{"id":"https://openalex.org/W2810372721","doi":"https://doi.org/10.3390/s18072030","title":"Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors","display_name":"Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors","publication_year":2018,"publication_date":"2018-06-25","ids":{"openalex":"https://openalex.org/W2810372721","doi":"https://doi.org/10.3390/s18072030","mag":"2810372721","pmid":"https://pubmed.ncbi.nlm.nih.gov/29941825"},"language":"en","primary_location":{"id":"doi:10.3390/s18072030","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18072030","pdf_url":"https://www.mdpi.com/1424-8220/18/7/2030/pdf?version=1529921985","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/7/2030/pdf?version=1529921985","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058840505","display_name":"Bo Zhao","orcid":"https://orcid.org/0000-0002-0141-7647"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Zhao","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084510919","display_name":"Weijia Shi","orcid":"https://orcid.org/0000-0003-4474-4434"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Weijia Shi","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100462837","display_name":"Jiawei Zhang","orcid":"https://orcid.org/0000-0002-5904-0360"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiawei Zhang","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100447306","display_name":"Ming Zhang","orcid":"https://orcid.org/0000-0002-9372-4926"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ming Zhang","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101933311","display_name":"Xue Qi","orcid":"https://orcid.org/0000-0002-2218-4280"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xue Qi","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":"https://orcid.org/0000-0002-2218-4280","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100343397","display_name":"Jiaxin Li","orcid":"https://orcid.org/0000-0001-6153-7643"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaxin Li","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100448998","display_name":"Feng Li","orcid":"https://orcid.org/0000-0003-4964-749X"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Feng Li","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090605103","display_name":"Jiubin Tan","orcid":"https://orcid.org/0000-0002-0941-7932"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiubin Tan","raw_affiliation_strings":["School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5084510919"],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.6244,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.65511063,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"18","issue":"7","first_page":"2030","last_page":"2030"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12692","display_name":"Magnetic Field Sensors Techniques","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7697736024856567},{"id":"https://openalex.org/keywords/hall-effect-sensor","display_name":"Hall effect sensor","score":0.7616674900054932},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.7085264325141907},{"id":"https://openalex.org/keywords/hall-effect","display_name":"Hall effect","score":0.5663586258888245},{"id":"https://openalex.org/keywords/degrees-of-freedom","display_name":"Degrees of freedom (physics and chemistry)","score":0.5291937589645386},{"id":"https://openalex.org/keywords/stage","display_name":"Stage (stratigraphy)","score":0.5022263526916504},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.395679771900177},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3701891601085663},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.36576104164123535},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3486981987953186},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3334428071975708},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.1351388692855835},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.08802363276481628},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.06723800301551819}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7697736024856567},{"id":"https://openalex.org/C107637996","wikidata":"https://www.wikidata.org/wiki/Q1431247","display_name":"Hall effect sensor","level":3,"score":0.7616674900054932},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.7085264325141907},{"id":"https://openalex.org/C134112204","wikidata":"https://www.wikidata.org/wiki/Q10656","display_name":"Hall effect","level":3,"score":0.5663586258888245},{"id":"https://openalex.org/C208081375","wikidata":"https://www.wikidata.org/wiki/Q274502","display_name":"Degrees of freedom (physics and chemistry)","level":2,"score":0.5291937589645386},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.5022263526916504},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.395679771900177},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3701891601085663},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36576104164123535},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3486981987953186},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3334428071975708},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.1351388692855835},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.08802363276481628},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.06723800301551819},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s18072030","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18072030","pdf_url":"https://www.mdpi.com/1424-8220/18/7/2030/pdf?version=1529921985","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:29941825","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/29941825","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:6f3b828d5262407695632ce922893a2e","is_oa":true,"landing_page_url":"https://doaj.org/article/6f3b828d5262407695632ce922893a2e","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 7, p 2030 (2018)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5028135","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6068923","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/7/2030/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s18072030","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18072030","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18072030","pdf_url":"https://www.mdpi.com/1424-8220/18/7/2030/pdf?version=1529921985","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.6000000238418579,"display_name":"Reduced inequalities","id":"https://metadata.un.org/sdg/10"},{"score":0.41999998688697815,"display_name":"Peace, Justice and strong institutions","id":"https://metadata.un.org/sdg/16"}],"awards":[{"id":"https://openalex.org/G5256618281","display_name":null,"funder_award_id":"QC2016065","funder_id":"https://openalex.org/F4320323085","funder_display_name":"Natural Science Foundation of Heilongjiang Province"},{"id":"https://openalex.org/G6267896481","display_name":null,"funder_award_id":"51575141","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320323085","display_name":"Natural Science Foundation of Heilongjiang Province","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2810372721.pdf","grobid_xml":"https://content.openalex.org/works/W2810372721.grobid-xml"},"referenced_works_count":15,"referenced_works":["https://openalex.org/W1966207777","https://openalex.org/W2030394132","https://openalex.org/W2039924400","https://openalex.org/W2045034545","https://openalex.org/W2047343362","https://openalex.org/W2092494999","https://openalex.org/W2107783410","https://openalex.org/W2113271839","https://openalex.org/W2167844299","https://openalex.org/W2438038693","https://openalex.org/W2586454696","https://openalex.org/W2612107690","https://openalex.org/W2671037902","https://openalex.org/W2759492039","https://openalex.org/W2763690775"],"related_works":["https://openalex.org/W3162919010","https://openalex.org/W2622830326","https://openalex.org/W2151516162","https://openalex.org/W814571287","https://openalex.org/W2906319801","https://openalex.org/W2370291732","https://openalex.org/W2007447343","https://openalex.org/W1979220576","https://openalex.org/W2981436745","https://openalex.org/W1667373633"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"a":[3],"decoupled":[4],"six":[5,18,24,74,102],"degrees":[6],"of":[7,20,43,52,59,72,86,100,113,123],"freedom":[8],"(DOF)":[9],"displacement":[10,83,104],"measurement":[11,105],"methodology,":[12,106],"which":[13,34,109],"is":[14],"accomplished":[15],"by":[16],"utilizing":[17],"pairs":[19],"permanent":[21],"magnets":[22],"and":[23,47,63,84,119],"Hall":[25,54,75],"sensors.":[26,55],"Firstly,":[27],"the":[28,36,39,44,53,57,64,69,73,81,87,94,98,101,110,120],"coordinate":[29,41,50],"transformation":[30],"was":[31],"mathematically":[32],"derived,":[33],"represented":[35],"relationships":[37],"between":[38],"main":[40],"system":[42,46,51],"motion":[45,88],"each":[48],"body":[49],"With":[56],"aid":[58],"an":[60],"ellipsoid":[61],"function":[62],"least":[65],"squares":[66],"method,":[67],"only":[68],"output":[70],"voltages":[71],"sensors":[76],"were":[77],"required":[78],"to":[79],"decouple":[80],"six-DOF":[82],"inclination":[85],"platform":[89],"with":[90],"high":[91],"accuracy.":[92],"Finally,":[93],"experimental":[95],"measurements":[96],"demonstrate":[97],"effectiveness":[99],"DOF":[103],"based":[107],"on":[108],"maximum":[111,121],"errors":[112,122],"displacements":[114],"can":[115,125],"reach":[116,126],"0.23":[117],"mm":[118],"inclinations":[124],"0.07°.":[127]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}