{"id":"https://openalex.org/W2912275393","doi":"https://doi.org/10.3390/s19030659","title":"Humidity Sensors with Shielding Electrode Under Interdigitated Electrode","display_name":"Humidity Sensors with Shielding Electrode Under Interdigitated Electrode","publication_year":2019,"publication_date":"2019-02-06","ids":{"openalex":"https://openalex.org/W2912275393","doi":"https://doi.org/10.3390/s19030659","mag":"2912275393","pmid":"https://pubmed.ncbi.nlm.nih.gov/30736294"},"language":"en","primary_location":{"id":"doi:10.3390/s19030659","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030659","pdf_url":"https://www.mdpi.com/1424-8220/19/3/659/pdf?version=1549447244","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/3/659/pdf?version=1549447244","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100410292","display_name":"Hong Liu","orcid":"https://orcid.org/0000-0002-1447-1300"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hong Liu","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100341261","display_name":"Qi Wang","orcid":"https://orcid.org/0000-0002-1328-8571"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qi Wang","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077463168","display_name":"Wenjie Sheng","orcid":null},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenjie Sheng","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020937326","display_name":"Xubo Wang","orcid":"https://orcid.org/0000-0001-9014-6158"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xubo Wang","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005848045","display_name":"Kaidi Zhang","orcid":"https://orcid.org/0000-0002-1453-0681"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kaidi Zhang","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074509945","display_name":"Lin Du","orcid":"https://orcid.org/0000-0001-7485-0030"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lin Du","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020046309","display_name":"Jia Zhou","orcid":"https://orcid.org/0000-0002-9098-5661"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jia Zhou","raw_affiliation_strings":["ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China"],"raw_orcid":"https://orcid.org/0000-0002-9098-5661","affiliations":[{"raw_affiliation_string":"ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China","institution_ids":["https://openalex.org/I4210132426","https://openalex.org/I24943067"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5020046309"],"corresponding_institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4210132426"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":3.0589,"has_fulltext":true,"cited_by_count":36,"citation_normalized_percentile":{"value":0.89604782,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":99},"biblio":{"volume":"19","issue":"3","first_page":"659","last_page":"659"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.8734478950500488},{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.8356077671051025},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.7556447386741638},{"id":"https://openalex.org/keywords/electromagnetic-shielding","display_name":"Electromagnetic shielding","score":0.7433736324310303},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7168743014335632},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7117543816566467},{"id":"https://openalex.org/keywords/polyimide","display_name":"Polyimide","score":0.7070425748825073},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.642751157283783},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6327642798423767},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5747411847114563},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.49616631865501404},{"id":"https://openalex.org/keywords/shielding-effect","display_name":"Shielding effect","score":0.47750920057296753},{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.4507772624492645},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4152637720108032},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.30170512199401855},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2946004867553711},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.17941045761108398},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12219506502151489},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09658649563789368},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.08723723888397217},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.056169748306274414}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8734478950500488},{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.8356077671051025},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.7556447386741638},{"id":"https://openalex.org/C2265751","wikidata":"https://www.wikidata.org/wiki/Q332007","display_name":"Electromagnetic shielding","level":2,"score":0.7433736324310303},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7168743014335632},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7117543816566467},{"id":"https://openalex.org/C2780965675","wikidata":"https://www.wikidata.org/wiki/Q145958","display_name":"Polyimide","level":3,"score":0.7070425748825073},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.642751157283783},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6327642798423767},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5747411847114563},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.49616631865501404},{"id":"https://openalex.org/C113078167","wikidata":"https://www.wikidata.org/wiki/Q3699481","display_name":"Shielding