{"id":"https://openalex.org/W3024147105","doi":"https://doi.org/10.3390/s20102822","title":"Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope","display_name":"Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope","publication_year":2020,"publication_date":"2020-05-15","ids":{"openalex":"https://openalex.org/W3024147105","doi":"https://doi.org/10.3390/s20102822","mag":"3024147105","pmid":"https://pubmed.ncbi.nlm.nih.gov/32429296"},"language":"en","primary_location":{"id":"doi:10.3390/s20102822","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20102822","pdf_url":"https://www.mdpi.com/1424-8220/20/10/2822/pdf?version=1590569519","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/20/10/2822/pdf?version=1590569519","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025974172","display_name":"Rocco Crescenzi","orcid":"https://orcid.org/0000-0002-5239-406X"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Rocco Crescenzi","raw_affiliation_strings":["Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy"],"affiliations":[{"raw_affiliation_string":"Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075566532","display_name":"Giuseppe Vincenzo Castellito","orcid":null},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giuseppe Vincenzo Castellito","raw_affiliation_strings":["Department of Mechanical and Aerospace Engineer, Sapienza University of Roma, 00184 Rome, Italy"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Aerospace Engineer, Sapienza University of Roma, 00184 Rome, Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009067964","display_name":"Simone Quaranta","orcid":"https://orcid.org/0000-0002-7956-3281"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Simone Quaranta","raw_affiliation_strings":["Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy"],"affiliations":[{"raw_affiliation_string":"Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy","institution_ids":["https://openalex.org/I861853513"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014085678","display_name":"M. Balucani","orcid":"https://orcid.org/0000-0001-7045-7063"},"institutions":[{"id":"https://openalex.org/I861853513","display_name":"Sapienza University of Rome","ror":"https://ror.org/02be6w209","country_code":"IT","type":"education","lineage":["https://openalex.org/I861853513"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Marco Balucani","raw_affiliation_strings":["Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy"],"affiliations":[{"raw_affiliation_string":"Department of Information, Electronic and Telecomunication Engineer, Sapienza University of Roma, 00184 Rome, Italy","institution_ids":["https://openalex.org/I861853513"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5025974172"],"corresponding_institution_ids":["https://openalex.org/I861853513"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.3111,"has_fulltext":true,"cited_by_count":7,"citation_normalized_percentile":{"value":0.5602615,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"20","issue":"10","first_page":"2822","last_page":"2822"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8891785740852356},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7770570516586304},{"id":"https://openalex.org/keywords/automotive-industry","display_name":"Automotive industry","score":0.6733773350715637},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5357125997543335},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4947938323020935},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.47738832235336304},{"id":"https://openalex.org/keywords/microsystem","display_name":"Microsystem","score":0.46331146359443665},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.4613587558269501},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.46062225103378296},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.45728346705436707},{"id":"https://openalex.org/keywords/rotor","display_name":"Rotor (electric)","score":0.4335617423057556},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.4332343339920044},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.42699673771858215},{"id":"https://openalex.org/keywords/manufacturing-cost","display_name":"Manufacturing cost","score":0.41348016262054443},{"id":"https://openalex.org/keywords/automotive-engineering","display_name":"Automotive engineering","score":0.4108264744281769},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.39188289642333984},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.31563523411750793},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.22023776173591614},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.19236239790916443},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1746494472026825}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8891785740852356},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7770570516586304},{"id":"https://openalex.org/C526921623","wikidata":"https://www.wikidata.org/wiki/Q190117","display_name":"Automotive industry","level":2,"score":0.6733773350715637},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5357125997543335},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4947938323020935},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.47738832235336304},{"id":"https://openalex.org/C151054161","wikidata":"https://www.wikidata.org/wiki/Q379385","display_name":"Microsystem","level":2,"score":0.46331146359443665},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.4613587558269501},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.46062225103378296},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.45728346705436707},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.4335617423057556},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.4332343339920044},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.42699673771858215},{"id":"https://openalex.org/C2778337023","wikidata":"https://www.wikidata.org/wiki/Q6753108","display_name":"Manufacturing cost","level":2,"score":0.41348016262054443},{"id":"https://openalex.org/C171146098","wikidata":"https://www.wikidata.org/wiki/Q124192","display_name":"Automotive