{"id":"https://openalex.org/W2991458166","doi":"https://doi.org/10.3390/s19235289","title":"Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors","display_name":"Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors","publication_year":2019,"publication_date":"2019-12-01","ids":{"openalex":"https://openalex.org/W2991458166","doi":"https://doi.org/10.3390/s19235289","mag":"2991458166","pmid":"https://pubmed.ncbi.nlm.nih.gov/31805630"},"language":"en","primary_location":{"id":"doi:10.3390/s19235289","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19235289","pdf_url":"https://www.mdpi.com/1424-8220/19/23/5289/pdf","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/23/5289/pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019910404","display_name":"Yuki Shimizu","orcid":"https://orcid.org/0000-0003-3527-2869"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Yuki Shimizu","raw_affiliation_strings":["Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048332393","display_name":"Hiraku Matsukuma","orcid":"https://orcid.org/0000-0001-8125-9708"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiraku Matsukuma","raw_affiliation_strings":["Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079733529","display_name":"Wei Gao","orcid":"https://orcid.org/0000-0001-9336-2729"},"institutions":[{"id":"https://openalex.org/I201537933","display_name":"Tohoku University","ror":"https://ror.org/01dq60k83","country_code":"JP","type":"education","lineage":["https://openalex.org/I201537933"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Wei Gao","raw_affiliation_strings":["Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"],"raw_orcid":"https://orcid.org/0000-0001-9336-2729","affiliations":[{"raw_affiliation_string":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan","institution_ids":["https://openalex.org/I201537933"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5019910404"],"corresponding_institution_ids":["https://openalex.org/I201537933"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":3.3405,"has_fulltext":true,"cited_by_count":73,"citation_normalized_percentile":{"value":0.92784752,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":98,"max":100},"biblio":{"volume":"19","issue":"23","first_page":"5289","last_page":"5289"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.8112267851829529},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.7706374526023865},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.7041309475898743},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.591372549533844},{"id":"https://openalex.org/keywords/angular-displacement","display_name":"Angular displacement","score":0.5670716762542725},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5316579341888428},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.5278496742248535},{"id":"https://openalex.org/keywords/retroreflector","display_name":"Retroreflector","score":0.5237829089164734},{"id":"https://openalex.org/keywords/rotary-encoder","display_name":"Rotary encoder","score":0.484009712934494},{"id":"https://openalex.org/keywords/nanometrology","display_name":"Nanometrology","score":0.4353444278240204},{"id":"https://openalex.org/keywords/interference-lithography","display_name":"Interference lithography","score":0.4299514591693878},{"id":"https://openalex.org/keywords/encoder","display_name":"Encoder","score":0.41559749841690063},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.381902813911438},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.3708346486091614},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3525221347808838},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.29626840353012085},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2129192352294922},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.17689213156700134}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.8112267851829529},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.7706374526023865},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.7041309475898743},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.591372549533844},{"id":"https://openalex.org/C108439606","wikidata":"https://www.wikidata.org/wiki/Q3305038","display_name":"Angular displacement","level":2,"score":0.5670716762542725},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5316579341888428},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.5278496742248535},{"id":"https://openalex.org/C135339813","wikidata":"https://www.wikidata.org/wiki/Q2835","display_name":"Retroreflector","level":3,"score":0.5237829089164734},{"id":"https://openalex.org/C37488316","wikidata":"https://www.wikidata.org/wiki/Q53699","display_name":"Rotary