{"id":"https://openalex.org/W2972294450","doi":"https://doi.org/10.3390/s19183866","title":"A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging","display_name":"A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging","publication_year":2019,"publication_date":"2019-09-07","ids":{"openalex":"https://openalex.org/W2972294450","doi":"https://doi.org/10.3390/s19183866","mag":"2972294450","pmid":"https://pubmed.ncbi.nlm.nih.gov/31500306"},"language":"en","primary_location":{"id":"doi:10.3390/s19183866","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19183866","pdf_url":"https://www.mdpi.com/1424-8220/19/18/3866/pdf?version=1567848495","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/18/3866/pdf?version=1567848495","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016084523","display_name":"Pengcheng Yan","orcid":"https://orcid.org/0000-0001-9144-7278"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pengcheng Yan","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050851728","display_name":"Yulan Lu","orcid":"https://orcid.org/0000-0003-3826-5998"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulan Lu","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":"https://orcid.org/0000-0003-3826-5998","affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102772738","display_name":"Chao Xiang","orcid":"https://orcid.org/0000-0002-9903-5451"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Xiang","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":"https://orcid.org/0000-0003-4612-3279","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5049215297","https://openalex.org/A5109218676"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210165038"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.2107,"has_fulltext":true,"cited_by_count":20,"citation_normalized_percentile":{"value":0.80026501,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":"19","issue":"18","first_page":"3866","last_page":"3866"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.740477442741394},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6846166849136353},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6794570684432983},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6760343313217163},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6626937389373779},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.606217086315155},{"id":"https://openalex.org/keywords/residual-stress","display_name":"Residual stress","score":0.5407386422157288},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.49624139070510864},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.49455782771110535},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.48370033502578735},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.47151339054107666},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4517171382904053},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.4191122353076935},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.3383832573890686},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.23771211504936218},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.10859298706054688}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.740477442741394},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6846166849136353},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6794570684432983},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6760343313217163},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6626937389373779},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.606217086315155},{"id":"https://openalex.org/C37292000","wikidata":"https://www.wikidata.org/wiki/Q1257918","display_name":"Residual stress","level":2,"score":0.5407386422157288},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.49624139070510864},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.49455782771110535},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.48370033502578735},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.47151339054107666},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4517171382904053},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.4191122353076935},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3383832573890686},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.23771211504936218},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.10859298706054688},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s19183866","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19183866","pdf_url":"https://www.mdpi.com/1424-8220/19/18/3866/pdf?version=1567848495","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:31500306","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31500306","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:9060749507644530b4b71e949a360caa","is_oa":true,"landing_page_url":"https://doaj.org/article/9060749507644530b4b71e949a360caa","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 19, Iss 18, p 3866 (2019)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/18/3866/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19183866","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6767015","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6767015","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s19183866","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19183866","pdf_url":"https://www.mdpi.com/1424-8220/19/18/3866/pdf?version=1567848495","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.7799999713897705,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1639096366","display_name":null,"funder_award_id":"61825107","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G1736621537","display_name":null,"funder_award_id":"No. 61825107, U1930206 and 61431019","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G1813887227","display_name":null,"funder_award_id":"61431019","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5566042464","display_name":null,"funder_award_id":"2018YFB2002302","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G5639802925","display_name":null,"funder_award_id":"No. 61825107","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8045324403","display_name":null,"funder_award_id":"2018YFF01010400","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G8993397100","display_name":null,"funder_award_id":"U1930206","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2972294450.pdf","grobid_xml":"https://content.openalex.org/works/W2972294450.grobid-xml"},"referenced_works_count":17,"referenced_works":["https://openalex.org/W1611100619","https://openalex.org/W1899063697","https://openalex.org/W2009953081","https://openalex.org/W2013853238","https://openalex.org/W2025582238","https://openalex.org/W2088161664","https://openalex.org/W2089073173","https://openalex.org/W2098508403","https://openalex.org/W2116308975","https://openalex.org/W2131753857","https://openalex.org/W2152747678","https://openalex.org/W2541945257","https://openalex.org/W2562590922","https://openalex.org/W2595916539","https://openalex.org/W2742281416","https://openalex.org/W2793553354","https://openalex.org/W2887959795"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W4206445530","https://openalex.org/W2771786520","https://openalex.org/W2034653092","https://openalex.org/W2174354966","https://openalex.org/W2810180604","https://openalex.org/W2001476809","https://openalex.org/W2095990703","https://openalex.org/W1921407827","https://openalex.org/W2146341803"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,13,21,108,115,121,140],"temperature-insensitive":[4],"resonant":[5],"pressure":[6,18,31,36,110,130],"sensor,":[7],"which":[8,157],"is":[9,158],"mainly":[10],"composed":[11],"of":[12,30,44,53,61,100,112,117,125,143,151,161],"silicon-on-insulator":[14],"(SOI)":[15],"wafer":[16],"for":[17,25],"measurements":[19],"and":[20,39,89,120],"silicon-on-glass":[22],"(SOG)":[23],"cap":[24,68],"vacuum":[26],"packaging.":[27],"The":[28],"variations":[29,52],"under":[32],"measurement":[33],"bend":[34],"the":[35,41,45,48,58,62,66,85,91,98,101,129,149,165],"sensitive":[37],"diaphragm":[38],"regulate":[40],"intrinsic":[42,59],"frequencies":[43,60],"resonators":[46,102],"in":[47,148],"device":[49],"layer.":[50],"While,":[51],"temperature":[54,141],"cannot":[55],"significantly":[56],"change":[57],"resonators,":[63],"due":[64],"to":[65,69,83,135,154],"SOG":[67],"offset":[70],"generated":[71],"thermal":[72,87],"stress.":[73],"Numerical":[74],"simulations,":[75],"based":[76],"on":[77],"finite":[78],"element":[79],"analysis,":[80],"were":[81],"conducted":[82],"calculate":[84],"residual":[86],"stress":[88],"optimize":[90],"sensing":[92],"structures.":[93],"Experimental":[94],"results":[95],"show":[96],"that":[97],"Q-factors":[99],"are":[103],"higher":[104],"than":[105,164],"16,000,":[106],"with":[107,128],"differential":[109],"sensitivity":[111,142],"11.89":[113],"Hz/kPa,":[114],"nonlinearity":[116],"0.01%":[118,126],"F.S":[119,127],"low":[122],"fitting":[123],"error":[124],"varying":[131],"from":[132],"100":[133],"kPa":[134],"1000":[136],"kPa.":[137],"In":[138],"particular,":[139],"~1":[144],"Hz/\u00b0C":[145],"was":[146],"obtained":[147],"range":[150],"-45":[152],"\u00b0C":[153],"65":[155],"\u00b0C,":[156],"one":[159],"order":[160],"magnitude":[162],"lower":[163],"previously":[166],"reported":[167],"counterparts.":[168]},"counts_by_year":[{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":2}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}