{"id":"https://openalex.org/W3088249832","doi":"https://doi.org/10.3390/s20195460","title":"A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes","display_name":"A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes","publication_year":2020,"publication_date":"2020-09-23","ids":{"openalex":"https://openalex.org/W3088249832","doi":"https://doi.org/10.3390/s20195460","mag":"3088249832","pmid":"https://pubmed.ncbi.nlm.nih.gov/32977560"},"language":"en","primary_location":{"id":"doi:10.3390/s20195460","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20195460","pdf_url":"https://www.mdpi.com/1424-8220/20/19/5460/pdf?version=1600857839","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/20/19/5460/pdf?version=1600857839","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019311212","display_name":"Risheng Lv","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Risheng Lv","raw_affiliation_strings":["MEMS Center, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044850288","display_name":"Qiang Fu","orcid":"https://orcid.org/0000-0002-7017-4773"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Qiang Fu","raw_affiliation_strings":["MEMS Center, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100652322","display_name":"Weiping Chen","orcid":"https://orcid.org/0000-0001-5658-1914"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weiping Chen","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","MEMS Center, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101616979","display_name":"Liang Yin","orcid":"https://orcid.org/0000-0003-4811-5053"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liang Yin","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","MEMS Center, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100390760","display_name":"Xiaowei Liu","orcid":"https://orcid.org/0000-0002-3071-5467"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaowei Liu","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","MEMS Center, Harbin Institute of Technology, Harbin 150001, China","State Key Laboratory of Urban Water Resource & Environment, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"State Key Laboratory of Urban Water Resource & Environment, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100459694","display_name":"Yufeng Zhang","orcid":"https://orcid.org/0000-0003-0235-7049"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yufeng Zhang","raw_affiliation_strings":["Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","MEMS Center, Harbin Institute of Technology, Harbin 150001, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Systems and Micro-Structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology, Harbin 150001, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5044850288"],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.4172,"has_fulltext":true,"cited_by_count":5,"citation_normalized_percentile":{"value":0.62413914,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"20","issue":"19","first_page":"5460","last_page":"5460"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.6693977117538452},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4864804446697235},{"id":"https://openalex.org/keywords/application-specific-integrated-circuit","display_name":"Application-specific integrated circuit","score":0.461984246969223},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.45346203446388245},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.43494874238967896},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4112062454223633},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3753146529197693},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.35123389959335327},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30744147300720215}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.6693977117538452},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4864804446697235},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.461984246969223},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.45346203446388245},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.43494874238967896},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4112062454223633},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3753146529197693},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35123389959335327},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30744147300720215},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s20195460","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20195460","pdf_url":"https://www.mdpi.com/1424-8220/20/19/5460/pdf?version=1600857839","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:32977560","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/32977560","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:83cf33cd5b3846d99eabc1325e1b667b","is_oa":true,"landing_page_url":"https://doaj.org/article/83cf33cd5b3846d99eabc1325e1b667b","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 20, Iss 19, p 