encoder","level":3,"score":0.484009712934494},{"id":"https://openalex.org/C148402106","wikidata":"https://www.wikidata.org/wiki/Q1549529","display_name":"Nanometrology","level":3,"score":0.4353444278240204},{"id":"https://openalex.org/C159395582","wikidata":"https://www.wikidata.org/wiki/Q6046394","display_name":"Interference lithography","level":4,"score":0.4299514591693878},{"id":"https://openalex.org/C118505674","wikidata":"https://www.wikidata.org/wiki/Q42586063","display_name":"Encoder","level":2,"score":0.41559749841690063},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.381902813911438},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.3708346486091614},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3525221347808838},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.29626840353012085},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2129192352294922},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.17689213156700134},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s19235289","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19235289","pdf_url":"https://www.mdpi.com/1424-8220/19/23/5289/pdf","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:31805630","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31805630","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:europepmc.org:5881374","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6928657","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/23/5289/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19235289","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s19235289","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19235289","pdf_url":"https://www.mdpi.com/1424-8220/19/23/5289/pdf","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1799991047","display_name":"Nanometric surface defect inspection based on the heat flow detection and the collaborative development of a compact scale for measurement of a nanometric displacement(Fostering Joint International Research)","funder_award_id":"16KK0119","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G6149997352","display_name":null,"funder_award_id":"15H05957","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2991458166.pdf","grobid_xml":"https://content.openalex.org/works/W2991458166.grobid-xml"},"referenced_works_count":138,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1559103798","https://openalex.org/W1630642568","https://openalex.org/W1965752623","https://openalex.org/W1965992358","https://openalex.org/W1966889561","https://openalex.org/W1969883785","https://openalex.org/W1978235591","https://openalex.org/W1978874960","https://openalex.org/W1981026540","https://openalex.org/W1983630439","https://openalex.org/W1986259112","https://openalex.org/W1990833990","https://openalex.org/W1992984362","https://openalex.org/W1996366026","https://openalex.org/W1997491027","https://openalex.org/W1998003102","https://openalex.org/W1999307361","https://openalex.org/W1999767249","https://openalex.org/W2000354489","https://openalex.org/W2001253540","https://openalex.org/W2004608206","https://openalex.org/W2007077251","https://openalex.org/W2007612343","https://openalex.org/W2009058820","https://openalex.org/W2015107228","https://openalex.org/W2016225733","https://openalex.org/W2016580240","https://openalex.org/W2016849049","https://openalex.org/W2017863685","https://openalex.org/W2018595389","https://openalex.org/W2020295449","https://openalex.org/W2022527895","https://openalex.org/W2023302610","https://openalex.org/W2024143052","https://openalex.org/W2024522463","https://openalex.org/W2025749696","https://openalex.org/W2032918888","https://openalex.org/W2035620388","https://openalex.org/W2036540111","https://openalex.org/W2037136032","https://openalex.org/W2039454972","https://openalex.org/W2039924400","https://openalex.org/W2043272176","https://openalex.org/W2047089824","https://openalex.org/W2048095729","https://openalex.org/W2052264557","https://openalex.org/W2052506786","https://openalex.org/W2053203891","https://openalex.org/W2053306676","https://openalex.org/W2055237474","https://openalex.org/W2055865569","https://openalex.org/W2061857001","https://openalex.org/W2069887481","https://openalex.org/W2071573125","https://openalex.org/W2071608488","https://openalex.org/W2074169311","https://openalex.org/W2074532347","https://openalex.org/W2075693964","https://openalex.org/W2076267627","https://openalex.org/W2076365604","https://openalex.org/W2077229335","https://openalex.org/W2078759197","https://openalex.org/W2082132180","https://openalex.org/W2082401727","https://openalex.org/W2084655580","https://openalex.org/W2085435934","https://openalex.org/W2085827067","https://openalex.org/W2088331397","https://openalex.org/W2088433467","https://openalex.org/W2092058774","https://openalex.org/W2092931388","https://openalex.org/W2093761996","https://openalex.org/W2094160848","https://openalex.org/W2095575090","https://openalex.org/W2117984845","https://openalex.org/W2126038554","https://openalex.org/W2126722841","https://openalex.org/W2131417783","https://openalex.org/W2138857477","https://openalex.org/W2139408969","https://openalex.org/W2141734849","https://openalex.org/W2141762459","https://openalex.org/W2146876309","https://openalex.org/W2159391728","https://openalex.org/W2166653133","https://openalex.org/W2201421291","https://openalex.org/W2211356189","https://openalex.org/W2216182356","https://openalex.org/W2223480613","https://openalex.org/W2268072277","https://openalex.org/W2313448972","https://openalex.org/W2333817312","https://openalex.org/W2396942016","https://openalex.org/W2471367111","https://openalex.org/W2483646448","https://openalex.org/W2530396736","https://openalex.org/W2552148444","https://openalex.org/W2592581518","https://openalex.org/W2606118357","https://openalex.org/W2606455448","https://openalex.org/W2607027040","https://openalex.org/W2608791817","https://openalex.org/W2615804590","https://openalex.org/W2726628778","https://openalex.org/W2730608400","https://openalex.org/W2748259473","https://openalex.org/W2753300995","https://openalex.org/W2755918173","https://openalex.org/W2775397295","https://openalex.org/W2790445735","https://openalex.org/W2790947731","https://openalex.org/W2793394660","https://openalex.org/W2793541250","https://openalex.org/W2803764327","https://openalex.org/W2804015472","https://openalex.org/W2806184111","https://openalex.org/W2806761578","https://openalex.org/W2897311702","https://openalex.org/W2897420614","https://openalex.org/W2898165056","https://openalex.org/W2901056234","https://openalex.org/W2903336162","https://openalex.org/W2903605504","https://openalex.org/W2915874780","https://openalex.org/W2916956741","https://openalex.org/W2925597739","https://openalex.org/W2938424996","https://openalex.org/W2940827434","https://openalex.org/W2951215190","https://openalex.org/W2969211202","https://openalex.org/W4234723300","https://openalex.org/W4244664608","https://openalex.org/W6668471090","https://openalex.org/W6687699427","https://openalex.org/W6688055419","https://openalex.org/W6702443411","https://openalex.org/W6743823225"],"related_works":["https://openalex.org/W3046009069","https://openalex.org/W1968694530","https://openalex.org/W4307866409","https://openalex.org/W142004827","https://openalex.org/W2335254046","https://openalex.org/W1972872473","https://openalex.org/W2202333230","https://openalex.org/W991034957","https://openalex.org/W2350644324","https://openalex.org/W2331414698"],"abstract_inverted_index":{"In":[0,58],"dimensional":[1],"metrology":[2],"it":[3,27],"is":[4,28],"necessary":[5],"to":[6,31,48],"carry":[7],"out":[8,105],"multi-axis":[9,42,64,97],"angle":[10,43],"and":[11,44,52,76,99,132],"displacement":[12,21,45,101],"measurement":[13,25,36,46,95],"for":[14,41],"high-precision":[15],"positioning.":[16],"Although":[17],"the":[18,33,49,53,62,69,72,77,90,127,133,141,144,148,155],"state-of-the-art":[19,63],"linear":[20],"sensors":[22],"have":[23],"sub-nanometric":[24],"resolution,":[26],"not":[29],"easy":[30],"suppress":[32],"increase":[34],"of":[35,55,92,96,114,143,147],"uncertainty":[37],"when":[38],"being":[39],"applied":[40],"due":[47],"Abbe":[50],"errors":[51],"influences":[54],"sensor":[56],"misalignment.":[57],"this":[59],"review":[60],"article,":[61],"optical":[65],"sensors,":[66],"such":[67],"as":[68],"three-axis":[70,73],"autocollimator,":[71],"planar":[74,79,84,117,150],"encoder,":[75],"six-degree-of-freedom":[78],"encoder":[80],"based":[81,120,153],"on":[82,121,154],"a":[83,108,115,122],"scale":[85,118,151],"grating":[86,93,119,152],"are":[87,136],"introduced.":[88],"With":[89],"employment":[91],"reflectors,":[94],"translational":[98],"angular":[100],"can":[102],"be":[103],"carried":[104],"while":[106],"employing":[107],"single":[109],"laser":[110],"beam.":[111],"Fabrication":[112],"methods":[113],"large-area":[116,149],"single-point":[123],"diamond":[124],"cutting":[125],"with":[126],"fast":[128],"tool":[129],"servo":[130],"technique":[131],"interference":[134],"lithography":[135],"also":[137],"presented,":[138],"followed":[139],"by":[140],"description":[142],"evaluation":[145],"method":[146],"Fizeau":[156],"interferometer.":[157]},"counts_by_year":[{"year":2026,"cited_by_count":6},{"year":2025,"cited_by_count":19},{"year":2024,"cited_by_count":13},{"year":2023,"cited_by_count":8},{"year":2022,"cited_by_count":11},{"year":2021,"cited_by_count":8},{"year":2020,"cited_by_count":8}],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-10-10T00:00:00"}