{"id":"https://openalex.org/W2790555029","doi":"https://doi.org/10.3390/s18020660","title":"Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light","display_name":"Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light","publication_year":2018,"publication_date":"2018-02-23","ids":{"openalex":"https://openalex.org/W2790555029","doi":"https://doi.org/10.3390/s18020660","mag":"2790555029","pmid":"https://pubmed.ncbi.nlm.nih.gov/29473917"},"language":"en","primary_location":{"id":"doi:10.3390/s18020660","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18020660","pdf_url":"https://www.mdpi.com/1424-8220/18/2/660/pdf?version=1536894768","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/2/660/pdf?version=1536894768","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079956770","display_name":"Wei Li","orcid":"https://orcid.org/0000-0002-5277-6850"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]},{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wei Li","raw_affiliation_strings":["State Key Laboratory of Millimeter Waves, Southeast University, Nanjing 210096, China","State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Millimeter Waves, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114778176","display_name":"Chao Ding","orcid":"https://orcid.org/0009-0008-2871-5493"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chao Ding","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054968774","display_name":"Yun Cai","orcid":"https://orcid.org/0000-0001-5820-2236"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Cai","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048703058","display_name":"Juyan Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Juyan Liu","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100349000","display_name":"Linlin Wang","orcid":"https://orcid.org/0000-0002-6999-5056"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Linlin Wang","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112307109","display_name":"Qingying Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qingying Ren","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006271565","display_name":"Jie Xu","orcid":"https://orcid.org/0000-0003-4570-8566"},"institutions":[{"id":"https://openalex.org/I41198531","display_name":"Nanjing University of Posts and Telecommunications","ror":"https://ror.org/043bpky34","country_code":"CN","type":"education","lineage":["https://openalex.org/I41198531"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jie Xu","raw_affiliation_strings":["State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China"],"affiliations":[{"raw_affiliation_string":"State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering &amp; College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China","institution_ids":["https://openalex.org/I41198531"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5079956770"],"corresponding_institution_ids":["https://openalex.org/I41198531","https://openalex.org/I76569877"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.7825,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.73062411,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"18","issue":"2","first_page":"660","last_page":"660"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanopillar","display_name":"Nanopillar","score":0.9818651676177979},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8229905366897583},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6554533839225769},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6515963077545166},{"id":"https://openalex.org/keywords/irradiation","display_name":"Irradiation","score":0.6052723526954651},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.4869007170200348},{"id":"https://openalex.org/keywords/ultraviolet","display_name":"Ultraviolet","score":0.48287633061408997},{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.4387199282646179},{"id":"https://openalex.org/keywords/nanosphere-lithography","display_name":"Nanosphere lithography","score":0.42178788781166077},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3245275914669037},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3092789351940155},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.18408802151679993},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.10665252804756165}],"concepts":[{"id":"https://openalex.org/C25479853","wikidata":"https://www.wikidata.org/wiki/Q12228614","display_name":"Nanopillar","level":3,"score":0.9818651676177979},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8229905366897583},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6554533839225769},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6515963077545166},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.6052723526954651},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.4869007170200348},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.48287633061408997},{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.4387199282646179},{"id":"https://openalex.org/C43766710","wikidata":"https://www.wikidata.org/wiki/Q17043033","display_name":"Nanosphere lithography","level":4,"score":0.42178788781166077},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3245275914669037},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3092789351940155},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.18408802151679993},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.10665252804756165},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s18020660","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18020660","pdf_url":"https://www.mdpi.com/1424-8220/18/2/660/pdf?version=1536894768","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:29473917","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/29473917","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:f954f817654749ef8e2a6aae61210a45","is_oa":true,"landing_page_url":"https://doaj.org/article/f954f817654749ef8e2a6aae61210a45","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 