{"id":"https://openalex.org/W2769614655","doi":"https://doi.org/10.3390/s18082442","title":"Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis","display_name":"Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis","publication_year":2018,"publication_date":"2018-07-27","ids":{"openalex":"https://openalex.org/W2769614655","doi":"https://doi.org/10.3390/s18082442","mag":"2769614655","pmid":"https://pubmed.ncbi.nlm.nih.gov/30060479"},"language":"en","primary_location":{"id":"doi:10.3390/s18082442","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18082442","pdf_url":"https://www.mdpi.com/1424-8220/18/8/2442/pdf?version=1532682554","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/8/2442/pdf?version=1532682554","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002613289","display_name":"Dongxu Ren","orcid":"https://orcid.org/0000-0002-9052-606X"},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dongxu Ren","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024879480","display_name":"Zexiang Zhao","orcid":"https://orcid.org/0000-0001-5504-0497"},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zexiang Zhao","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066092045","display_name":"Jianpu Xi","orcid":"https://orcid.org/0000-0003-0472-9256"},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianpu Xi","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101515989","display_name":"Bin Li","orcid":"https://orcid.org/0000-0003-0914-6754"},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Li","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010114655","display_name":"Zhengfeng Li","orcid":null},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhengfeng Li","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029051152","display_name":"Huiying Zhao","orcid":"https://orcid.org/0000-0001-9134-536X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huiying Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016267132","display_name":"Lujun Cui","orcid":null},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lujun Cui","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079990075","display_name":"Hang Xu","orcid":"https://orcid.org/0000-0002-6784-5863"},"institutions":[{"id":"https://openalex.org/I132586189","display_name":"Zhongyuan University of Technology","ror":"https://ror.org/0360zcg91","country_code":"CN","type":"education","lineage":["https://openalex.org/I132586189"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hang Xu","raw_affiliation_strings":["School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronics Engineering, Zhongyuan University of Technology, Zhengzhou 450007, China","institution_ids":["https://openalex.org/I132586189"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5002613289"],"corresponding_institution_ids":["https://openalex.org/I132586189"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.5301,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.69913636,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"18","issue":"8","first_page":"2442","last_page":"2442"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6647671461105347},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.577663779258728},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5053163170814514},{"id":"https://openalex.org/keywords/grayscale","display_name":"Grayscale","score":0.491849422454834},{"id":"https://openalex.org/keywords/cardinal-point","display_name":"Cardinal point","score":0.48657119274139404},{"id":"https://openalex.org/keywords/projection","display_name":"Projection (relational algebra)","score":0.4580179750919342},{"id":"https://openalex.org/keywords/digital-image-correlation","display_name":"Digital image correlation","score":0.44257110357284546},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.440665066242218},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.37584227323532104},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3208794891834259},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.29109126329421997},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.22607704997062683}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6647671461105347},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.577663779258728},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5053163170814514},{"id":"https://openalex.org/C78201319","wikidata":"https://www.wikidata.org/wiki/Q685727","display_name":"Grayscale","level":3,"score":0.491849422454834},{"id":"https://openalex.org/C138395690","wikidata":"https://www.wikidata.org/wiki/Q376733","display_name":"Cardinal point","level":2,"score":0.48657119274139404},{"id":"https://openalex.org/C57493831","wikidata":"https://www.wikidata.org/wiki/Q3134666","display_name":"Projection (relational algebra)","level":2,"score":0.4580179750919342},{"id":"https://openalex.org/C115635565","wikidata":"https://www.wikidata.org/wiki/Q860900","display_name":"Digital