{"id":"https://openalex.org/W2901342801","doi":"https://doi.org/10.3390/s18114061","title":"A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide","display_name":"A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide","publication_year":2018,"publication_date":"2018-11-21","ids":{"openalex":"https://openalex.org/W2901342801","doi":"https://doi.org/10.3390/s18114061","mag":"2901342801","pmid":"https://pubmed.ncbi.nlm.nih.gov/30469328"},"language":"en","primary_location":{"id":"doi:10.3390/s18114061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18114061","pdf_url":"https://www.mdpi.com/1424-8220/18/11/4061/pdf?version=1542780296","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/11/4061/pdf?version=1542780296","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018825003","display_name":"Henry C. Frankis","orcid":null},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":true,"raw_author_name":"Henry C. Frankis","raw_affiliation_strings":["Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada","institution_ids":["https://openalex.org/I98251732"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011327709","display_name":"Daniel Chiung\u2010Jui Su","orcid":"https://orcid.org/0000-0002-8646-0918"},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Daniel Su","raw_affiliation_strings":["Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada","institution_ids":["https://openalex.org/I98251732"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034047589","display_name":"Dawson B. Bonneville","orcid":"https://orcid.org/0000-0002-1900-8999"},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Dawson B. Bonneville","raw_affiliation_strings":["Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada","institution_ids":["https://openalex.org/I98251732"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025893261","display_name":"Jonathan D. B. Bradley","orcid":"https://orcid.org/0000-0003-0500-3537"},"institutions":[{"id":"https://openalex.org/I98251732","display_name":"McMaster University","ror":"https://ror.org/02fa3aq29","country_code":"CA","type":"education","lineage":["https://openalex.org/I98251732"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Jonathan D. B. Bradley","raw_affiliation_strings":["Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada"],"raw_orcid":"https://orcid.org/0000-0003-0500-3537","affiliations":[{"raw_affiliation_string":"Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada","institution_ids":["https://openalex.org/I98251732"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5018825003"],"corresponding_institution_ids":["https://openalex.org/I98251732"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.7854,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.74874715,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"18","issue":"11","first_page":"4061","last_page":"4061"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7558698654174805},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6990551948547363},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6929612159729004},{"id":"https://openalex.org/keywords/tellurium","display_name":"Tellurium","score":0.6536562442779541},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6480990648269653},{"id":"https://openalex.org/keywords/silicon-chip","display_name":"Silicon chip","score":0.6136040687561035},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.5900271534919739},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.498063325881958},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.47370144724845886},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.31014686822891235},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.20507752895355225},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.06466591358184814}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7558698654174805},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6990551948547363},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6929612159729004},{"id":"https://openalex.org/C538181303","wikidata":"https://www.wikidata.org/wiki/Q1100","display_name":"Tellurium","level":2,"score":0.6536562442779541},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6480990648269653},{"id":"https://openalex.org/C2983805867","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Silicon chip","level":3,"score":0.6136040687561035},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.5900271534919739},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.498063325881958},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.47370144724845886},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31014686822891235},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.20507752895355225},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.06466591358184814}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s18114061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18114061","pdf_url":"https://www.mdpi.com/1424-8220/18/11/4061/pdf?version=1542780296","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:30469328","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30469328","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:0b5f4c8224184c99a56abc4188786bfa","is_oa":true,"landing_page_url":"https://doaj.org/article/0b5f4c8224184c99a56abc4188786bfa","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 