5460 (2020)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/20/19/5460/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s20195460","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 20; Issue 19; Pages: 5460","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7583939","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7583939","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s20195460","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20195460","pdf_url":"https://www.mdpi.com/1424-8220/20/19/5460/pdf?version=1600857839","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3088249832.pdf","grobid_xml":"https://content.openalex.org/works/W3088249832.grobid-xml"},"referenced_works_count":39,"referenced_works":["https://openalex.org/W1923793735","https://openalex.org/W1966275328","https://openalex.org/W1972951425","https://openalex.org/W1988290411","https://openalex.org/W1990030059","https://openalex.org/W2000624188","https://openalex.org/W2012990987","https://openalex.org/W2029378023","https://openalex.org/W2033735267","https://openalex.org/W2034976055","https://openalex.org/W2071848335","https://openalex.org/W2076485774","https://openalex.org/W2080281496","https://openalex.org/W2091183725","https://openalex.org/W2101966158","https://openalex.org/W2102319061","https://openalex.org/W2102388997","https://openalex.org/W2118814875","https://openalex.org/W2139134090","https://openalex.org/W2158429553","https://openalex.org/W2197788712","https://openalex.org/W2242649539","https://openalex.org/W2289656125","https://openalex.org/W2291674180","https://openalex.org/W2325132425","https://openalex.org/W2362274869","https://openalex.org/W2466745998","https://openalex.org/W2539169626","https://openalex.org/W2592594236","https://openalex.org/W2593336842","https://openalex.org/W2594606040","https://openalex.org/W2602440913","https://openalex.org/W2770352091","https://openalex.org/W2779618545","https://openalex.org/W2811436806","https://openalex.org/W2883455918","https://openalex.org/W2883551563","https://openalex.org/W2939386056","https://openalex.org/W3025950502"],"related_works":["https://openalex.org/W1889129279","https://openalex.org/W4387451989","https://openalex.org/W2532412374","https://openalex.org/W2063137106","https://openalex.org/W23275807","https://openalex.org/W2358715846","https://openalex.org/W2761234876","https://openalex.org/W2153246813","https://openalex.org/W2168042464","https://openalex.org/W2109445684"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"a":[3,162,172,178],"solution":[4],"for":[5,19,35,68,151],"sensing":[6,61],"spatial":[7],"angular":[8,42,73],"velocity.":[9],"A":[10],"high-performance":[11],"digital":[12,53,112,130,146],"interface":[13],"application":[14],"specific":[15],"integrated":[16],"circuit":[17],"(ASIC)":[18],"triple-axis":[20],"micro-electromechanical":[21],"systems":[22],"(MEMS)":[23],"vibratory":[24],"gyroscopes":[25],"is":[26,33,109,135,149],"presented.":[27],"The":[28,75],"technique":[29],"of":[30,49,87,154,175,180],"time":[31],"multiplexing":[32],"employed":[34],"synergetic":[36],"stable":[37],"drive":[38,81],"control":[39],"and":[40,82,92,122,141,157,177],"precise":[41],"velocity":[43],"measurement":[44],"in":[45,60,79,129,161],"three":[46],"separate":[47],"degrees":[48],"freedom":[50],"(DOF).":[51],"Self-excited":[52],"closed":[54],"loop":[55,120],"drives":[56],"the":[57],"proof":[58],"mass":[59],"elements":[62],"at":[63],"its":[64],"inherent":[65],"resonant":[66],"frequency":[67],"Coriolis":[69],"force":[70],"generation":[71],"during":[72],"rotation.":[74],"analog":[76],"front":[77],"ends":[78],"both":[80],"sense":[83],"loops":[84],"are":[85,126],"comprised":[86],"low-noise":[88],"charge-voltage":[89],"(C/V)":[90],"converters":[91,97],"multi-channel":[93],"incremental":[94],"zoom":[95],"analog-to-digital":[96],"(ADC),":[98],"so":[99],"that":[100],"capacitance":[101],"variation":[102],"between":[103],"combs":[104],"induced":[105],"by":[106,138],"mechanical":[107],"motion":[108],"transformed":[110],"into":[111],"voltage":[113],"signals.":[114],"Other":[115],"circuitry":[116],"elements,":[117],"such":[118],"as":[119],"controlling":[121],"accurate":[123],"demodulation":[124],"modules,":[125],"all":[127],"implemented":[128],"logics.":[131],"Automatic":[132],"amplitude":[133],"stabilization":[134],"mainly":[136],"realized":[137],"peak":[139],"detection":[140],"proportion-integration":[142],"(PI)":[143],"control.":[144],"Nonlinear":[145],"gain":[147],"adjustment":[148],"designed":[150],"rapid":[152],"establishment":[153],"resonance":[155],"oscillation":[156],"linearity":[158],"improvement.":[159],"Manufactured":[160],"standard":[163],"0.35-\u03bcm":[164],"complementary":[165],"metal-oxide-semiconductor":[166],"(CMOS)":[167],"technology,":[168],"this":[169],"design":[170],"achieves":[171],"bias":[173],"instability":[174],"2.1\u00b0/h":[176],"nonlinearity":[179],"0.012%":[181],"over":[182],"full-scale":[183],"range.":[184]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}