658492088318},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5856612920761108},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.49960851669311523},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4718199670314789},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4650733470916748},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.44651710987091064},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.353130578994751},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3229132890701294},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1736275553703308},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13684746623039246},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D012907","descriptor_name":"Smoking","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012907","descriptor_name":"Smoking","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012907","descriptor_name":"Smoking","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true}],"locations_count":5,"locations":[{"id":"doi:10.3390/s21124088","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21124088","pdf_url":"https://www.mdpi.com/1424-8220/21/12/4088/pdf?version=1623751503","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:34198533","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/34198533","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:eb2a87d6b1e74499a37912c9a303a953","is_oa":true,"landing_page_url":"https://doaj.org/article/eb2a87d6b1e74499a37912c9a303a953","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 12, p 4088 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/12/4088/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21124088","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 12; Pages: 4088","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:8231909","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/8231909","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21124088","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21124088","pdf_url":"https://www.mdpi.com/1424-8220/21/12/4088/pdf?version=1623751503","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/3","score":0.6899999976158142,"display_name":"Good health and well-being"}],"awards":[{"id":"https://openalex.org/G1035051593","display_name":null,"funder_award_id":"8245-ID","funder_id":"https://openalex.org/F4320326442","funder_display_name":"Kementerian Riset, Teknologi dan Pendidikan Tinggi"},{"id":"https://openalex.org/G1383578038","display_name":null,"funder_award_id":"17IND05","funder_id":"https://openalex.org/F4320338394","funder_display_name":"European Metrology Programme for Innovation and Research"},{"id":"https://openalex.org/G6475901908","display_name":null,"funder_award_id":"17IND05 MicroProbes","funder_id":"https://openalex.org/F4320338394","funder_display_name":"European Metrology Programme for Innovation and Research"},{"id":"https://openalex.org/G7842005466","display_name":null,"funder_award_id":"Horizon 2020","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320326442","display_name":"Kementerian Riset, Teknologi dan Pendidikan Tinggi","ror":null},{"id":"https://openalex.org/F4320338394","display_name":"European Metrology Programme for Innovation and Research","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3169765903.pdf","grobid_xml":"https://content.openalex.org/works/W3169765903.grobid-xml"},"referenced_works_count":41,"referenced_works":["https://openalex.org/W1443879350","https://openalex.org/W2004103224","https://openalex.org/W2017955610","https://openalex.org/W2019412622","https://openalex.org/W2019999319","https://openalex.org/W2045334710","https://openalex.org/W2047030019","https://openalex.org/W2052271939","https://openalex.org/W2059507240","https://openalex.org/W2060627980","https://openalex.org/W2065826129","https://openalex.org/W2067397710","https://openalex.org/W2084415052","https://openalex.org/W2086124436","https://openalex.org/W2088925130","https://openalex.org/W2091678114","https://openalex.org/W2097276652","https://openalex.org/W2097790574","https://openalex.org/W2104527385","https://openalex.org/W2108444085","https://openalex.org/W2129051861","https://openalex.org/W2131997523","https://openalex.org/W2145801240","https://openalex.org/W2153006784","https://openalex.org/W2162639858","https://openalex.org/W2262654073","https://openalex.org/W2321026351","https://openalex.org/W2547894625","https://openalex.org/W2729115361","https://openalex.org/W2755824773","https://openalex.org/W2910347511","https://openalex.org/W2915038090","https://openalex.org/W2915970322","https://openalex.org/W2918948537","https://openalex.org/W2921351976","https://openalex.org/W2974977284","https://openalex.org/W2986159698","https://openalex.org/W2987468955","https://openalex.org/W2988410504","https://openalex.org/W3046663996","https://openalex.org/W4212797376"],"related_works":["https://openalex.org/W2150004397","https://openalex.org/W2540685717","https://openalex.org/W1973407535","https://openalex.org/W2025294681","https://openalex.org/W2122612554","https://openalex.org/W2474799934","https://openalex.org/W2105225674","https://openalex.org/W2045503801","https://openalex.org/W3040115070","https://openalex.org/W2121972528"],"abstract_inverted_index":{"An":[0],"electrothermal":[1,86],"piezoresistive":[2,87],"cantilever":[3,88],"(EPC)":[4,89],"sensor":[5,11,28,122,132,141],"is":[6,22,54,95,133],"a":[7,51,73,81,99,107,143,158],"low-cost":[8],"MEMS":[9],"resonance":[10,90,100,117],"that":[12,102],"provides":[13],"self-actuating":[14],"and":[15,37,47,114,136,142],"self-sensing":[16],"capabilities.":[17],"In":[18],"the":[19,26,57,63,67,116,120,130],"platform,":[20],"which":[21],"of":[23,34,59,119,129],"MEMS-cantilever":[24],"shape,":[25],"EPC":[27,121,131],"offers":[29],"several":[30],"advantages":[31],"in":[32,84],"terms":[33],"physical,":[35],"chemical,":[36],"biological":[38],"sensing,":[39],"e.g.,":[40],"high":[41],"sensitivity,":[42],"low":[43],"cost,":[44],"simple":[45],"procedure,":[46],"quick":[48],"response.":[49],"However,":[50],"crosstalk":[52,82],"effect":[53,83],"generated":[55,153],"by":[56],"coupling":[58],"parasitic":[60,74],"elements":[61],"from":[62,154],"actuation":[64],"part":[65],"to":[66,79,97,106,112,138],"sensing":[68],"part.":[69],"This":[70],"study":[71],"presents":[72],"feedthrough":[75],"subtraction":[76],"(PFS)":[77],"method":[78,94],"mitigate":[80],"an":[85,139],"sensor.":[91],"The":[92,127,148],"PFS":[93],"employed":[96],"identify":[98],"phase":[101],"is,":[103],"furthermore,":[104],"deployed":[105],"phase-locked":[108],"loop":[109],"(PLL)-based":[110],"system":[111],"track":[113],"lock":[115],"frequency":[118],"under":[123],"cigarette":[124],"smoke":[125],"exposure.":[126],"performance":[128],"further":[134],"evaluated":[135],"compared":[137],"AFM-microcantilever":[140],"commercial":[144],"particle":[145,149],"counter":[146],"(DC1100-PRO).":[147],"mass-concentration":[150],"measurement":[151],"result":[152],"cigarette-smoke":[155],"puffs":[156],"shows":[157],"good":[159],"agreement":[160],"between":[161],"these":[162],"three":[163],"detectors.":[164]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":1}],"updated_date":"2026-05-09T13:55:54.758798","created_date":"2025-10-10T00:00:00"}