{"id":"https://openalex.org/W2915049723","doi":"https://doi.org/10.3390/s19030658","title":"A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity\u2013Density Sensors","display_name":"A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity\u2013Density Sensors","publication_year":2019,"publication_date":"2019-02-06","ids":{"openalex":"https://openalex.org/W2915049723","doi":"https://doi.org/10.3390/s19030658","mag":"2915049723","pmid":"https://pubmed.ncbi.nlm.nih.gov/30736296"},"language":"en","primary_location":{"id":"doi:10.3390/s19030658","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030658","pdf_url":"https://www.mdpi.com/1424-8220/19/3/658/pdf?version=1549447710","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","datacite","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/3/658/pdf?version=1549447710","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006119963","display_name":"V\u00edctor Ruiz-D\u00edez","orcid":"https://orcid.org/0000-0002-0568-2974"},"institutions":[{"id":"https://openalex.org/I79189158","display_name":"University of Castilla-La Mancha","ror":"https://ror.org/05r78ng12","country_code":"ES","type":"education","lineage":["https://openalex.org/I79189158"]}],"countries":["ES"],"is_corresponding":true,"raw_author_name":"V\u00edctor Ruiz-D\u00edez","raw_affiliation_strings":["Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain"],"raw_orcid":"https://orcid.org/0000-0002-0568-2974","affiliations":[{"raw_affiliation_string":"Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain","institution_ids":["https://openalex.org/I79189158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033499101","display_name":"J. Toledo","orcid":"https://orcid.org/0000-0002-8114-7252"},"institutions":[{"id":"https://openalex.org/I79189158","display_name":"University of Castilla-La Mancha","ror":"https://ror.org/05r78ng12","country_code":"ES","type":"education","lineage":["https://openalex.org/I79189158"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Javier Toledo","raw_affiliation_strings":["Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain"],"raw_orcid":"https://orcid.org/0000-0002-8114-7252","affiliations":[{"raw_affiliation_string":"Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain","institution_ids":["https://openalex.org/I79189158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007445390","display_name":"J. Hernando","orcid":"https://orcid.org/0000-0002-1651-2372"},"institutions":[{"id":"https://openalex.org/I79189158","display_name":"University of Castilla-La Mancha","ror":"https://ror.org/05r78ng12","country_code":"ES","type":"education","lineage":["https://openalex.org/I79189158"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Jorge Hernando-Garc\u00eda","raw_affiliation_strings":["Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain","institution_ids":["https://openalex.org/I79189158"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090186090","display_name":"A. Ababneh","orcid":"https://orcid.org/0000-0002-3746-7507"},"institutions":[{"id":"https://openalex.org/I85507684","display_name":"Yarmouk University","ror":"https://ror.org/004mbaj56","country_code":"JO","type":"education","lineage":["https://openalex.org/I85507684"]}],"countries":["JO"],"is_corresponding":false,"raw_author_name":"Abdallah Ababneh","raw_affiliation_strings":["Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan","institution_ids":["https://openalex.org/I85507684"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026915398","display_name":"H. Seidel","orcid":"https://orcid.org/0000-0003-4210-2964"},"institutions":[{"id":"https://openalex.org/I91712215","display_name":"Saarland University","ror":"https://ror.org/01jdpyv68","country_code":"DE","type":"education","lineage":["https://openalex.org/I91712215"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Helmut Seidel","raw_affiliation_strings":["Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123 Saarbr\u00fccken, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123 Saarbr\u00fccken, Germany","institution_ids":["https://openalex.org/I91712215"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064576504","display_name":"J. L. S\u00e1nchez-Rojas","orcid":"https://orcid.org/0000-0001-8605-0321"},"institutions":[{"id":"https://openalex.org/I79189158","display_name":"University of Castilla-La Mancha","ror":"https://ror.org/05r78ng12","country_code":"ES","type":"education","lineage":["https://openalex.org/I79189158"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Jos\u00e9 Luis