11, p 4061 (2018)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5257698","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6263654","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/11/4061/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s18114061","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6263654","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6263654","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18114061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18114061","pdf_url":"https://www.mdpi.com/1424-8220/18/11/4061/pdf?version=1542780296","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5699999928474426,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G4406332346","display_name":null,"funder_award_id":"35548","funder_id":"https://openalex.org/F4320319952","funder_display_name":"Canada Foundation for Innovation"},{"id":"https://openalex.org/G5373462074","display_name":null,"funder_award_id":"STPGP 494306","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"},{"id":"https://openalex.org/G8930190674","display_name":null,"funder_award_id":"RGPIN-2017-06423","funder_id":"https://openalex.org/F4320334593","funder_display_name":"Natural Sciences and Engineering Research Council of Canada"}],"funders":[{"id":"https://openalex.org/F4320310709","display_name":"CMC Microsystems","ror":"https://ror.org/03k70ea39"},{"id":"https://openalex.org/F4320319952","display_name":"Canada Foundation for Innovation","ror":"https://ror.org/000az4664"},{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2901342801.pdf","grobid_xml":"https://content.openalex.org/works/W2901342801.grobid-xml"},"referenced_works_count":43,"referenced_works":["https://openalex.org/W271484748","https://openalex.org/W1588892532","https://openalex.org/W1983245255","https://openalex.org/W2010313120","https://openalex.org/W2010488832","https://openalex.org/W2017472350","https://openalex.org/W2021109347","https://openalex.org/W2023511330","https://openalex.org/W2023694391","https://openalex.org/W2027253574","https://openalex.org/W2034567528","https://openalex.org/W2035306395","https://openalex.org/W2036219534","https://openalex.org/W2037474659","https://openalex.org/W2038347056","https://openalex.org/W2045788803","https://openalex.org/W2072704180","https://openalex.org/W2074922525","https://openalex.org/W2076335042","https://openalex.org/W2089209516","https://openalex.org/W2090340729","https://openalex.org/W2097577826","https://openalex.org/W2103968957","https://openalex.org/W2118158333","https://openalex.org/W2141961913","https://openalex.org/W2156661930","https://openalex.org/W2169930363","https://openalex.org/W2170898100","https://openalex.org/W2286370831","https://openalex.org/W2312614790","https://openalex.org/W2327597358","https://openalex.org/W2337544052","https://openalex.org/W2472267112","https://openalex.org/W2529004225","https://openalex.org/W2559872856","https://openalex.org/W2566062678","https://openalex.org/W2595277080","https://openalex.org/W2625603090","https://openalex.org/W2799613386","https://openalex.org/W2804214283","https://openalex.org/W3098718614","https://openalex.org/W6701575790","https://openalex.org/W6739724985"],"related_works":["https://openalex.org/W2372686625","https://openalex.org/W2386903594","https://openalex.org/W4713013","https://openalex.org/W3155422432","https://openalex.org/W2809991190","https://openalex.org/W583682455","https://openalex.org/W4236452141","https://openalex.org/W2114537201","https://openalex.org/W2416990614","https://openalex.org/W2065214418"],"abstract_inverted_index":{"We":[0,49,81],"report":[1],"on":[2,15],"thermal":[3,84],"and":[4,30,59,65,91,122],"evanescent":[5,106],"field":[6,107],"sensing":[7,133],"from":[8],"a":[9,16,33,38,45,83,92,102,115],"tellurium":[10,46,77,120],"oxide":[11,47,78,121],"optical":[12],"microcavity":[13,125],"resonator":[14,22],"silicon":[17,128],"photonics":[18],"platform.":[19],"The":[20],"on-chip":[21],"structure":[23],"is":[24,42],"fabricated":[25],"using":[26],"silicon-photonics-compatible":[27],"processing":[28],"steps":[29],"consists":[31],"of":[32,86,94,96,109],"silicon-on-insulator":[34],"waveguide":[35],"next":[36],"to":[37,88,118],"circular":[39],"trench":[40],"that":[41],"coated":[43],"in":[44,70],"film.":[48],"characterize":[50],"the":[51,57,63,67,71],"device\u2019s":[52],"sensitivity":[53,85,108],"by":[54],"both":[55],"changing":[56],"temperature":[58],"coating":[60],"water":[61],"over":[62],"chip":[64],"measuring":[66],"corresponding":[68],"shift":[69],"cavity":[72],"resonance":[73],"wavelength":[74],"for":[75,101,131],"different":[76],"film":[79],"thicknesses.":[80],"obtain":[82],"up":[87],"47":[89],"pm/\u00b0C":[90],"limit":[93],"detection":[95],"2.2":[97],"\u00d7":[98],"10\u22123":[99],"RIU":[100],"device":[103],"with":[104],"an":[105],"10.6":[110],"nm/RIU.":[111],"These":[112],"results":[113],"demonstrate":[114],"promising":[116],"approach":[117],"integrating":[119],"other":[123],"novel":[124],"materials":[126],"into":[127],"microphotonic":[129],"circuits":[130],"new":[132],"applications.":[134]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}