{"id":"https://openalex.org/W3125377795","doi":"https://doi.org/10.3390/s21030809","title":"MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure","display_name":"MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure","publication_year":2021,"publication_date":"2021-01-26","ids":{"openalex":"https://openalex.org/W3125377795","doi":"https://doi.org/10.3390/s21030809","mag":"3125377795","pmid":"https://pubmed.ncbi.nlm.nih.gov/33530375"},"language":"en","primary_location":{"id":"doi:10.3390/s21030809","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21030809","pdf_url":"https://www.mdpi.com/1424-8220/21/3/809/pdf?version=1611913311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/3/809/pdf?version=1611913311","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003751510","display_name":"Xu She","orcid":"https://orcid.org/0000-0001-9560-6109"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xu She","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":"https://orcid.org/0000-0003-4612-3279","affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100770905","display_name":"Chao Xu","orcid":"https://orcid.org/0000-0002-6166-8325"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Xu","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022186934","display_name":"Wenjie Qi","orcid":"https://orcid.org/0000-0002-1757-0232"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenjie Qi","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100427706","display_name":"Bowen Liu","orcid":"https://orcid.org/0000-0003-4973-6126"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bowen Liu","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101702301","display_name":"Tian Liang","orcid":"https://orcid.org/0000-0001-9459-9920"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tian Liang","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210137199"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5109218676"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210137199","https://openalex.org/I4210165038"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.017,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.73825315,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"21","issue":"3","first_page":"809","last_page":"809"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11757","display_name":"Seismic Waves and Analysis","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/1908","display_name":"Geophysics"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12424","display_name":"Earthquake Detection and Analysis","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/1908","display_name":"Geophysics"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7094374299049377},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6853086948394775},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6360712647438049},{"id":"https://openalex.org/keywords/cathode","display_name":"Cathode","score":0.5753990411758423},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5711579918861389},{"id":"https://openalex.org/keywords/anode","display_name":"Anode","score":0.5243337750434875},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.4346421957015991},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42868903279304504},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3974226117134094},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3022468686103821},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21562302112579346},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.11485180258750916}],"concepts":[{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7094374299049377},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6853086948394775},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6360712647438049},{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.5753990411758423},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5711579918861389},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.5243337750434875},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4346421957015991},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42868903279304504},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3974226117134094},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3022468686103821},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21562302112579346},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11485180258750916},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s21030809","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21030809","pdf_url":"https://www.mdpi.com/1424-8220/21/3/809/pdf?version=1611913311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:33530375","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/33530375","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:ec1d4359d00e45dba26330454c19bb9a","is_oa":true,"landing_page_url":"https://doaj.org/article/ec1d4359d00e45dba26330454c19bb9a","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 3, p 809 (2021)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:6771243","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC7865234","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/3/809/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21030809","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 3; Pages: 809","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7865234","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7865234","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21030809","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21030809","pdf_url":"https://www.mdpi.com/1424-8220/21/3/809/pdf?version=1611913311","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G4377052412","display_name":null,"funder_award_id":"No. 61825107","funder_id":"https://openalex.org/F4320336125","funder_display_name":"National Science Fund for Distinguished Young Scholars"},{"id":"https://openalex.org/G4963825569","display_name":null,"funder_award_id":"XDA22020302","funder_id":"https://openalex.org/F4320321133","funder_display_name":"Chinese Academy of Sciences"},{"id":"https://openalex.org/G7127054671","display_name":null,"funder_award_id":"61825107","funder_id":"https://openalex.org/F4320336125","funder_display_name":"National Science Fund for Distinguished Young Scholars"},{"id":"https://openalex.org/G7557213680","display_name":null,"funder_award_id":"61825107 and U1930206","funder_id":"https://openalex.org/F4320336125","funder_display_name":"National Science Fund for Distinguished Young Scholars"},{"id":"https://openalex.org/G8329460179","display_name":null,"funder_award_id":"U1930206","funder_id":"https://openalex.org/F4320336125","funder_display_name":"National Science Fund for Distinguished Young Scholars"}],"funders":[{"id":"https://openalex.org/F4320321133","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35"},{"id":"https://openalex.org/F4320336125","display_name":"National Science Fund for Distinguished Young Scholars","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3125377795.pdf","grobid_xml":"https://content.openalex.org/works/W3125377795.grobid-xml"},"referenced_works_count":22,"referenced_works":["https://openalex.org/W1483166646","https://openalex.org/W1999155810","https://openalex.org/W2003960799","https://openalex.org/W2037355697","https://openalex.org/W2048668518","https://openalex.org/W2069986458","https://openalex.org/W2074554092","https://openalex.org/W2089328359","https://openalex.org/W2092332007","https://openalex.org/W2245533563","https://openalex.org/W2292759021","https://openalex.org/W2350381853","https://openalex.org/W2363653345","https://openalex.org/W2369561377","https://openalex.org/W2382974660","https://openalex.org/W2561589434","https://openalex.org/W2972696703","https://openalex.org/W3004456029","https://openalex.org/W3028648315","https://openalex.org/W3045176038","https://openalex.org/W6773490021","https://openalex.org/W7060939585"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2374930937","https://openalex.org/W2602150962","https://openalex.org/W3003741000","https://openalex.org/W2328053366","https://openalex.org/W4249028082","https://openalex.org/W3106365267","https://openalex.org/W4243588094","https://openalex.org/W2158550990","https://openalex.org/W2051018604"],"abstract_inverted_index":{"This":[0],"study":[1],"developed":[2,147,151],"a":[3,9,24,80,129,162],"MEMS-based":[4],"electrochemical":[5,115,152],"seismometer":[6],"relying":[7],"on":[8,20,32,155],"cathode-anode-cathode":[10],"(CAC)":[11],"integrated":[12,70,157],"three-electrode":[13,56,71,158],"structure":[14,57,72,159],"where":[15],"two":[16,21],"cathodes":[17],"were":[18,48],"positioned":[19,31],"surfaces":[22],"of":[23,35,39,54,96,103,108,145],"silicon":[25,41],"wafer,":[26],"while":[27,117],"one":[28],"anode":[29],"was":[30,73,100,121,140],"the":[33,36,40,52,55,63,94,97,109,118,134,137,143,146,150],"sidewalls":[34],"through":[37],"holes":[38],"wafer.":[42],"Device":[43,90],"design":[44],"and":[45,136,168],"numerical":[46],"simulations":[47],"conducted":[49],"to":[50,126],"model":[51],"functionality":[53],"in":[58,84,124,165],"detecting":[59],"vibration":[60],"signals":[61],"with":[62,86],"key":[64],"geometrical":[65],"parameters":[66],"optimized.":[67],"The":[68],"CAC":[69,98,135],"then":[74],"manufactured":[75],"by":[76],"microfabrication,":[77],"which":[78],"demonstrated":[79],"simplified":[81],"fabrication":[82],"process":[83],"comparison":[85],"conventional":[87],"four-electrode":[88,114],"structures.":[89],"characterization":[91],"shows":[92],"that":[93,107],"sensitivity":[95],"microseismometer":[99,153],"an":[101,156],"order":[102],"magnitude":[104],"higher":[105],"than":[106],"CME6011":[110,138],"(a":[111],"commercially":[112],"available":[113],"seismometer),":[116],"noise":[119],"level":[120],"comparable.":[122],"Furthermore,":[123],"response":[125],"random":[127],"vibrations,":[128],"high":[130],"correlation":[131],"coefficient":[132],"between":[133],"(0.985)":[139],"located,":[141],"validating":[142],"performance":[144],"seismometer.":[148],"Thus,":[149],"based":[154],"may":[160],"provide":[161],"new":[163],"perspective":[164],"seismic":[166],"observations":[167],"resource":[169],"explorations.":[170]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}