S\u00e1nchez-Rojas","raw_affiliation_strings":["Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain"],"raw_orcid":"https://orcid.org/0000-0001-8605-0321","affiliations":[{"raw_affiliation_string":"Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain","institution_ids":["https://openalex.org/I79189158"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5006119963"],"corresponding_institution_ids":["https://openalex.org/I79189158"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.8968,"has_fulltext":true,"cited_by_count":12,"citation_normalized_percentile":{"value":0.71377186,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"19","issue":"3","first_page":"658","last_page":"658"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tile","display_name":"Tile","score":0.7718386054039001},{"id":"https://openalex.org/keywords/roof","display_name":"Roof","score":0.6972814798355103},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6785695552825928},{"id":"https://openalex.org/keywords/viscosity","display_name":"Viscosity","score":0.6347445249557495},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5510497689247131},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5498476624488831},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.4828084707260132},{"id":"https://openalex.org/keywords/piezoelectric-sensor","display_name":"Piezoelectric sensor","score":0.4391769468784332},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.40188953280448914},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.3909326195716858},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32180044054985046},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.321296751499176},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2423325777053833}],"concepts":[{"id":"https://openalex.org/C2780728851","wikidata":"https://www.wikidata.org/wiki/Q468402","display_name":"Tile","level":2,"score":0.7718386054039001},{"id":"https://openalex.org/C2776748203","wikidata":"https://www.wikidata.org/wiki/Q83180","display_name":"Roof","level":2,"score":0.6972814798355103},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6785695552825928},{"id":"https://openalex.org/C127172972","wikidata":"https://www.wikidata.org/wiki/Q128709","display_name":"Viscosity","level":2,"score":0.6347445249557495},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5510497689247131},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5498476624488831},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.4828084707260132},{"id":"https://openalex.org/C173677008","wikidata":"https://www.wikidata.org/wiki/Q2094637","display_name":"Piezoelectric sensor","level":3,"score":0.4391769468784332},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.40188953280448914},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.3909326195716858},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32180044054985046},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.321296751499176},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2423325777053833}],"mesh":[],"locations_count":9,"locations":[{"id":"doi:10.3390/s19030658","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030658","pdf_url":"https://www.mdpi.com/1424-8220/19/3/658/pdf?version=1549447710","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:30736296","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30736296","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:0745c40f87774392abbd192b6859f4e0","is_oa":true,"landing_page_url":"https://doaj.org/article/0745c40f87774392abbd192b6859f4e0","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 19, Iss 3, p 658 (2019)","raw_type":"article"},{"id":"pmh:oai:eciencia.urjc.es:10115/29642","is_oa":true,"landing_page_url":"https://hdl.handle.net/10115/29642","pdf_url":null,"source":{"id":"https://openalex.org/S4377196484","display_name":"BURJC Digital (King Juan Carlos University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I182083151","host_organization_name":"Universidad Rey Juan Carlos","host_organization_lineage":["https://openalex.org/I182083151"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:europepmc.org:5385263","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6387016","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/3/658/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19030658","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:publikationen.sulb.uni-saarland.de:20.500.11880/29951","is_oa":true,"landing_page_url":"http://dx.doi.org/10.22028/D291-27771","pdf_url":null,"source":{"id":"https://openalex.org/S4377196499","display_name":"Publications of the UdS (Saarland University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I91712215","host_organization_name":"Saarland University","host_organization_lineage":["https://openalex.org/I91712215"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"doc-type:article"},{"id":"pmh:oai:pubmedcentral.nih.gov:6387016","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6387016","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"doi:10.22028/d291-27771","is_oa":true,"landing_page_url":"https://doi.org/10.22028/d291-27771","pdf_url":null,"source":{"id":"https://openalex.org/S7407052975","display_name":"Universit\u00e4t