{"id":"https://openalex.org/W2973191531","doi":"https://doi.org/10.3390/s19092141","title":"Enhanced Humidity Sensing Response of SnO2/Silicon Nanopillar Array by UV Irradiation","display_name":"Enhanced Humidity Sensing Response of SnO2/Silicon Nanopillar Array by UV Irradiation","publication_year":2019,"publication_date":"2019-05-09","ids":{"openalex":"https://openalex.org/W2973191531","doi":"https://doi.org/10.3390/s19092141","mag":"2973191531","pmid":"https://pubmed.ncbi.nlm.nih.gov/31075817"},"language":"en","primary_location":{"id":"doi:10.3390/s19092141","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19092141","pdf_url":"https://www.mdpi.com/1424-8220/19/9/2141/pdf?version=1557373350","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/9/2141/pdf?version=1557373350","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079956770","display_name":"Wei Li","orcid":"https://orcid.org/0000-0002-5277-6850"},"institutions":[{"id":"https://openalex.org/I881766915","display_name":"Nanjing University","ror":"https://ror.org/01rxvg760","country_code":"CN","type":"education","lineage":["https://openalex.org/I881766915"]},{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wei Li","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","School of Physics, Nanjing University, Nanjing 210093, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]},{"raw_affiliation_string":"School of Physics, Nanjing University, Nanjing 210093, China","institution_ids":["https://openalex.org/I881766915"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100349000","display_name":"Linlin Wang","orcid":"https://orcid.org/0000-0002-6999-5056"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Linlin Wang","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054968774","display_name":"Yun Cai","orcid":"https://orcid.org/0000-0001-5820-2236"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Cai","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091422437","display_name":"Peifeng Pan","orcid":"https://orcid.org/0000-0003-4746-0998"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peifeng Pan","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100728947","display_name":"Jinze Li","orcid":"https://orcid.org/0009-0002-8901-4806"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinze Li","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112307109","display_name":"Qingying Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qingying Ren","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006271565","display_name":"Jie Xu","orcid":"https://orcid.org/0000-0003-4570-8566"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jie Xu","raw_affiliation_strings":["College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5079956770"],"corresponding_institution_ids":["https://openalex.org/I41198531","https://openalex.org/I881766915"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.2412,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.55781156,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"19","issue":"9","first_page":"2141","last_page":"2141"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanopillar","display_name":"Nanopillar","score":0.9977774024009705},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8263765573501587},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.7146064639091492},{"id":"https://openalex.org/keywords/nanosphere-lithography","display_name":"Nanosphere lithography","score":0.691620409488678},{"id":"https://openalex.org/keywords/irradiation","display_name":"Irradiation","score":0.685291051864624},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6548720598220825},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5857913494110107},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"Sputter deposition","score":0.5615851283073425},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.5330257415771484},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.4990668296813965},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.44681882858276367},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4216739237308502},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.3008819818496704},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.09094220399856567}],"concepts":[{"id":"https://openalex.org/C25479853","wikidata":"https://www.wikidata.org/wiki/Q12228614","display_name":"Nanopillar","level":3,"score":0.9977774024009705},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8263765573501587},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.7146064639091492},{"id":"https://openalex.org/C43766710","wikidata":"https://www.wikidata.org/wiki/Q17043033","display_name":"Nanosphere lithography","level":4,"score":0.691620409488678},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.685291051864624},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6548720598220825},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5857913494110107},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5615851283073425},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5330257415771484},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.4990668296813965},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.44681882858276367},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4216739237308502},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.3008819818496704},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.09094220399856567},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s19092141","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19092141","pdf_url":"https://www.mdpi.com/1424-8220/19/9/2141/pdf?version=1557373350","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:31075817","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/31075817","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:2f06227e466a411f8175342f27473a51","is_oa":true,"landing_page_url":"https://doaj.org/article/2f06227e466a411f8175342f27473a51","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 