engineering","level":1,"score":0.4108264744281769},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.39188289642333984},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.31563523411750793},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.22023776173591614},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.19236239790916443},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1746494472026825},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s20102822","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20102822","pdf_url":"https://www.mdpi.com/1424-8220/20/10/2822/pdf?version=1590569519","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:32429296","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/32429296","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:fb6d223084ac4710b04a1b51c75a0f38","is_oa":true,"landing_page_url":"https://doaj.org/article/fb6d223084ac4710b04a1b51c75a0f38","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 20, Iss 10, p 2822 (2020)","raw_type":"article"},{"id":"pmh:oai:iris.uniroma1.it:11573/1504087","is_oa":true,"landing_page_url":"http://hdl.handle.net/11573/1504087","pdf_url":null,"source":{"id":"https://openalex.org/S4377196107","display_name":"IRIS Research product catalog (Sapienza University of Rome)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:mdpi.com:/1424-8220/20/10/2822/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s20102822","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:7284569","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7284569","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s20102822","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20102822","pdf_url":"https://www.mdpi.com/1424-8220/20/10/2822/pdf?version=1590569519","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.550000011920929}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3024147105.pdf","grobid_xml":"https://content.openalex.org/works/W3024147105.grobid-xml"},"referenced_works_count":30,"referenced_works":["https://openalex.org/W53274673","https://openalex.org/W1966275328","https://openalex.org/W1969596565","https://openalex.org/W2015039727","https://openalex.org/W2030851382","https://openalex.org/W2032792080","https://openalex.org/W2072719414","https://openalex.org/W2107778440","https://openalex.org/W2108139646","https://openalex.org/W2124428935","https://openalex.org/W2157715949","https://openalex.org/W2159014047","https://openalex.org/W2190019382","https://openalex.org/W2537225146","https://openalex.org/W2790840074","https://openalex.org/W2800422219","https://openalex.org/W2888866904","https://openalex.org/W2897651278","https://openalex.org/W2911534664","https://openalex.org/W2911898580","https://openalex.org/W2921349807","https://openalex.org/W2949167181","https://openalex.org/W2965798268","https://openalex.org/W2991439135","https://openalex.org/W2997130154","https://openalex.org/W2997378488","https://openalex.org/W4249993555","https://openalex.org/W6658682682","https://openalex.org/W6676256574","https://openalex.org/W6678439747"],"related_works":["https://openalex.org/W1515979396","https://openalex.org/W1636281465","https://openalex.org/W192636932","https://openalex.org/W2163891117","https://openalex.org/W2097997314","https://openalex.org/W2138941867","https://openalex.org/W2162167164","https://openalex.org/W2120655901","https://openalex.org/W2000583484","https://openalex.org/W2080008858"],"abstract_inverted_index":{"Gyroscopes":[0],"are":[1,89,158],"one":[2],"of":[3,36,67,140,160,176],"the":[4,9,27,93,130,138,189,200,215],"next":[5],"killer":[6],"applications":[7,16],"for":[8,26,47,56,76,95,103,129,207],"MEMS":[10],"(Micro-Electro-Mechanical-Systems)":[11],"sensors":[12,153],"industry.":[13,70],"Many":[14],"mature":[15],"have":[17,44],"already":[18],"been":[19,45],"developed":[20],"and":[21,32,65,82,97,101,154,167,203],"produced":[22],"in":[23,185,209,211],"limited":[24],"volumes":[25],"automotive,":[28],"consumer,":[29],"industrial,":[30],"medical,":[31],"military":[33],"markets.":[34],"Plenty":[35],"high-volume":[37],"applications,":[38],"over":[39],"100":[40],"million":[41],"per":[42],"year,":[43],"calling":[46],"low-cost":[48,57],"gyroscopes.":[49],"Bulk":[50],"silicon":[51,183],"is":[52,73,173,205],"a":[53,77,84,104,114,141,161],"promising":[54],"candidate":[55],"gyroscopes":[58],"due":[59],"to":[60,91,187,196,213],"its":[61,68],"large":[62],"scale":[63],"availability":[64],"maturity":[66],"manufacturing":[69],"Nevertheless,":[71],"it":[72,204],"not":[74],"suitable":[75],"real":[78,105],"monolithic":[79,106,163,217],"IC":[80],"integration":[81],"requires":[83],"dedicated":[85],"packaging.":[86],"New":[87],"designs":[88],"supposed":[90],"eliminate":[92],"need":[94],"magnets":[96],"metal":[98],"case":[99],"package,":[100],"allow":[102],"MEMS-IC":[107,216],"(Integrated":[108],"Circuit)":[109],"electronic":[110],"system.":[111],"In":[112],"addition,":[113],"drastic":[115],"cost":[116],"reduction":[117],"could":[118],"be":[119,197],"achieved":[120],"by":[121,181],"utilizing":[122],"off-the-shelf":[123],"plastic":[124],"packaging":[125],"with":[126],"lead":[127],"frames":[128],"final":[131],"assembly.":[132],"The":[133,156,171,192],"present":[134],"paper":[135],"puts":[136],"forward":[137],"design":[139],"novel":[142],"tri-axial":[143],"gyroscope":[144],"based":[145],"on":[146],"rotating":[147],"comb-drives":[148,157],"acting":[149],"as":[150],"both":[151],"capacitive":[152],"actuators.":[155],"comprised":[159],"single":[162],"moving":[164],"component":[165],"(rotor)":[166],"fixed":[168],"parts":[169],"(stators).":[170],"former":[172],"made":[174],"out":[175],"different":[177],"concentrated":[178],"masses":[179],"connected":[180],"curved":[182],"beams":[184],"order":[186,212],"decouple":[188],"motion":[190],"signals.":[191],"sensor":[193],"was":[194],"devised":[195],"fabricated":[198],"through":[199],"PolyMUMPs<sup>\u00ae</sup>":[201],"process":[202],"intended":[206],"working":[208],"air":[210],"semplify":[214],"integration.":[218]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2019,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}