2, p 660 (2018)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/2/660/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s18020660","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 18; Issue 2; Pages: 660","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5855532","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5855532","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18020660","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18020660","pdf_url":"https://www.mdpi.com/1424-8220/18/2/660/pdf?version=1536894768","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.699999988079071,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1254019375","display_name":null,"funder_award_id":"K201609","funder_id":"https://openalex.org/F4320327028","funder_display_name":"State Key Laboratory of Millimeter Waves"},{"id":"https://openalex.org/G2087396116","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G268815535","display_name":null,"funder_award_id":"K201714","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3214160367","display_name":null,"funder_award_id":"No. 11","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3317480652","display_name":null,"funder_award_id":"Science","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3910829908","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G4093379285","display_name":null,"funder_award_id":"2016090","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5167091242","display_name":null,"funder_award_id":"No. 1","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5994120800","display_name":null,"funder_award_id":"Natural","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6463241511","display_name":null,"funder_award_id":"BK20171442","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G6686781502","display_name":null,"funder_award_id":"201609","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7214658278","display_name":null,"funder_award_id":"K201723","funder_id":"https://openalex.org/F4320324856","funder_display_name":"Southeast University"},{"id":"https://openalex.org/G75979029","display_name":null,"funder_award_id":"BK20160909","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G7679369841","display_name":null,"funder_award_id":"11504177","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8118195979","display_name":null,"funder_award_id":"K201714","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G8863666567","display_name":null,"funder_award_id":"and No.","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320324856","display_name":"Southeast University","ror":"https://ror.org/04ct4d772"},{"id":"https://openalex.org/F4320327028","display_name":"State Key Laboratory of Millimeter Waves","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2790555029.pdf","grobid_xml":"https://content.openalex.org/works/W2790555029.grobid-xml"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W780649391","https://openalex.org/W1970483710","https://openalex.org/W1973143919","https://openalex.org/W1984281186","https://openalex.org/W1992756297","https://openalex.org/W2001086979","https://openalex.org/W2004020341","https://openalex.org/W2006063164","https://openalex.org/W2031273095","https://openalex.org/W2039394518","https://openalex.org/W2066087567","https://openalex.org/W2075891867","https://openalex.org/W2090780047","https://openalex.org/W2092475165","https://openalex.org/W2147809546","https://openalex.org/W2334012162","https://openalex.org/W2345541690","https://openalex.org/W2406730669","https://openalex.org/W2437954140","https://openalex.org/W2475304844","https://openalex.org/W2513243817","https://openalex.org/W2528395482","https://openalex.org/W2539004042","https://openalex.org/W2554300797","https://openalex.org/W2589650326","https://openalex.org/W2765094529"],"related_works":["https://openalex.org/W2055390148","https://openalex.org/W2098503598","https://openalex.org/W2009380844","https://openalex.org/W2094409448","https://openalex.org/W3126541126","https://openalex.org/W2318020050","https://openalex.org/W2298773019","https://openalex.org/W2013511864","https://openalex.org/W1586733611","https://openalex.org/W2366365583"],"abstract_inverted_index":{"The":[0,18,57,100],"sensitivity":[1,49],"of":[2],"silicon":[3,19,104],"nanopillar":[4,20,105],"array":[5,21,106],"for":[6,118],"relative":[7],"humidity":[8,48,120],"(RH)":[9],"with":[10,35,50,108,122],"UV":[11,38,44,52,89,109],"illumination":[12],"was":[13,22,41],"investigated":[14],"in":[15],"this":[16],"work.":[17],"prepared":[23],"by":[24,88],"nanosphere":[25],"lithography.":[26],"Electrical":[27],"measurements":[28],"were":[29,63],"performed":[30],"on":[31],"its":[32],"sensing":[33,77,116],"performance":[34],"and":[36,55,60,70,97],"without":[37],"irradiation.":[39],"It":[40],"found":[42],"that":[43,103],"light":[45,53],"improved":[46],"the":[47,66,71,84,95],"different":[51],"wavelengths":[54],"power.":[56],"sensor":[58],"response":[59],"recovery":[61],"time":[62],"reduced.":[64],"Furthermore,":[65],"turn-on":[67],"threshold":[68],"voltage":[69,73],"operating":[72],"both":[74],"decreased.":[75],"These":[76,91],"characteristics":[78],"can":[79],"mainly":[80],"be":[81,112],"attributed":[82],"to":[83],"electron-hole":[85,92],"pairs":[86,93],"generated":[87],"light.":[90],"promote":[94],"adsorption":[96],"desorption":[98],"processes.":[99],"results":[101],"indicate":[102],"materials":[107,117],"irradiation":[110],"might":[111],"competitive":[113],"as":[114],"novel":[115],"fabricating":[119],"sensors":[121],"high":[123],"performances.":[124]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}
