{"id":"https://openalex.org/W2788135710","doi":"https://doi.org/10.3390/s18010286","title":"A High Sensitivity Electric Field Microsensor Based on Torsional Resonance","display_name":"A High Sensitivity Electric Field Microsensor Based on Torsional Resonance","publication_year":2018,"publication_date":"2018-01-19","ids":{"openalex":"https://openalex.org/W2788135710","doi":"https://doi.org/10.3390/s18010286","mag":"2788135710","pmid":"https://pubmed.ncbi.nlm.nih.gov/29351210"},"language":"en","primary_location":{"id":"doi:10.3390/s18010286","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010286","pdf_url":"https://www.mdpi.com/1424-8220/18/1/286/pdf?version=1516348648","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/1/286/pdf?version=1516348648","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043945924","display_name":"Zhaozhi Chu","orcid":"https://orcid.org/0000-0003-3250-8928"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhaozhi Chu","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100039, China"],"raw_orcid":"https://orcid.org/0000-0003-3250-8928","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100039, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084685662","display_name":"Chunrong Peng","orcid":"https://orcid.org/0000-0002-1661-7588"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunrong Peng","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Ren Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ren Ren","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002901609","display_name":"Biyun Ling","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Biyun Ling","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100039, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100039, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103049164","display_name":"Zhouwei Zhang","orcid":"https://orcid.org/0000-0002-5392-6208"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhouwei Zhang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100039, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100039, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019757702","display_name":"Hucheng Lei","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hucheng Lei","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100039, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100039, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041822714","display_name":"Shanhong Xia","orcid":"https://orcid.org/0000-0001-7231-8147"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Shanhong Xia","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210107198","https://openalex.org/I19820366","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5041822714"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.02,"has_fulltext":true,"cited_by_count":46,"citation_normalized_percentile":{"value":0.87038806,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"18","issue":"1","first_page":"286","last_page":"286"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7127447724342346},{"id":"https://openalex.org/keywords/electric-field","display_name":"Electric field","score":0.5841659903526306},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.49271705746650696},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.4717175364494324},{"id":"https://openalex.org/keywords/nuclear-magnetic-resonance","display_name":"Nuclear magnetic resonance","score":0.4228188097476959},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.36234453320503235},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.36204689741134644},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35212716460227966},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3366127610206604},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.29941079020500183},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.20212063193321228},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.1270439624786377},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0821075439453125}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7127447724342346},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.5841659903526306},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.49271705746650696},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.4717175364494324},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.4228188097476959},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.36234453320503235},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36204689741134644},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35212716460227966},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3366127610206604},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.29941079020500183},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.20212063193321228},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.1270439624786377},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0821075439453125},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s18010286","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010286","pdf_url":"https://www.mdpi.com/1424-8220/18/1/286/pdf?version=1516348648","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:29351210","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/29351210","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:a16698f8a7eb4d77817ecd890aa6156f","is_oa":true,"landing_page_url":"https://doaj.org/article/a16698f8a7eb4d77817ecd890aa6156f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 1, p 286 (2018)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/1/286/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s18010286","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 18; Issue 1; Pages: 286","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5795550","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5795550","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18010286","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010286","pdf_url":"https://www.mdpi.com/1424-8220/18/1/286/pdf?version=1516348648","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8600000143051147}],"awards":[{"id":"https://openalex.org/G4243412236","display_name":null,"funder_award_id":"863 Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6967478438","display_name":null,"funder_award_id":"2015AA042602","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7534654555","display_name":null,"funder_award_id":"61327810","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321133","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35"},{"id":"https://openalex.org/F4320335773","display_name":"National High-tech Research and Development Program","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2788135710.pdf","grobid_xml":"https://content.openalex.org/works/W2788135710.grobid-xml"},"referenced_works_count":24,"referenced_works":["https://openalex.org/W1975149239","https://openalex.org/W1987497676","https://openalex.org/W2010717450","https://openalex.org/W2028969753","https://openalex.org/W2038544002","https://openalex.org/W2048393519","https://openalex.org/W2074440012","https://openalex.org/W2085397204","https://openalex.org/W2089870281","https://openalex.org/W2115371002","https://openalex.org/W2130366703","https://openalex.org/W2135321193","https://openalex.org/W2136881858","https://openalex.org/W2143052911","https://openalex.org/W2143661133","https://openalex.org/W2154793390","https://openalex.org/W2161386714","https://openalex.org/W2166298514","https://openalex.org/W2169770845","https://openalex.org/W2169878816","https://openalex.org/W2171726171","https://openalex.org/W2251099320","https://openalex.org/W2745145214","https://openalex.org/W6685050254"],"related_works":["https://openalex.org/W2362645459","https://openalex.org/W4377941396","https://openalex.org/W2909125451","https://openalex.org/W2011906856","https://openalex.org/W2973491786","https://openalex.org/W3197962506","https://openalex.org/W4224436004","https://openalex.org/W3201314611","https://openalex.org/W2374797803","https://openalex.org/W4294838556"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"a":[3],"high":[4,130],"sensitivity":[5,131],"electric":[6],"field":[7,113],"microsensor":[8,16,165],"(EFM)":[9],"based":[10],"on":[11,40],"torsional":[12,18,27,56,63],"resonance.":[13],"The":[14,29,71,158],"proposed":[15],"adopts":[17],"shutter,":[19],"which":[20,143],"is":[21,51,144],"composed":[22],"of":[23,68,73,82,106,115,132,140,151,160],"shielding":[24,31],"electrodes":[25,32,37],"and":[26,33,44,118],"beams.":[28],"movable":[30],"the":[34,41,55,62,94,101,119,125,138],"fixed":[35],"sensing":[36],"are":[38],"fabricated":[39],"same":[42],"plane":[43],"interdigitally":[45],"arranged.":[46],"Push-pull":[47],"electrostatic":[48,112],"actuation":[49],"method":[50],"employed":[52],"to":[53,78,92,99],"excite":[54],"shutter.":[57],"Simulation":[58],"results":[59],"proved":[60],"that":[61],"shutter":[64],"has":[65],"higher":[66],"efficiency":[67,81,159],"charge":[69,83,161],"induction.":[70],"optimization":[72],"structure":[74],"parameters":[75],"was":[76,90,108,121,135],"conducted":[77,98],"improve":[79],"its":[80],"induction":[84,162],"further.":[85],"A":[86,103,129],"micromachining":[87],"fabrication":[88],"process":[89],"developed":[91],"fabricate":[93],"EFM.":[95,102],"Experiments":[96],"were":[97],"characterize":[100],"good":[104],"linearity":[105],"0.15%":[107],"achieved":[109,136],"within":[110],"an":[111],"range":[114],"0-50":[116],"kV/m,":[117],"uncertainty":[120],"below":[122],"0.38%":[123],"in":[124],"three":[126],"roundtrip":[127],"measurements.":[128],"4.82":[133],"mV/(kV/m)":[134],"with":[137,154],"trans-resistance":[139],"100":[141],"M\u03a9,":[142],"improved":[145],"by":[146],"at":[147],"least":[148],"one":[149],"order":[150],"magnitude":[152],"compared":[153],"previously":[155],"reported":[156],"EFMs.":[157],"for":[163],"this":[164],"reached":[166],"48.19":[167],"pA/(kV/m).":[168]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":9},{"year":2023,"cited_by_count":7},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":7},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}