{"id":"https://openalex.org/W3133734220","doi":"https://doi.org/10.3390/s21051823","title":"Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array","display_name":"Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array","publication_year":2021,"publication_date":"2021-03-05","ids":{"openalex":"https://openalex.org/W3133734220","doi":"https://doi.org/10.3390/s21051823","mag":"3133734220","pmid":"https://pubmed.ncbi.nlm.nih.gov/33807831"},"language":"en","primary_location":{"id":"doi:10.3390/s21051823","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051823","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1823/pdf?version=1615180553","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/5/1823/pdf?version=1615180553","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020937326","display_name":"Xubo Wang","orcid":"https://orcid.org/0000-0001-9014-6158"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xu-Bo Wang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":"https://orcid.org/0000-0001-9014-6158","affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022664507","display_name":"Leming He","orcid":"https://orcid.org/0000-0003-4131-3508"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Le-Ming He","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":"https://orcid.org/0000-0003-4131-3508","affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032851234","display_name":"Youcao Ma","orcid":"https://orcid.org/0000-0002-9537-7198"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"You-Cao Ma","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":"https://orcid.org/0000-0002-9537-7198","affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100430642","display_name":"Wenjuan Liu","orcid":"https://orcid.org/0000-0003-0926-4195"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["CN","FR"],"is_corresponding":false,"raw_author_name":"Wen-Juan Liu","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","State Key Laboratory of ASIC and System (Shanghai - Chine)","IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Centrale Lille Institut, Junia, Univ. Polytechnique Hauts-de-France] \u2013\u2013\r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)","MAMINA - IEMN - Mat\u00e9riaux et Acoustiques pour MIcro et NAno syst\u00e8mes int\u00e9gr\u00e9s - IEMN (Groupe MAMINA \r\nB\u00e2timent Lottmann\r\n - 59313 Valenciennes cedex - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I70348806","https://openalex.org/I1294671590","https://openalex.org/I7454413","https://openalex.org/I4210123471","https://openalex.org/I2279609970"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]},{"raw_affiliation_string":"IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Centrale Lille Institut, Junia, Univ. Polytechnique Hauts-de-France] \u2013\u2013\r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I70348806","https://openalex.org/I7454413","https://openalex.org/I4210123471","https://openalex.org/I2279609970"]},{"raw_affiliation_string":"MAMINA - IEMN - Mat\u00e9riaux et Acoustiques pour MIcro et NAno syst\u00e8mes int\u00e9gr\u00e9s - IEMN (Groupe MAMINA \r\nB\u00e2timent Lottmann\r\n - 59313 Valenciennes cedex - France)","institution_ids":["https://openalex.org/I4210123471"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024738909","display_name":"Wei-Jiang X\u00fc","orcid":"https://orcid.org/0000-0002-7309-2343"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2279609970","display_name":"Universit\u00e9 de Lille","ror":"https://ror.org/02kzqn938","country_code":"FR","type":"education","lineage":["https://openalex.org/I2279609970"]},{"id":"https://openalex.org/I4210123471","display_name":"Institut d'\u00e9lectronique de micro\u00e9lectronique et de nanotechnologie","ror":"https://ror.org/02q4res37","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I137614889","https://openalex.org/I2279609970","https://openalex.org/I3132279224","https://openalex.org/I4210095849","https://openalex.org/I4210123471","https://openalex.org/I4387154098","https://openalex.org/I70348806","https://openalex.org/I70348806","https://openalex.org/I7454413"]},{"id":"https://openalex.org/I4387154098","display_name":"INSA Hauts-de-France","ror":"https://ror.org/041rsh762","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154098","https://openalex.org/I70348806"]},{"id":"https://openalex.org/I70348806","display_name":"Universit\u00e9 Polytechnique Hauts-de-France","ror":"https://ror.org/02ezch769","country_code":"FR","type":"education","lineage":["https://openalex.org/I70348806"]},{"id":"https://openalex.org/I7454413","display_name":"\u00c9cole Centrale de Lille","ror":"https://ror.org/01x441g73","country_code":"FR","type":"education","lineage":["https://openalex.org/I7454413"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Wei-Jiang Xu","raw_affiliation_strings":["INSA Hauts-de-France, Le Mont Houy, F-59313 Valenciennes, France","Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN (Groupe TPIA -- UPHF\r\nB\u00e2timent Lottmann\r\n59313 Valenciennes cedex - France)","IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Centrale Lille Institut, Junia, Univ. Polytechnique