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THE PROPOSED SYSTEM INCLUDES AN ARRAY OF THREE INDIUM ALUMINUM NITRIDE (INALN)/ GALLIUM NITRIDE (GAN) MECHANICAL RESONATORS WITH DIFFERENT TEMPERATURE COEFFICIENTS OF FREQUENCY (TCFS)  OPERATING AT THEIR BULK RESONANCE MODE TO ACHIEVE HIGH THERMAL STABILITY OF<1 PPM OVER THE 470 TO 530C RANGE AND ACCELERATION SURVIVABILITY OF>20 000 G WITHOUT THE NEED FOR HIGH-POWER HEATERS. OUR KEY INNOVATION IS THE USE OF WIDE BANDGAP NANOFABRICATION TECHNOLOGY TO IMPLEMENT PASSIVELY COMPENSATED RESONATORS WITH ZERO-BIAS TCF OF SUB-PPM LEVELS AT AND AROUND 500C. FURTHER  THESE RESONATORS OFFER A HIGH Q OF MORE THAN 5 000 AND SMALL MOTIONAL IMPEDANCE AND CAN BE MONOLITHICALLY INTEGRATED WITH HIGH-TEMPERATURE III-V AMPLIFIERS - ALL CHARACTERISTICS REQUIRED FOR ACHIEVING LOW-PHASE NOISE AND LOW-POWER CLOCKS. INALN/GAN HIGH ELECTRON MOBILITY TRANSISTORS ARE PROVEN TO BE OPERABLE UP TO 1000C AND RESONATORS IN GAN AND OTHER III-VS ARE SHOWN TO OFFER HIGH-TEMPERATURE OPERATION  HIGH POWER STABILITY  HIGH Q  AND DESIGNABLE ZERO-BIAS TCF VALUES IN A WIDE TEMPERATURE RANGE (UP TO 600C). IN THIS PROGRAM  WE WILL INTEGRATE THE RESONATORS IN AN ARRAY AND MULTIPLEX THEIR OUTPUT TO GET A FINAL FREQUENCY READOUT WITH AN ACCURACY THAT IS 260 TIMES BETTER THAN THAT OF A SINGLE RESONATOR CLOCK AND FUNCTIONAL AT 500C. THE DESIGN AND IMPLEMENTATION OF THE CHIP-SCALE CLOCK HAS AN ENTRY TECHNOLOGY READINESS LEVEL (TRL) OF 2 AND EXIT TRL OF 4. IT SHOULD ALSO BE NOTED THAT THIS WORK READILY TRANSLATES TO COMMERCIAL GROUND-BASED APPLICATIONS SUCH AS OIL AND GAS  GEOTHERMAL AND COMBUSTION.","funder_award_id":"NNX17AG44G","funder_id":"https://openalex.org/F4320306101","funder_display_name":"National Aeronautics and Space Administration"}],"funders":[{"id":"https://openalex.org/F4320306101","display_name":"National Aeronautics and Space Administration","ror":"https://ror.org/027ka1x80"}],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2990186201.pdf"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W340780719","https://openalex.org/W1977578895","https://openalex.org/W1987427100","https://openalex.org/W1991651109","https://openalex.org/W2006514057","https://openalex.org/W2006906797","https://openalex.org/W2017268458","https://openalex.org/W2033253746","https://openalex.org/W2034733827","https://openalex.org/W2076135873","https://openalex.org/W2089829079","https://openalex.org/W2128142446","https://openalex.org/W2132409325","https://openalex.org/W2135743648","https://openalex.org/W2168716961","https://openalex.org/W2340926428","https://openalex.org/W2569662843","https://openalex.org/W2576752932","https://openalex.org/W2594745722","https://openalex.org/W2743318664","https://openalex.org/W2780140783","https://openalex.org/W2798914386","https://openalex.org/W2811262930","https://openalex.org/W2907029717","https://openalex.org/W2914679682","https://openalex.org/W2934822848"],"related_works":[],"abstract_inverted_index":{"This":[0,179],"paper":[1],"reports":[2],"the":[3,38,58,69,97,105,113,182],"high-temperature":[4,26,56,177],"characteristics":[5],"of":[6,61,115,124,184],"a":[7,25,42,91,188],"laterally":[8],"vibrating":[9],"piezoelectric":[10,185],"lithium":[11],"niobate":[12],"(LiNbO3;":[13],"LN)":[14],"MEMS":[15],"resonator":[16],"array":[17,70],"up":[18,48],"to":[19,35,41,49,102,109,129,168,174],"500":[20,50,87],"\u00b0C":[21,79],"in":[22,54,68,94],"air.":[23],"After":[24],"burn-in":[27],"treatment,":[28],"device":[29,116],"quality":[30,153],"factor":[31,154],"(Q)":[32],"was":[33],"enhanced":[34],"508":[36],"and":[37,45,74,80,83,120,133,140,143,155,162,170,200],"resonance":[39],"shifted":[40],"lower":[43],"frequency":[44,95,107,125],"remained":[46],"stable":[47],"\u00b0C.":[51],"During":[52],"subsequent":[53],"situ":[55],"testing,":[57],"resonant":[59,106,137,147,196],"frequencies":[60],"two":[62],"coupled":[63],"shear":[64],"horizontal":[65],"(SH0)":[66],"modes":[67],"were":[71,127,160],"87.36":[72,110],"MHz":[73,76,82,85],"87.21":[75],"at":[77,86],"25":[78],"84.56":[81],"84.39":[84],"\u00b0C,":[88],"correspondingly,":[89],"representing":[90],"\u22123%":[92],"shift":[93],"over":[96],"temperature":[98,122,199],"range.":[99],"Upon":[100],"cooling":[101],"room":[103],"temperature,":[104],"returned":[108],"MHz,":[111],"demonstrating":[112],"recoverability":[114],"performance.":[117],"The":[118,151],"first-":[119],"second-order":[121],"coefficient":[123,158],"(TCF)":[126],"found":[128],"be":[130],"\u221295.27":[131],"ppm/\u00b0C":[132,142],"57.5":[134],"ppb/\u00b0C2":[135,145],"for":[136,146,191],"mode":[138,148],"A,":[139],"\u221295.43":[141],"55.8":[144],"B,":[149],"respectively.":[150],"temperature-dependent":[152],"electromechanical":[156],"coupling":[157,205],"(kt2)":[159],"extracted":[161],"are":[163],"reported.":[164],"Device":[165],"Q":[166],"decreased":[167],"334":[169],"total":[171],"kt2":[172],"increased":[173],"12.40%":[175],"after":[176],"exposure.":[178],"work":[180],"supports":[181],"use":[183],"LN":[186],"as":[187],"material":[189],"platform":[190],"harsh":[192],"environment":[193],"radio-frequency":[194],"(RF)":[195],"sensors":[197],"(e.g.,":[198],"infrared)":[201],"incorporated":[202],"with":[203],"high":[204],"acoustic":[206],"readout.":[207]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3}],"updated_date":"2026-07-03T08:13:44.112507","created_date":"2019-12-05T00:00:00"}