des Saarlandes","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/s19030658","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19030658","pdf_url":"https://www.mdpi.com/1424-8220/19/3/658/pdf?version=1549447710","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2140390832","display_name":null,"funder_award_id":"FPI-BES-2013-063743","funder_id":"https://openalex.org/F4320315062","funder_display_name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades"},{"id":"https://openalex.org/G8615644191","display_name":null,"funder_award_id":"FPU-AP2010-6069","funder_id":"https://openalex.org/F4320315062","funder_display_name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades"}],"funders":[{"id":"https://openalex.org/F4320315062","display_name":"Ministerio de Ciencia, Innovaci\u00f3n y Universidades","ror":null},{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"},{"id":"https://openalex.org/F4320335322","display_name":"European Regional Development Fund","ror":"https://ror.org/00k4n6c32"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2915049723.pdf","grobid_xml":"https://content.openalex.org/works/W2915049723.grobid-xml"},"referenced_works_count":23,"referenced_works":["https://openalex.org/W358152805","https://openalex.org/W1662224533","https://openalex.org/W1811654640","https://openalex.org/W1973455488","https://openalex.org/W2000492916","https://openalex.org/W2011482553","https://openalex.org/W2027917822","https://openalex.org/W2030150077","https://openalex.org/W2037838910","https://openalex.org/W2049260789","https://openalex.org/W2055421226","https://openalex.org/W2066660487","https://openalex.org/W2069253014","https://openalex.org/W2077140764","https://openalex.org/W2078627856","https://openalex.org/W2163098316","https://openalex.org/W2266164778","https://openalex.org/W2489959417","https://openalex.org/W2499859857","https://openalex.org/W2734615110","https://openalex.org/W2751858806","https://openalex.org/W2998509956","https://openalex.org/W4239975607"],"related_works":["https://openalex.org/W2076349672","https://openalex.org/W2056122069","https://openalex.org/W2068961688","https://openalex.org/W4281676937","https://openalex.org/W2362248709","https://openalex.org/W2036762417","https://openalex.org/W2381455125","https://openalex.org/W2487217422","https://openalex.org/W2020488292","https://openalex.org/W2377696596"],"abstract_inverted_index":{"Cantilever":[0],"resonators":[1,70,115],"based":[2],"on":[3],"the":[4,31,35,59,62,114,157],"roof":[5,160],"tile-shaped":[6,161],"modes":[7,67,90],"have":[8,21],"recently":[9],"demonstrated":[10],"their":[11,123],"suitability":[12],"for":[13,146,179],"liquid":[14,119],"media":[15,120],"monitoring":[16],"applications.":[17],"The":[18,108],"early":[19],"studies":[20],"shown":[22],"that":[23],"certain":[24],"combinations":[25],"of":[26,30,45,58,65,113,129,170],"dimensions":[27],"and":[28,61,73,77,80,84,101,110,121,132,167,173],"order":[29,159],"mode":[32,162],"can":[33,91],"maximize":[34],"Q-factor,":[36],"what":[37],"might":[38],"suggest":[39],"a":[40,55,96,102,147,180],"competition":[41],"between":[42,75,82],"two":[43],"mechanisms":[44],"losses":[46],"with":[47,71],"different":[48],"geometrical":[49],"dependence.":[50],"To":[51],"provide":[52],"more":[53],"insight,":[54],"comprehensive":[56],"study":[57],"Q-factor":[60],"resonant":[63,133],"frequency":[64],"these":[66],"in":[68,118,127,144,156],"microcantilever":[69],"lengths":[72],"widths":[74],"250":[76],"3000":[78],"\u00b5m":[79,86],"thicknesses":[81],"10":[83,152],"60":[85],"is":[87,125],"presented.":[88],"These":[89],"be":[92],"efficiently":[93],"excited":[94],"by":[95],"thin":[97],"piezoelectric":[98],"AlN":[99],"film":[100],"properly":[103],"designed":[104],"top":[105],"electrode":[106],"layout.":[107],"electrical":[109],"optical":[111],"characterization":[112],"are":[116,177],"performed":[117],"then":[122],"performance":[124],"evaluated":[126],"terms":[128],"quality":[130,136],"factor":[131,137],"frequency.":[134],"A":[135],"as":[138,140],"high":[139],"140":[141],"was":[142],"measured":[143],"isopropanol":[145],"1000":[148],"\u00d7":[149,151],"900":[150],"\u00b5m3":[153],"cantilever":[154,183],"oscillating":[155],"11th":[158],"at":[163],"4":[164],"MHz;":[165],"density":[166],"viscosity":[168],"resolutions":[169],"10\u22126":[171],"g/mL":[172],"10\u22124":[174],"mPa\u00b7s,":[175],"respectively":[176],"estimated":[178],"geometrically":[181],"optimized":[182],"resonating":[184],"below":[185],"1":[186],"MHz.":[187]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}