effect","level":3,"score":0.47750920057296753},{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.4507772624492645},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4152637720108032},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.30170512199401855},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2946004867553711},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.17941045761108398},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12219506502151489},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09658649563789368},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08723723888397217},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.056169748306274414},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s19030659","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030659","pdf_url":"https://www.mdpi.com/1424-8220/19/3/659/pdf?version=1549447244","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:30736294","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30736294","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:cbfefb8304db4d6bbcb6e10e0333446a","is_oa":true,"landing_page_url":"https://doaj.org/article/cbfefb8304db4d6bbcb6e10e0333446a","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 19, Iss 3, p 659 (2019)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5385190","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6386973","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/3/659/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19030659","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6386973","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6386973","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s19030659","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030659","pdf_url":"https://www.mdpi.com/1424-8220/19/3/659/pdf?version=1549447244","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Zero hunger","score":0.800000011920929,"id":"https://metadata.un.org/sdg/2"}],"awards":[{"id":"https://openalex.org/G4908407906","display_name":null,"funder_award_id":"2018MS003","funder_id":"https://openalex.org/F4320321851","funder_display_name":"Fudan University"},{"id":"https://openalex.org/G6350991335","display_name":null,"funder_award_id":"61874033","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321851","display_name":"Fudan University","ror":"https://ror.org/013q1eq08"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2912275393.pdf","grobid_xml":"https://content.openalex.org/works/W2912275393.grobid-xml"},"referenced_works_count":41,"referenced_works":["https://openalex.org/W401178921","https://openalex.org/W1420846089","https://openalex.org/W1968072150","https://openalex.org/W1968858082","https://openalex.org/W1992161920","https://openalex.org/W2001086979","https://openalex.org/W2005360663","https://openalex.org/W2011573248","https://openalex.org/W2021682139","https://openalex.org/W2021839698","https://openalex.org/W2022643834","https://openalex.org/W2024545352","https://openalex.org/W2027016537","https://openalex.org/W2027788633","https://openalex.org/W2036061431","https://openalex.org/W2043511763","https://openalex.org/W2044694370","https://openalex.org/W2047445546","https://openalex.org/W2047641437","https://openalex.org/W2061762242","https://openalex.org/W2070113713","https://openalex.org/W2071415227","https://openalex.org/W2076501549","https://openalex.org/W2080727402","https://openalex.org/W2085889410","https://openalex.org/W2089067453","https://openalex.org/W2096409528","https://openalex.org/W2110525386","https://openalex.org/W2117014970","https://openalex.org/W2128549812","https://openalex.org/W2165219985","https://openalex.org/W2165965511","https://openalex.org/W2323126045","https://openalex.org/W2334904126","https://openalex.org/W2423793223","https://openalex.org/W2557542940","https://openalex.org/W2583468737","https://openalex.org/W2769565356","https://openalex.org/W2908121281","https://openalex.org/W6613931422","https://openalex.org/W6757530944"],"related_works":["https://openalex.org/W1991899782","https://openalex.org/W2461519373","https://openalex.org/W2037517127","https://openalex.org/W2354393715","https://openalex.org/W2379120132","https://openalex.org/W2030260570","https://openalex.org/W1968611165","https://openalex.org/W2466922863","https://openalex.org/W2025017507","https://openalex.org/W2119800850"],"abstract_inverted_index":{"Recently,":[0],"humidity":[1,24,45,111],"sensors":[2,55],"have":[3],"been":[4],"investigated":[5],"extensively":[6],"due":[7],"to":[8,40,69],"their":[9],"broad":[10],"applications":[11],"in":[12],"chip":[13],"fabrication,":[14],"health":[15],"care,":[16],"agriculture,":[17],"amongst":[18],"others.":[19],"We":[20,65],"propose":[21],"a":[22,27],"capacitive":[23,54,63],"sensor":[25,46,91],"with":[26,83],"shielding":[28,42],"electrode":[29,33,62],"under":[30,108],"the":[31,41,48,57,73,84,89],"interdigitated":[32,61],"(SIDE)":[34],"based":[35],"on":[36],"polyimide":[37],"(PI).":[38],"Thanks":[39],"electrode,":[43],"this":[44],"combines":[47],"high":[49],"sensitivity":[50,87],"of":[51,60,88],"parallel":[52],"plate":[53],"and":[56,71],"fast":[58],"response":[59],"sensors.":[64],"use":[66],"COMSOL":[67],"Multiphysics":[68],"design":[70],"optimize":[72],"SIDE":[74,90],"structure.":[75],"The":[76,86,104],"experimental":[77],"data":[78],"show":[79],"very":[80],"good":[81],"agreement":[82],"simulation.":[85],"is":[92,100,112],"0.0063%":[93],"\u00b1":[94],"0.0002%":[95],"RH.":[96,114],"Its":[97],"response/recovery":[98],"time":[99],"20":[101],"s/22":[102],"s.":[103],"maximum":[105],"capacitance":[106],"drift":[107],"different":[109],"relative":[110],"1.28%":[113]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":9},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}