{"id":"https://openalex.org/W3121878130","doi":"https://doi.org/10.3390/s21020632","title":"A Microvalve Module with High Chemical Inertness and Embedded Flow Heating for Microscale Gas Chromatography","display_name":"A Microvalve Module with High Chemical Inertness and Embedded Flow Heating for Microscale Gas Chromatography","publication_year":2021,"publication_date":"2021-01-18","ids":{"openalex":"https://openalex.org/W3121878130","doi":"https://doi.org/10.3390/s21020632","mag":"3121878130","pmid":"https://pubmed.ncbi.nlm.nih.gov/33477497"},"language":"en","primary_location":{"id":"doi:10.3390/s21020632","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21020632","pdf_url":"https://www.mdpi.com/1424-8220/21/2/632/pdf?version=1611053347","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/21/2/632/pdf?version=1611053347","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037037333","display_name":"Hsueh-Tsung Lu","orcid":"https://orcid.org/0000-0001-6145-6771"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Hsueh-Tsung Lu","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0001-6145-6771","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084912799","display_name":"Yutao Qin","orcid":"https://orcid.org/0000-0003-4589-4485"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yutao Qin","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0003-4589-4485","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016991190","display_name":"Yogesh B. Gianchandani","orcid":"https://orcid.org/0000-0003-2281-3937"},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yogesh Gianchandani","raw_affiliation_strings":["Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA","Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA"],"raw_orcid":"https://orcid.org/0000-0003-2281-3937","affiliations":[{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS<sup>2</sup>), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]},{"raw_affiliation_string":"Center for Wireless Integrated MicroSensing and Systems (WIMS2), University of Michigan, Ann Arbor, MI 48109, USA","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5037037333"],"corresponding_institution_ids":["https://openalex.org/I27837315"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.331,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.5083843,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"21","issue":"2","first_page":"632","last_page":"632"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10908","display_name":"Analytical Chemistry and Chromatography","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11407","display_name":"Innovative Microfluidic and Catalytic Techniques Innovation","score":0.9876999855041504,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microscale-chemistry","display_name":"Microscale chemistry","score":0.766825795173645},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.7341051697731018},{"id":"https://openalex.org/keywords/polydimethylsiloxane","display_name":"Polydimethylsiloxane","score":0.6312562823295593},{"id":"https://openalex.org/keywords/polyimide","display_name":"Polyimide","score":0.5767112374305725},{"id":"https://openalex.org/keywords/thermistor","display_name":"Thermistor","score":0.5362199544906616},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5171843767166138},{"id":"https://openalex.org/keywords/fluidics","display_name":"Fluidics","score":0.5131359696388245},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.48094791173934937},{"id":"https://openalex.org/keywords/valve-actuator","display_name":"Valve actuator","score":0.42576727271080017},{"id":"https://openalex.org/keywords/solenoid-valve","display_name":"Solenoid valve","score":0.42377448081970215},{"id":"https://openalex.org/keywords/microfluidics","display_name":"Microfluidics","score":0.4110381603240967},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3823711574077606},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3467104434967041},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.3180341124534607},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.293081134557724},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.23305779695510864},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.21762773394584656},{"id":"https://openalex.org/keywords/ball-valve","display_name":"Ball valve","score":0.21604347229003906},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.15238407254219055},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.08576300740242004},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.08128675818443298}],"concepts":[{"id":"https://openalex.org/C179428855","wikidata":"https://www.wikidata.org/wiki/Q1069216","display_name":"Microscale chemistry","level":2,"score":0.766825795173645},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.7341051697731018},{"id":"https://openalex.org/C2779849746","wikidata":"https://www.wikidata.org/wiki/Q411955","display_name":"Polydimethylsiloxane","level":2,"score":0.6312562823295593},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.5767112374305725},{"id":"https://openalex.org/C66726788","wikidata":"https://www.wikidata.org/wiki/Q175973","display_name":"Thermistor","level":2,"score":0.5362199544906616},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5171843767166138},{"id":"https://openalex.org/C132651336","wikidata":"https://www.wikidata.org/wiki/Q185571","display_name":"Fluidics","level":2,"score":0.5131359696388245},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.48094791173934937},{"id":"https://openalex.org/C173909513","wikidata":"https://www.wikidata.org/wiki/Q645549","display_name":"Valve actuator","level":3,"score":0.42576727271080017},{"id":"https://openalex.org/C2777112803","wikidata":"https://www.wikidata.org/wiki/Q1430621","display_name":"Solenoid valve","level":2,"score":0.42377448081970215},{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.4110381603240967},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3823711574077606},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3467104434967041},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.3180341124534607},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.293081134557724},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.23305779695510864},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21762773394584656},{"id":"https://openalex.org/C90610171","wikidata":"https://www.wikidata.org/wiki/Q1517381","display_name":"Ball