{"id":"https://openalex.org/W2782618222","doi":"https://doi.org/10.3390/s18010138","title":"Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection","display_name":"Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection","publication_year":2018,"publication_date":"2018-01-05","ids":{"openalex":"https://openalex.org/W2782618222","doi":"https://doi.org/10.3390/s18010138","mag":"2782618222","pmid":"https://pubmed.ncbi.nlm.nih.gov/29304011"},"language":"en","primary_location":{"id":"doi:10.3390/s18010138","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010138","pdf_url":"https://www.mdpi.com/1424-8220/18/1/138/pdf?version=1515159566","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/18/1/138/pdf?version=1515159566","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111801113","display_name":"Satoshi Maruyama","orcid":null},"institutions":[{"id":"https://openalex.org/I136259955","display_name":"Toyohashi University of Technology","ror":"https://ror.org/04ezg6d83","country_code":"JP","type":"education","lineage":["https://openalex.org/I136259955"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Satoshi Maruyama","raw_affiliation_strings":["AIST-TUT Advanced Sensor Collaborative Research Laboratory, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"AIST-TUT Advanced Sensor Collaborative Research Laboratory, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","institution_ids":["https://openalex.org/I136259955"]},{"raw_affiliation_string":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","institution_ids":["https://openalex.org/I136259955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052453059","display_name":"Takeshi Hizawa","orcid":null},"institutions":[{"id":"https://openalex.org/I136259955","display_name":"Toyohashi University of Technology","ror":"https://ror.org/04ezg6d83","country_code":"JP","type":"education","lineage":["https://openalex.org/I136259955"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeshi Hizawa","raw_affiliation_strings":["Electronics Inspired-Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronics Inspired-Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","institution_ids":["https://openalex.org/I136259955"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022405845","display_name":"Kazuhiro Takahashi","orcid":"https://orcid.org/0000-0002-8983-1884"},"institutions":[{"id":"https://openalex.org/I136259955","display_name":"Toyohashi University of Technology","ror":"https://ror.org/04ezg6d83","country_code":"JP","type":"education","lineage":["https://openalex.org/I136259955"]},{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuhiro Takahashi","raw_affiliation_strings":["Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","JST Precursory Research for Embryonic Science and Technology (PRESTO), Tokyo 102-0076, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","institution_ids":["https://openalex.org/I136259955"]},{"raw_affiliation_string":"JST Precursory Research for Embryonic Science and Technology (PRESTO), Tokyo 102-0076, Japan","institution_ids":["https://openalex.org/I4210086780"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058869309","display_name":"Kazuaki Sawada","orcid":"https://orcid.org/0000-0001-5625-4649"},"institutions":[{"id":"https://openalex.org/I136259955","display_name":"Toyohashi University of Technology","ror":"https://ror.org/04ezg6d83","country_code":"JP","type":"education","lineage":["https://openalex.org/I136259955"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuaki Sawada","raw_affiliation_strings":["Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan","institution_ids":["https://openalex.org/I136259955"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5111801113"],"corresponding_institution_ids":["https://openalex.org/I136259955"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":1.6756,"has_fulltext":true,"cited_by_count":17,"citation_normalized_percentile":{"value":0.83962993,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"18","issue":"1","first_page":"138","last_page":"138"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7388713359832764},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.727806568145752},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.7107388973236084},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5701464414596558},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.4539016783237457},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4326508641242981},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3761707544326782},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.36875927448272705},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3678451478481293},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.32958346605300903},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24969980120658875}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7388713359832764},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.727806568145752},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.7107388973236084},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