{"id":"https://openalex.org/W3129468402","doi":"https://doi.org/10.3390/s21051557","title":"Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements","display_name":"Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements","publication_year":2021,"publication_date":"2021-02-24","ids":{"openalex":"https://openalex.org/W3129468402","doi":"https://doi.org/10.3390/s21051557","mag":"3129468402","pmid":"https://pubmed.ncbi.nlm.nih.gov/33668104"},"language":"en","primary_location":{"id":"doi:10.3390/s21051557","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051557","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1557/pdf?version=1614648324","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/5/1557/pdf?version=1614648324","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058729552","display_name":"Min Xu","orcid":"https://orcid.org/0000-0002-5115-5737"},"institutions":[{"id":"https://openalex.org/I1285933455","display_name":"Physikalisch-Technische Bundesanstalt","ror":"https://ror.org/05r3f7h03","country_code":"DE","type":"government","lineage":["https://openalex.org/I1285933455","https://openalex.org/I4210136623"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Min Xu","raw_affiliation_strings":["Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany","institution_ids":["https://openalex.org/I1285933455"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5107834173","display_name":"Zhi Li","orcid":null},"institutions":[{"id":"https://openalex.org/I1285933455","display_name":"Physikalisch-Technische Bundesanstalt","ror":"https://ror.org/05r3f7h03","country_code":"DE","type":"government","lineage":["https://openalex.org/I1285933455","https://openalex.org/I4210136623"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Zhi Li","raw_affiliation_strings":["Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany","institution_ids":["https://openalex.org/I1285933455"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051854726","display_name":"Michael Fahrbach","orcid":"https://orcid.org/0000-0003-1027-9968"},"institutions":[{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Michael Fahrbach","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Stra\u00dfe 66, 38106 Braunschweig, Germany","Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6 a/b, 38106 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0003-1027-9968","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Stra\u00dfe 66, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]},{"raw_affiliation_string":"Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6 a/b, 38106 Braunschweig, Germany","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027087490","display_name":"Erwin Peiner","orcid":"https://orcid.org/0000-0001-5801-813X"},"institutions":[{"id":"https://openalex.org/I94509681","display_name":"Technische Universit\u00e4t Braunschweig","ror":"https://ror.org/010nsgg66","country_code":"DE","type":"education","lineage":["https://openalex.org/I94509681"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Erwin Peiner","raw_affiliation_strings":["Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Stra\u00dfe 66, 38106 Braunschweig, Germany","Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6 a/b, 38106 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0001-5801-813X","affiliations":[{"raw_affiliation_string":"Institute of Semiconductor Technology (IHT), Technische Universit\u00e4t Braunschweig, Hans-Sommer-Stra\u00dfe 66, 38106 Braunschweig, Germany","institution_ids":["https://openalex.org/I94509681"]},{"raw_affiliation_string":"Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6 a/b, 38106 Braunschweig, Germany","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001442135","display_name":"Uwe Brand","orcid":"https://orcid.org/0000-0002-4293-4982"},"institutions":[{"id":"https://openalex.org/I1285933455","display_name":"Physikalisch-Technische Bundesanstalt","ror":"https://ror.org/05r3f7h03","country_code":"DE","type":"government","lineage":["https://openalex.org/I1285933455","https://openalex.org/I4210136623"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Uwe Brand","raw_affiliation_strings":["Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany"],"raw_orcid":"https://orcid.org/0000-0002-4293-4982","affiliations":[{"raw_affiliation_string":"Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany","institution_ids":["https://openalex.org/I1285933455"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5058729552"],"corresponding_institution_ids":["https://openalex.org/I1285933455"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.197,"has_fulltext":true,"cited_by_count":11,"citation_normalized_percentile":{"value":0.77997028,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"21","issue":"5","first_page":"1557","last_page":"1557"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11799","display_name":"Adhesion, Friction, and Surface Interactions","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stylus","display_name":"Stylus","score":0.8757091760635376},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8401106595993042},{"id":"https://openalex.org/keywords/microprobe","display_name":"Microprobe","score":0.819701611995697},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6827780604362488},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6509274244308472},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.6256271004676819},{"id":"https://openalex.org/keywords/diamond","display_name":"Diamond","score":0.5241466164588928},{"id":"https://openalex.org/keywords/surface-finish","display_name":"Surface finish","score":0.5228232145309448},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"Surface