{"id":"https://openalex.org/W3016939742","doi":"https://doi.org/10.3390/s20082306","title":"An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process","display_name":"An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process","publication_year":2020,"publication_date":"2020-04-17","ids":{"openalex":"https://openalex.org/W3016939742","doi":"https://doi.org/10.3390/s20082306","mag":"3016939742","pmid":"https://pubmed.ncbi.nlm.nih.gov/32316545"},"language":"en","primary_location":{"id":"doi:10.3390/s20082306","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20082306","pdf_url":"https://www.mdpi.com/1424-8220/20/8/2306/pdf?version=1587138227","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/20/8/2306/pdf?version=1587138227","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5020572860","display_name":"Qianhuang Chen","orcid":"https://orcid.org/0000-0002-4098-0934"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qianhuang Chen","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China"],"raw_orcid":"https://orcid.org/0000-0002-4098-0934","affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062689799","display_name":"Tianyang Shao","orcid":"https://orcid.org/0000-0003-3292-100X"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tianyang Shao","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054085833","display_name":"Yan Xing","orcid":"https://orcid.org/0000-0001-8443-2000"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yan Xing","raw_affiliation_strings":["Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5054085833"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":0.2445,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.49078527,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"20","issue":"8","first_page":"2306","last_page":"2306"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7627902626991272},{"id":"https://openalex.org/keywords/focused-ion-beam","display_name":"Focused ion beam","score":0.7294234037399292},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6000823974609375},{"id":"https://openalex.org/keywords/ion-beam","display_name":"Ion beam","score":0.5898852348327637},{"id":"https://openalex.org/keywords/amorphous-solid","display_name":"Amorphous solid","score":0.5834951996803284},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4694836735725403},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.45516690611839294},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"Ion implantation","score":0.45494839549064636},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.4504167437553406},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.4235532581806183},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3083895444869995},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.29680830240249634},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2059744894504547},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.11510497331619263},{"id":"https://openalex.org/keywords/crystallography","display_name":"Crystallography","score":0.07882007956504822}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7627902626991272},{"id":"https://openalex.org/C161866238","wikidata":"https://www.wikidata.org/wiki/Q258563","display_name":"Focused ion beam","level":3,"score":0.7294234037399292},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6000823974609375},{"id":"https://openalex.org/C50774322","wikidata":"https://www.wikidata.org/wiki/Q644248","display_name":"Ion beam","level":3,"score":0.5898852348327637},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5834951996803284},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4694836735725403},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.45516690611839294},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.45494839549064636},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.4504167437553406},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.4235532581806183},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3083895444869995},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29680830240249634},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2059744894504547},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11510497331619263},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.07882007956504822},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s20082306","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20082306","pdf_url":"https://www.mdpi.com/1424-8220/20/8/2306/pdf?version=1587138227","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:32316545","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/32316545","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:pubmedcentral.nih.gov:7219045","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/7219045","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:9a6bf63c71ae4b0787c19c67e1b56aa5","is_oa":true,"landing_page_url":"https://doaj.org/article/9a6bf63c71ae4b0787c19c67e1b56aa5","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 20, Iss 8, p 2306 (2020)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/20/8/2306/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s20082306","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s20082306","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s20082306","pdf_url":"https://www.mdpi.com/1424-8220/20/8/2306/pdf?version=1587138227","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5299999713897705}],"awards":[{"id":"https://openalex.org/G5025390902","display_name":null,"funder_award_id":"51875104","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321133","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35"},{"id":"https://openalex.org/F4320322392","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549"},{"id":"https://openalex.org/F4320336672","display_name":"Institute of Geology and Geophysics, Chinese Academy of Sciences","ror":"https://ror.org/030vmwa78"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3016939742.pdf","grobid_xml":"https://content.openalex.org/works/W3016939742.grobid-xml"},"referenced_works_count":30,"referenced_works":["https://openalex.org/W112633697","https://openalex.org/W1602691307","https://openalex.org/W1902346400","https://openalex.org/W2013668173","https://openalex.org/W2024968816","https://openalex.org/W2027658025","https://openalex.org/W2039144759","https://openalex.org/W2046746676","https://openalex.org/W2052547535","https://openalex.org/W2069641213","https://openalex.org/W2079418923","https://openalex.org/W2084888749","https://openalex.org/W2088879277","https://openalex.org/W2137377938","https://openalex.org/W2142978805","https://openalex.org/W2255470580","https://openalex.org/W2466213500","https://openalex.org/W2528346774","https://openalex.org/W2558297598","https://openalex.org/W2734584304","https://openalex.org/W2767954664","https://openalex.org/W2783108115","https://openalex.org/W2890877785","https://openalex.org/W2945096587","https://openalex.org/W2978444301","https://openalex.org/W3005851333","https://openalex.org/W3015666161","https://openalex.org/W3102699940","https://openalex.org/W4236226624","https://openalex.org/W6635684626"],"related_works":["https://openalex.org/W1992780761","https://openalex.org/W4320036769","https://openalex.org/W4291746287","https://openalex.org/W2916782604","https://openalex.org/W2382573956","https://openalex.org/W2171786186","https://openalex.org/W1587443902","https://openalex.org/W1992059889","https://openalex.org/W2371667353","https://openalex.org/W2188272038"],"abstract_inverted_index":{"The":[0,139],"helium":[1],"focused":[2],"ion":[3,54,96,159],"beam":[4,51,99,162],"(He-FIB)":[5],"is":[6],"widely":[7],"used":[8],"in":[9,31],"the":[10,47,50,63,70,75,90,108,112,137,146],"field":[11],"of":[12,22,49,56,74,107,157],"nanostructure":[13,41],"fabrication":[14],"due":[15],"to":[16,135],"its":[17],"high":[18],"resolution.":[19],"Complicated":[20],"forms":[21],"processing":[23,59],"damage":[24,72,92,110,148],"induced":[25,150],"by":[26,80,94,126,151],"He-FIB":[27,57,82,127,152],"can":[28,143],"be":[29],"observed":[30],"substrates,":[32],"and":[33,53,85,98,161],"these":[34],"damages":[35],"have":[36],"a":[37,66,86,118,154],"severe":[38],"impact":[39],"on":[40,58,62,104,122],"processing.":[42],"This":[43],"study":[44],"experimentally":[45],"investigated":[46],"influence":[48],"energy":[52,100],"dose":[55,97],"damage.":[60],"Based":[61,103],"experimental":[64],"results,":[65],"prediction":[67],"function":[68,113],"for":[69,88],"amorphous":[71,91,109,147],"profile":[73,93,149],"single-crystalline":[76,123],"silicon":[77,124],"substrate":[78],"caused":[79],"incident":[81],"was":[83,101],"proposed,":[84],"method":[87],"calculating":[89],"inputting":[95],"established.":[102],"one":[105],"set":[106],"profiles,":[111],"coefficients":[114],"were":[115,132],"determined":[116],"using":[117],"genetic":[119],"algorithm.":[120],"Experiments":[121],"scanned":[125],"under":[128,153],"different":[129,158],"process":[130],"parameters":[131],"carried":[133],"out":[134],"validate":[136],"model.":[138],"proposed":[140],"experiment-based":[141],"model":[142],"accurately":[144],"predict":[145],"wide":[155],"range":[156],"doses":[160],"energies.":[163]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-08-11T07:18:39.950985","created_date":"2025-10-10T00:00:00"}