{"id":"https://openalex.org/W2908038755","doi":"https://doi.org/10.3390/s19010188","title":"Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption","display_name":"Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption","publication_year":2019,"publication_date":"2019-01-07","ids":{"openalex":"https://openalex.org/W2908038755","doi":"https://doi.org/10.3390/s19010188","mag":"2908038755","pmid":"https://pubmed.ncbi.nlm.nih.gov/30621043"},"language":"en","primary_location":{"id":"doi:10.3390/s19010188","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19010188","pdf_url":"https://www.mdpi.com/1424-8220/19/1/188/pdf?version=1546852352","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/19/1/188/pdf?version=1546852352","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049145125","display_name":"Debo Wei","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Debo Wei","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062235024","display_name":"Jianyu Fu","orcid":"https://orcid.org/0000-0002-0046-0192"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jianyu Fu","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008554772","display_name":"Ruiwen Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Ruiwen Liu","raw_affiliation_strings":["Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028138775","display_name":"Ying Hou","orcid":"https://orcid.org/0000-0003-4820-5438"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ying Hou","raw_affiliation_strings":["Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100719624","display_name":"Chao Liu","orcid":"https://orcid.org/0000-0002-1042-1533"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Liu","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112462500","display_name":"Weibing Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weibing Wang","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100723409","display_name":"Dapeng Chen","orcid":"https://orcid.org/0000-0003-2000-401X"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dapeng Chen","raw_affiliation_strings":["School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5008554772","https://openalex.org/A5062235024"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210119392","https://openalex.org/I4210165038"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.8475,"has_fulltext":true,"cited_by_count":15,"citation_normalized_percentile":{"value":0.73292688,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"19","issue":"1","first_page":"188","last_page":"188"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6828455924987793},{"id":"https://openalex.org/keywords/diode","display_name":"Diode","score":0.6254874467849731},{"id":"https://openalex.org/keywords/power-consumption","display_name":"Power consumption","score":0.587748110294342},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48629602789878845},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46400776505470276},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.4502614140510559},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4236827492713928},{"id":"https://openalex.org/keywords/energy-consumption","display_name":"Energy consumption","score":0.41392382979393005},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.1979982852935791},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17861464619636536},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1639145016670227}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6828455924987793},{"id":"https://openalex.org/C78434282","wikidata":"https://www.wikidata.org/wiki/Q11656","display_name":"Diode","level":2,"score":0.6254874467849731},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.587748110294342},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48629602789878845},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46400776505470276},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4502614140510559},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4236827492713928},{"id":"https://openalex.org/C2780165032","wikidata":"https://www.wikidata.org/wiki/Q16869822","display_name":"Energy consumption","level":2,"score":0.41392382979393005},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.1979982852935791},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17861464619636536},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1639145016670227},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s19010188","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19010188","pdf_url":"https://www.mdpi.com/1424-8220/19/1/188/pdf?version=1546852352","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:30621043","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30621043","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:81b42714930848589320ac2b4c91cedd","is_oa":true,"landing_page_url":"https://doaj.org/article/81b42714930848589320ac2b4c91cedd","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 19, Iss 1, p 188 (2019)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5322734","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6338961","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/19/1/188/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s19010188","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6338961","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6338961","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s19010188","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s19010188","pdf_url":"https://www.mdpi.com/1424-8220/19/1/188/pdf?version=1546852352","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.9100000262260437,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G6097457024","display_name":null,"funder_award_id":"61335008","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6831680902","display_name":null,"funder_award_id":"61601455;61335008","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8272780225","display_name":null,"funder_award_id":"61601455","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321133","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35"},{"id":"https://openalex.org/F4320324787","display_name":"Peking University","ror":"https://ror.org/02v51f717"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2908038755.pdf","grobid_xml":"https://content.openalex.org/works/W2908038755.grobid-xml"},"referenced_works_count":29,"referenced_works":["https://openalex.org/W1518372083","https://openalex.org/W1979295946","https://openalex.org/W1986693125","https://openalex.org/W2008652568","https://openalex.org/W2015894640","https://openalex.org/W2032287201","https://openalex.org/W2039805392","https://openalex.org/W2051369469","https://openalex.org/W2074064189","https://openalex.org/W2087301718","https://openalex.org/W2087900608","https://openalex.org/W2098939290","https://openalex.org/W2108561225","https://openalex.org/W2136967156","https://openalex.org/W2150017286","https://openalex.org/W2151443045","https://openalex.org/W2152735110","https://openalex.org/W2153745379","https://openalex.org/W2219598583","https://openalex.org/W2229628845","https://openalex.org/W2241325183","https://openalex.org/W2323516091","https://openalex.org/W2546156683","https://openalex.org/W2601461571","https://openalex.org/W2730309366","https://openalex.org/W2755318592","https://openalex.org/W2883905968","https://openalex.org/W3104295964","https://openalex.org/W4229725690"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2378757965","https://openalex.org/W4224903346","https://openalex.org/W1593262897","https://openalex.org/W2372869593","https://openalex.org/W2384194537","https://openalex.org/W2031011156","https://openalex.org/W2368745429","https://openalex.org/W2152522766","https://openalex.org/W3171126029"],"abstract_inverted_index":{"Micro-Pirani":[0],"vacuum":[1,26,36,92],"sensors":[2],"usually":[3],"operate":[4],"at":[5,147],"hundreds":[6],"of":[7,60,95,119,132],"microwatts,":[8],"which":[9],"limits":[10],"their":[11],"application":[12],"in":[13],"battery-powered":[14],"sensor":[15,27,37,68,81,97,143,155],"systems.":[16],"This":[17],"paper":[18],"reports":[19],"a":[20,47,116,148],"diode-based,":[21],"low":[22,111],"power":[23,55,117,134],"consumption":[24,56,118,135],"micro-Pirani":[25,35],"that":[28,89],"has":[29],"high":[30],"sensitivity.":[31],"Optimizations":[32],"to":[33,74,101,126,137],"the":[34,44,64,67,80,90,96,105,130,142],"were":[38,72],"made":[39],"regarding":[40],"two":[41],"aspects.":[42],"On":[43],"one":[45],"hand,":[46,66],"greater":[48,149],"temperature":[49,76],"coefficient":[50],"was":[51,82,98,109,124],"obtained":[52],"without":[53],"increasing":[54],"by":[57],"taking":[58],"advantage":[59],"series":[61],"diodes;":[62],"on":[63],"other":[65],"structure":[69],"and":[70,84,129],"geometries":[71],"redesigned":[73],"enlarge":[75],"variation.":[77],"After":[78],"that,":[79],"fabricated":[83],"tested.":[85],"Test":[86],"results":[87],"indicated":[88],"dynamic":[91],"pressure":[93],"range":[94],"from":[99],"10\u22121":[100],"104":[102],"Pa":[103],"when":[104],"forward":[106,150],"bias":[107,151],"current":[108,152],"as":[110,112],"10":[113],"\u03bcA":[114],"with":[115],"50":[120],"\u03bcW.":[121],"Average":[122],"sensitivity":[123,131],"up":[125],"90":[127],"\u03bcV/Pa":[128],"unit":[133],"increased":[136],"1.8":[138],"V/W/Pa.":[139],"In":[140],"addition,":[141],"could":[144],"also":[145],"work":[146],"for":[153],"better":[154],"performance.":[156]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":5},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}