Hauts-de-France] \u2013\u2013\r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)"],"raw_orcid":"https://orcid.org/0000-0002-7309-2343","affiliations":[{"raw_affiliation_string":"INSA Hauts-de-France, Le Mont Houy, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I4387154098"]},{"raw_affiliation_string":"Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, Centrale Lille, UMR 8520-IEMN, DOAE, F-59313 Valenciennes, France","institution_ids":["https://openalex.org/I70348806","https://openalex.org/I1294671590","https://openalex.org/I7454413","https://openalex.org/I4210123471","https://openalex.org/I2279609970"]},{"raw_affiliation_string":"TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN (Groupe TPIA -- UPHF\r\nB\u00e2timent Lottmann\r\n59313 Valenciennes cedex - France)","institution_ids":["https://openalex.org/I4210123471"]},{"raw_affiliation_string":"IEMN - Institut d\u2019\u00c9lectronique, de Micro\u00e9lectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Centrale Lille Institut, Junia, Univ. Polytechnique Hauts-de-France] \u2013\u2013\r\nLaboratoire Central \u2013 Cit\u00e9 Scientifique \u2013 Avenue Poincar\u00e9 \u2013 CS 60069 \u2013 59652 VILLENEUVE D\u2019ASCQ CEDEX - France)","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I70348806","https://openalex.org/I7454413","https://openalex.org/I4210123471","https://openalex.org/I2279609970"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016448886","display_name":"Junyan Ren","orcid":"https://orcid.org/0000-0002-7799-6251"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun-Yan Ren","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051234917","display_name":"Antoine Riaud","orcid":"https://orcid.org/0000-0001-8323-706X"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Antoine Riaud","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020046309","display_name":"Jia Zhou","orcid":"https://orcid.org/0000-0002-9098-5661"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jia Zhou","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","State Key Laboratory of ASIC and System (Shanghai - Chine)"],"raw_orcid":"https://orcid.org/0000-0002-9098-5661","affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 201203, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"State Key Laboratory of ASIC and System (Shanghai - Chine)","institution_ids":["https://openalex.org/I4391767673"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5020046309"],"corresponding_institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4391767673"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":3.2944,"has_fulltext":true,"cited_by_count":34,"citation_normalized_percentile":{"value":0.92727273,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"21","issue":"5","first_page":"1823","last_page":"1823"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},"topics":[{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.8118693828582764},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.8091096878051758},{"id":"https://openalex.org/keywords/broadband","display_name":"Broadband","score":0.7116559743881226},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.6964700222015381},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6845256090164185},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.6807538270950317},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6643918752670288},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6587175130844116},{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.6482452154159546},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.274694561958313},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.1863170564174652},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.10182008147239685},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08920338749885559}],"concepts":[{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.8118693828582764},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.8091096878051758},{"id":"https://openalex.org/C509933004","wikidata":"https://www.wikidata.org/wiki/Q194163","display_name":"Broadband","level":2,"score":0.7116559743881226},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6964700222015381},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6845256090164185},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.6807538270950317},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6643918752670288},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6587175130844116},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.6482452154159546},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.274694561958313},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1863170564174652},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.10182008147239685},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08920338749885559}],"mesh":[],"locations_count":7,"locations":[{"id":"doi:10.3390/s21051823","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051823","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1823/pdf?version=1615180553","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:33807831","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/33807831","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:lilloa.univ-lille.fr:20.500.12210/43601","is_oa":true,"landing_page_url":"http://hdl.handle.net/20.500.12210/43601","pdf_url":"http://hdl.handle.net/20.500.12210/43601","source":{"id":"https://openalex.org/S4306402203","display_name":"LillOA (Universit\u00e9 de Lille (University Of Lille))","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210123514","host_organization_name":"Centre d'Etudes en Civilisations, Langues et Litt\u00e9ratures Etrang\u00e8res","host_organization_lineage":["https://openalex.org/I4210123514"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"},{"id":"pmh:oai:HAL:hal-03260141v1","is_oa":true,"landing_page_url":"https://hal.science/hal-03260141","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://www.mdpi.com/1424-8220/21/5/1823","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:doaj.org/article:33af2334e16642e982bdcf1964dcbba4","is_oa":true,"landing_page_url":"https://doaj.org/article/33af2334e16642e982bdcf1964dcbba4","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 5, p 1823 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/5/1823/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21051823","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 5; Pages: 1823","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7961902","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7961902","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21051823","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051823","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1823/pdf?version=1615180553","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5400000214576721,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G6917309823","display_name":null,"funder_award_id":"61674043","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7581948008","display_name":null,"funder_award_id":"61674043, 12004078, 51950410582","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7801597079","display_name":null,"funder_award_id":"51950410582","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8554202172","display_name":null,"funder_award_id":"12004078","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3133734220.pdf","grobid_xml":"https://content.openalex.org/works/W3133734220.grobid-xml"},"referenced_works_count":25,"referenced_works":["https://openalex.org/W1481967161","https://openalex.org/W1501841716","https://openalex.org/W2012779095","https://openalex.org/W2046312882","https://openalex.org/W2056326110","https://openalex.org/W2066665164","https://openalex.org/W2073123044","https://openalex.org/W2077887258","https://openalex.org/W2089587744","https://openalex.org/W2092950681","https://openalex.org/W2122016971","https://openalex.org/W2160732394","https://openalex.org/W2321001221","https://openalex.org/W2591689298","https://openalex.org/W2617446799","https://openalex.org/W2769085981","https://openalex.org/W2967217387","https://openalex.org/W2996063371","https://openalex.org/W2999716001","https://openalex.org/W3012990734","https://openalex.org/W3030951314","https://openalex.org/W3098062135","https://openalex.org/W4229927610","https://openalex.org/W6664390832","https://openalex.org/W6673131526"],"related_works":["https://openalex.org/W2912807936","https://openalex.org/W2383309909","https://openalex.org/W3189577114","https://openalex.org/W47979711","https://openalex.org/W2102304199","https://openalex.org/W2352652589","https://openalex.org/W2766757780","https://openalex.org/W138921638","https://openalex.org/W2314521183","https://openalex.org/W2051847435"],"abstract_inverted_index":{"Piezoelectric":[0],"micromachined":[1],"ultrasonic":[2,128],"transducers":[3],"(PMUT)":[4],"are":[5],"promising":[6],"elements":[7],"to":[8,22,39,46,65,104],"fabricate":[9],"a":[10,15,48,55,72,81,92],"two-dimensional":[11],"(2D)":[12],"array":[13,85],"with":[14,86,91],"pitch":[16,89],"small":[17],"enough":[18],"(approximately":[19],"half":[20],"wavelength)":[21],"form":[23],"and":[24,108],"receive":[25],"arbitrary":[26],"acoustic":[27],"beams":[28],"for":[29,130],"medical":[30],"imaging.":[31,133],"However,":[32],"PMUT":[33,127],"arrays":[34,129],"have":[35],"so":[36],"far":[37],"failed":[38],"combine":[40],"the":[41,63,67,98,102,113,119],"wide,":[42],"high-frequency":[43],"bandwidth":[44,69,103],"needed":[45],"achieve":[47],"high":[49],"axial":[50],"resolution.":[51],"In":[52],"this":[53,78,122],"paper,":[54],"polydimethylsiloxane":[56],"(PDMS)":[57],"backing":[58,79,99,123],"structure":[59],"is":[60],"introduced":[61],"into":[62],"PMUTs":[64],"improve":[66],"device":[68],"while":[70],"keeping":[71],"sub-wavelength":[73],"(\u03bb)":[74],"pitch.":[75],"We":[76],"implement":[77],"on":[80,112],"16":[82],"\u00d7":[83],"8":[84],"75":[87],"\u00b5m":[88],"(3\u03bb/4)":[90],"15":[93],"MHz":[94],"working":[95],"frequency.":[96],"Adding":[97],"nearly":[100],"doubles":[101],"92%":[105],"(-6":[106],"dB)":[107],"has":[109],"little":[110],"influence":[111],"impulse":[114],"response":[115],"sensitivity.":[116],"By":[117],"widening":[118],"transducer":[120],"bandwidth,":[121],"may":[124],"enable":[125],"using":[126],"high-resolution":[131],"3D":[132]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":7},{"year":2021,"cited_by_count":10}],"updated_date":"2026-07-15T18:14:33.161393","created_date":"2025-10-10T00:00:00"}