5701464414596558},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.4539016783237457},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4326508641242981},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3761707544326782},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.36875927448272705},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3678451478481293},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32958346605300903},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24969980120658875},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s18010138","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010138","pdf_url":"https://www.mdpi.com/1424-8220/18/1/138/pdf?version=1515159566","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:29304011","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/29304011","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:2ffc91831611477498d6c67dab6db9c8","is_oa":true,"landing_page_url":"https://doaj.org/article/2ffc91831611477498d6c67dab6db9c8","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 18, Iss 1, p 138 (2018)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:4718048","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5796276","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/18/1/138/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s18010138","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 18; Issue 1; Pages: 138","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s18010138","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s18010138","pdf_url":"https://www.mdpi.com/1424-8220/18/1/138/pdf?version=1515159566","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8100000023841858,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G4752934331","display_name":"A label-free multi-modal biosensor using MEMS-CMOS image sensor technology","funder_award_id":"26709025","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G8892976919","display_name":null,"funder_award_id":"15655927","funder_id":"https://openalex.org/F4320338111","funder_display_name":"Precursory Research for Embryonic Science and Technology"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"},{"id":"https://openalex.org/F4320334789","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19"},{"id":"https://openalex.org/F4320338111","display_name":"Precursory Research for Embryonic Science and Technology","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2782618222.pdf","grobid_xml":"https://content.openalex.org/works/W2782618222.grobid-xml"},"referenced_works_count":23,"referenced_works":["https://openalex.org/W1875933026","https://openalex.org/W1977356477","https://openalex.org/W1984021543","https://openalex.org/W1984629814","https://openalex.org/W1989015740","https://openalex.org/W1993499315","https://openalex.org/W2004134412","https://openalex.org/W2016059623","https://openalex.org/W2030552522","https://openalex.org/W2033163215","https://openalex.org/W2052513028","https://openalex.org/W2054996105","https://openalex.org/W2066410769","https://openalex.org/W2086378083","https://openalex.org/W2091723149","https://openalex.org/W2097678620","https://openalex.org/W2109362544","https://openalex.org/W2110357888","https://openalex.org/W2111941759","https://openalex.org/W2117228527","https://openalex.org/W2126924184","https://openalex.org/W2157289535","https://openalex.org/W6644810529"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W3014521742","https://openalex.org/W1763916368","https://openalex.org/W1988809445","https://openalex.org/W2391127530","https://openalex.org/W2112026144","https://openalex.org/W2045753504","https://openalex.org/W2045074154"],"abstract_inverted_index":{"We":[0,79],"developed":[1],"a":[2,7,52,57,81],"Fabry-Perot":[3],"interferometer":[4],"sensor":[5,50],"with":[6,56,101],"metal-oxide-semiconductor":[8],"field-effect":[9],"transistor":[10],"(MOSFET)":[11],"circuit":[12,76],"for":[13],"chemical":[14],"sensing.":[15],"The":[16,45,69],"novel":[17],"signal":[18],"transducing":[19],"technique":[20],"was":[21,37,51,77],"performed":[22],"in":[23,97],"three":[24],"steps:":[25],"mechanical":[26],"deflection,":[27],"transmittance":[28],"change,":[29],"and":[30,62],"photocurrent":[31,36],"change.":[32],"A":[33],"small":[34,89],"readout":[35],"processed":[38],"by":[39,88],"an":[40,63,98],"integrated":[41,73],"source":[42,74],"follower":[43,75],"circuit.":[44],"movable":[46],"film":[47],"of":[48,59,66,71,92],"the":[49,72,102],"350-nm-thick":[53],"polychloro-para-xylylene":[54],"membrane":[55,90],"diameter":[58],"100":[60],"\u00b5m":[61],"air":[64],"gap":[65],"300":[67],"nm.":[68],"linearity":[70],"obtained.":[78],"demonstrated":[80],"gas":[82],"response":[83],"using":[84],"80-ppm":[85],"ethanol":[86],"detected":[87],"deformation":[91],"50":[93],"nm,":[94],"which":[95],"resulted":[96],"output-voltage":[99],"change":[100],"proposed":[103],"high-efficiency":[104],"transduction.":[105]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2}],"updated_date":"2026-07-30T17:31:21.811387","created_date":"2025-10-10T00:00:00"}