image correlation","level":2,"score":0.44257110357284546},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.440665066242218},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.37584227323532104},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3208794891834259},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.29109126329421997},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.22607704997062683}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s18082442","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18082442","pdf_url":"https://www.mdpi.com/1424-8220/18/8/2442/pdf?version=1532682554","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:30060479","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30060479","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:a7e625e6c56f4436b93746175e34351c","is_oa":true,"landing_page_url":"https://doaj.org/article/a7e625e6c56f4436b93746175e34351c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 8, p 2442 (2018)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5064991","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6111620","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/8/2442/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s18082442","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6111620","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6111620","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18082442","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18082442","pdf_url":"https://www.mdpi.com/1424-8220/18/8/2442/pdf?version=1532682554","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2769614655.pdf","grobid_xml":"https://content.openalex.org/works/W2769614655.grobid-xml"},"referenced_works_count":16,"referenced_works":["https://openalex.org/W1976414009","https://openalex.org/W1978357788","https://openalex.org/W1979338195","https://openalex.org/W1990077895","https://openalex.org/W2049261659","https://openalex.org/W2079058546","https://openalex.org/W2091953514","https://openalex.org/W2108451729","https://openalex.org/W2164019919","https://openalex.org/W2338809313","https://openalex.org/W2597407003","https://openalex.org/W2769614655","https://openalex.org/W3120784072","https://openalex.org/W6644145914","https://openalex.org/W6670325479","https://openalex.org/W6735557324"],"related_works":["https://openalex.org/W115686965","https://openalex.org/W2768918307","https://openalex.org/W2110031805","https://openalex.org/W2040020606","https://openalex.org/W1964003912","https://openalex.org/W2533694135","https://openalex.org/W4362659915","https://openalex.org/W3135525037","https://openalex.org/W2113071088","https://openalex.org/W2116526828"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,11,30,172,217],"method":[4,26],"to":[5,29,35,73,101,115,160],"improve":[6],"the":[7,20,37,41,45,50,53,60,64,69,74,85,88,93,97,103,108,117,120,124,133,142,149,151,154,161,165,169,179,183,191,199,210],"alignment":[8,51,138,180],"accuracy":[9,135,139,185,208],"of":[10,40,44,52,63,87,96,107,123,141,153,171,178,209],"mask":[12,98,155],"in":[13,18,59,148,190,215],"linear":[14],"scale":[15,211],"projection":[16],"lithography,":[17],"which":[19,131],"adjacent":[21],"pixel":[22,203],"gray":[23],"square":[24],"variance":[25],"is":[27,99,156,186,196,204,212],"applied":[28],"charge-coupled":[31],"device":[32],"(CCD)":[33],"image":[34,57,75],"obtain":[36],"best":[38],"position":[39],"focal":[42,54,61],"length":[43],"motherboard":[46],"and":[47,78,128,136,158,188,194,207],"then":[48],"realize":[49],"plane.":[55],"Two":[56],"positions":[58],"plane":[62],"CCD":[65,109,200],"are":[66,82,113],"compared":[67],"with":[68,168],"traits":[70],"overlap":[71],"according":[72],"splicing":[76],"principle,":[77],"four":[79,144],"typical":[80],"errors":[81],"corrected":[83,157],"on":[84,182],"basis":[86],"total":[89],"grating":[90],"errors.":[91],"Simultaneously,":[92],"rotation":[94,134],"error":[95,145,181],"used":[100],"summarize":[102],"grayscale":[104],"variation":[105],"function":[106],"image.":[110],"Threshold":[111],"functions":[112],"employed":[114],"express":[116],"factors":[118],"including":[119],"wave":[121],"crests":[122],"amplitude,":[125],"period":[126],"error,":[127,130],"phase":[129],"govern":[132],"weight":[137],"expression":[140],"established":[143],"factors.":[146],"Finally,":[147],"experiment,":[150],"slope":[152],"adjusted":[159],"same":[162],"direction":[163],"as":[164],"slide":[166],"plate":[167],"assistance":[170],"dual-frequency":[173],"laser":[174],"interferometer.":[175],"The":[176],"effect":[177],"lithography":[184],"discussed":[187],"verified":[189],"static":[192],"case,":[193],"it":[195],"found":[197],"that":[198],"maximum":[201],"resolution":[202],"0.1":[205],"\u03bcm":[206,214],"0.79":[213],"only":[216],"200-mm-measurement":[218],"range.":[219]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}