valve","level":2,"score":0.21604347229003906},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.15238407254219055},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.08576300740242004},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.08128675818443298},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C145420912","wikidata":"https://www.wikidata.org/wiki/Q853077","display_name":"Mathematics education","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s21020632","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21020632","pdf_url":"https://www.mdpi.com/1424-8220/21/2/632/pdf?version=1611053347","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:33477497","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/33477497","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:a85303bffe384b78be513f4bf624ad5c","is_oa":true,"landing_page_url":"https://doaj.org/article/a85303bffe384b78be513f4bf624ad5c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 21, Iss 2, p 632 (2021)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/21/2/632/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s21020632","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 21; Issue 2; Pages: 632","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7831052","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7831052","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s21020632","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s21020632","pdf_url":"https://www.mdpi.com/1424-8220/21/2/632/pdf?version=1611053347","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.46000000834465027}],"awards":[{"id":"https://openalex.org/G3798810580","display_name":null,"funder_award_id":"FA8650-17-C-9105 and FA8650-19-C-9105","funder_id":"https://openalex.org/F4320333051","funder_display_name":"Intelligence Advanced Research Projects Activity"}],"funders":[{"id":"https://openalex.org/F4320333051","display_name":"Intelligence Advanced Research Projects Activity","ror":"https://ror.org/01v3fsc55"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W3121878130.pdf"},"referenced_works_count":45,"referenced_works":["https://openalex.org/W1514046374","https://openalex.org/W1963622178","https://openalex.org/W1992470636","https://openalex.org/W2001195021","https://openalex.org/W2015075262","https://openalex.org/W2023404429","https://openalex.org/W2027178519","https://openalex.org/W2030763565","https://openalex.org/W2036116377","https://openalex.org/W2039937471","https://openalex.org/W2043395470","https://openalex.org/W2052945395","https://openalex.org/W2055378791","https://openalex.org/W2066904101","https://openalex.org/W2071509028","https://openalex.org/W2085817796","https://openalex.org/W2097559230","https://openalex.org/W2108943437","https://openalex.org/W2114631721","https://openalex.org/W2115308633","https://openalex.org/W2118529203","https://openalex.org/W2122282498","https://openalex.org/W2128660474","https://openalex.org/W2129445978","https://openalex.org/W2133749315","https://openalex.org/W2137161843","https://openalex.org/W2139712155","https://openalex.org/W2145834420","https://openalex.org/W2149182757","https://openalex.org/W2163781922","https://openalex.org/W2166519670","https://openalex.org/W2170454608","https://openalex.org/W2178662956","https://openalex.org/W2234054835","https://openalex.org/W2312988186","https://openalex.org/W2322521875","https://openalex.org/W2324494414","https://openalex.org/W2332585343","https://openalex.org/W2523076896","https://openalex.org/W2528304560","https://openalex.org/W2742459862","https://openalex.org/W2907907212","https://openalex.org/W2968455150","https://openalex.org/W4302408458","https://openalex.org/W4388400013"],"related_works":["https://openalex.org/W2441246853","https://openalex.org/W2372919008","https://openalex.org/W4240706765","https://openalex.org/W4382136376","https://openalex.org/W2360830311","https://openalex.org/W1948764122","https://openalex.org/W2379311937","https://openalex.org/W2351348254","https://openalex.org/W4205606638","https://openalex.org/W2260982462"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3,24,41,104],"multi-valve":[4,21,99],"module":[5,22,43],"with":[6,142],"high":[7],"chemical":[8,72],"inertness":[9],"and":[10,32,66,89,93,120,149],"embedded":[11],"flow":[12,136],"heating":[13],"for":[14,51],"microscale":[15],"gas":[16],"chromatography":[17],"(\u00b5GC)":[18],"systems.":[19,58],"The":[20,35,59,74,95,122,131,156],"incorporates":[23,37],"monolithically":[25],"microfabricated":[26],"die":[27,60,76],"stack,":[28],"polyimide":[29,67],"valve":[30,68,87,106],"membranes,":[31],"solenoid":[33],"actuators.":[34],"design":[36],"three":[38,80],"valves":[39,123],"within":[40],"single":[42],"of":[44,56,97,128,135],"volume":[45],"30.2":[46],"cm3,":[47],"which":[48],"is":[49,101,138,159],"suitable":[50],"the":[52,146,153],"small":[53],"form":[54],"factor":[55],"\u00b5GC":[57],"stack":[61,77],"uses":[62],"fused":[63],"silica":[64],"wafers":[65],"membranes":[69],"that":[70],"enhance":[71],"inertness.":[73],"monolithic":[75],"requires":[78],"only":[79],"lithographic":[81],"masks":[82],"to":[83,103],"pattern":[84],"fluidic":[85],"microchannels,":[86],"seats,":[88],"thin-film":[90],"metal":[91],"heaters":[92],"thermistors.":[94],"performance":[96],"fabricated":[98],"modules":[100],"compared":[102],"commercial":[105],"in":[107,145,152],"tests":[108],"using":[109],"multiple":[110],"volatile":[111],"organic":[112],"compounds,":[113],"including":[114],"alkanes,":[115],"alcohols,":[116],"ketones,":[117],"aromatic":[118],"hydrocarbons,":[119],"phosphonates.":[121],"show":[124],"almost":[125],"no":[126],"distortion":[127],"chromatographic":[129],"peaks.":[130],"experimentally":[132],"measured":[133],"ratio":[134],"conductance":[137],"3.46":[139],"\u00d7":[140],"103,":[141],"4.15":[143],"sccm/kPa":[144,151],"open":[147],"state":[148],"0.0012":[150],"closed":[154],"state.":[155],"response":[157],"time":[158],"&lt;120":[160],"ms.":[161]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}