19, Iss 9, p 2141 (2019)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/9/2141/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19092141","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6539979","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6539979","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s19092141","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19092141","pdf_url":"https://www.mdpi.com/1424-8220/19/9/2141/pdf?version=1557373350","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.6299999952316284,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1121271761","display_name":null,"funder_award_id":"Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2082826544","display_name":null,"funder_award_id":"Postdoctoral","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2087396116","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2655915699","display_name":null,"funder_award_id":"2018T110480","funder_id":"https://openalex.org/F4320321543","funder_display_name":"China Postdoctoral Science Foundation"},{"id":"https://openalex.org/G268815535","display_name":null,"funder_award_id":"K201714","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3317480652","display_name":null,"funder_award_id":"Science","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3910829908","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G391238517","display_name":null,"funder_award_id":", and","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4020255992","display_name":null,"funder_award_id":"Project","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4340175768","display_name":null,"funder_award_id":"51602159","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4363638668","display_name":null,"funder_award_id":"SJCX18_0290","funder_id":"https://openalex.org/F4320321605","funder_display_name":"Government of Jiangsu Province"},{"id":"https://openalex.org/G5994120800","display_name":null,"funder_award_id":"Natural","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6269860938","display_name":null,"funder_award_id":"2018T1104","funder_id":"https://openalex.org/F4320321543","funder_display_name":"China Postdoctoral Science Foundation"},{"id":"https://openalex.org/G6463241511","display_name":null,"funder_award_id":"BK20171442","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G7679369841","display_name":null,"funder_award_id":"11504177","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8118195979","display_name":null,"funder_award_id":"K201714","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321543","display_name":"China Postdoctoral Science Foundation","ror":"https://ror.org/0426zh255"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2973191531.pdf","grobid_xml":"https://content.openalex.org/works/W2973191531.grobid-xml"},"referenced_works_count":41,"referenced_works":["https://openalex.org/W1765446501","https://openalex.org/W1954516036","https://openalex.org/W1970058340","https://openalex.org/W1977066710","https://openalex.org/W1978762670","https://openalex.org/W1988784692","https://openalex.org/W1998706446","https://openalex.org/W2001319551","https://openalex.org/W2005034538","https://openalex.org/W2006880698","https://openalex.org/W2032164889","https://openalex.org/W2032459738","https://openalex.org/W2039394518","https://openalex.org/W2047142826","https://openalex.org/W2066087567","https://openalex.org/W2075891867","https://openalex.org/W2075992247","https://openalex.org/W2090780047","https://openalex.org/W2092475165","https://openalex.org/W2094538061","https://openalex.org/W2105024153","https://openalex.org/W2115110079","https://openalex.org/W2202257499","https://openalex.org/W2285403976","https://openalex.org/W2334012162","https://openalex.org/W2345541690","https://openalex.org/W2437954140","https://openalex.org/W2475304844","https://openalex.org/W2492854146","https://openalex.org/W2528395482","https://openalex.org/W2560417649","https://openalex.org/W2589650326","https://openalex.org/W2594349753","https://openalex.org/W2599199563","https://openalex.org/W2765094529","https://openalex.org/W2773575055","https://openalex.org/W2790555029","https://openalex.org/W2993478925","https://openalex.org/W4214531572","https://openalex.org/W4243595109","https://openalex.org/W6824998261"],"related_works":["https://openalex.org/W2055390148","https://openalex.org/W2098503598","https://openalex.org/W2094409448","https://openalex.org/W2009380844","https://openalex.org/W2318020050","https://openalex.org/W2298773019","https://openalex.org/W3126541126","https://openalex.org/W2165334470","https://openalex.org/W2286987323","https://openalex.org/W2316845188"],"abstract_inverted_index":{"In":[0],"this":[1,17],"work,":[2],"a":[3,52],"silicon":[4],"nanopillar":[5,26],"array":[6,27],"was":[7,14],"created":[8],"with":[9,45,66,71],"nanosphere":[10],"lithography.":[11],"SnO<sub>2</sub>":[12],"film":[13],"deposited":[15],"on":[16],"nanostructure":[18,78],"by":[19,60],"magnetron":[20],"sputtering":[21],"to":[22],"form":[23],"an":[24],"SnO<sub>2</sub>/silicon":[25],"sensor.":[28],"The":[29],"humidity":[30,55],"sensitivity,":[31],"response":[32],"time,":[33],"and":[34,69],"recovery":[35],"time":[36],"were":[37,58],"all":[38],"measured":[39],"at":[40],"room":[41],"temperature":[42],"(25":[43],"\u00b0C)":[44],"UV":[46,49,72],"or":[47],"without":[48],"irradiation.":[50],"As":[51],"result,":[53],"the":[54,62,84],"sensitivity":[56],"properties":[57],"improved":[59],"enlarging":[61],"specific":[63],"surface":[64],"area":[65],"ordered":[67],"nanopillars":[68],"irradiating":[70],"light.":[73],"These":[74],"results":[75],"indicate":[76],"that":[77],"sensors":[79],"have":[80],"potential":[81],"applications":[82],"in":[83],"field":[85],"of":[86],"sensors.":[87]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2019-09-19T00:00:00"}