roughness","score":0.4947318732738495},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4012778401374817},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3921276926994324},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31563547253608704},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.25548821687698364},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.11575603485107422},{"id":"https://openalex.org/keywords/mineralogy","display_name":"Mineralogy","score":0.09594312310218811},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08724594116210938}],"concepts":[{"id":"https://openalex.org/C164086593","wikidata":"https://www.wikidata.org/wiki/Q1227035","display_name":"Stylus","level":2,"score":0.8757091760635376},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8401106595993042},{"id":"https://openalex.org/C125206250","wikidata":"https://www.wikidata.org/wiki/Q2365355","display_name":"Microprobe","level":2,"score":0.819701611995697},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6827780604362488},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6509274244308472},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.6256271004676819},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.5241466164588928},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.5228232145309448},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.4947318732738495},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4012778401374817},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3921276926994324},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31563547253608704},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.25548821687698364},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11575603485107422},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.09594312310218811},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08724594116210938}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s21051557","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051557","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1557/pdf?version=1614648324","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:33668104","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/33668104","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:95317326a3124f0bbd7b59e009666761","is_oa":true,"landing_page_url":"https://doaj.org/article/95317326a3124f0bbd7b59e009666761","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 5, p 1557 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/5/1557/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21051557","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 5; Pages: 1557","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7956422","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7956422","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21051557","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21051557","pdf_url":"https://www.mdpi.com/1424-8220/21/5/1557/pdf?version=1614648324","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1383578038","display_name":null,"funder_award_id":"17IND05","funder_id":"https://openalex.org/F4320338394","funder_display_name":"European Metrology Programme for Innovation and Research"},{"id":"https://openalex.org/G6475901908","display_name":null,"funder_award_id":"17IND05 MicroProbes","funder_id":"https://openalex.org/F4320338394","funder_display_name":"European Metrology Programme for Innovation and Research"},{"id":"https://openalex.org/G7842005466","display_name":null,"funder_award_id":"Horizon 2020","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320338394","display_name":"European Metrology Programme for Innovation and Research","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3129468402.pdf","grobid_xml":"https://content.openalex.org/works/W3129468402.grobid-xml"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W15407153","https://openalex.org/W1569210791","https://openalex.org/W1970739558","https://openalex.org/W1980419249","https://openalex.org/W1981466833","https://openalex.org/W2023005967","https://openalex.org/W2032578085","https://openalex.org/W2058881713","https://openalex.org/W2070011623","https://openalex.org/W2075013753","https://openalex.org/W2076920183","https://openalex.org/W2082971309","https://openalex.org/W2088466529","https://openalex.org/W2140726998","https://openalex.org/W2143891597","https://openalex.org/W2150297986","https://openalex.org/W2165761746","https://openalex.org/W2493989774","https://openalex.org/W2501363426","https://openalex.org/W2581407083","https://openalex.org/W2791183886","https://openalex.org/W2922626034","https://openalex.org/W3036176476","https://openalex.org/W4211126997","https://openalex.org/W4235268289","https://openalex.org/W6645330375"],"related_works":["https://openalex.org/W2150004397","https://openalex.org/W2019828542","https://openalex.org/W2540685717","https://openalex.org/W1973407535","https://openalex.org/W2025294681","https://openalex.org/W2122612554","https://openalex.org/W2474799934","https://openalex.org/W2105225674","https://openalex.org/W2045503801","https://openalex.org/W3040115070"],"abstract_inverted_index":{"High-speed":[0],"tactile":[1],"roughness":[2,38],"measurements":[3,106],"set":[4],"high":[5,25,103],"demand":[6],"on":[7,62],"the":[8,11,16,28,43,87,90,96,99,115,119,129],"trackability":[9,44,104],"of":[10,15,18,45,89,111,118],"stylus":[12],"probe.":[13],"Because":[14],"features":[17],"low":[19,21],"mass,":[20],"probing":[22],"force,":[23],"and":[24,58,71,79],"signal":[26],"linearity,":[27],"piezoresistive":[29],"silicon":[30,77,100],"microprobe":[31,97,120],"is":[32],"a":[33,50,82],"hopeful":[34],"candidate":[35],"for":[36,105,128],"high-speed":[37,132],"measurements.":[39,134],"This":[40],"paper":[41],"investigates":[42],"these":[46],"microprobes":[47,68],"through":[48],"building":[49],"theoretical":[51],"dynamic":[52],"model,":[53],"measuring":[54],"their":[55],"resonant":[56,116],"response,":[57],"performing":[59],"tip-flight":[60],"experiments":[61],"surfaces":[63],"with":[64,74,81,98,121],"sharp":[65],"variations.":[66],"Two":[67],"are":[69],"investigated":[70],"compared:":[72],"one":[73,80],"an":[75],"integrated":[76],"tip":[78,84,101,123],"diamond":[83,122],"glued":[85],"to":[86,108,125],"end":[88],"cantilever.":[91],"The":[92],"result":[93],"indicates":[94],"that":[95],"has":[102],"up":[107],"traverse":[109],"speeds":[110],"10":[112],"mm/s,":[113],"while":[114],"response":[117],"needs":[124],"be":[126],"improved":[127],"application":[130],"in":[131],"topography":[133]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-05-09T13:55:54.758798","created_date":"2025-10-10T00:00:00"}